AMAT Centura PVD System Config

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Charles Hodge
5 years ago
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1 System with 2 Al PVD Chambers Vintage: mid 1990 s Originally built by AMAT USA Refurbished in 2011 Set up for 200mm substrates De-installed and crated in USA Complete working system Re-install services available Tool Configuration Information OEM = Applied Materials (AMAT) Platform = Centura 5200 Qty 2 narrow body load-locks Chamber A and C are PVD chambers o Standard body o Aluminum deposition o 4 finger heater o With back side gas Chamber D is an mark II etch (set up as pre-clean) Chamber F is an orienter/degas chamber Support Equipment Included o Neslab HX-750 chiller o Ebara cold traps (3) o Ebara cryo compressor o Ebara dry vacuum pumps o Ebara turbo pumps and controllers (6) o Integrated smaller foot print AC controller and gen rack (single unit) o All required umbilical s Notes The system was originally built by AMAT so it is a common mainframe and standard chambers. It does have a few modifications: o It has an older mark II etch chamber acting at the Pre-clean chamber (more custom as amat uses the PC or PCII chamber). This can be easily removed and a PC chamber added if need be. o This system has a standard orienter degas chamber (currently the customer didn t use so not configured in the software, but physically it is there, just need to turn on in the software). o The customer ran a special substrate so the robot blade was modified note, on the blade, so very easy to get this back to standard AMAT configuration can replace the blade if need be. Page 1

2 o Chambers have a cold trap (aka water pump) and turbo pumps. This was a standard configuration option from AMAT allows more process gas to be used and longer times between regens, actually the water pump regens very quickly. AMAT serial is 2506 estimated vintage is mid 90 s platform type is centura I with rev II facilities (so typical centura I mainframe for PVD 5200 and facilities points of connections are along the rear) NOTE: This tool was originally running in a Toshiba Japan fab and the tool vacuum system was designed to reduce maintenance/pump re-generation time and also to provide faster pump downs and elimination of moisture (water) from the entire system. The critical chambers use a combination of Ebara cold traps (similar to cryo-pump but much reduced down time) and turbo pumps. Cold traps are similar to cryo-pumps: they use a cryo-compressor to chill and trap moisture (water vapor) on the walls of the trap. They do not use a charcoal element so they do not accumulate vapors that then require re-generation. In fact these cold traps almost never require re-generation effort, hence reduce down time and increase production time. These traps operate at a slightly higher temperature than cryo-pumps. They can handle much larger gas volumes compared to cryo-pumps. They also are a must if the customer wants to run O2 gas in the process. This tool also has a combination of cold trap-turbo pump on the transfer module. The load locks have turbo pumps (one for each). Vacuum design details here: This system has 6 turbo pumps and 3 cold traps total: -loadlock A; turbo pump only -loadlock B; turbo pump only -transfer chamber; turbo pump and cold trap -PVD chamber A; turbo pump and cold trap -PVD chamber C; turbo pump and cold trap -Etch chamber D; turbo pump only Page 2

3 Photos Note Ebara cold trap-turbo pump locations Page 3

4 Note turbo pump mounted on load-lock, one per load-lock Page 4

5 The following photos are when the refurbishment was taking place in 2011; Note: this was before the addition of the etch chamber in position D. Page 5

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OLED vacuum deposition cluster system Sunicel Plus 400 / Plus 400L (Sunic Systems)

OLED vacuum deposition cluster system Sunicel Plus 400 / Plus 400L (Sunic Systems) Gen2 substrate size : 370 (+/- 0.2) mm x 470 (+/- 0.2) mm. Thickness : 0.55 to 2.0mm. Supports the following deposition