Series ZL. Multistage Ejector. New models! ZL212 large flow rate type and ZL112 with valve. ZX ZR ZM ZY ZH ZU ZL ZF ZP ZCU

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MULTISTAGE EJECTOR Multistage Ejector Series ZL ZX ZR ZM ZY ZH ZU ZL ZF Z ZCU acuum related New models! ZL212 large flow rate type and ZL112 with valve. 3.7-1

Multistage Ejector Series ZL112/212 Energy saving, large flow rate, 3 stage diffuser construction Suction flow rate increased 25% and air consumption reduced 2% with 3 stage diffuser construction (ersus ø1.3, one stage model) acuum pressure 1 stage performance Q1 Q2 Q3 Q1 Q2 Q3 2 stage performance 25 % suction flow rate increase 3 stage performance Suction flow rate Maximum suction flow rate l/min (ANR) ZL112 1 ZL212 2 Air consumption l/min (ANR) 63 126 Series ZL212 Diffusers stacked and integrated Compact size and large flow rate (twice the flow rate of the ZL112) Series ZL112 valve option now available (ZL112 only) Release valve Supply valve Release flow rate adjustment needle One-touch fitting feature Makes piping work easy (ZL112 only) Exhaust port options Built-in silencer acuum pressure sensor With digital vacuum pressure switch SMC RESSURE SWITCH SMC RESSURE SWITCH ort exhaust RESET SET RESET SET LCD display/zse4 With vacuum adapter LCD display with back light/zse4b With vacuum pressure gauge Series variations acuum pressure sensor options Series Maximum suction flow rate l/min (ANR) Air consumption l/min (ANR) Exhaust port Built-in silencer ort exhaust With supply valve/ release valve With supply valve Digital vacuum pressure switch ZSE4E ZSE4B ZSE4 acuum pressure gauge acuum adapter ZL112 1 63 ZL212 2 126 3.7-2

Multistage Ejector Series ZL112 How to Order Without valve ZL1 12 ZL1 12 K1 5 M Z E 25 Nozzle diameter 12 ø1.2mm Exhaust specifications Built-in silencer ort exhaust Exhaust port thread specification (port exhaust only) K1 K2 F N T Rc1/2 G1/2 1/2-14NT 1/2-14NTF Supply valve/release valve combination With supply and release valves With supply valve acuum pressure sensor GN G E EB - Q - Q Lead wire length L.5m 2.9m Digital vacuum pressure switch specifications For E (ZSE4) EB (ZSE4B) 25 NN output Lead wire length.5 (2.9)m 26 Analogue output Lead wire length.5 (2.9)m 65 N output Lead wire length.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G). None acuum adapter Rc1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B ZX ZR ZM ZY ZH ZU ZL ZF Z ZCU acuum related G H L LN LO M MN MO Grommet L type plug connector M type plug connector Rated voltage DC specifications 5 6 S R 24DC 12DC 6DC 5DC 3DC Electrical entry Lead wire length.3m Lead wire length.6m Lead wire length.3m Without lead wires Without connector Lead wire length.3m Without lead wires Without connector S Z U Manual override D Non-locking push type Slotted locking type Light/Surge voltage suppressor Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With light/surge voltage suppressor (non-polar type) Note 1) Type U is 24 or 12DC only. 3.7-3

Series ZL Standard With vacuum pressure gauge Adapter ort exhaust Ejector Specifications Model Nozzle diameter Maximum suction flow rate Air consumption Maximum vacuum pressure Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range Supply/Release alve Specifications art Number Type of valve actuation Fluid Operating pressure range Internal pilot type Ambient and fluid temperature Response time (for.5ma) Note 1) Maximum operating frequency Manual operation ilot exhaust type Lubrication Mounting position Impact/ibration resistance Note 2) Enclosure Option Specifications acuum pressure gauge specifications art number Fluid ressure range Scale range (angular) Accuracy Class Operating temperature range Material ZL112 ø1.2mm 1l/min (ANR) 63l/min (ANR) 84ka.7Ma.2 to.5ma.4ma 5 to 5 C SYJ514- N.C. Air.2 to.5ma 5 to 5 C 25ms or less 5Hz Non-locking push type, Slotted locking type ilot valve individual exhaust type, Main valve/ilot valve common exhaust Not required Unrestricted 15/3m/s 2 Dust proof Note 1) Based on JIS B8374-1981 dynamic performance test. (coil temperature 2 C, at rated voltage, without surge voltage suppressor) Note 2) Impact resistance: No malfunction when tested with a drop tester in the axial direction and at a right angle to the main valve and armature, one time each in both energized and deenergized states. (initial value) ibration resistance: No malfunction when tested with one sweep of 8.3 to 2Hz in the axial direction and at a right angle to the main valve and armature, one time each in both energized and deenergized states. (initial value) Note 3) Refer to volume 1 "SYJ3/5/7" for details on valves. GZ3S Air 1 to 1ka 23 ± 3% F.S. (full span) Class 3 to 5 C Housing: olycarbonate/abs resin Symbol Standard 3.7-4

Multistage Ejector Series ZL With digital vacuum pressure switch (ZSE4) Option Specifications Digital vacuum pressure switch specifications art number Display ressure setting range Maximum operating pressure Operation indicator light (lights up when ON) Response frequency Hysteresis mode Hysteresis Window comparator mode Fluid Temperature characteristics Repeatability Operating voltage Current consumption ZSE4-- -X15 ZSE4B-- -X15 LCD LCD with back light 11 to 1Ka { 76 to 75mmHg} 2Ka 25mA or less Green ariable (3 digits or more) Fixed (3 digits) Air, Non-corrosive gas ±3% F.S. or less ±1% F.S. or less 12 to 24DC (ripple ±1% or less ) 45mA or less ressure indication 3 1/2 digits (character height 8mm) Self diagnostic function (Over current Note 1) ), Over pressure, Data error, resence of pressure at clear Operating temperature range to 5 C (with no condensation) Noise resistance 5p-p, ulse width: 1µS, Start up: 1nS Withstand voltage Between external terminal batch and case: 1AC 5/6Hz for 1 min. Insulation resistance Between external terminal batch and case: 2MΩ (at 5DC) 2hrs. each in X, Y, Z directions at smaller of 1 to 5Hz ibration resistance with amplitude 1.5mm, or acceleration 1G Impact resistance 1G in X, Y, Z directions, 3 times each Note 1) Not available on Analogue output type. Refer to volume 4 "ressure Switch" for details on switches. Output specifications ZSE4 ZSE4B 25 (L) 26 (L) 67 (L) Refer to volume 4 "ressure Switch" for details on switches. 2Hz (5ms) 1 output NN open collector 3, 8mA or less Analogue output (1 to 5) 1 output N open collector 8mA or less ZX ZR ZM ZY ZH ZU ZL ZF Z ZCU acuum related 3.7-5

Series ZL Construction Without valve arts list Replacement parts No. Description art No. Note No. Description Material art No. 1 Suction cover 9 Sound absorbing material B F ZL112-S1 2 Front cover Without valve 1 Sound absorbing material A F (set no. for 9, 1 &11) 3 End cover 11 Suction filter E 4 5 6 7 8 Body acuum sensor unit Nozzle Diffuser Detent plug 39711 Other than vacuum switch Lead wire cover 397176 acuum switch specifications When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.7-5. 12 13 14 15 16 Front cover B alve plate Needle Supply valve (N.C.) Release valve (N.C.) SYJ514 SYJ514 3.7-6

Multistage Ejector Series ZL Dimensions/Series ZL112 (without alve) Label 5 117 Scale: 4% Standard ZL112 2 56 166 4.5 ZX Exhaust port Rc1/2 35 ZR ort exhaust ZL112 ZM ZY 14 acuum pressure gauge ZH ZU With vacuum pressure gauge ZL112-G 7 acuum adapter Rc1/8 ZL ZF Z ZCU With vacuum adapter ZL112-GN acuum related 61 acuum pressure switch With digital vacuum pressure switch ZL112-E RESET SET Section A with digital vacuum pressure switch Approx. 5 (L: Approx. 29) ZL112-E (ZSE4) ZL112-EB (ZSE4B) 28 (1.6) (2) 4-M4 x.7 Thread depth 8 (mounting hole) 85 59 ressure supply port One-touch fitting ø6 acuum port One-touch fitting ø12 Section A Label 3 59 56 MULTISTAGE EJECTOR 59.5 8.5 166 175 4.5 36 3.7-7

Series ZL Dimensions/Series ZL112 (with alve) With supply valve and release valve ZL112-K1 L -E25 (L) Scale: 4% Release flow rate adjustment needle ressure supply port One-touch fitting ø6 acuum port One-touch fitting ø12 5 (L: 29) Circuit diagram Manual override - + -+ 3 35.7 28 85 59 4 x M4 Thread depth 8 (mounting hole) Label MULTISTAGE EJECTOR 59.5 66.5 216 166 4.5 8.5 17 36 Manual override Release valve 13.5 5 117 acuum pressure switch 2 Supply valve RESETSET 19 -+ 166 4.5 With supply valve ZL112-K2 L -E25 (L) Circuit diagram MULTISTAGE EJECTOR Blank plate assembly (SYJ5-1-2A) Supply valve RESETSET 3.7-8

Multistage Ejector Series ZL212 Standard How to Order ZX ZL2 12 -Q ZR ZM Nozzle diameter Lead wire length ZY With vacuum pressure gauge 12 ø1.2mm L.5m 2.9m ZH ZU With digital vacuum pressure switch GN G E EB Exhaust specifications Built-in silencer ort exhaust acuum pressure sensor None Adaptor Rc1/8 With vacuum pressure gauge With digital vacuum pressure switch ZSE4 With digital vacuum pressure switch ZSE4B Digital vacuum pressure switch specifications For E (ZSE4) EB (ZSE4B) 25 26 65 NN output Lead wire length.6 (3.)m Analogue output Lead wire length.6 (3.)m N output Lead wire length.6 (3.)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G). ZL ZF Z ZCU acuum related Ejector Specifications With adaptor Model Nozzle diameter Maximum suction flow rate Air consumption Maximum vacuum pressure Maximum operating pressure Supply pressure range Standard supply pressure Operating temperature range ZL212 ø1.2mm x 2 2l/min (ANR) 126l/min (ANR) 84ka.7Ma.2 to.5ma.4ma 5 to 5 C ort exhaust Symbol Standard 3.7-9

Series ZL Construction arts list Replacement parts No. Description art No. Note No. Description Material art No. 1 2 Suction cover Front cover A 9 1 Sound absorbing material A Sound absorbing material F F 397114 39723 3 4 5 6 7 8 End plate Body acuum sensor unit Nozzle Diffuser Detent plug 39711 Other than vacuum switch Lead wire cover 397176 acuum switch specifications When ordering a vacuum pressure gauge or a digital vacuum pressure switch separately, use the part numbers shown in the option specifications on page 3.7-5. 3.7-1

Multistage Ejector Series ZL Dimensions/Series ZL212 ressure supply port Rc1/8 76 acuum port Rc3/4 Scale: 4% Standard ZL212 4 Label 61 54 125 188 ZX ZR ZM ort exhaust ZL212 ZY ZH Exhaust port Rc1 25 acuum pressure gauge ZU With vacuum pressure gauge ZL212-G ZL ZF Z With vacuum adapter ZL212-GN 7 acuum adapter Rc1/8 ZCU acuum related acuum pressure switch With digital vacuum pressure switch ZL212-E RESETSET Approx. 5 (L: approx. 29) Section A with digital vacuum pressure switch ZL212-E ZL212-EB (ZSE4B) (ZSE4) 73 87 Section A 2-ø4.4 8 52 76 27 4 x M5 Thread depth 6 (mounting hole) (1.6) (2) MULTISTAGE EJECTOR (4) 5 178.5 4.5 3.7-11

Series ZL Specific roduct recautions ZL112 Selection ZL212 Exhaust characteristics acuum pressure [ka] 1 9 8 7 6 5 4 3 2 1 Supply pressure [Ma] acuum pressure Suction flow rate Air consumption 15 125 1 75 5 25 Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Exhaust characteristics.1.2.3.4.5.6 1. 2. 3. 4. 5. 6. acuum pressure [ka] 1 9 8 7 6 5 4 3 2 1 acuum pressure Suction flow rate Air consumption Supply pressure [Ma] 3 25 2 15 1 5 Suction flow rate [l/min (ANR)] Air consumption [l/min (ANR)] Flow rate Characteristics acuum pressure [ka] 1 9 8 7 6 5 4 3 2 1 Time to reach vacuum acuum pressure in tank [ka] Suction flow rate [l/min(anr)] Supply pressure:.4ma 1 2 3 4 5 6 7 8 9 1 11 12 Time to reach vacuum [S] iewing the graphs The graphics indicate the time required to reach a vacuum pressure determined by adsorption conditions for work pieces, etc., starting from atmospheric pressure in a 1l sealed tank. Approximately 8.8 seconds are necessary to attain a vacuum pressure of 89.3ka. 3.7-12 13 Measurement conditions/tank capacity: 1l Supply pressure:.4ma 1 acuum pressure reached 89.3ka 9 8ka 8 7 66.7ka 6 53.3ka 5 4 4ka 3 26.7ka 2 13.3ka 1 1 2 3 4 5 6 7 8 9 1 11 12 Flow rate characteristics acuum pressure [ka] 1 9 8 7 6 5 4 3 2 1 Time to reach vacuum acuum pressure in tank [ka] 1 9 8 7 6 5 4 3 2 1 Supply pressure:.4ma 2 6 1 14 18 22 26 3 Suction Flow rate [l/min (ANR)] Measurement conditions/tank capacity: 1l Supply pressure:.4ma 1 2 3 4 5 6 Time to reach vacuum [S] iewing the graphs The flow rate characteristics indicate the relationship between the vacuum pressure and the suction flow rate of the ejector, and show that when the suction flow rate changes the vacuum pressure also changes. In general, this indicates the relationship at the ejector's standard operating pressure. In the graph, max indicates the maximum vacuum pressure, and Qmax indicates the maximum suction flow rate. These are the values that are published as specifications in catalogs, etc. Changes in vacuum pressure are explained below. 1. If the ejector's suction port is closed and sealed max tight, the suction flow rate becomes "" and the vacuum pressure increases to the maximum (max). 2. If the suction port is opened and air is allowed to flow (the air leaks), the suction flow rate increases and the vacuum pressure decreases. (the condition of 1 and Q1) 3. If the suction port is opened completely, the suction flow rate increases to the maximum (Qmax), while the vacuum pressure then drops almost to "" (atmospheric pressure). acuum pressure reached 89.3ka acuum pressure 1 8ka 66.7ka 53.3ka 4ka 26.7ka 13.3ka Q1 Qmax Suction flow rate When adsorbing work pieces which are permeable or subject to leakage, etc., caution is required as the vacuum pressure will not be very high.