The Ultimate. in Precision Pressure Control. Precision Back Pressure Regulators. GS Series Gas and Mixed Phase Service

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The Ultimate in Precision Pressure Control Precision Back Pressure Regulators GS Series Gas and Mixed Phase Service Gas and Pressure stability across widely varying flow rates Pressure range: 01 to 2000 psi Standard Body Materials: SS316, PVC Diaphragms: PTFE, Viton, Buna, PE, SS316, Polyimide Sizes 1/8 through 1 1 GS8 SS316 Dome Loaded Design Matches your process pressure 1:1 to the pressure provided on the top reference port Manual Adjustment Use manual regulator to provide set-point Computer Automated Control Use electronic pressure regulator to provide set-point 1 GS8 PVC w/ electronic set-point Unique Diaphragm Regulator Technology: 5X more Precise than standard Pressure Regulators Dome loaded: for Manual or Automated control Elegant friction-less design Suitable for ultra-pure, hygienic, and aggressive chemicals April, 2013 pg 1

The Equilibar back pressure regulator is an exciting breakthrough in precision pressure control Designed for critical and demanding processes, the patented Equilibar offers unmatched precision across a wide range of pressures and flow rates Unmatched Precision 1/2 GS4 SS316 How the Equilibar Back Pressure Regulator Works The Equilibar Precision Back Pressure Regulator works like a fluid transistor by forming a unique force balance on an flexible membrane between three separate pressures The fluid inlet pressure and the downstream exhaust pressure exist on the wetted side of the membrane, separated by a valve seat The reference air pressure exists on the non-wetted side The lower pressure of the outlet tries to hold the membrane in a leak-tight seal with the valve seat However, any slight excess between the fluid inlet pressure and the reference pressure quickly overwhelms these seating forces and pulls the membrane away from the valve seat Traditional backpressure regulators use springs to gradually open up as the overpressure is used to compress the spring The Equilibar pressure regulator uses only a frictionless flexible membrane to modulate the pressure It fully opens in less than 1 psi overpressure; less than 001 psi in some applications Equilibar back pressure technology is protected by US and foreign patents April, 2013 pg 2

Back Pressure Regulator vs Pressure Reducing Regulator Pressure Reducing Regulators (PRR s) are the most common type of regulator They reduce a higher upstream pressure into a controlled, lower downstream pressure A PRR opens to increase downstream pressure and closes to reduce it A Back Pressure Regulator (BPR) works in the opposite way, controlling the upstream pressure Just like a relief valve, a BPR closes to increase upstream pressure, and opens to reduce it The Equilibar GS series is a precision Back Pressure Regulator that is dome-loaded A fluid signal commands the regulator to control with a 1:1 ratio This signal is supplied via a manual or electronic pressure device Dramatic stability improvement The Equilibar sets a new industry standard in pressure control This chart shows the superior flow stability of the Equilibar over the Tescom regulator Note: Due to the traditional spring actuated back pressure regulation the Tescom performance shows a significantly higher amount of overpressure than the Equilibar regulators over varying flow rates Traditional pressure regulators hold constant pressure until you very the flow rate Precision over varying flow ranges The inlet pressure of most back pressure regulators vary significantly with changes in process flow The chart at right shows how the Equilibar GS regulator holds a constant process pressure even through widely varying flow rates The GS regulator can achieve as high as 10000:1 flow turn down ratios This is extremely useful in applications where the flow consumption varies significantly Pressure is maintained stable even with sudden spikes or drops in flow GS Series Precision Back Pressure Regulator Pressure, psig Pressure, psi g Pressure, psi g 80 70 60 50 40 30 20 10 0 PRR BPR Air Flow, normal LPM 0 50 100 150 200 250 300 7 6 5 4 3 2 1 0 100 10 1 01 Set Point 3 psi (85 kpa) Air Performance Comparison EQUILIBAR vs Tescom Air Flow, normal LPM 0 200 400 600 800 Tescom 26-23 High Precision (1/4", 3/8", 1/2") Set Point 30 psi (206 kpa) Low Pressure Air Comparison EQUILIBAR vs Fairchild Fairchild 30 BP Precision 3/8" EQUILIBAR GS8 3/8" 0 2 4 6 8 10 12 Air Flow, SCFM Equilibar GS3 3/8" Equilibar GS2 1/4" 0 5 10 15 20 25 30 Air Flow, SCFM Ultra Wide Flow Range Performance 3/8" GS3 GR w/ VT9 diaphragm Air Flow, normal LPM 03 3 30 300 Various Set Points: 25, 5, 1, 2, 5, 10 and 30 psi g 001 01 1 10 100 Air Flow, SCFM April, 2013 pg 3 45 40 35 30 25 20 15 10 5 0 500 400 300 200 100 0 1 Pressure, kpa g Pressure, kpa g 100 10 Pressure, kpa g

GS Series Features For gas & mixed phase processes 1 Rugged Bar Stock Design Simpler two-piece body Same high performance as NL and NLB Series GS Series Precision Back Pressure Regulator Reference Port B 1 GS8 PVC A Metallic GS Series Model / Port Reference Port Standard Body Materials Dim A Dim B Max Std Pressure Max Custom Pressure Cv Range (Precision) Available End Fittings GS2 1/4 Polymeric GS Series (inch) (psig) Min Max Std Available 30 13 500 2000 1E-3 12 GS3 3/8 SS316 (std) 35 135 400 1500 1E-3 18 GS4 1/2 1/8 Carbon steel 45 16 400 1500 1E-3 32 GS6 3/4 (black oxide) 60 2 350 1000 1E-2 55 GS8 1 70 26 350 1000 1E-2 85 NPT BSP SAE VCO style VCR style Model / Port Reference Port Standard Body Materials Dim A Dim B Max Pressure psig Cv Range (Precision) Available End Fittings (inch) PVC, other PTFE Min 2 Max Std Available GS2 1/4 PVC (std) 325 15 100 50 1E-3 12 GS3 GS4 GS6 GS8 3/8 1/2 3/4 1 1/4 PTFE CPVC PVDF Acetal 375 475 625 725 155 18 225 29 100 75 75 75 50 50 50 50 1E-3 1E-3 1E-2 1E-2 18 32 55 85 NPT BSP SAE VCO Style VCR Style Flange (PVC, CPVC) Available Diaphragms Material PTFE PTFE/Glass PolyEthylene Viton (reinforced) Buna N (reinforced) SS316 Polyimide Pressure Range 02 psig to max body pressure 5 psig to max body pressure 002 psig to 20 psig 05 psig to max body pressure 05 to max body pressure 100 psig to max body pressure 5 psig to max body pressure Two wetted components (Body + Diaphragm) No wetted o-rings Two plugged access ports on back side 1 - Contact factory for liquid applications 2 - Minimum Cv dependant on diaphragm and set-point pressure Dimensions and Cv values subject to change April, 2013 pg 4

Applications There are hundreds of potential applications for the unique capabilities of the Equilibar The GS series is specifically designed for a variety of gas service and mixed flow applications where precision is a must Applications span from ultra low flow rates to extreme high pressures By using unique combinations of diaphragms and o-ring materials, Equilibar regulators are able to perform in the harshest environments that include high temperature and aggressive chemicals Gas - Precision Pressure Supply It is possible to use the Equilibar precision back pressure regulator as part of a precision pressure control system, replacing less precise pressure reducing regulators A flow control device meters a constant gas flow The Equilibar is able to vent any excess gas not required by your application The advantage is far greater precision across widely varying flow rates than by conventional regulators Reactor Pressure Control / Nitrogen Padding The Equilibar makes it easy to control reactor pressure, or to pad vessels with inert gases such as nitrogen Gas inflows to the vessel can be provided by any convenient means The Equilibar s superior flow range (up to 1000:1) and pressure window (down to 02 psi), gives the user a superior operating window I R O Reference pressure set-point can be provided by the Equilibar LPR2 for pressures below 05 psi, or by an electro-pneumatic regulator for easy computer Glove Box / Ventilation Control The Equilibar can control gas pressures in glove boxes or other ventilation applications Supply gas can be provided by a blower or other flow control means, Reference pressure can be provided by an elctro-pneumatic regulator (shown) or manual spring regulator I R O April, 2013 pg 5

The GS Series regulator can be used in mixed flow and vacuum applications For full liquid applications please contact an applications engineer Precision Ultra Low Pressure Gas Supply System Few commercial regulators are capable of controlling gas below 05 psig with varying flow rates Combining the LPR2 with an Equilibar Precision Back Pressure Regulator and a flow control valve to provide incredible precision and responsiveness By venting any gas flow not required by the application, this system can accommodate forward or reverse gas flow at the application without loss of accuracy Precision Control with Closed Loop Control Exhaust Applications (continued) LPR2 Ultra Low Pressure Regulator O R I Equilibar Precision Back Pressure Flow Regulator Control Gas Supply Air Supply Precision Pressure Supply to Application For most applications, the Equilibar is precise enough to be used with a simple manual set-point pressure input However, for some automation applications, it is useful to have closed loop control using an external pressure transmitter By using an electro-pneumatic regulator with external feedback, it is possible to match the reading of your process pressure transmitter exactly to your desired setpoint The Equilibar provides numerous benefits over traditional control valves in these closed-loop applications Such benefits include extremely wide flow range, ultra fast reaction times, and ease of PID tuning Pressure Feedback 0-10 VDC or 4-20 ma Process PID Controller PT Set Point 0-10 VDC or 4-20 ma I O E/P Equilibar Precision Back Pressure Regulator Electro-Pneumatic Regulator w/ External Feedback air Vacuum Control The Equilibar can control in the vacuum range just as easily in the positive pressure range Electro-Pneumatic Vacuum Regulator Set Point 0-10 VDC or 4-20 ma The reference pressure can be supplied by a sensitive manual vacuum regulator, or by an electropneumatic regulator (as shown) See the Equilibar Vacuum Regulator brochure for additional details Process PG I E/P O Equilibar Precision Vacuum Regulator Vacuum Supply April, 2013 pg 6

Air Performance Curves Low Flow/Low Pressure Air Performance Low flow gas applications reveal the extra-ordinary unmatched precision capable with the Equilibar 3/8 Equilibar Air Performance Trials - High Medium Pressure Air Performance The chart below illustrates how the overpressure varies slightly with the increasing Set-Point pressure in the Equilibar 3/8 Equilibar Air Performance Trials - Low Flow April, 2013 pg 7

Manual Control Set-Point Kits Equilibar Precision Back Pressure Regulators get their pilot control signal using a fluid set-point pressure (also called reference or pilot pressure) on their top port You can supply your own fluid set point signal or choose one of the popular pilot set point regulators below Application Supply Pressure Ports Equilibar Part Number Pressure Range Repeatability & Sensitivity Suggested Pressure Gauge High Pressure HPR-500-B 0-500 psig 600p-25b-2L High Pressure Regulators Max 6000 psig 1/4 Gauge HPR-1500-B 0-1500 psig 1500p-25b-2L HPR-2500-B HPR-4000-B 0-2500 psig 0-4000 psig Sensitive through a wide range of pressures 3000p-25b-2L 500p-25b-2L Technical Page HPR-6000-B 0-6000 psig 6000p-25b-2L High Precision Belofram Type 10 (2-stage) Max 50 psig Max 150 psig 1/4 Gauge T10LR-25 05 to 25 psig 25p-25b-2c Highly sensitive T10-25 2 to 25 psig and stable 25p-25b-2c Varies 0005 psi T10-60 2 to 60 psig with 25 psi supply 60p-25b-2c variation Technical Page T10-120 2 to 120 psig 160p-25b-2c Compact Economical T41-2 0-10 psig 5p-25b-1c Bellofram Type 41 (1-stage) Max 250 psig 1/4 Gauge T41-10 0-10 psig Highly sensitive 10p-25b-1c T41-30 0-30 psig Varies 035 psig with 25 psi supply 30p-25b-1c T41-60 0-60 psig variation 60p-25b-1c Technical Page T41-100 0-100 psig 100p-25b-1c Ultra Low Pressure LPR2 Ultra Low Pressure Regulator Technical Page 5-30 psig (Stable Regulated) 1/4 (No Gauge) LPR2-B (Bleed) & LPR2-NB (Non-Bleed) 25-7 inwc (001 to 025 psig) Sensitivity: 002 inwc 1-10 inwc 1-28 inwc Stability: 006 inwc 0-10 WC 0-30 WC Vacuum Vacuum Regulators Technical Page 30 hg (Vac) 1/8" (no gauge) Panel Mount Only VPR-30 VPR-10 04 to 30 inhg 04 to 10 inhg Sensitivity 01 inhg 30h-25b-2 20-turn knob VPR-3 0-3 inhg Consult factory April, 2013 pg 8

Process Automation Set-Point Controllers Automating your process pressure is easily accomplished by using an electronic pressure regulator to provide the pilot set-point pressure to the Equilibar dome-loaded back pressure regulator Equilibar is proud to represent precision electronic regulators from Proportion-Air These devices are custom tuned on the bench to work perfectly with the Equilibar precision back pressure reglators or vacuum regulators Contact Equilibar or visit our website for additional details about the many possible configuration of these products Regulator Low Pressure - Ultra Precision Regulator (150 psi max) Description Key Features QPV Series Technical Page Medium Pressure - Precision Regulator (500 psi max) Aluminum IP65 enclosure Optional digital display 4-20 ma or 0-10 VDC * Min range: 0-03 psig, vacuum * Max range: 0-150 psig * Available in gauge, absolute, vacuum and vacuumpositive ranges * Superior proportional valve action * Accuracy: 01% - 05% FS * Resolution: 0005% - 02% FS * Tuned ready for set-point service * Optional DeviceNet / Serial communication * Factory set for your pressure QB Series Technical Page High Pressure - Precision Regulator (1000 psi max) Aluminum IP65 enclosure Optional digital display 4-20 ma or 0-10 VDC * Min range: vacuum; 0-1 psig * Max range:, 0-500 psig * Available in gauge, absolute, vacuum and vacuumpositive ranges * 02 to 05% FS accuracy * Tuned ready for set-point service * Good for most applications * Factory set for your pressure GP Series Aluminum IP65 enclosure 4-20 ma or 0-10 VDC * Min range: Vaccum or 0-500 * Max range:, 0-1000 psig * Available in gauge, absolute, vacuum and vacuumpositive ranges * 05% FS accuracy * Factory set for your pressure Technical Page April, 2013 pg 9

Contact our Engineers Other products from Equilibar At Equilibar, your application s unique requirements will be carefully addressed by one of our trained application engineers Please contact us if you have any questions or special requirements Web: Email: www equilibarcom inquiry@equilibarcom Telephone: (828)650-6590 Fax: (801)504-4439 Address: Equilibar, LLC 320 Rutledge Road Fletcher, NC 28732 NL Series Back Pressure Regulators The NL Series has the same exact performance as the GS Series BPRs However, these units have an additional water hammer suppression feature, making them ideal for most liquid applications About Equilibar Equilibar, LLC manufacturers and markets our specialized products worldwide Equilibar branded products are made in the USA, and protected by US and foreign patents All of our products are assembled, inspected and tested by trained technicians in Fletcher, NC Application Engineering How we are different Instrument Series BPRs Our new Instrument Series dome loaded back pressure regulators offer performance up to 5000 psig and temperatures up to 3270C with the use of SS316 diaphragms and Kalrez o-rings Unlike mass-market regulator distributors, everything about Equilibar is focused on you, the scientist or engineer with a unique pressure control challenge We assign an Application Engineer to you, typically within moments of your call We work with you closely to identify the optimum model, trim, and diaphragm to best meet your challenge You can stay in touch with your Application Engineer by email, telephone, mobile phone, or fax After installation, if there are any unexpected issues, your Application Engineer is still available to support you with start-up information or (if needed) expedited replacement parts EVR Series Vacuum Regulators The EVR Series uses the GS Series BPR, but adds a manual set-point kit to make vacuum control of processes easy and simple April, 2013 pg 10