MKS Baratron Types 615A/616A/617A High Accuracy Sensor Heads

Transcription

1 Table of Contents P1 Rev B, 4/09 MKS Baratron Types 615A/616A/617A High Accuracy Sensor Heads iii

2 Table of Contents Copyright 2009 by MKS Instruments, Inc. All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means, electronic or mechanical, including photocopying and recording, or by any information storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments, Inc. Baratron is a registered trademark of MKS Instruments, Inc., Andover, MA Swagelok, VCR, NUPRO, and VCO are registered trademarks of Swagelok Co., Solon, OH Inconel is a registered trademark of Inco Alloys Inc., Huntington, WV iv

3 Table of Contents Table of Contents Pressure Transducer Safety Information...9 Symbols Used in This Instruction Manual...9 Symbols Found on the Unit...10 Safety Procedures and Precautions...11 Sicherheitshinweise für den Druckmeßumformer...13 In dieser Betriebsanleitung vorkommende Symbole...13 Erklärung der am Gerät angebrachten Symbole...14 Sicherheitsvorschriften und Vorsichtsmaßnahmen...15 Informations relatives à la sécurité pour le transducteur de pression...17 Symboles utilisés dans ce manuel d'utilisation...17 Symboles apparaissant sur l'unité...18 Mesures de sécurité et précautions...19 Medidas de seguridad del transductor de presión...21 Símbolos usados en este manual de instrucciones...21 Símbolos hallados en la unidad...22 Procedimientos y precauciones de seguridad...23 Chapter One: General Information...25 Introduction...25 How This Manual is Organized...27 Customer Support...27 Chapter Two: Installation...29 How to Unpack the Type 615, 616, or Unpacking Checklist...29 Product Location and Requirements...30 Type 615, 616, and 617 Sensor Heads...30 Type 615, 616, and 617 Preamplifiers...30 Type 670 Electronics Unit...30 Fittings...30 Types 615 and v

4 Table of Contents Type Setup...31 Vibration and Strain Isolation...31 Sensor Head Mounting Instructions...31 Electronics Unit Installation...33 Interface Cables...33 Dimensions...34 Chapter Three: Overview...37 General Information...37 Sensors...37 Signal Conditioner/Electronics...38 Chapter Four: Operation...39 General Information...39 How To Stabilize the Sensors...39 How To Zero The Sensors...40 Chapter Five: Maintenance and Troubleshooting...41 General Information...41 Maintenance...41 Troubleshooting...42 How To Use the Sensor Head Simulator...42 Troubleshooting Chart...43 Appendix A: Product Specifications...45 Type 615 Specifications...45 Type 616 Specifications...47 Type 617 Specifications...49 Index...51 vi

5 List of Figures List of Tables List of Figures Figure 1: Type 615/616 Dimensions...34 Figure 2: Type 617 Dimensions...35 Figure 3: Preamplifier Unit for Types 615, 616, and List of Tables Table 1: Definition of Symbols Found on the Unit Tabelle 2: Bedeutung der am Gerät angebrachten Symbole Tableau 3: Définition des symboles apparaissant sur l'unité Tabla 4: Definición de los símbolos hallados en la unidad Table 5: Troubleshooting Chart vii

6 List of Figures List of Tables viii

7 Pressure Transducer Safety Information USymbols Used in This Instruction Manual Pressure Transducer Safety Information Symbols Used in This Instruction Manual Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual. Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel. Caution The CAUTION sign denotes a hazard to equipment. It calls attention to an operating procedure, practice, or the like, which, if not correctly performed or adhered to, could result in damage to or destruction of all or part of the product. Note The NOTE sign denotes important information. It calls attention to a procedure, practice, condition, or the like, which is essential to highlight. 9

8 U Symbols Found on the Unit Pressure Transducer Safety Information Symbols Found on the Unit The following table describes symbols that may be found on the unit. Definition of Symbols Found on the Unit On (Supply) IEC 417, No.5007 Off (Supply) IEC 417, No.5008 Earth (ground) IEC 417, No.5017 Protective earth (ground) IEC 417, No.5019 Frame or chassis IEC 417, No.5020 Equipotentiality IEC 417, No.5021 Direct current IEC 417, No.5031 Alternating current IEC 417, No.5032 Both direct and alternating current IEC 417, No.5033-a Class ll equipment IEC 417, No.5172-a Three phase alternating current IEC No Caution, refer to accompanying documents ISO 3864, No.B.3.1 Caution, risk of electric shock ISO 3864, No.B.3.6 Caution, hot surface IEC 417, No.5041 Table 1: Definition of Symbols Found on the Unit 10

9 Pressure Transducer Safety Information U Safety Procedures and Precautions Safety Procedures and Precautions Observe the following general safety precautions during all phases of operation of this instrument. Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of intended use of the instrument and may impair the protection provided by the equipment. MKS Instruments, Inc. assumes no liability for the customer s failure to comply with these requirements. DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained. SERVICE BY QUALIFIED PERSONNEL ONLY Operating personnel must not attempt component replacement and internal adjustments. Any service must be made by qualified service personnel only. USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used, users must take responsibility to observe the proper safety precautions, completely purge the instrument when necessary, and ensure that the material used is compatible with the materials in this product, including any sealing materials. PURGE THE INSTRUMENT After installing the unit, or before removing it from a system, purge the unit completely with a clean, dry gas to eliminate all traces of the previously used flow material. USE PROPER PROCEDURES WHEN PURGING This instrument must be purged under a ventilation hood, and gloves must be worn for protection. DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for such operation. USE PROPER FITTINGS AND TIGHTENING PROCEDURES All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the instrument. Assemble and tighten fittings according to manufacturer s directions. CHECK FOR LEAK-TIGHT FITTINGS Carefully check all vacuum component connections to ensure leak-tight installation. 11

10 U Safety Procedures and Precautions Pressure Transducer Safety Information OPERATE AT SAFE INLET PRESSURES Never operate at pressures higher than the rated maximum pressure (refer to the product specifications for the maximum allowable pressure). INSTALL A SUITABLE BURST DISC When operating from a pressurized gas source, install a suitable burst disc in the vacuum system to prevent system explosion should the system pressure rise. KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use. Contamination such as dust, dirt, lint, glass chips, and metal chips may permanently damage the unit or contaminate the process. ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS Temperature-controlled units will only meet specifications when sufficient time is allowed for the unit to meet, and stabilize at, the designed operating temperature. Do not zero or calibrate the unit until the warm up is complete. 12

11 Sicherheitshinweise für den Druckmeßumformer UIn dieser Betriebsanleitung vorkommende Symbole Sicherheitshinweise für den Druckmeßumformer In dieser Betriebsanleitung vorkommende Symbole Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser Betriebsanleitung. Warnung! Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende Berücksichtigung zu Verletzungen führen kann. Vorsicht! Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende Berücksichtigung zu einer Beschädigung oder Zerstörung des Gerätes oder von Teilen des Gerätes führen kann. Hinweis Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige Gegebenheit aufmerksam. 13

12 U Erklärung der am Gerät angebrachten Symbole Sicherheitshinweise für den Druckmeßumformer Erklärung der am Gerät angebrachten Symbole Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können. Bedeutung der am Gerät angebrachten Symbole Ein (Energie) IEC 417, No.5007 Aus (Energie) IEC 417, No.5008 Erdanschluß IEC 417, No.5017 Schutzleiteranschluß IEC 417, No.5019 Masseanschluß IEC 417, No.5020 Aquipotentialanschluß IEC 417, No.5021 Gleichstrom IEC 417, No.5031 Wechselstrom IEC 417, No.5032 Gleich- oder Wechselstrom IEC 417, No.5033-a Durchgängige doppelte oder verstärkte Isolierung IEC 417, No.5172-a Dreileiter- Wechselstrom (Drehstrom) IEC 617-2, No Warnung vor einer Gefahrenstelle (Achtung, Dokumentation beachten) ISO 3864, No.B.3.1 Warnung vor gefährlicher elektrischer Spannung ISO 3864, No.B.3.6 Höhere Temperatur an leicht zugänglichen Teilen IEC 417, No.5041 Tabelle 2: Bedeutung der am Gerät angebrachten Symbole 14

13 Sicherheitshinweise für den Druckmeßumformer U Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitsvorschriften und Vorsichtsmaßnahmen Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu befolgen. Eine Mißachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards, und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. MKS Instruments, Inc. haftet nicht für Mißachtung dieser Sicherheitsvorschriften seitens des Kunden. Niemals Teile austauschen oder Änderungen am Gerät vornehmen! Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein. Nur so wird sichergestellt, daß alle Schutzvorrichtungen voll funktionsfähig bleiben. Wartung nur durch qualifizierte Fachleute! Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgeführt werden, niemals vom Bedienpersonal. Vorsicht beim Arbeiten mit gefährlichen Stoffen! Wenn gefährliche Stoffe verwendet werden, muß der Bediener die entsprechenden Sicherheitsvorschriften genauestens einhalten, das Gerät, falls erforderlich, vollständig spülen, sowie sicherstellen, daß der Gefahrstoff die am Gerät verwendeten Materialien, insbesondere Dichtungen, nicht angreift. Spülen des Gerätes mit Gas! Nach dem Installieren oder vor dem Ausbau aus einem System muß das Gerät unter Einsatz eines reinen Trockengases vollständig gespült werden, um alle Rückstände des Vorgängermediums zu entfernen. Anweisungen zum Spülen des Gerätes Das Gerät darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen. Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen! Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in der Nähe von) explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist. 15

14 U Sicherheitsvorschriften und Vorsichtsmaßnahmen Sicherheitshinweise für den Druckmeßumformer Anweisungen zum Installieren der Armaturen! Alle Anschlußstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muß gemäß den Anweisungen des Herstellers vorgenommen werden. Verbindungen auf Undichtigkeiten prüfen! Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen. Gerät nur unter zulässigen Anschlußdrücken betreiben! Betreiben Sie das Gerät niemals unter Drücken, die den maximal zulässigen Druck (siehe Produktspezifikationen) übersteigen. Geeignete Berstscheibe installieren! Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden. Verunreinigungen im Gerät vermeiden! Stellen Sie sicher, daß Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das Instrumenteninnere gelangen können. Staub- und Schmutzpartikel, Glassplitter oder Metallspäne können das Gerät dauerhaft beschädigen oder Prozeß und Meßwerte verfälschen. Bei Geräten mit Temperaturkontrolle korrekte Anwärmzeit einhalten! Temperaturkontrollierte Geräte arbeiten nur dann gemäß ihrer Spezifikation, wenn genügend Zeit zum Erreichen und Stabilisieren der Betriebstemperatur eingeräumt wird. Kalibrierungen und Nulleinstellungen sollten daher nur nach Abschluß des Anwärmvorgangs durchgeführt werden. 16

15 Informations relatives à la sécurité pour le USymboles utilisés dans ce manuel d'utilisation Informations relatives à la sécurité pour le transducteur de pression Symboles utilisés dans ce manuel d'utilisation Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel. Avertissement L'indication AVERTISSEMENT signale un danger pour le personnel. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation présentant un risque d'accident pour le personnel, en cas d'exécution incorrecte ou de non respect des consignes. Attention L'indication ATTENTION signale un danger pour l'appareil. Elle attire l'attention sur une procédure d'exploitation, une pratique, ou toute autre situation, présentant un risque d'endommagement ou de destruction d'une partie ou de la totalité de l'appareil, en cas d'exécution incorrecte ou de non respect des consignes. Remarque L'indication REMARQUE signale une information importante. Elle attire l'attention sur une procédure, une pratique, une condition, ou toute autre situation, présentant un intérêt particulier. 17

16 U Symboles apparaissant sur l'unité Informations relatives à la sécurité pour le Symboles apparaissant sur l'unité Le tableau suivant décrit les symboles pouvant apparaître sur l'unité. Définition des symboles apparaissant sur l'unité Marche (sous tension) IEC 417, No.5007 Arrêt (hors tension) IEC 417, No.5008 Terre (masse) IEC 417, No.5017 Terre de protection (masse) IEC 417, No.5019 Masse IEC 417, No.5020 Equipotentialité IEC 417, No.5021 Courant continu IEC 417, No.5031 Courant alternatif IEC 417, No.5032 Courant continu et alternatif IEC 417, No.5033-a Matériel de classe II IEC 417, No.5172-a Courant alternatif triphasé IEC 617-2, No Attention : se reporter à la documentation ISO 3864, No.B.3.1 Attention : risque de choc électrique ISO 3864, No.B.3.6 Attention : surface brûlante IEC 417, No.5041 Tableau 3: Définition des symboles apparaissant sur l'unité 18

17 Informations relatives à la sécurité pour le U Mesures de sécurité et précautions Mesures de sécurité et précautions Prendre les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation de cet appareil. Le non respect des ces précautions ou des avertissements contenus dans ce manuel constitue une violation des normes de sécurité relatives à l'utilisation de l'appareil et peut diminuer la protection fournie par l'appareil. MKS Instruments, Inc. n'assume aucune responsabilité concernant le non respect des consignes par les clients. PAS DE SUBSTITUTION DE PIÈCES OU DE MODIFICATION DE L'APPAREIL Ne pas installer des pièces de substitution ou effectuer des modifications non autorisées sur l'appareil. Renvoyer l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des dispositifs de sécurité. DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ Le personnel d'exploitation ne doit pas essayer de remplacer des composants ou de faire des réglages internes. Tout dépannage doit être uniquement effectué par du personnel qualifié. PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilisés, l'utilisateur est responsable de la prise des mesures de précaution appropriées, de la purge complète de l'appareil quand cela est nécessaire, et de la garantie que les produits utilisés sont compatibles avec les composants de cet appareil, y compris les matériaux d'étanchéité. PURGE DE L'APPAREIL Après l'installation de l'unité, ou avant son enlèvement d'un système, purger l'unité complètement avec un gaz propre et sec afin d'éliminer toute trace du produit de flux utilisé précédemment. UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE Cet appareil doit être purgé sous une hotte de ventilation, et il faut porter des gants de protection. PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation spécifique pour une telle exploitation. UTILISATION D'ÉQUIPEMENTS APPROPRIÉS ET PROCÉDURES DE SERRAGE Tous les équipements de l'appareil doivent être cohérents avec ses spécifications, et compatibles avec l'utilisation prévue de l'appareil. Assembler et serrer les équipements conformément aux directives du fabricant. 19

18 U Mesures de sécurité et précautions Informations relatives à la sécurité pour le VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation. EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux spécifications de l'unité pour la pression maximum admissible). INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adapté dans le système à vide, afin d'éviter une explosion du système en cas d'augmentation de la pression. MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des produits contaminants tels que des poussières et des fragments de tissu, de glace et de métal peuvent endommager l'unité d'une manière permanente ou contaminer le processus. RESPECT DU TEMPS D'ÉCHAUFFEMENT APPROPRIÉ POUR LES UNITÉS Á TEMPÉRATURE CONTRÔLÉE Les unités à température contrôlée atteignent leurs spécifications uniquement quand on leur laisse un temps suffisant pour atteindre d'une manière stable la température d'exploitation. Ne pas remettre à zéro ou calibrer l'unité tant que l'échauffement n'est pas terminé. 20

19 Medidas de seguridad del transductor de presión USímbolos usados en este manual de instrucciones Medidas de seguridad del transductor de presión Símbolos usados en este manual de instrucciones Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual. Advertencia El símbolo de advertencia indica la posibilidad de que se produzcan daños personales. Pone de relieve un procedimiento, práctica, estado, etc. que en caso de no realizarse u observarse correctamente puede causar daños personales. Precaución El símbolo de precaución indica la posibilidad de producir daños al equipo. Pone de relieve un procedimiento operativo, práctica, estado, etc. que en caso de no realizarse u observarse correctamente puede causar daños o la destrucción total o parcial del equipo. Nota El símbolo de notas indica información de importancia. Este símbolo pone de relieve un procedimiento, práctica o condición cuyo conocimiento es esencial destacar. 21

20 U Símbolos hallados en la unidad Medidas de seguridad del transductor de presión Símbolos hallados en la unidad La tabla siguiente contiene los símbolos que puede hallar en la unidad. Definición de los símbolos hallados en la unidad Encendido (alimentación eléctrica) IEC 417, N 5007 Apagado (alimentación eléctrica) IEC 417, N 5008 Puesta a tierra IEC 417, N 5017 Protección a tierra IEC 417, N 5019 Caja o chasis IEC 417, N 5020 Equipotencialidad IEC 417, N 5021 Corriente continua IEC 417, N 5031 Corriente alterna IEC 417, N 5032 Corriente continua y alterna IEC 417, N 5033-a Equipo de clase II IEC 417, N 5172-a Corriente alterna trifásica IEC 617-2, N Precaución. Consulte los documentos adjuntos ISO 3864, N B.3.1 Precaución. Riesgo de descarga eléctrica ISO 3864, N B.3.6 Precaución. Superficie caliente IEC 417, N 5041 Tabla 4: Definición de los símbolos hallados en la unidad 22

21 Medidas de seguridad del transductor de presión U Procedimientos y precauciones de seguridad Procedimientos y precauciones de seguridad Las precauciones generales de seguridad descritas a continuación deben observarse durante todas las etapas de funcionamiento del instrumento. La falta de cumplimiento de dichas precauciones o de las advertencias específicas a las que se hace referencia en el manual, constituye una violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular la protección proporcionada por el equipo. Si el cliente no cumple dichas precauciones y advertencias, MKS Instruments, Inc. no asume responsabilidad legal alguna. NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS toda vez que sea necesario repararlo o efectuar tareas de mantenimiento. LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento. Las tareas de mantenimiento o reparación deben ser realizadas únicamente por personal autorizado. TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS Cuando se utilicen materiales tóxicos, es responsabilidad de los operarios tomar las medidas de seguridad correspondientes, purgar totalmente el instrumento cuando sea necesario y comprobar que el material utilizado sea compatible con los materiales del instrumento e inclusive, con todos los materiales de sellado. PURGUE EL INSTRUMENTO Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con gas limpio y seco para eliminar todo resto de la sustancia líquida empleada anteriormente. USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA El instrumento debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores. NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE EXPLOSIÓN Para evitar que se produzcan explosiones, no haga funcionar este instrumento en un ambiente con riesgo de explosiones, excepto cuando el mismo haya sido certificado específicamente para tal uso. 23

22 U Procedimientos y precauciones de seguridad Medidas de seguridad del transductor de presión USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante. COMPRUEBE QUE LAS CONEXIONES SEAN A PRUEBA DE FUGAS Inspeccione cuidadosamente las conexiones de los componentes de vacío para comprobar que hayan sido instalados a prueba de fugas. HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS No haga funcionar nunca el instrumento con presiones superiores a la máxima presión nominal (en las especificaciones del instrumento hallará la presión máxima permitida). INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula de seguridad adecuada en el sistema de vacío para evitar que se produzcan explosiones cuando suba la presión del sistema. MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad o contaminar el proceso. CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA Las unidades controladas por medio de temperatura funcionarán de acuerdo con las especificaciones sólo cuando se las caliente durante el tiempo suficiente para permitir que lleguen y se estabilicen a la temperatura de operación indicada. No calibre la unidad y no la ponga en cero hasta que finalice el procedimiento de calentamiento. 24

23 Chapter One: General Information UIntroduction Chapter One: General Information Introduction The MKS Baratron Types 615A, 616A, and 617A Sensor Heads are part of the MKS family of high temperature pressure sensors designed to provide highly accurate, reliable, and repeatable pressure measurements in the range from 20K Torr to as low as 1 Torr Full Scale (F.S.). The Types 615, 616, and 617 units consist of a capacitance manometer, encased in a protective aluminum cover, connected to a remote preamplifier by triaxial cables. These units must be used in conjunction with an MKS Type 670 Electronics Unit, which provides an external power supply and signal conditioner, an optional pressure display, and optional temperature control. The sensor and its preamplifier output an AC voltage to the signal conditioner which converts the voltage into a pressure value. The Types 615 and 617 are absolute sensors with a built-in zero pressure reference. In these units, the pressure inlet tube (Px) is connected to the unknown pressure to be measured. The low pressure side (P R ) of the sensor is pumped to a high vacuum, outgassed thoroughly, chemically gettered, and permanently sealed. This process ensures a useful life of ten years or more. The Type 615 and 617 sensors expose only Inconel and stainless steel to the process, permitting use with corrosive or dirty gases and eliminating contamination of the process with sensor materials. Measurements are independent of gas composition. The Type 616 is a differential sensor. In this unit, the pressure inlet tube (Px) is connected to the unknown pressure to be measured, while the reference inlet tube (P R ) is connected to the lower pressure or reference side. A differential sensor head can be used to make absolute pressure measurements by continuously pumping the reference side to a low pressure below the resolution of the sensor. In addition to the Inconel and stainless steel on the Px side, the Type 616 sensor exposes ceramic, glass, and palladium on the reference side of the transducer. The P R tube should be connected to clean, dry, non-conductive gases. Using the latest single-sided, dual-electrode Inconel transducer design, coupled with a fixedfrequency bridge signal conditioner, these instruments are capable of withstanding high overpressure conditions (45 psia, or 125% of F.S. for ranges greater than 5K Torr) with minimal or no shifts in output over their entire range. The advanced bridge signal conditioning technology provides high accuracy and operation which is extremely temperature-stable at operating pressure. The Types 615 and 616 sensors have a minimum measuring range of 4 decades of pressure; the Type 617 has a minimum measuring range of 3 decades of pressure. With its large port, the Type 617 has exceptionally fast response, especially at low pressures. The sensors are designed specifically to meet the needs of vacuum process systems where environmental and process conditions are particularly demanding. Optional temperature control of the sensor will minimize the effects of ambient or process temperature variations typically encountered in process line environments. The Types 615, 616, and 617 sensor heads are capable of accurately measuring pressure at ambient temperatures of 15 to 200 C (up to 300 C with an optional cable). Sensor head accuracy is 0.12% of reading (0.25% of reading for 1 Torr units). All of the sensors are bakeable to 400 C. 25

24 U How This Manual is Organized Chapter One: General Information 26

25 Chapter One: General Information U How This Manual is Organized How This Manual is Organized This manual is designed to provide instructions on how to set up and install a Type 615, 616, or 617 unit. Before installing your Type 615, 616, or 617 unit in a system and/or operating it, carefully read and familiarize yourself with all precautionary notes in the Safety Messages and Procedures section at the front of this manual. In addition, observe and obey all WARNING and CAUTION notes provided throughout the manual. Chapter One: General Information, (this chapter) introduces the products and describes the organization of the manual. Chapter Two: Installation, explains the environmental requirements and describes how to mount the instruments in your system. Chapter Three: Overview, gives a brief description of the instruments and their functionality. Chapter Four: Operation, describes how to use the instruments and explains all their functions and features. Chapter Five: Maintenance and Troubleshooting, describes maintenance and troubleshooting procedures. Appendix A: Product Specifications, lists the specifications of the instruments. Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers, listed on the back cover. In addition, MKS accepts the instruments of other manufacturers for recalibration using the Primary and Transfer Standard calibration equipment located at all of our regional service centers. Should any difficulties arise in the use of your Type 615, 616, or 617 instrument, or to obtain information about companion products MKS offers, contact any authorized MKS Calibration and Service Center. If it is necessary to return the instrument to MKS, please obtain an RMA (Return Material Authorization) Number from the MKS Calibration and Service Center before shipping. The RMA Number expedites handling and ensures proper servicing of your instrument. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Warning All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or toxic materials. 27

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27 Chapter Two: Installation UHow to Unpack the Type 615, 616, or 617 Chapter Two: Installation How to Unpack the Type 615, 616, or 617 MKS has carefully packed the Type 615, 616, or 617 unit so that it will reach you in perfect operating order. Upon receiving the unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not occurred during shipment. Note Do not discard any packing materials until you have completed your inspection and are sure the unit arrived safely. If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to MKS, obtain an RMA (Return Material Authorization) Number from an MKS Service Center before shipping. Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers. Unpacking Checklist Standard Equipment: Type 615, 616, or 617 Transducer (consists of a sensor head and preamplifier connected via triaxial cables) Type 615/616/617 Instruction Manual (this book) Required Electronics Equipment: Type 670 Electronics Unit (provides an external power supply and signal conditioner, optional display, and optional temperature control) Interface Cables (where xx = length in feet): Standard Head Cable (CB270-1-xx) Shielded Head Cable (CB270S-1-xx) Note 1. Braided, shielded cables are required to meet CE Mark certification. 2. To order braided, shielded cables, add an S after the cable type designation. For example, to order a standard head cable, use part number CB270-1-xx; for a shielded cable, use part number CB270S-1-xx. 29

28 UProduct Location and Requirements Chapter Two: Installation Optional Equipment: Type 274 Three-Channel Multiplexer (with temperature compensation) Product Location and Requirements Type 615, 616, and 617 Sensor Heads Ambient operating temperature range: 15 to 200 C (59 to 392 F) 15 to 300 C (59 to 572 F) with optional cable Bakeable (without cable) to 400 C (752 F) Type 615, 616, and 617 Preamplifiers Ambient operating temperature range: 15 to 40 C (59 to 104 F) Type 670 Electronics Unit Input power: 90 to 132 or 180 to 264 VAC, Hz, 70 VA (max) Ambient operating temperature range: 15 to 40 C (59 to 104 F) Fittings Types 615 and 616 Swagelok 4-VCR (female) 2 ¾ CF (rotatable or non-rotatable) Mini-CF (rotatable or non-rotatable) Type ¾ CF non-rotatable 30

29 Chapter Two: Installation U Setup Setup Vibration and Strain Isolation The sensor heads are highly accurate devices and are subject to influence by excessive vibration or mechanical strain on the port(s). MKS recommends that the sensor head (particularly low range units such as 1 Torr units) be shock mounted on a plate using commercially available shock mounts and coupled to the processing chamber through flexible bellows couplings. Caution Do not mount the Px or P R ports in a manner that causes strain to be transmitted to the sensor head. Vibration due to mechanical type vacuum pumps can affect the accuracy of pressure measurement and control, and typically occurs as 24 to 120 Hz noise on the DC output signal. If you suspect such noise, connect an oscilloscope to the DC output connectors of the MKS Electronics Unit and look for this noise on the DC output signal. Momentarily shutting off the mechanical pump will help to determine if this is the problem. Sensor Head Mounting Instructions The Type 615, 616, or 617 unit is shipped with the sensor head and preamplifier connected, via triaxial cables, in the following manner: the Jx connection on the preamplifier is connected to the Px side of the sensor head the J R connection on the preamplifier is connected to the P R side of the sensor head Caution Because the triaxial cables are sensitive to capacitive pickup, attach the triaxial cables solidly to some surface and avoid touching or handling the cables while you are making precision measurements. 31

30 U Setup Chapter Two: Installation How To Mount a Type 615 or 617 Absolute Sensor Connect a Type 615 or 617 absolute sensor to the vacuum system using an isolation valve to maximize the life and zero repeatability of the sensor. An isolation valve protects the sensor in two ways: Protection from overpressure. Overpressure is common in systems that incorporate pressure purging cycles in excess of sensor specifications. Refer to Appendix A: Product Specifications beginning on page 45, for the sensor s overpressure limit. Protection from moisture contamination. Whenever a process is vented to atmosphere, moisture can be a contaminant. Moisture can often combine with residue on the sensor and/or system surfaces, and form acids such as HCl (from a chlorine-based process), which can cause pressure errors and a slow return to zero. Special Instructions for the 617 Sensor Use flexible bellows to complete vibration isolation to the 617 sensor, allowing it to function independently of significant system vibration or stress that could be induced during operation or shipment. With its large port, the Type 617 unit has an exceptionally fast response, especially at low pressures. However, if speed is critical, you may want to mount the unit without the bellows. To mount the 615 or 617 unit: 1. Set the closing point of the isolation valve at or slightly above the sensor s full scale range. Use any good quality electric or air-operated valve. 2. Connect the sensor inlet (Px) port to the isolation valve via an appropriate length of stainless steel bellows tubing with welded mating Swagelok fittings. 3. Mount the sensor head with the inlet (Px) port pointing (vertically) downward so that any foreign matter entering the pressure port will fall away from the diaphragm. Refer to Chapter Four: Operation, beginning on page 39, for instructions on using the 615/617 unit. How To Mount the Type 616 Differential Sensor 1. Connect the inlet (Px) port of the Type 616 unit to the high side of your pressure system. 2. Connect the pressure reference (P R ) port to the low pressure (reference) side. If the connections are reversed, the pressure sensor will output a negative signal. To use a 616 differential sensor for an absolute measurement, continually pump the P R port to a pressure below the resolution of the sensor (<0.01% F.S.). Refer to Chapter Four: Operation, beginning on page 39, for instructions on using the 616 unit. 32

31 Chapter Two: Installation U Dimensions Electronics Unit Installation The Types 615, 616, and 617 sensor heads each must be operated in conjunction with an MKS Type 270 or Type 670 Electronics Unit. Refer to the instruction manual that accompanies your MKS Electronics Unit for directions on connecting the preamplifier to the electronics unit. Heating a 615/616/617 Sensor You can operate the 615/616/617 sensor at an elevated temperature, but you must supply the appropriate heaters and heater controllers. An MKS Type 274 Three-Channel Multiplexer may be used for temperature compensation. Connect the 615/616/617 sensor to a Type 274 multiplexer for temperature compensation. Temperature compensation is necessary for a 615/616/617 sensor operated at an elevated temperature. Up to three sensors can be connected to one 274 multiplexer. Refer to the Type 274 multiplexer manual for installation instructions. Interface Cables The Type 615, 616, and 617 units are shipped with the sensor head and preamplifier connected via triaxial cables. The preamplifier is connected to an MKS Type 670 Electronics Unit using either standard, or braided, shielded interface cables (CB270-1-xx or CB270S-1-xx). The cables are available in a variety of lengths. Note 1. Use a standard cable for normal environments; use a braided, shielded cable for high RFI environments. 2. Braided, shielded cables are required to meet CE Mark certification. 3. To order braided, shielded cables, add an S after the cable type designation. For example, to order a standard head cable, use part number CB270-1-xx; for a shielded cable, use part number CB270S-1-xx (where xx indicates length). 33

32 U Dimensions Chapter Two: Installation Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses. Cajon 4-VCR coupling P X Inlet Tubes 1/4" O.D / (87.5) Flexible triaxial cable P R Inlet, Type 616 only Removable aluminum protective cover Figure 1: Type 615/616 Dimensions 34

33 Chapter Two: Installation U Dimensions (304.8) 1.00 Dia Inlet Tube (25.4) Connector Plug 2.44 (62.1) Dia 3.69 (93.7) Figure 2: Type 617 Dimensions 0.25 (6.4) 4.25 (108.0) 3.75 (95.2) DIA (4.6) 1.38 (34.9) 2.75 (69.9) 3.75 (95.1) Connector Receptacle Head Connector 2.10 max (53.3) Figure 3: Preamplifier Unit for Types 615, 616, and

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35 Chapter Three: Overview UGeneral Information Chapter Three: Overview General Information MKS Type 615, 616, and 617 units consist of a capacitance manometer and remote preamplifier only. These units must be used in conjunction with an MKS Type 270 or 670 Electronics Unit. The electronics unit provides an external power supply and signal conditioner, an optional pressure display, and optional temperature control. Sensors The Type 615 and 617 variable capacitance sensors are absolute sensors. They consist of a pressure inlet tube (Px) connected to a small chamber in the sensor body. One wall of this chamber is a metal diaphragm. The front side of the diaphragm is exposed to the gas whose pressure is to be measured. The back, or reference side of the diaphragm faces a rigidly mounted ceramic disc containing two electrodes. The reference side is permanently evacuated to a high vacuum and maintained with a chemical getter system. The Type 616 variable capacitance sensor is a differential sensor. It consists of a pressure inlet tube (Px) connected to a small chamber in the sensor body. One wall of this chamber is an elastic metal diaphragm. The front side of the diaphragm is exposed to the gas whose pressure is to be measured. The back, or reference side of the diaphragm faces a rigidly mounted ceramic disc containing two electrodes. The reference side is open to a reference pressure via an inlet tube (P R ). The diaphragm, in either an absolute or differential sensor, deflects with changing pressure (force per unit area) independently of the gas type or composition of the measured gas. This deflection causes an imbalance of the sensor electrode capacitances since the distance to the diaphragm is now different for each electrode. The imbalance of capacitances is converted to a voltage in the bridge. This bridge is excited by a precision constant frequency oscillator. The resultant signal is then linearized, zeroed, and amplified via the signal conditioner electronics, to produce a precise 0 to 10 VDC signal scaled to the range of the transducer. 37

36 U Signal Conditioner/Electronics Chapter Three: Overview Signal Conditioner/Electronics The signal conditioner contains a state-of-the-art, low impedance balanced bridge circuitry, selfcompensated for thermal stability with ambient temperature changes. The output is a DC voltage which is linear with pressure. The sensor is then calibrated against a pressure standard to provide a 0 to 10 Volt DC output over the range of the sensor. 38

37 Chapter Four: Operation UGeneral Information Chapter Four: Operation General Information After installing the sensor head into your pressure system and connecting the sensor head to a Type 670 Electronics Unit, you must stabilize and zero the unit. Note The span of the sensor head is factory set during the calibration and should never be adjusted by the user. If the span potentiometer in the sensor head preamplifier is mistakenly adjusted, please contact MKS for assistance, and possible instructions for returning the instrument to MKS for recalibration. Caution To bakeout the unit, you MUST remove the cable from the sensor head. The interface cables are not designed to withstand the maximum bakeout temperature of 400 C (752 F). How To Stabilize the Sensors Stabilization of the Type 615 and 617 absolute sensors is accomplished by pumping the unit, with the power on, to a pressure less than the transducer s resolution (refer to Appendix A: Product Specifications, beginning on page 45). Stabilization of the Type 616 differential sensor is accomplished by achieving equal pressure on both ports of the unit, ports Px and P R. You may connect the two ports together as a means of applying equal pressure to both sides of the sensor. Allow 4 hours for thermal stabilization of the Type 615, 616, and 627 sensors; 24 hours for optimum stabilization. 39

38 U How To Zero The Sensors Chapter Four: Operation How To Zero The Sensors For initial operation, and periodically as required, check the sensor zero. It is important that you make the zero adjustment only after the unit is fully stabilized (refer to How To Stabilize the Sensors, page 39). Adjusting the sensor zero has no effect on the factory calibration. Note In order to set the zero, an absolute sensor must be at a pressure below its minimum usable resolution, and a differential sensor must have equal pressure on both sides. How To Set (or Re-Set) the Zero of the Type 615 and 617 Absolute Sensors 1. Pump down the system to a pressure less than the resolution of the sensor (refer to Appendix A: Product Specifications, page 45). 2. Zero the sensor according to the procedure described in your electronic unit s manual. How To Set (or Re-Set) the Zero of the Type 616 Differential Sensor To use the Type 616 unit for a differential measurement: 1. Equalize the pressure on both ports (Px and P R ). One way to accomplish this is to connect the ports together. 2. Zero the sensor according to the procedure described in your electronic unit s manual. To use the Type 616 unit for an absolute measurement: 1. Continually pump down the P R port to a pressure below that of the resolution of the sensor (< 0.01% F.S.). 2. Zero the sensor according to the procedure described in your electronic unit s manual. 40

39 Chapter Five: Maintenance and Troubleshooting UGeneral Information Chapter Five: Maintenance and Troubleshooting General Information If your Type 615, 616, and 617 sensor head fails to operate properly upon receipt, check for shipping damage, and check the cables for proper continuity. Any damage should be reported to the carrier and MKS Instruments immediately. If it is necessary to return the unit to MKS, obtain an RMA number (Return Material Authorization) Number from any MKS Calibration and Service Center before shipping. Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers. Maintenance In general, the Type 615, 616, and 617 sensor heads require no maintenance other than proper installation and operation, and an occasional zero adjustment. Note MKS recommends that adjusting the zero with the sensor head simulator be the only adjustment made in the field (refer to How To Use the Sensor Head Simulator, page 42). Return the sensor to MKS Instruments for other adjustments, calibration, or servicing. 41

40 U Troubleshooting Chapter Five: Maintenance and Troubleshooting Troubleshooting How To Use the Sensor Head Simulator The Type 170M-80 Sensor Head Simulator simulates the Type 615, 616, or 617 sensor head in your pressure measurement system. Use the simulator to for system troubleshooting and optimization of the electronics unit. System Checkout Use the three position output range switch on the simulator to check the zero, 50% F.S., and 100% F.S. ranges of your system. If the unit fails any step, call the MKS Applications group for assistance. 1. Disconnect the sensor head cable and connect it to the connector on the simulator. The red lamp should be ON, indicating that the proper preamp voltage is present at the end of the cable. 2. Place the simulator output range switch in the zero (0 V) position. The simulator produces a zero signal across the signal input lines. 3. Adjust the electronics unit for a stable zero. It should be possible to adjust the electronics unit for a stable zero on all ranges. Zero the unit according to the procedure described in your electronic unit s manual. 4. Place the simulator output switch to the 100% Full Scale position (10 V). The simulator produces a 10 V signal across the signal input lines. 5. Adjust the full scale on the electronics unit to read Volts. 6. Place the simulator output switch to the 50% Full Scale position (5 V). The simulator produces a 5 V signal across the signal input lines. The electronics unit should read 50% of full scale. 42

41 Chapter Five: Maintenance and Troubleshooting U Troubleshooting Troubleshooting Chart Note The information in the troubleshooting chart applies to each of the sensor heads except where noted. Troubleshooting Chart Symptom Possible Cause Remedy Cannot zero an absolute sensor Cannot zero when power first applied Cannot zero on most sensitive ranges Cannot zero at end of zero pot range (after warm-up) Zero offset at or near full scale on least sensitive ranges Zero shift after applying power Zero shift when either raising or lowering line pressure Zero shift upon turn on of RF power in, for example, a sputtering system. Sudden negative going pressure reading. 616 only Zero shift when changing from atmospheric to vacuum operation Pressure differential Sensor head not at operating temperature Amplifier overload System zero has shifted Shorted sensor. Open or short in sensor head cable. Sensor temperature drift Leaks in vacuum system Pick up in sensor preamplifier Different outgassing rates for P X and P R at vacuum Pump down Px side (refer to Appendix A: Product Specifications, page 45) Allow time for stabilizing Go back to less sensitive range until on scale and try again Adjust coarse zero control at sensor to bring Indicator control in range. Center ZERO ADJ. on Indicator first. Substitute head or cable, if available Allow 4 hours for sensor thermal stabilization; 24 hours for optimum stabilization. Check pressure connections and sensor head and other fittings Replace standard sensor head cable with shielded version or relocate sensor on system Allow time for outgassing completion Table 5: Troubleshooting Chart 43

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43 Appendix A: Product Specifications Type 615 Specifications Appendix A: Product Specifications Type 615 Specifications Accuracy (including non-linearity, hysteresis and non-repeatability) 1 Torr unit 10 to Torr units Ambient operating temperature range Sensor Preamplifier Type 615 Bakeable Absolute Pressure Sensor ± 0.25% of Reading ± 0.12% of Reading 15 to 200 C (59 to 392 F) 15 to 300 C (59 to 572 F) with optional cable 15 to 40 C (59 to 104 F) Bakeout temperature Bakeable (without cable) to 400 C (752 F) CE Mark Compliance Fittings Standard Optional Materials exposed to gases Overpressure limit (without damage) 1, 10, 100, 1000 Torr units > 1000 Torr units EMC Directive 2004/108/EEC Swagelok 4-VCR (female) 2 ¾ CF (rotatable or non-rotatable ) or Mini-CF (rotatable or non-rotatable) Inconel, stainless steel 45 psia (310 kpa) 125% of F.S. Pressure ranges (Torr, Full Scale) 1, 10, 100, 1000, 5000, 10000, 15000, Resolution Temperature Coefficients (with the Type 273 controller only) Zero Span 1 x 10-6 F.S. 40 ppm (F.S. / C) 30 ppm (Reading / C) Table continued on next page 45