Usage Policies Notebook for BMR HIDEP Low Temperature Plasma Enhanced CVD (LTPECVD) Revision date September 2014
2 Emergency Plan for BMR HIDEP Low Temperature Plasma Enhanced CVD (LTPECVD) Standard Operating Procedures for Emergencies Contact information Person Lab Manager Director Staff Super User Phone number Jake Hes, 949-824-8239 (day), 562-522-8328 (alternate) G.P. Li: 949-824-4194 (day), 949-824-2047 (alternate) Mo Kebaili: 949-824-8239 (day), 949-494-5892 (alternate) Carlos Ruiz (818) 527-6349 (Anytime, voicemail or text only) Hazardous chemicals, gases, and conditions Hazard name Description of hazard Vacuum Implosion High temperature Burn or ignition source High voltage Electrical shock, ignition source Isopropyl alcohol Flammable solvent SiH 4 (silane) gas Pyrophoric (explodes on contact with air) O 2 (oxygen) gas Oxidizer gas H 2 (hydrogen) gas Flammable gas N 2 (nitrogen) gas Asphyxiant
3 Alarms or indications of danger Alarm type Alarm on the scrubber in the utility room Alarm on the console Pungent or foul smell Condition and response Problem with scrubber. Halt any running process. Correct the problem or notify the staff or the lab manager before continuing. Problem with process state. Halt the process. Correct the problem or notify the staff or the lab manager before continuing. Gas leak. Shutdown the machine at once and evacuate the area. Contact the staff and the lab manager. Emergency shutdown plan #1 In the event of an emergency, when there is very little time, press the large red emergency shut-off button at the front of the machine. This will shutdown the system and will stop the gas flow into the system. Leave the facility at once. Then contact the lab manager or the staff. Emergency shutdown plan #2 In the event of an emergency, when there are a few minutes available, press the large red emergency shut-off button at the front of the machine. This will shutdown the system, and stop gas flow into the system. Next, check the gases in the utility room w2331, adjacent to the Plasma-therm room. If there is no fire, and no smell of gases, enter the room and shut off all gas cylinders valves by turning them fully clockwise. Check the oxygen tank in room w2336, feel the door for possible fire, and if safe, close the oxygen tank by turning fully clockwise. Leave the facility at once, then, contact the staff and the lab manager.
4 Usage Policies for BMR HIDEP Low Temperature Plasma Enhanced CVD (LTPECVD) Standard policies for usage The HIDEP system from BMR Technology opens a new horizon for plasma-enhanced chemical vapor deposition (PECVD), BMR s new high density plasma CVD system HIDEP, can deposit high quality dielectric films at temperature below 100 C with high deposition rates based on BMR s patented Hybrid Electromagnetic Energy Coupling technology (US Patent 6310577 B). Conventional PECVD processes typically need operating temperatures in excess of 400 C to produce films with necessary electrical or physical properties at economically viable deposition rates. In typical PECVD systems, as the deposition temperature decreases below 300 C, film morphology and integrity also decrease rapidly due to pinholes. Contact information The INRF staff or the lab manager may be reached at 824-8239 or 824-9831. Authorized users Only INRF registered users who have completed the training and passed the certification may use this equipment. Users may only use the portion of the system for which they have been trained. Training Users must have received direct training from the staff in order to use this equipment. Users are expected to understand the nature of the system, as well as the proper control and use of the gases. Training varies slightly, depending on the process to be performed. Contact the staff for details and to arrange for a training session. Usage logs Users are required to log all activity in the log sheets provided. All users must log in when they used the BMR HIDEP System (date and time), which gases they used and quantity, and when they completed their process in the user log sheets. If users notice anything unusual, they should record it in the user log sheets, and add details in the maintenance log sheets. Any maintenance to the machine must be logged in the maintenance log sheets (maintenance staff only). Safety equipment There is no specific safety equipment for use on this tool, however, cleanroom gloves and tweezers should be used when handling pieces in the chamber. Care should be taken to avoid burns when working near the chamber hot plate.
5 Standard equipment and materials The laboratory provides the following gases: O 2, SiH 4, N 2, and H 2. Other gases must be cleared with the lab manager. User maintenance Users are requested to clean the chambers after use by first, wiping them down with the isopropanol, then run the required cleaning process. Spray the isopropanol into a lint-free cloth and wipe the inside of the chamber, (you must wait until the unit is cool to do this). Dispose of the cloth in a waste container marked for flammable solid waste. Pollution Control Turn on the scrubber when using the following gases: SiH 4, H 2. Dispose of the alcohol soaked wipes in a waste container marked for flammable solid waste. Purge the gas lines after using corrosive gases. Scheduling Reservations can be done online, also, the system can be used on a first come, first served usage if no reservation was made. Other issues Users should remain physically present in the cleanroom facility during the entire use of the BMR HIDEP System. This includes the time when the chamber hotplate is warming up. Gases should be turned off at the cylinders valves when finished. Users should not modify any standard recipe in the software. New recipes can be created, but once created, they should stay unedited. A modified recipe should be given a new name. This allows us to track down the history of a problem later, if necessary. At no time should a user adjust a pressure regulator on a gas line. Gas control should be on or off only, using only the valves appropriate. For most gases, this is usually the valve at the cylinder head. Non-standard use Users may not modify any hardware on this equipment. For use of non-standard processes, gases or materials, contact the staff or the lab manager.
6 Usage Notes for BMR HIDEP Low Temperature Plasma Enhanced CVD (LTPECVD) Guide for using the BMR HIDEP LTPECVD correctly!"# %&'() *+)(,-'./0123 425267120 8948:/ ;900<=9712; >:70370?/ @0954 1932AB76/954 3745219= C92:;0 2D=912;?/ 7 0>2=97::/ ;209452; 7512557 7667/ 71 67;9< C62E@25=/ F#GHI 1890 >6<>692176/75125577667/>6<B9;20182%&'()>:7037J9188948><J262CC9=925=/<B267J9;2 67542 <C <>2671954 >6200@62 75; ><J26 02119540K L 0>2=97: 3745219= C92:; 90 :<=7:9M2; 71 182 =873?26=96=@3C2625=21<C@6182625875=22:2=16<5=<5C952325175;825=2;2><0919<5>6<>261920K L;;919<57:#G><J26=75?27>>:92;1<1821<>2:2=16<;275;1<182J7C26=8@=NK+82027;;919<57: #G ><J260 762 @02C@: 95 =<516<::954 C9:3 =8767=1269019=0 0@=8 70 C9:3 016200I =<5C<637:91/I C9:3 ;25091/I21=K&1=75?27:0<@02;C<6752CC2=19B2=873?26=:275954>6<=200K!"##%&'"%()"*+(!#,-+"&#.(/#-0(12234 +828948:/;900<=9712;>:70370<C%&'()09459C9=751:/:<J2618262E@962;>6<=200123>2671@62 C<62D=2::251E@7:91/;92:2=169=C9:300@=870.9OP75;.9QRS;2><0912;?2:<JTUUV,K +890 =7>7?9:91/ 257?:20 ;92:2=169= C9:3 ;2><0919<5 <5 123>2671@62 0250919B2 3712697:0I 95=:@;954 ><:/3260K Gas cylinders All gas cylinders should be turned on or off at the cylinders valves. At no time should a user adjust a pressure regulator. Clockwise for all valves, means CLOSED. The standard off configuration for the system is to close the cylinders valves, but leave all other valves alone.
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lose the gas cylinders in w2331, by turning the main valves on the cylinder heads clockwise. Record the date and time in the user log sheets. Also record your process recipe and any problems encountered during your session.