MKS Type 1179A and 2179A Mass-Flo Controller and Type 179A Mass-Flo Meter

116527-P1 Rev E, 3/99 Instruction Manual MKS Type 1179A and 2179A Mass-Flo Controller and Type 179A Mass-Flo Meter Six Shattuck Road Andover, MA 01810-2449 (800) 227-8766 or (978) 975-2350 Fax: (978) 975-0093 E-mail: mks@mksinst.com Web site: http://www.mksinst.com

WARRANTY Type 1179A/2179A/179A Equipment MKS Instruments, Inc. (MKS) warrants that for three years from the date of shipment the equipment described above (the equipment ) manufactured by MKS shall be free from defects in materials and workmanship and will correctly perform all date-related operations, including without limitation accepting data entry, sequencing, sorting, comparing, and reporting, regardless of the date the operation is performed or the date involved in the operation, provided that, if the equipment exchanges data or is otherwise used with equipment, software, or other products of others, such products of others themselves correctly perform all date-related operations and store and transmit dates and date-related data in a format compatible with MKS equipment. THIS WARRANTY IS MKS SOLE WARRANTY CONCERNING DATE-RELATED OPERATIONS. For the period commencing with the date of shipment of this equipment and ending three years later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty. The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS home office in Andover, Massachusetts, USA. This warranty does not apply to any equipment which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be liable under any circumstances for indirect, special, consequential, or incidental damages in connection with, or arising out of, the sale, performance, or use of the equipment covered by this warranty. MKS recommends that all MKS pressure and flow products be calibrated periodically (typically every 6 to 12 months) to ensure accurate readings. When a product is returned to MKS for this periodic re-calibration it is considered normal preventative maintenance not covered by any warranty. THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY AGAINST INFRINGEMENT OF ANY PATENT. 11-98 116527-P1

MKS Type 1179A and 2179A Mass-Flo Controller and Type 179A Mass-Flo Meter 116527-P1 Rev E, 3/99

Copyright 1999 by MKS Instruments, Inc. All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Printed in the United States of America Mass-Flo is a registered trademark of MKS Instruments, Inc., Andover, MA Swagelok, VCR, and VCO are registered trademarks of Swagelok Marketing Company, Solon, OH Kalrez and Viton are registered trademarks of DuPont Dow Elastomers Inc., Wilmington, DE NUPRO is a registered trademark of Crawford Fitting Company, Solon, OH Kel-F is a registered trademark of 3M, Minneapolis, MN DeviceNet is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL Protected by U.S. Patent 5,461,913; foreign patents pending

Table of Contents Table of Contents Mass Flow Controller Safety Information... 1 Symbols Used in This Instruction Manual... 1 Symbols Found on the Unit... 2 Safety Procedures and Precautions... 3 Sicherheitshinweise für den Massenflußregler... 5 In dieser Betriebsanleitung vorkommende Symbole... 5 Erklärung der am Gerät angebrachten Symbole... 6 Sicherheitsvorschriften und Vorsichtsmaßnahmen... 7 Informations relatives à la sécurité pour le contrôleur de débit de masse... 9 Symboles utilisés dans ce manuel d'utilisation... 9 Symboles apparaissant sur l'unité... 10 Mesures de sécurité et précautions... 11 Medidas de seguridad del controlador de flujo de masa... 13 Símbolos usados en este manual de instrucciones... 13 Símbolos hallados en la unidad... 14 Procedimientos y precauciones de seguridad... 15 Chapter One: General Information... 17 Introduction... 17 Design Features... 17 Reliability... 18 Cleanliness Features... 18 How This Manual is Organized... 19 Customer Support... 20 Chapter Two: Installation...21 How To Unpack the Type 1179 Series Unit... 21 Opening the Package... 21 Unpacking Checklist... 22 Environmental Requirements... 23 iii

Table of Contents Interface Cables...24 Generic Shielded Cable Description...25 Setup...26 Dimensions...27 Gas Line Connections...29 Standard Fittings...29 Optional Fittings...29 Mounting a Type 1179 MFC...29 Mounting a Type 2179 MFC...30 Chapter Three: Overview...31 Type 2179 MFC with a Positive Shutoff Valve...31 Electrical Connections...31 9-Pin Type D Connector...32 P.C. Edge Card Connector...33 15-Pin Type D Connector...34 The Gas Correction Factor (GCF)...35 How To Calculate the GCF for Pure Gases...35 How To Calculate the GCF for Gas Mixtures...36 How To Read Mass Flow at a Different Reference Temperature...37 Labels...38 Control Valve (MFC only)...38 Chapter Four: Operation...39 How To Start Up the MFC/MFM...39 How To Zero the Flow Controller...40 How To Adjust the Controller Gain (MFC only)...41 How To Override the Valve (MFC only)...42 Priority of the Commands...42 How To Use the Optional Input (MFC only)...43 Chapter Five: Theory of Operation...45 General Information...45 Flow Path...45 Measurement Technique...45 iv

Table of Contents Control Circuitry... 46 Chapter Six: Maintenance... 47 General... 47 Zero Adjustment... 47 Repair... 48 Chapter Seven: Troubleshooting... 49 Troubleshooting Chart... 49 How To Adjust the Valve Preload (MFC only)... 50 Appendix A: Product Specifications... 57 Performance Specifications... 57 Environmental Specifications... 58 Electrical Specifications... 58 Physical Specifications... 59 Appendix B: Model Code Explanation... 61 Model Code... 61 Appendix C: Gas Correction Factors... 65 Common Gases... 65 Appendix D: MFC Sizing Guidelines... 69 General Information... 69 How To Determine the Flow Controller Range... 70 How To Determine the Valve Configuration... 71 Example... 73 Appendix E: Positive Shutoff Valve Information... 75 How To Operate the Positive Shutoff Valve... 75 Index... 77 v

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List of Figures and Tables List of Figures and Tables Figures Figure 1: Outline Dimensions of the Type 1179 MFC and Type 179 MFM... 27 Figure 2: Side View of the Type 1179 MFC and Type 179 MFM... 28 Figure 3: Outline Dimensions of the Type 2179 MFC (with optional mounting plate)... 28 Figure 4: Mounting Dimensions of the 1179 Flow Controller... 29 Figure 5: Mounting Dimensions of the Base Aluminum Plate... 30 Figure 6: Mounting Dimensions of the Type 2179 Flow Controller... 30 Figure 7: Serial Number Label... 38 Figure 8: Location of the Retaining Screws... 51 Figure 9: Location of the Lock Nut and Centershaft... 52 Figure 10: Location of the R85 Potentiometer on the PC Board... 55 Figure 11: Connecting the Type 2179 MFC to a Solenoid Valve... 76 Tables Table 1: Definition of Symbols Found on the Unit...2 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole...6 Tableau 3: Définition des symboles apparaissant sur l'unité...10 Tabla 4: Definición de los símbolos hallados en la unidad...14 Table 5: MKS Cables...24 Table 6: 9-Pin Type D Connector Pinout...32 Table 7: 20-Pin Edge Card Connector Pinout...33 Table 8: 15-Pin Type D Connector Pinout...34 Table 9: Troubleshooting Chart...49 Table 10: Maximum Valve Currents...54 Table 11: Valve Current Headroom...54 Table 12: C v Pressure Factors...71 Table 13: Valve Configuration Selection Guide...72 Table 14: Suitable Two-Way Solenoid Valves...75 vii

List of Figures and Tables viii

Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Mass Flow Controller Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. Caution The CAUTION sign denotes a hazard to equipment. It calls attention to an operating procedure, practice, or the like, which, if not correctly performed or adhered to, could result in damage to or destruction of all or part of the product. Note The NOTE sign denotes important information. It calls attention to a procedure, practice, condition, or the like, which is essential to highlight. 1

Symbols Found on the Unit Mass Flow Controller Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit On (Supply) IEC 417, No.5007 Off (Supply) IEC 417, No.5008 Earth (ground) IEC 417, No.5017 Protective earth (ground) IEC 417, No.5019 Frame or chassis IEC 417, No.5020 Equipotentiality IEC 417, No.5021 Direct current IEC 417, No.5031 Alternating current IEC 417, No.5032 Both direct and alternating current IEC 417, No.5033-a Class ll equipment IEC 417, No.5172-a Three phase alternating current IEC 617-2 No.020206 Caution, refer to accompanying documents ISO 3864, No.B.3.1 Caution, risk of electric shock ISO 3864, No.B.3.6 Caution, hot surface IEC 417, No.5041 Table 1: Definition of Symbols Found on the Unit 2

Mass Flow Controller Safety Information Safety Procedures and Precautions Safety Procedures and Precautions The following general safety precautions must be observed during all phases of operation of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer s failure to comply with these requirements. DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not attempt component replacement and internal adjustments. Any service must be made by qualified service personnel only. USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used, observe the proper safety precautions, completely purge the instrument when necessary, and ensure that the material used is compatible with the wetted materials in this product, including any sealing materials. PURGE THE INSTRUMENT After installing the unit, or before removing it from a system, purge the unit completely with a clean, dry gas to eliminate all traces of the previously used flow material. USE PROPER PROCEDURES WHEN PURGING This instrument must be purged under a ventilation hood, and gloves must be worn for protection. DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for such operation. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the instrument. Assemble and tighten fittings according to manufacturer s directions. 3

Safety Procedures and Precautions Mass Flow Controller Safety Information CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise. KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the process. ALLOW THE UNIT TO WARM UP If the unit is used to control dangerous gases, they should not be applied before the unit has completely warmed up. Use a positive shutoff valve to ensure that no erroneous flow can occur during warm up. 4

Sicherheitshinweise für den Massenflußregler In dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Massenflußregler In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende Berücksichtigung zu Verletzungen führen kann. Vorsicht! Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende Berücksichtigung zu einer Beschädigung oder Zerstörung des Gerätes oder von Teilen des Gerätes führen kann. Hinweis Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige Gegebenheit aufmerksam. 5

Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Massenflußregler Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) IEC 417, No.5007 Aus (Energie) IEC 417, No.5008 Erdanschluß IEC 417, No.5017 Schutzleiteranschluß IEC 417, No.5019 Masseanschluß IEC 417, No.5020 Aquipotentialanschluß IEC 417, No.5021 Gleichstrom IEC 417, No.5031 Wechselstrom IEC 417, No.5032 Gleich- oder Wechselstrom IEC 417, No.5033-a Durchgängige doppelte oder verstärkte Isolierung IEC 417, No.5172-a Dreileiter- Wechselstrom (Drehstrom) IEC 617-2, No.020206 Warnung vor einer Gefahrenstelle (Achtung, Dokumentation beachten) ISO 3864, No.B.3.1 Warnung vor gefährlicher elektrischer Spannung ISO 3864, No.B.3.6 Höhere Temperatur an leicht zugänglichen Teilen IEC 417, No.5041 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole 6

Sicherheitshinweise für den Massenflußregler Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitsvorschriften und Vorsichtsmaßnahmen Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu befolgen. Eine Mißachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards, und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. MKS Instruments, Inc. haftet nicht für Mißachtung dieser Sicherheitsvorschriften seitens des Kunden. Niemals Teile austauschen oder Änderungen am Gerät vornehmen! Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben. Wartung nur durch qualifizierte Fachleute! Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgeführt werden, niemals vom Bedienpersonal. Vorsicht beim Arbeiten mit gefährlichen Stoffen! Wenn gefährliche Stoffe verwendet werden, muß der Bediener die entsprechenden Sicherheitsvorschriften genauestens einhalten, das Gerät, falls erforderlich, vollständig spülen, sowie sicherstellen, daß der Gefahrstoff die von ihm benetzten, am Gerät verwendeten Materialien, insbesondere Dichtungen, nicht angreift. Spülen des Gerätes mit Gas! Nach dem Installieren oder vor dem Ausbau aus einem System muß das Gerät unter Einsatz eines reinen Trockengases vollständig gespült werden, um alle Rückstände des Vorgängermediums zu entfernen. Anweisungen zum Spülen des Gerätes Das Gerät darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen. Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen! Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in der Nähe von) explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist. 7

Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Massenflußregler Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen. Gerät nur unter zulässigen Anschlußdrücken betreiben! Betreiben Sie das Gerät niemals unter Drücken, die den maximal zulässigen Druck (siehe Produktspezifikationen) übersteigen. Geeignete Berstscheibe installieren! Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden. Verunreinigungen im Gerät vermeiden! Stellen Sie sicher, daß Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das Instrumenteninnere gelangen können. Staub- und Schmutzpartikel, Glassplitter oder Metallspäne können das Gerät dauerhaft beschädigen oder Prozeß und Meßwerte verfälschen. Geräteeinheit auf Arbeitstemperatur bringen! Wird das Gerät zur Flußregelung gefährlicher Gase verwendet, so dürfen diese nur nach Abschluß des Anwärmvorgangs zugeführt werden. Um das versehentliche Fließen von Gas während der Aufheizperiode zu verhindern, sollte ein Absperrventil (normal geschlossen) eingebaut werden. 8

Informations relatives à la sécurité pour le contrôleur de débit de masse Symboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour le contrôleur de débit de masse Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d'accident pour le personnel, en cas d'exécution incorrecte ou de non respect des consignes. Attention L'indication ATTENTION signale un danger pour l'appareil. Elle attire l'attention sur une procédure d'exploitation, une pratique, ou toute autre situation, présentant un risque d'endommagement ou de destruction d'une partie ou de la totalité de l'appareil, en cas d'exécution incorrecte ou de non respect des consignes. Remarque L'indication REMARQUE signale une information importante. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation, présentant un intérêt particulier. 9

Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le contrôleur de débit de masse Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche (sous tension) IEC 417, No.5007 Arrêt (hors tension) IEC 417, No.5008 Terre (masse) IEC 417, No.5017 Terre de protection (masse) IEC 417, No.5019 Masse IEC 417, No.5020 Equipotentialité IEC 417, No.5021 Courant continu IEC 417, No.5031 Courant alternatif IEC 417, No.5032 Courant continu et alternatif IEC 417, No.5033-a Matériel de classe II IEC 417, No.5172-a Courant alternatif triphasé IEC 617-2, No.020206 Attention : se reporter à la documentation ISO 3864, No.B.3.1 Attention : risque de choc électrique ISO 3864, No.B.3.6 Attention : surface brûlante IEC 417, No.5041 Tableau 3: Définition des symboles apparaissant sur l'unité 10

Informations relatives à la sécurité pour le contrôleur de débit de masse Mesures de sécurité et précautions Mesures de sécurité et précautions Prendre les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation de cet appareil. Le non respect des ces précautions ou des avertissements contenus dans ce manuel constitue une violation des normes de sécurité relatives à l'utilisation de l'appareil et peut diminuer la protection fournie par l'appareil. MKS Instruments, Inc. n'assume aucune responsabilité concernant le non respect des consignes par les clients. PAS DE SUBSTITUTION DE PIÈCES OU DE MODIFICATION DE L'APPAREIL Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir l'intégrité des dispositifs de sécurité. DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ Le personnel d'exploitation ne doit pas essayer de remplacer des composants ou de faire des réglages internes. Tout dépannage doit être uniquement effectué par du personnel qualifié. PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilisés, prendre les mesures de précaution appropriées, purger complètement l'appareil quand cela est nécessaire, et s'assurer que les produits utilisés sont compatibles avec les composants liquides de l'appareil, y compris les matériaux d'étanchéité. PURGE DE L'APPAREIL Après l'installation de l'unité, ou avant son enlèvement d'un système, purger l'unité complètement avec un gaz propre et sec afin d'éliminer toute trace du produit de flux utilisé précédemment. UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE Cet appareil doit être purgé sous une hotte de ventilation, et il faut porter des gants de protection. PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation spécifique pour une telle exploitation. UTILISATION D'ÉQUIPEMENTS APPROPRIÉS ET PROCÉDURES DE SERRAGE Tous les équipements de l'appareil doivent être cohérents avec ses spécifications, et compatibles avec l'utilisation prévue de l'appareil. Assembler et serrer les équipements conformément aux directives du fabricant. 11

Mesures de sécurité et précautions Informations relatives à la sécurité pour le contrôleur de débit de masse VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux spécifications de l'unité pour la pression maximum admissible). INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adapté dans le système à vide afin d'éviter une explosion du système en cas d'augmentation de la pression. MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des produits contaminants tels que des poussières et des fragments de tissu, de glace et de métal peuvent endommager l'unité d'une manière permanente ou contaminer le processus. RESPECT DU TEMPS D'ÉCHAUFFEMENT Si l'unité est utilisée pour contrôler des gaz dangereux, ceux-ci ne doivent pas être appliqués avant l'échauffement complet de l'unité. Utiliser une valve de fermeture positive afin de garantir qu'aucun flux ne se produise par erreur pendant l'échauffement. 12

Medidas de seguridad del controlador de flujo de masa Símbolos usados en este manual de instrucciones Medidas de seguridad del controlador de flujo de masa Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. Pone de relieve un procedimiento, práctica, estado, etc. que en caso de no realizarse u observarse correctamente puede causar daños personales. Precaución El símbolo de precaución indica la posibilidad de producir daños al equipo. Pone de relieve un procedimiento operativo, práctica, estado, etc. que en caso de no realizarse u observarse correctamente puede causar daños o la destrucción total o parcial del equipo. Nota El símbolo de notas indica información de importancia. Este símbolo pone de relieve un procedimiento, práctica o condición cuyo conocimiento es esencial destacar. 13

Símbolos hallados en la unidad Medidas de seguridad del controlador de flujo de masa Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido (alimentación eléctrica) IEC 417, N 5007 Apagado (alimentación eléctrica) IEC 417, N 5008 Puesta a tierra IEC 417, N 5017 Protección a tierra IEC 417, N 5019 Caja o chasis IEC 417, N 5020 Equipotencialidad IEC 417, N 5021 Corriente continua IEC 417, N 5031 Corriente alterna IEC 417, N 5032 Corriente continua y alterna IEC 417, N 5033-a Equipo de clase II IEC 417, N 5172-a Corriente alterna trifásica IEC 617-2, N 020206 Precaución. Consulte los documentos adjuntos ISO 3864, N B.3.1 Precaución. Riesgo de descarga eléctrica ISO 3864, N B.3.6 Precaución. Superficie caliente IEC 417, N 5041 Tabla 4: Definición de los símbolos hallados en la unidad 14

Medidas de seguridad del controlador de flujo de masa Procedimientos y precauciones de seguridad Procedimientos y precauciones de seguridad Las precauciones generales de seguridad descritas a continuación deben observarse durante todas las etapas de funcionamiento del instrumento. La falta de cumplimiento de dichas precauciones o de las advertencias específicas a las que se hace referencia en el manual, constituye una violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular la protección proporcionada por el equipo. Si el cliente no cumple dichas precauciones y advertencias, MKS Instruments, Inc. no asume responsabilidad legal alguna. NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO No instale piezas que no sean originales o modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento. LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento. Las tareas de mantenimiento o reparación deben ser realizadas únicamente por personal autorizado. TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS Cuando se utilicen materiales tóxicos, es responsabilidad de los operarios cumplir las medidas de seguridad correspondientes, purgar totalmente el instrumento cuando sea necesario y comprobar que el material utilizado sea compatible con los materiales humedecidos de este producto e inclusive, con los materiales de sellado. PURGUE EL INSTRUMENTO Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con gas limpio y seco para eliminar todo resto de la sustancia líquida empleada anteriormente. USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA El instrumento debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores. NO HAGA FUNCIONAR ESTE INSTRUMENTO EN UN AMBIENTE CON RIESGO DE EXPLOSIONES Para evitar que se produzcan explosiones, no haga funcionar este producto en un ambiente con riesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal uso. 15

Procedimientos y precauciones de seguridad Medidas de seguridad del controlador de flujo de masa USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante. COMPRUEBE QUE LAS CONEXIONES SEAN A PRUEBA DE FUGAS Inspeccione cuidadosamente las conexiones de los componentes de vacío para comprobar que hayan sido instalados a prueba de fugas. HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS No haga funcionar nunca el instrumento con presiones superiores a la máxima presión nominal (en las especificaciones del instrumento hallará la presión máxima permitida). INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula de seguridad adecuada en el sistema de vacío para evitar que se produzcan explosiones cuando suba la presión del sistema. MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad o contaminar el proceso. PERMITA QUE LA UNIDAD SE CALIENTE Si se utiliza la unidad para controlar gases peligrosos, no libere los gases hasta que la unidad termine de calentarse. Use una válvula de cierre positivo para impedir todo flujo no deseado durante el período de calentamiento. 16

Chapter One: General Information Introduction Chapter One: General Information Introduction The Type 1179A Mass-Flo controller and the Type 2179A Mass-Flo controller with a positive shutoff valve, accurately measure and control the mass flow rates of gases. The Type 179A Mass-Flo Meter measures the flow rate of gases. Based upon an MKS measurement technique, patent pending, these instruments use a laminar flow device whose precise indication of mass flow is achieved through the use of a bypass element in parallel with a sensor tube. The 1179 controller and 179 meter have a three-inch footprint. The 1179 and 2179 controllers feature the ability to accept TTL level commands to remotely open and close the control valve. The controller includes a metal cover and RF bypass capacitors, and incorporates a design that virtually eliminates RFI and EMI interference. The 1179 Series units can interface to complementary MKS equipment (Type 647, 246, 247, PR4000) to display the reading and to provide the power, and set point commands. (Additionally, the 167 unit can be used as a readout and set point generator, but it does not supply power; the 660 unit can be used as a power supply and readout, though it cannot send a set point to the flow controller.) Refer to the corresponding manuals for requirements and instructions. The 1179 Series flow units are available in a variety of types and configurations to suit specific needs. The options that must be specified when you order the flow unit include: Connector: 9-pin or 15-pin Type D connector, recessed P.C. Edge Card connector, Digital RS-485, Digital DeviceNet Range: 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10,000, 20,000, 30,000 sccm (N 2 equivalent) Fittings: Swagelok 4-VCR male compatible, Cajon 4-VCO male compatible, and ¼ inch Swagelok compatible Seals: Viton, Neoprene, Buna-N, Kalrez, all-metal All 1179 controllers have normally closed valves. Design Features The design of the 1179 flow controller incorporates an advanced flow sensor, a new control valve, and an optimized bypass. (U.S. and Foreign Patents; Patents Pending on the sensor.) The latest generation two-element sensing circuit provides accurate, repeatable performance even in low flow ranges (< 10 sccm). Low temperature effect from ambient temperature change and a low attitude sensitivity effect are also ensured. The newly optimized sensor/bypass arrangement minimizes the flow splitting error for gases with different densities, which dramatically improves measurement accuracy when gases other than the calibration gas are used. The surface mount 17

Introduction Chapter One: General Information electronics feature optional pin-to-pin compatibility with other manufacturer s flow controllers. In addition, the variable valve control electronics provides for fast response to any set point. Reliability To help provide excellent reliability, the design contains a low mechanical and electronic components count and has successfully passed the following tests: STRIFE, including temperature cycling and vibration (sine and random tests) and with an overall metal braided shielded cable, properly grounded at both ends: CE Compliance - EMC Directive 89/336/EEC (units with a Type D connector only; the Edge Card connector is not CE compliant) Cleanliness Features With only three elastomeric external seals, the design of the flow controller ensures extremely low external leakage and minimizes a key source of particle generation, outgassing, and permeation. The design also incorporates minimal wetted surface area. To further ensure its cleanliness, the 1179 controller undergoes precision machining as well as a proprietary cleaning process. The instrument is assembled and double-bagged under Class 100 conditions. 18

Chapter One: General Information How This Manual is Organized How This Manual is Organized This manual is designed to provide instructions on how to set up and install a Type 1179 Series unit. Before installing your Type 1179 Series unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual. In addition, observe and obey all WARNING and CAUTION notes provided throughout the manual. Chapter One: General Information, (this chapter) introduces the product and describes the organization of the manual. Chapter Two: Installation, explains environmental requirements and practical considerations to take into account when selecting the proper setting for the mass flow controller. Chapter Three: Overview, describes, in a general way, how the flow controller operates in a gas flow system. This chapter also provides information on how to use a Gas Correction Factor when interpreting the output signal for a gas other than the calibration gas. Chapter Four: Operation, explains how to start up and operate the mass flow controller. It also discusses how to override the control valve. Chapter Five: Theory of Operation, provides additional information on how the flow controller operates. Chapter Six: Maintenance, lists a few general practices to follow to ensure that the flow controller will perform optimally. Chapter Seven: Troubleshooting, includes a table of hints for reference in the event that your flow controller malfunctions. Appendix A: Product Specifications, lists the specifications of the instrument. Appendix B: Model Code Explanation, describes the instrument s ordering code. Appendix C: Gas Correction Factors, provides a table listing the gas correction factors for the most commonly used gases. Appendix D: MFC Sizing Guidelines, is provided for reference and describes how to calculate the correct size MFC for an application. This information is useful if you need to purchase another MFC or if you plan to use your MFC in another, different application. Appendix E: Positive Shutoff Valve Information, describes how to attach a solenoid valve to a Type 2179 MFC. 19

Customer Support Chapter One: General Information Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers. Should any difficulties arise in the use of your Type 1179 instrument, or to obtain information about companion products MKS offers, contact any authorized MKS Calibration and Service Center. If it is necessary to return the instrument to MKS, please obtain an ERA Number (Equipment Return Authorization Number) from the MKS Calibration and Service Center before shipping. The ERA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. 20

Chapter Two: Installation How To Unpack the Type 1179 Series Unit Chapter Two: Installation How To Unpack the Type 1179 Series Unit MKS has carefully packed the 1179 Series unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment. Note Do not discard any packing materials until you have completed your inspection and are sure the unit arrived safely. If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an ERA Number (Equipment Return Authorization Number) from the MKS Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Opening the Package The 1179 Series unit is assembled, leak tested with helium, and calibrated in a clean room environment. The instrument is double-bagged in this environment to ensure maintenance of its particle free condition during shipment. It is very important to remove the bags according to clean room practices. To maintain at least a minimal level of clean room standards, follow the instructions below. 1. Remove the outer bag in an ante room (garmenting room) or transfer box. Do not allow this outer bag to enter the clean room. 2. Wipe down the exterior of the inner bag with a clean room wipe. This step reduces the contamination introduced into the clean room. 3. Remove the inner bag in the clean room. 21

Unpacking Checklist Chapter Two: Installation Unpacking Checklist Standard Parts: The 1179 or 2179 mass flow controller, or 179 mass flow meter The 1179/2179/179 instruction manual (this book) Optional Equipment: Electrical Connector Accessories Kit, M100B-K1 (includes a mate to the electrical connector if you choose to make your own interface cable) Interface cables (refer to Interface Cables, page 24) Power supply readout, such as the Type 647, 246, 247, PR4000, 167 (no power supply, readout, and set point generator only), or 660 (no set point, readout and power supply only) Length Adapter Kit - allows the 1179 Series unit to be a drop-in replacement for a 1259/1260 or 2259/2260 unit 22

Chapter Two: Installation Environmental Requirements Environmental Requirements Follow the guidelines listed below when installing and using the 1179 flow controller. 1. Maintain the normal operating temperature between 0 and 50 C (32 and 122 F). 2. Observe the pressure limits: A. Maximum gas inlet pressure is 150 psig. B. Operational differential pressure is: 10 to 40 psid for 5000 sccm units 15 to 40 psid for 10,000 to 30,000 sccm units The standard orifice is sized for control over this range with the outlet at atmospheric pressure. 3. Provide power input at ±15 VDC (±5%) @ 200 ma. A. Maximum voltage/current at startup is ±15 VDC (±5%) @ 200 ma. B. Typical steady state voltage/current should be ±15 VDC (±5%) @ 100 ma. 4. Allow 2 minutes for warm-up time. 5. Use high purity gas and filters in line upstream of the MFC. 6. Leave the power to the instrument on at all times, for optimal performance. For additional information refer to Appendix A: Product Specifications, page 57. 23

Interface Cables Chapter Two: Installation Interface Cables As of January 1, 1996, most products shipped to the European Community must comply with the EMC Directive 89/336/EEC, which covers radio frequency emissions and immunity tests. In addition, as of January 1, 1997, some products shipped to the European Community must also comply with the Product Safety Directive 92/59/EEC and Low Voltage Directive 73/23/EEC, which cover general safety practices for design and workmanship. MKS products that meet these requirements are identified by application of the CE Mark. Note Only 1179 Series units with a Type D connector or digital communications connector can be CE marked. The Edge Card connector is not CE compliant. To ensure compliance with EMC Directive 89/336/EEC, an overall metal braided shielded cable, properly grounded at both ends, is required during use. No additional installation requirements are necessary to ensure compliance with Directives 92/59/EEC and 73/23/EEC. Note 1. An overall metal braided, shielded cable, properly grounded at both ends, is required during use to meet CE specifications. 2. To order an overall metal braided shielded cable, add an S after the cable type designation. For example, to order a cable to connect an 1179 unit equipped with a 15-pin Type D connector to a 146 unit, use part number CB47-1-XX, where XX designates the cable length; for a braided, shielded cable use part number CB147S-1-XX. MKS offers a variety of interface cables, listed in Table 5. MKS Cables To Connect To A... 15-pin Type D 9-pin Type D 20-pin Edge Card PR4000, 146, 186, 167, 647 CB147-1-xx CB147-12-xx CB147-7-xx 246, 247 CB259-5-xx CB147-12-xx CB259-10-xx where xx indicates the cable length Table 5: MKS Cables 24

Chapter Two: Installation Interface Cables Generic Shielded Cable Description Note 1. To meet CE specifications, an overall metal braided shielded cable, properly grounded at both ends, is required during use. 2. Use an overall metal braided shielded cable assemblies, especially if the environment contains high EMI/RFI noise. 3. Provide adequate clearance for Type D cable assemblies: Straight Shielded connectors require approximately 3 height. Right Angle connectors require approximately 2 height. Should you choose to manufacture your own cables, follow the guidelines listed below: 1. The cable must have a braided shield, covering all wires. Neither aluminum foil nor spiral shielding will be as effective; using either may nullify regulatory compliance. 2. The connectors must have a metal case which has direct contact to the cable s shield on the whole circumference of the cable. The inductance of a flying lead or wire from the shield to the connector will seriously degrade the shield s effectiveness. The shield should be grounded to the connector before its internal wires exit. 3. With very few exceptions, the connector(s) must make good contact to the device s case (ground). Good contact is about 0.01 ohms; and the ground should surround all wires. Contact to ground at just one point may not suffice. 4. For shielded cables with flying leads at one or both ends; it is important at each such end, to ground the shield before the wires exit. (A ¼ inch piece of #22 wire may be undesirably long since it has approximately 5 nh of inductance, equivalent to 31 ohms at 1000 MHz). After picking up the braid s ground, keep wires and braid flat against the case. With very few exceptions, grounded metal covers are not required over terminal strips. If one is required, it will be stated in the Declaration of Conformity or in this instruction manual. 5. In selecting the appropriate type and wire size for cables, consider: A. The voltage ratings. B. The cumulative I 2 R heating of all the conductors (keep them safely cool). C. The IR drop of the conductors, so that adequate power or signal voltage gets to the device. D. The capacitance and inductance of cables which are handling fast signals, (such as data lines or stepper motor drive cables). E. That some cables may need internal shielding from specific wires to others; please see the instruction manual for details regarding this matter. 25

Setup Chapter Two: Installation Setup Follow the guidelines below when setting up the 1179 flow controller. 1. Set the controller into position where it will be connected to a gas supply. Placement of flow components in an orientation other than that in which they were calibrated (typically horizontal) may cause a small zero shift. The zero offset can be removed according to the instructions in How To Zero the Flow Controller, page 40. 2. Install the flow controller in the gas stream such that the flow will be in the direction of the arrow on the side of the controller. 3. Allow adequate clearance for the cable connector and tubing. Straight Shielded connectors require approximately 3 height. Right Angle connectors require approximately 2 height. 4. Position the flow controller to provide access to the zero potentiometer. The zero potentiometer is located on the inlet side of the flow controller body. Refer to Figures 1, and 2, page 28, for outline dimensions, and Figure 4, page 29, for mounting dimensions of the flow controller. 26

Chapter Two: Installation Setup Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. Controller Gain Zero Adjust 5.49 (139.5) with Type "D" connector or 5.30 (134.6) with recessed P.C. Edge Board connector 3.00 (76.2) 0.50 (12.7) Swagelok 4-VCR compatible 4.88 (123.9) shown Swagelok 4-VCO compatible 4.56 (115.8) ¼ " Swagelok compatible 4.44 (112.7) Figure 1: Outline Dimensions of the Type 1179 MFC and Type 179 MFM Note The method used to measure the overall length of the unit varies with the type of fitting. For VCR and VCO compatible fittings, the unit is measured from mating face to mating face. For Swagelok compatible fittings, the unit is measured from fitting end to fitting end (less nut). 27

Setup Chapter Two: Installation 1.45 (36.8) Figure 2: Side View of the Type 1179 MFC and Type 179 MFM 5.43 (137.9) with Type "D" connector or 3.38 (85.9) 5.30 (134.6) with PC Edge Board Connector 0.625 (15.8) 0.125 (3.1) Figure 3: Outline Dimensions of the Type 2179 MFC (with optional mounting plate) 28

Chapter Two: Installation Gas Line Connections Gas Line Connections Connect the gas line (via tubing) from the gas supply to the flow controller s inlet, and from the flow controller s outlet, to the downstream tubing. Standard Fittings The 1179 flow controller is equipped with Swagelok 4-VCR male compatible fittings. For specific information regarding these fittings, refer to the manufacturer s documentation. Optional Fittings As an option, ¼ inch Swagelok compatible, or Swagelok 4-VCO male compatible fittings, are available when specified. Mounting a Type 1179 MFC Tapped holes are provided in the base of the unit for mounting. Refer to Figure 4 for the size and location of the mounting holes. 8-32 UNC -2B x 0.25 DP 2 Holes 0.750 (19.1) 2.750 (69.8) 0.35 (8.8) 0.12 (3.2) Figure 4: Mounting Dimensions of the 1179 Flow Controller 29

Mounting a Type 2179 MFC Chapter Two: Installation Mounting a Type 2179 MFC The Type 2179 MFC includes a positive shutoff valve. Mount each assembly horizontally, if possible. Placement of flow components in a different orientation may cause a small zero shift. The zero offset can be removed according to the instructions in How To Zero the Flow Controller, page 40. The air operator port is a ¹/8 NPT (National Pipe Thread) internal fitting. The aluminum plate can be mounted via four mounting holes. Refer to Figure 5 for the location of the mounting holes on the aluminum plate. 6.34 (161.0) 0.38 (9.7) 5.58 (141.7) 0.56 2 PL 1.12 2 PL 1.50 Ref. 0.233 Dia 4 PL 0.240 Figure 5: Mounting Dimensions of the Base Aluminum Plate 0.405 (10.3) VCO compatible 0.565 (14.3) VCR compatible 0.345 (8.7) Swagelok compatible 0.187 (4.7) 6.33 (160.7) 5.58 (141.7) 1.125 (28.5) 0.233 to 0.240 Dia (6.0) - TYP. 6.27 (159.2) SL* 6.71 (170.4) VCR* 6.39 (162.3) VCO* * or compatible Figure 6: Mounting Dimensions of the Type 2179 Flow Controller 30

Chapter Three: Overview Type 2179 MFC with a Positive Shutoff Valve Chapter Three: Overview Type 2179 MFC with a Positive Shutoff Valve The Type 2179 consists of a Type 1179 flow controller configured with a positive shutoff valve downstream. A pneumatically operated valve may be used in series with a mass flow controller when a no-leakage condition is required. The shutoff valve is an all 316L VAR SST diaphragm valve with a Kel-F valve seat. It has a maximum leak rate across the ports of 4 x 10-9 sccm He and a leak rate of less than 1x10-9 sccm He, to the outside. Refer to Figure 3, page 28, for the dimensions of a Type 2179 flow controller. Electrical Connections If you are using the 1179 instrument with any equipment other than corresponding MKS power supply/readout units, consult the manufacturer s specifications for connection, and for proper electrical and power characteristics. Refer to Appendix A: Product Specifications, page 57, for electrical requirements of the Type 1179 flow controller. The 1179 flow controller is available with either a Type D or an Edge Card connector. 31