INSTRUCTION MANUAL PARTICLE SENSOR KS-40AF Higashimotomachi, Kokubunji, Tokyo , Japan

Transcription

1 INSTRUCTION MANUAL PARTICLE SENSOR KS-40AF Higashimotomachi, Kokubunji, Tokyo , Japan

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3 Organization of this manual This manual describes the features and operation principles of the light-scattering type liquid-borne particle sensor KS-40AF. In sections related to the configuration of a measurement system comprising the KS-40AF and other equipment, this manual also touches upon operation of the other equipment, but to assure safe and correct operation, always consult the documentation of the other equipment as well. The following pages contain important information on safety. Be sure to read this part. This manual contains the following sections. Outline Provides an outline of the unit and descriptions of measurement system configuration examples. Controls and Features Briefly identifies and explains all parts of the unit. Preparations Describes how to make sampling tube, purge gas, and sample fluid connections and how to set the unit up for use. Measurement Describes the basic steps for measurement, and gives information on error messages. Maintenance Describes steps to perform after measurement, including how to clean the piping and countermeasures to take when the CELL indicator or LIQUID LEAK indicator or LASER indicator is lit in red, or when the LASER indicator flashes in red. Specifi cations Lists the technical specifications of the unit. * All company names and product names mentioned in this manual are trademarks or registered trademarks of their respective owners. i

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5 FOR SAFETY In this manual, important safety instructions are specially marked as shown below. To prevent the risk of death or injury to persons and severe damage to the unit or peripheral equipment, make sure that all instructions are fully understood and observed. WARNING Disregarding instructions printed here incurs the risk of death or severe injury to persons. Caution Disregarding instructions printed here incurs the risk of injury to persons and/or damage to peripheral equipment. Important Disregarding instructions printed here incurs the risk of damage to the product. Note Mentioned about the tips to use this unit properly. (This messages do not have to do with safety.) iii

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7 Caution Types of sample fluids The unit is designed for measuring liquid-borne particles. Never use the unit with the liquid types listed below, to prevent false measurement and the possibility of accidents and damage to the unit. - Explosive liquid or mixtures containing explosive fluid - Fluid which can cause corrosion of fluid-contacting parts or mixtures containing such fluid - Liquid with a temperature of less than +15 C or more than +35 C - Liquid with a pressure of more than 300 kpa (gauge pressure) When using different types of sample fluid where mixing can lead to reactions such as thermal build-up, hardening, or particle generation, always perform thorough cleaning to ensure complete replacement. v

8 WARNING Sample fluid danger prevention When toxic sample fluid comes into contact with any part of the human body or when toxic gases generated by the sample fluid are breathed, there is a danger of severe injury or death. Sample fluid also involves the risk of fire, explosion, heat generation, corrosion, deformation and other effects. Observe the following points closely to ensure safe use of sample fluid. Do not pass sample fluids which can cause corrosion of fluid-contacting parts (PFA, sapphire) through the system. Observe the following points when setting up or dismantling a measurement system. - Check the sample fluid for any risks due to toxicity or other harmful properties. - Make sure that sample fluid cannot leak from the system and come into contact with body parts, clothing etc. - When attaching or detaching tubes, connectors etc., always use appropriate protective tools and wear dual-layer gloves. - Double-check all connections before starting the sample fluid flow. - This unit incorporates a leak sensor or other safety device, but to verify safety you should always perform a thorough leak check before starting operation. To ensure that the leak sensor operates properly, the unit must be placed on a horizontal surface (inclination within 2 degrees; see page 2). The pressure of sample fluid passed through the unit may not exceed 300 kpa (gauge pressure). Ensure that the supply system (sampler, sample fluid lines etc.) has sufficient pressure resistance. When using sample fluid which may produce harmful gases, provide adequate ventilation as prescribed by applicable laws and regulations. vi

9 Before and after measurement, clean the entire sample fluid system thoroughly to remove any remnants. Otherwise unwanted effects such as thermal build-up, hardening, particle accumulation etc. can occur. This is especially important to prevent the possibility of serious accidents when using the unit to measure different types of sample fluids. Before starting to prepare the system for storage, complete the cleaning process with pure water and verify neutrality (ph7). Dispose of waste sample fluid only as prescribed by applicable laws and regulations. Never mix waste sample fluid with other substances unless absolute safety has been established. vii

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11 WARNING The unit uses a laser source This unit is designated as a class 1 laser product according to IEC (2001). The internal particle detector mechanism uses a laser, but it is fully shielded so that the beam cannot exit from the enclosure. The identification label shown at right is affixed to the top of the unit. Laser Precautions The particle detector mechanism in this unit uses a laser classified as a class 3B laser product according to IEC (2001). The laser source can cause blindness if viewed directly, and can cause skin injuries if the skin is exposed directly to the beam. Never open the cover, because this involves the risk of exposure to the laser beam. The warning label shown at right is affixed to the top of the unit. Caution Use of controls or adjustments or performance of procedures other than those specified herein may result in hazardous radiation exposure. ix

12 Warning Labels The following types of warning labels are used with this unit. Transport label Instructs the user to purge the sample fluid system with pure water and fill it with alcohol before transporting or shipping the unit for maintenance or servicing. The label is affixed to the rear of the unit. Important Before returning the unit for maintenance or servicing, purge the sample fluid system thoroughly with pure water to remove any sample fluid remnants. Then fill the piping with alcohol (isopropyl alcohol, ethyl alcohol or methyl alcohol). Sample fluid pressure warning label Warns that sample fluid pressure may not exceed 300 kpa (gauge pressure). INLET and OUTLET warning label Warns against subjecting the INLET and OUTLET to strong force or shocks. The label is affixed to the rear of the unit. WARNING Maximum allowable sample fluid pressure is 300 kpa (42 PSI) at gage. Attach and remove tubes carefully and do not exert strong force on the INLET and OUTLET to prevent deformation and fluid leaks. x

13 Installation warning label Instructs the user that the unit must be installed horizontally (inclination angle within 2 degrees), to ensure that the leak sensor operates properly. The label is affixed to the top of the unit. CAUTION This side must face up. The unit must be installed horizontally (maximum inclination 2 degrees). Laser product warning label This unit is designated as a class 1 laser product according to IEC (2001). The internal particle detector mechanism uses a laser, but it is fully shielded so that the beam cannot exit from the enclosure. The label is affixed to the top of the unit. Laser product description label The particle detector mechanism in this unit uses a laser classified as a class 3B laser product according to IEC (2001). The laser source can cause blindness if viewed directly, and can cause skin injuries if the skin is exposed directly to the beam. Never open the cover, because this involves the risk of exposure to the laser beam. The label is affixed to the top of the unit. xi

14 Precautions Operate the unit only as described in this manual. Do not use or store the unit in locations which - may exceed the temperature range specified on page 24, or may be subject to moisture condensation. If the temperature of the sample fluid is lower than the ambient temperature, condensation may occur. Take suitable countermeasures such as using purge gas. - may be subject to temperatures above +50 C or below -10 C, or to relative humidity of more than 90%, or where condensation or freezing inside the piping may occur. - may be subject to splashes of water or to direct sunlight. - may be subject to air with high salt or sulphur content or to gases. - do not provide a level support or may subject the unit and piping to vibrations or shock. Avoid sudden temperature changes which may cause moisture condensation on the optical assembly. Before using the unit, make sure that all cord, cable and tube connections are correctly and safely established. Do not subject the cords, cables and tubes to excessive bending or other force. When disconnecting the cords, cables and tubes, disconnect while holding onto the end of the plug, connector or tube. Excessive electrical noise or external noise can cause the unit to operate abnormally or malfunction. Do not disassemble the unit or attempt internal alterations. If a malfunction should happen to occur, do not try to solve the problem on your own, but rather note the condition of the unit clearly and contact the supplier. The end plugs are required to seal the unit when returning it for maintenance or servicing. Store the plugs in a safe location for later use. xii

15 The sample fluid system of the unit must always be filled with sample fluid (during measurement, storage, and transport). If the sample fluid system dries up, particle detector problems (see page 5) can occur. When the unit is not installed in a clean room environment, purge gas must be used to prevent contamination. Before returning the unit for maintenance or servicing, thoroughly purge the piping with pure water. Then fill the piping with ethyl alcohol and install the end plugs. In addition, use the special packaging box so as to prevent the unit from being subjected to vibrations and shock. xiii

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17 Contents FOR SAFETY... iii Outline...1 Light Source Service Life...1 Particle Size Detection...1 Leak detection...2 Measurement System Configuration Examples...2 Controls and Features...4 Front Panel...4 Rear Panel...6 Preparations...7 Attaching the Particle Size Labels...7 Connection to Controller KE Connecting the Sampling Tubes...9 Removing the Sampling Tubes...10 Purge Gas...11 Before Supplying the Sample Fluid...12 Sample Fluid Flow Rate Adjustment...14 Turning the System On...15 Measurement...16 Measurement...16 Error Message...16 Maintenance...18 Steps After Use...18 When CELL indicator is lit in red...19 When LIQUID LEAK indicator is lit in red...19 When LASER indicator is lit in red or flashes in red...19 Cleaning the Piping...20 Periodic maintenance...21 Transport...21 Specifications...22 xv

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19 Outline The KS-40AF is a sensor which uses the light-scattering method for measuring the particle number concentration in liquid. The particle count is determined for various sizes. Sample fluid contacting parts are made of sapphire and PFA, allowing direct measurement of hydrofluoric acid. By connecting the KS-40AF to the controller KE-40, a liquid-borne particle counter system with five size ranges can be created. Particles are measured in five size ranges ( 0.1 µm, 0.15 µm, 0.2 µm, 0.3 µm, 0.5 µm), and the rated sample fluid flow is 10 ml per minute. The KS-40AF does not have measurement controls or a display for measurement results. It is designed to be used under control of a separate controller which also supplies power to the KS-40AF. As the KS-40AF does not incorporate a flow control circuit for the sample fluid, the flow rate of the sample fluid must be controlled by external means. Light Source Service Life The life expectancy of a laser diode such as used in the KS-40AF is shorter than that of other semiconductors. When the laser diode nears the end of its service life, the optical power falls below the rated level. There are considerable differences in service life between individual diodes. Some may fail already after several thousand operation hours. The KS-40AF detects when the laser diode no longer provides the required output. In such a case, the LASER indicator flashes in red, which indicates that the laser diode must be replaced. Particle Size Detection The unit is calibrated at the factory, using particles of known diameter and refractive index (monodisperse polystyrene latex spheres with a refractive index of 1.6) in pure water. As the amount of scattered light by such particles is used as reference to determine the particle size, the measured size corresponds to the light-scattering size of polystyrene latex particles. 1

20 PARTICLE MONITOR LIQUID LEAK CELL LASER POWER PARTICLE SENSOR A PARTICLE SENSOR POWER LASER CELL Outline Leak detection The unit incorporates a leak sensor. If a leak is detected, the LIQUID LEAK indicator lights up in red and the LIQUID LEAK ALARM terminals become OPEN. To ensure that the leak sensor operates properly, the unit must be placed on a horizontal surface (inclination within 2 degrees). For proper activation of the leak sensor, the leak sample fluid must be held at the bottom of the unit. PARTICLE SENSOR KS-40 F KS-40AF LIQUID LEAK PARTICLE MONITOR (inclination within 2 degrees) OK Incorrect Incorrect PARTICLE MONITOR LIQUID LEAK CELL LASER POWER KS-40AF Caution If a leak is detected, stop the sample fl uid supply to the unit. Remove any sample fl uid that has accumulated in the unit. Then contact your supplier. Measurement System Configuration Examples With the KS-40AF, measurement control and processing of measurement results are entirely performed by the connected controller KE-40 and a printer KP-06 or computer connected to the KE-40. Two basic measurement configurations are shown page 3. Configure your actual system according to the measurement requirements and types of sample fluid. 2

21 Outline Important The service life of the light source (laser diode) is limited. While no measurement is being carried out, the light source should be turned off as much as possible. After turning on the power, wait at least 10 minutes before starting the measurement. This allows the light source output to stabilize. When using a flow controller to control sample flow Sample fluid line Pressuring sampler or similar Particle sensor Flow controller KS-40AF INLET OUTLET INLET OUTLET CONTROLLER PFAtube(2 4dia.) Connection cable PFA tube (2 4 dia.) SENSOR Sample fluid waste bottle Controller KE-40 SERIAL Printer KP-06 or computer When using the syringe sampler KZ-30W1 to control sample flow PFA tube (2 4 dia.) Syringe sampler Particle sensor KZ-30W1 KS-40AF INLET OUTLET INLET OUTLET CONTROLLER Connection cable PFAtube(2 4dia.) Sample fluid bottle Sample fluid SENSOR Controller KE-40 SERIAL KZ-30W1 Sample fluid waste bottle Printer KP-06 or computer 3

22 Controls and Features Front Panel LIQUID LEAK indicator PARTICLE MONITOR indicator PARTICLE MONITOR LIQUID LEAK CELL LASER POWER PARTICLE SENSOR KS-40AF POWER indicator LASER indicator CELL indicator LIQUID LEAK indicator Lit (green): Unit operates normally. Lit (red): A leak has occurred within the unit. PARTICLE MONITOR indicator Briefly flashes green when particles above the minimum particle size are detected. POWER indicator Lit while power to the unit is on. 4

23 Controls and Features LASER indicator Lit (green): Light source (laser diode) operates normally. Lit (red): Light source temperature is out of range. Flashing (red): Light source output is below normal. Off: Light source is off. CELL indicator Lit (green): Lit (red): Off: Particle detector flow cell operates normally. Particle detector flow cell cannot carry out normal measurement due to contamination, condensation, or similar causes. The indicator also lights up in red when particle number concentration exceeds the measurement limit. Light source is off. 5

24 Controls and Features Rear Panel INLET connector PURGE inlet EXT SELECT switch OUTLET connector EXT connector PURGE WARNING Maximum allowable sample fluid pressure is 300 kpa at gage. Attach and remove tubes carefully and do not exert strong force on the INLET and OUTLET to prevent deformation and fluid leaks. EXT SELECT EXT INLET OUTLET CONTROLLER LIQUID LEAK ALARM CONTROLLER connector LIQUID LEAK ALARM terminals INLET connector Sample fluid inlet PURGE inlet Serves for routing purge gas through the unit (see page 11). OUTLET connector Sample fluid outlet EXT connector, EXT SELECT switch Test output terminal and output selector switch LIQUID LEAK ALARM terminals Serves to drive an external leak alarm. Normally the terminals are closed (short-circuited). When a leak is detected, the terminals become open. The M3 terminal block accepts either electric wire with a 1.25 mm 2 cross section or ring tongue terminals. Maximum load: 30 V DC, 1 A (AC not allowed) CONTROLLER connector Serves for connection of the controller KE-40. 6

25 Preparations Attaching the Particle Size Labels Use the supplied particle size labels to mark settings at the controller KE-40 and the printer KP-06. Attach the labels so that the figures match the CH1 to CH6 indication. Note For information on affixing the particle size labels, please refer to the documentation of the respective equipment. The particle size labels serve only as a reminder and have no influence on operation of the unit. Affixing the labels is not mandatory. The following four label types are supplied Attach to KP Not used Attach to KE Not used 7

26 Preparations Connection to Controller KE Set the POWER switch of the KE-40 to OFF. Important When other components are also used in the system, set the power switch of these components also to OFF. 2. Link the CONTROLLER connector on the KS-40AF with the SEN- SOR connector on the KE-40, using the supplied connection cable. KS-40AF rear panel CONTROLLER connector Controller KE-40 rear panel SENSOR connector Connection to controller 8

27 Preparations Connecting the Sampling Tubes 1. Remove the end plugs from the INLET and OUTLET connectors of the KS-40AF by turning the plugs counterclockwise. 2. Loosen the nut of the sampling tube by turning it counterclockwise, and remove the plug from the sampling tube. Important Store the end plugs and plugs together in a safe place. The end plugs will be needed when the unit is sent to the supplier for servicing and maintenance. The plugs will be needed again when removing the sampling tube for storage. Plug Nut Sampling tube 3. Slide the tip of the sampling tube onto the INLET connector and turn the nut clockwise to fasten the tube. Connect the OUTLET side in the same way. INLET/OUTLET End plug Sampling tube Nut 9

28 Preparations Removing the Sampling Tubes 1. Purge the unit with pure water to remove any sample fluid remnants. If the use of pure water poses the risk of sample fluid reaction and thermal build-up, hardening, or particle accumulation, use a different cleaning agent that is suitable for the sample fluid, and finally purge with clean water. 2. Turn the nut on the INLET connector counterclockwise and pull the sampling tube off. Disconnect the OUTLET side in the same way. INLET/OUTLET Sampling tube Nut End plug 3. Place the end plugs on the INLET and OUTLET connectors and secure the plugs by turning them clockwise (see above illustration). 4. Insert the plug of the sampling tube into the flared section at the tip of the sampling tube and turn the nut clockwise to secure it. Important The fl ared section will contract slightly over time. Always store the sampling tube with the plug in place. Plug Flared section Nut Sampling tube 10

29 Preparations Purge Gas In the cases listed below, the interior of the unit should be cleaned with purge gas supplied to the PURGE inlet, to prevent adverse effects on the optical system and electrical circuitry. - If the temperature of the sample fluid is lower than the ambient temperature, so that moisture condensation may occur in the particle detector. - If there is the possibility that corrosive gases in the vicinity may affect the unit. - If the supplied sample fluid has the possibility that corrosive gases may leak from internal PFA tubes. - To cool the interior of the unit. - In environments with high particle number concentration. Important When the unit is not used in a clean room environment, airborne contamination may adversely affect the measurement. To prevent this, cleaning with purge gas during installation is required. Purge gas requirements are as follows. - Dry clean air or nitrogen gas - Temperature 15 to 35 C - Flow rate 3 to 10 L / min The PURGE inlet is an RC 1/8 type (PT 1/8 female). 11

30 Preparations Before Supplying the Sample Fluid Since the KS-40AF does not have a flow rate adjustment facility, additional equipment is required to adjust the sample fluid flow. Refer to Measurement System Configuration Examples on page 2 and configure a system which can supply sample fluid at a rate of 10 ml per minute. WARNING Do not exceed the sample fl uid pressure rating of the unit. The flow cell and INLET and OUTLET of the KS-40AF are made of sapphire and PFA. Never use sample fluids which can cause corrosion of fluid-contacting parts. Otherwise leaks or seepage may occur. The fluid system of the KS-40AF is designed to withstand sample fluid with a pressure of up to 300 kpa (gauge pressure). If this range is exceeded, leaks or seepage may occur. WARNING Always perform a leak test before supplying sample fl uid. Fill the system with pure water and leave it exposed to a pressure of 300 kpa (gauge pressure) for a while to verify that there are no leaks. WARNING When using different types of sample fl uid, verify that there is no danger of a chemical reaction. 12

31 Preparations Before changing to a different type of sample fluid, always clean the entire sample fluid system first to remove any remnants. Otherwise unwanted effects such as thermal build-up, hardening, particle accumulation etc. can occur. Use the system only after verifying that the cleaning process was successful. Otherwise there is a danger of serious accidents due to chemical reactions. Some sample fluids may react with water, leading to emulsification or thermal build-up. 13

32 Preparations Sample Fluid Flow Rate Adjustment Since this unit does not have a flow rate adjustment facility, additional equipment is required to adjust the sample fluid flow. Adjust the flow to a rate of 10 ml per minute. Pressurized sample fluid The pressure in the sample fluid system moves the sample fluid through the particle sensor. Use a flow controller or similar to adjust the flow rate. For details, please refer to the documentation of the flow controller. Non-pressurized sample fluid When the sample fluid is taken from a sample fluid bottle or similar and there is no pressure, the syringe sampler KZ-30W1 or KZ-30W2 should be used to draw the sample fluid into the KS-40AF. For details regarding flow rate adjustment, please refer to the documentation of the syringe sampler. WARNING Do not exceed the sample fl uid pressure rating of the unit. 14

33 Preparations Turning the System On Important Before turning on the controller KE-40, be sure to fi ll the fl uid system of the sensor with sample fl uid. If the interior of the fl ow cell is dry, the laser beam may cause burn-in of contamination particles, leading to an increase in noise. The KS-40AF does not have a power switch. When power to the controller KE-40 is turned on, the KS-40AF also will be powered. Important After turning on the power, wait at least 10 minutes before starting the measurement. This allows the light source output to stabilize. After turning the system off, wait at least 1 minute before turning it on again. Otherwise the light source may be damaged. 15

34 Measurement Measurement The KS-40AF does not incorporate a flow rate adjustment facility, additional equipment is required to adjust the sample fluid flow. Refer to Measurement system configuration examples on page 2 and configure a system which can supply sample fluid at a rate of 10 ml per minute. The KS-40AF does not have measurement controls or a display for measurement results. It is designed to perform measurement under control of a controller connected to it. For details, please refer to the documentation of the controller. Error Message When there is a problem with the unit, the LIQUID LEAK indicator, CELL indicator, and LASER indicator are used to indicate the condition. The following explanation explains operation and error messages when the Controller KE-40 is connected. For information on countermeasures, please refer to the section Maintenance on page 18. Status of indicators on KS-40AF Status: KS-40AF status Operation: KS-40AF operation and countermeasures Output: KE-40 serial interface output Shows the *** part of the measurement error report message having the format E / ***<EOL>. When LIQUID LEAK indicator is lit in red Status: Leak has occurred inside cabinet Operation: If measurement is in progress, it is stopped immediately and measurement data are discarded. Output: LIQUID_LEAK 16

35 Measurement When CELL indicator is lit in red Status: Measurement may not have been carried out properly, due to excessive particle number concentration in sample fluid, sensor contamination, condensation, or other cause. Operation: Measurement is possible, but may not be correct. Result data should be used with care. Output: NOISE_HIGH When LASER indicator is lit in red Status: Temperature of light source (laser diode) is outside of rated temperature range. Operation: If measurement is in progress, it is stopped and data are discarded. Output: LASER_TEMP. When LASER indicator flashes in red Status: Output of light source (laser diode) has dropped below rated limit. Operation: If measurement is in progress, measurement operation continues, but data should be discarded. Output: LASER_FAIL When LASER indicator and CELL indicator are off Status: Light source (laser diode) is off. Operation: If measurement is in progress, it is stopped and data are discarded. Output: LASER_OFF _ represents a space. 17

36 Maintenance Steps After Use When removing the KS-40AF from the measurement system, observe the following points. 1. Clean the piping with pure water. For more information, please refer to the section Cleaning the Piping on page Set the POWER switch of the controller KE-40 to OFF and disconnect the KS-40AF from the KE Fill the piping with ethyl alcohol to prevent bacteria growth and other contamination. 4. Disconnect the INLET and OUTLET tubes and attach the end plugs. Important The sample fluid system of the unit must always be filled with sample fluid (during measurement, storage, and transport). If the sample fl uid system dries up, particle detector problems (see page 5) can occur. 18

37 Maintenance When CELL indicator is lit in red This indicates that sample fluid with particle number concentration exceeding specifications was passed through the system, or that contamination or condensation has occurred in the particle detector flow cell. Perform purging as described in the section Cleaning the Piping on page 20. If the CELL indicator stays lit in red also after purging of the piping, here may be a problem with the particle detector flow cell or particle detector assembly. Please contact your supplier. When LIQUID LEAK indicator is lit in red A leak has occurred in the cabinet, or there is a problem with the leak sensor. Stop the sample fluid flow to the unit and turn off the Controller KE-40. Then contact your supplier. When LASER indicator is lit in red or flashes in red If these occur frequently, there may be a problem with the light source (laser diode). Please contact your supplier. 19

38 Maintenance Cleaning the Piping Clean the piping of the unit as follows. 1. Pass an ample amount of pure water through the system to replace the sample fluid with pure water. If the use of pure water poses the risk of a chemical reaction, use a different cleaning agent that is suitable for the sample fluid, and then purge with clean water. 2. Clean the KS-40AF by purging with pure water. It is not necessary to control the flow rate at this time. WARNING Keep the pressure (pressurization and suction) during purging within the rated sample fl uid pressure range (300 kpa (gauge pressure) for purging). If the rated pressure is exceeded, there is a risk of accidents. A sample system configuration for circular purging is shown below. Apply this example to your own requirements. Required equipment: External pump or syringe sampler, filter (0.1 µm or less) KS-40AF Filter ( 0.1µm or finer) Always use a filter. External pump or syringe sampler Pure water or cleaning fluid 20

39 Maintenance 3. After sufficient purging, pass pure water through the system at the prescribed flow rate (10 ml / min). 4. Verify that the CELL indicator of the KS-40AF is now lit in green. If the CELL indicator is still lit in red, repeat the cleaning procedure from step 2, but use cleaning fluid instead of pure water. Note Use cleaning fluid that does not contain solid matter, such as optical cleaning fluid or cleaning alcohol. Important If the CELL indicator is still lit in red also after purging with cleaning fl uid, cleaning of the particle detector fl ow cell is required. Please contact your supplier. Periodic maintenance In order to maintain continued measurement precision, it is recommended to have the unit checked and serviced once per year. Contact the supplier regarding periodic maintenance. Transport Before returning the unit for maintenance or servicing, purge the sample Important fluid system thoroughly with pure Before returning the unit for maintenance or servicing, purge the sample fluid system water to remove any sample fluid thoroughly with pure water to remove any remnants. sample fluid remnants. Then fill the piping with alcohol (or Then fill the piping with alcohol (isopropyl ethyl alcohol) and seal it with the end alcohol, ethyl alcohol or methyl alcohol). plugs. Wipe the outside of the unit clean so that there are no remnants of chemical substances on the unit. The label is affixed on the rear of the unit. 21

40 Specifications Optical system 90 sideway light-scattering method Light source Laser diode (rated output 200 mw; wave length 830 nm) Laser product classification Class 1, IEC (2001) Internal particle detection mechanism uses Class 3B laser Light detector PIN type photodiodes Materials of component parts exposed to sample fluid Sapphire, PFA Allowable sample fluid types Fluids which do not corrode the fluid contact materials Calibration Polystyrene latex (PSL) spheres* with refractive index 1.6 in pure water *The PSL spheres are calibrated according to the TEM (transmission electron microscopy) by the supplier, JSR Corporation. Minimum particle size 0.1 µm Measurable particle size 0.1 to 2 µm (with PSL particles of refractive index 1.6 in pure water) Measurement size range Five channels ( 0.1 µm, 0.15 µm, 0.2 µm, 0.3 µm, 0.5 µm) Count efficiency 60 ±15% (measuring PSL particles in the range of 0.3 µm, using count of 0.2 µm and above for comparison with reference unit) Sample flow rate 10 ml / min Maximum particle number concentration 1200 particles / ml (coincidence loss 5% for 0.1 µm particles) 22

41 Specifications Sample fluid temperature range +15 to +35 C (no moisture condensation on flow cell) Allowable sample fluid pressure 300 kpa or less (gauge pressure) Warm-up time 10 minutes Sample fluid connectors INLET Sample fluid inlet, 2 4 dia. flared tube joint OUTLET Sample fluid outlet, 2 4 dia. flared tube joint PURGE Purge gas inlet, Rc 1 / 8 (1 / 8 PT female) Indicators PARTICLE MONITOR Briefly flashes green when particles above minimum particle size are detected. LIQUID LEAK Lit (green) during normal operation Lit (red) when leak was detected CELL Lit (green) during normal operation Lit (red) when contamination was detected or maximum particle number concentration exceeded Off when light source is off LASER Lit (green) during normal operation Lit (red) when light source temperature is out of range Flashing (red) when light source output is below normal Off when light source is off POWER Lit while power to unit is on Input/output connectors CONTROLLER For connection of controller KE-40 LIQUID LEAK ALARM Shorted during normal operation, open when internal leak was detected (M3 terminal, fit in with 1.25 mm 2 electric wire) Maximum load: 30 V DC, 1 A EXT Test output Power requirements Supplied via Controller KE-40 23

42 Specifications in the following graph (no con- Installation inclination angle Max. 2 Ambient conditions for operation Shaded section densation) Temperature ( C) Relative humidity (%) Ambient conditions for storage -10 to +50 C, less than 90% RH (no condensation and no freezing in internal piping) Dimensions 139 (H) 245 (W) 179 (D) mm (maximum) 125 (H) 240 (W) 151 (D) mm (excluding joints and other protruding parts) Weight Approx. 4 kg Supplied Accessories Tube A vacuum pack 1 (2 4 dia., 1.5 m flared PFA tube 2, union joint 1) Particle size labels 1 Instruction manual 1 Instruction sheet for Transport and Installation 1 Liquid-borne particle counter usage precautions 1 Inspection certificate 1 24

43 Specifications Rear view Left-side view Top view Front view Right side view Dimensional Drawings Unit: mm 25

44 No