Brooks TMF-Zone 1 Models 5816-Ex/5864-Ex

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Data Sheet DS-TMF-586Ex-MFC-eng TMF-Zone Brooks TMF-Zone Models 586-Ex/5864-Ex Customer Benefits Assured process accuracy and repeatability Long-term reliability Reduced maintenance CE certified Improved safety; certified for use in zone hazardous area according to ATEX Designed, developed, manufactured and supplied by the first ISO-900 Quality Certified M&C company in the world: Brooks Instrument. CONTINUOUSLY IMPROVING QUALITY The commitment of Brooks Instrument to continuous improve: specifications, safety standards and application flexibility, make these Brooks [Ex] mass flow products leaders throughout industry in terms of performance, features, reliability, serviceability, and overall perceived quality. The primary standard calibration equipment used at Brooks Instrument is certified by the Dutch Weights and Measures Authorities (NMi): and traceable to the relevant international standards. Various calibration gases are available at Brooks Instrument to simulate difficult process applications. Calibration pressures from atmospheric to 00 bar are also possible. To ensure safety: all models are pressure tested as standard to.5 times the maximum working pressure using Nitrogen gas and to ensure leak integrity, leak tested to x 0-9 mbar l/sec. Helium. Model 586 Model 585 Ex INTRODUCTION The Brooks [Ex] Thermal Mass Flow (TMF) products are designed for use in petrochemical, pharmaceutical and food industry. The rugged weatherproof construction and certification for installation in Zone hazardous areas, make these products suitable for difficult-to-handle gasflow applications. Mass flow measurement for gases between 0 ml n /min. full scale to 260 m /h and mass n flow control between 0 mln/min. to 000 l n /min. can be accomplished by various models which utilise one common set of electronics. Model 5864 Ex

TMF-Zone Data Sheet DS-TMF-586Ex-MFC-eng DESCRIPTION Meter Body/Sensor The Brooks [Ex] mass flow products incorporates a high accurate thermal mass flow Sensor (. in figure ). A small amount of energy is constantly applied to the process gas. Temperature sensors located upstream and downstream accurately detect the temperature difference which occurs when gas flows. Based on the specific heat of the process gas the temperature difference is directly proportional to mass flow. The voltage signal, generated as a result of temperature difference, versus mass flow, represents the output signal. This signal can be converted into 4-20 ma with help of the remote installed conditioning electronics unit. The [Ex] mass flow meter and control valve are separated from the conditioning electronics, this can be closely installed in the control room. Figure represents a simplified block diagram of a Brooks [Ex] mass flow controller.. Represents the [Ex] mass flow sensor module (including temperature compensation circuitry) 2. Represents the meter body. Represents the control valve (for MFC only) 4. Represents the conditioning electronics Figure Blockdiagram of the Brooks [Ex] mass flow meter and controller Control module The Brooks [Ex] mass flow controllers accurately measure and control gas flows, responding fast to command changes virtually without over- or undershoot. The control valve receives its drive signal from the controller board and immediately responds to any deviation between the flow output signal and the setpoint value. 2 2 4 Location: safe area Location: hazardous area The control valve is a normally closed type, certified for use in hazardous areas. PERFORMANCE SPECIFICATIONS Flow accuracy ±.0 % full scale including linearity at calibration conditions Repeatability ± 0.25 % of rate Rangeability 50 : Stability Less than 0.5 % per year Temperature Less than 0. % per ºC over Effect 0 to 65 ºC temp.range Mounting position Negligible* Effect * Refer to the operating manual X-TMF-586Ex-eng for installation guide lines. PHYSICAL SPECIFICATIONS Materials of Wetted parts 6L stainless steel construction with Viton, Buna-N, PTFE/ Kalrez, or EPDM seals or elastomers. Mechanical NPT(F), Tube compression, VCR, connections VCO and Flanged DIN- or ANSI type available. Electrical M20 x,5 connections SPECIFICATIONS Certifications CE certified Flame proof/ Explosion proof Explosion proof Sensor Control Valve Power supply 24 Vdc, Power supply 24 Vdc 00 ma, 2,4 VA Ambient temp. Ambient temp. 0 C to 65 C -40 C to 50 C ATEX: ATEX: KEMA 02ATEX25 PTB 02ATEX2085 X II 2 G II 2 GD T 80 C EEx de IIC T6 EEx md II C T4/T5 EEx me II T4/T5 IP65 P66 CE 0409/044 CE 002 Flow ranges Brooks [Ex] mass flow products Mass Flow Mass Flow Flow Ranges Controller Meter Model: Model: Min. f.s. Max. f.s. Unit 586/8-Ex 586-Ex 0.00 5 l n /min. 586N/6-Ex 586N-Ex 5 00 l n /min. 586Ex 586-Ex 00 000 l n /min. 5864-Ex 8 260 m n /h.

Data Sheet DS-TMF-586Ex-MFC-eng TMF-Zone Ratings Differential pressure Temperature Leak Integrity Warm up time Max. operating pressure: Model: 586, 586/8 Ex 586P Ex and 586P2 Ex: 00 bar (Other models 00 bar, or up to flange rating specifications. (Other pressure ratings on request) Model 585-Ex: 0.5 bar to 20 bar All sensor models: 50 mbar at max. full scale flow (This is for information and is not a rating) Ambient and process gas: 0-65 ºC Outboard: x 0-9 mbar. l/sec. Helium Performance within specifications: 45 minutes System configuration can only be achieved by means of the remotely installed conditioning electronics. DIMENSIONAL DRAWINGS [Ex] mass flow controllers: Model: 586/8 Ex The [Ex] mass flow meter and control valve are seperated from the conditioning electronics. The latter has to be installed in a safe (control room) area. Housing dimensions Backpanel 9 ( HE, 0TE) H 28.4 x W 50.4 x D 227.0 mm H 5.05 x W.98 x D 8.94 Power supply 24 Vdc via 5 pin D-connector Mass flow meter input Control valve output Analog I/O via 5 pin D-connector The above mentioned conditioning electronics provides power to the [Ex] mass flow meter and drives the control valve to its required setpoint level. The comp lete system has been CE certified, and will have a Flow output available. In combination with a control valve the conditioning Electronics requires a setpoint signal that drives the control valve to the requested setpoint level. The I/O signals can be selected for 0-5V or 4-20 ma. Model: 586N/6 Ex

TMF-Zone Data Sheet DS-TMF-586Ex-MFC-eng Model: 586 Ex Model: 586 Ex (flanged) Connections Build-in Dimensions (mm) X Model 586 Tube Compression 22 Tube Compression 22 Tube Compression 22 VCO 95 VCO 2 VCR 20 0,5,,,5 NPT or /6-2 55 DIMENSIONAL DRAWINGS [Ex] Mass Flow Meters Model: 5864 Ex Flange Type DIN DN5 PN 40 DIN DN25 PN 40 DIN DN40 PN 40 DIN DN50 PN 40 ANSI 0,5 50LBS ANSI 0,5 00LBS Model: 5864 Ex (Flanged) ANSI 50LBS ANSI 00LBS ANSI,5 50LBS ANSI,5 00LBS ANSI 2 50LBS ANSI 2 00LBS CONN. NPT A B,5 272 42,5 2 28 47,5 CONN. NPT A B 265 250 4 265 262 6 5 290 8 5 5 4

Data Sheet DS-TMF-586Ex-MFC-eng TMF-Zone Model: 585 Ex Model: 585 Ex (flanged) Connections Build-in Dimensions (mm) X Model 585 Tube Compression 08 Tube Compression 08 Tube Compression 7 VCO 280 VCO 298 VCR 288 0,5,,,5 NPT or /6-2 240 Flange Type DIN DN5 PN 40 DIN DN25 PN 40 DIN DN40 PN 40 DIN DN50 PN 40 ANSI 0,5 50LBS ANSI 0,5 00LBS ANSI 50LBS ANSI 00LBS ANSI,5 50LBS ANSI,5 00LBS ANSI 2 50LBS ANSI 2 00LBS DIMENSIONAL DRAWINGS [Ex] Mass Flow Meters Model: 586 Ex Model: 586N Ex 586N 586P 586P2 CONN. /4 NPT /4 NPT /2 NPT A 25 55 55 B 05 5 5 C 22,2 4 7,5 D 0,2 4,8 47,5 E 9 26 76 F 2 27 5

TMF-Zone Data Sheet DS-TMF-586Ex-MFC-eng BROOKS LOCAL AND WORLDWIDE SUPPORT Brooks Instrument provides sales and service facilities around the world, ensuring quick delivery from local stock, timely repairs and locally based sales and service facilities. Our dedicated flow experts provide consultation and support, assuring successful applications of the Brooks flow measurement and control products. Calibration facilities are available in local sales and service offices. The primary standard calibration equipment used to calibrate our flow products is certified by our local Weights and Measures Authorities and traceable to the relevant international standards. START-UP SERVICE AND IN-SITU CALIBRATION Brooks Instrument can provide start-up service prior to operation when required. For some process applications, where ISO-900 Quality Certification is important, it is mandatory to verify and/or (re)calibrate the products periodically. In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards. CUSTOMER SEMINARS AND TRAINING Brooks Instrument can provide customer seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. HELP DESK In case you need technical assistance: Americas -888-554-FLOW Europe +() 8 549 290 Within Netherlands 08 549 290 Asia +0-8--56-700 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. 6