Description Advanced Features Typical Applications

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Series single stage, brass barstock line regulator Description Advanced Features Typical Applications The Series regulators are intended for secondary pressure control of noncorrosive, high purity or

1 Series single stage, brass barstock line regulator Description Advanced Features Typical Applications The Series regulators are intended for secondary pressure control of noncorrosive, high purity or liquefied gases or as point of use pressure control in high purity gas distribution systems. Chrome-plated brass barstock body Smooth surface finish Rear panel mountable Easy installation Pressure ranges 0-1 to 0-0 PSIG Broad range of applications 00 PSIG inlet pressure rating Safe use with high pressure cylinders Bulk gas distribution systems Gas and liquid chromatography High purity carrier gases Zero, span, and calibration gases High purity chamber pressurization Liquefied hydrocarbon gas control Control of cryogenic gases 0 Series Advantage Materials Specifications Capsule seat Increased serviceability and life 316L stainless steel diaphragm No inboard diffusion Low wetted surface area Minimal purge requirements Field-adjustable pressure limit Safeguard downstream equipment Convoluted diaphragm Smooth pressure changes Compact design Easily transported and integrated Chrome-plated brass barstock Chrome-plated die cast zinc Seat Filter micron sintered bronze 316L stainless steel Internal Seals Maximum Pressure 00 PSIG (2 BAR) Temperature Range -0 F to F (-0 C to 60 C) s 2 diameter chrome-plated Ports ¼ FPT Helium Leak Integrity 1 x -9 scc/sec Cv 0.1 (Max outlet PSIG or below) 0.2 (Max outlet about PSIG) Weight (-21-TF) 1.7 lbs. (0.78 kg).28

2 Flow Performance 0 0 Series Single Stage Regulator 0 0 Series Single Stage Regulator (3.) 90 (6.2) 80 (.) (31) 00 (27.6) 00 PSIG (138 BAR) 70 (.8) 3 (2.1) 60 (.1) 0 PSIG (13.8 BAR) 0 (.7) OUTLET PRESSURE - PSIG (BAR (3.) 0 (2.8) (2.0) OUTLET PRESSURE - PSIG (BAR 2 (17.2) 0 (13.8) 1 (.3) (1.) 0 PSIG (13.8 BAR) 0 (0.7) (3.) 0 PSIG (13.8 BAR) (12) 1 (2) (66) (12) 1 (2) (66) 2 (708) (8) 3 (991) 0 (1133) Ordering Information and Configuration Options A B C D - Options Series Pressure 1: 0-1 2: 0-3: 0-0 : 0-2 : 0-0 7: PSIG -0-0 PSIG -0-0 PSIG 0-00 PSIG 0-00 PSIG -0-0 PSIG 0: None Assemblies 0: ¼ FPT Port 1: ¼ MPT 2: ¼ Tube Fitting 3: Valve ¼ Tube Fitting : Valve ¼ MPT : Needle Valve ¼ MPT 6: ⅛ Tube Fitting 7: ⅜ Tube Fitting 8: Valve ⅛ Tube Fitting 9: Valve ¼ FPT A: ⅜ BSP Right Hand Fitting M: 6mm Tube Fitting S: Valve 6mm Tube Fitting Assembly/ s 0: Bare 1: Standard Assembly (PSIG/kPa s) 2: Standard Assembly (BAR/PSIG s) Connections 000: ¼ FPT TF2: ⅛ Tube TF: ¼ Tube TF6: ⅜ Tube M06: 6mm Tube Installed Options None.29

Series single stage, stainless steel barstock line regulator Description Advanced Features Typical Applications The Series regulators are intended for secondary pressure control of ultra high purity

3 Series single stage, stainless steel barstock line regulator Description Advanced Features Typical Applications The Series regulators are intended for secondary pressure control of ultra high purity and corrosive gases or as point-of- use pressure control in high purity gas distribution systems. Stainless steel barstock body Smooth surface finish Front and rear panel mountable Versatile system configuration Pressure ranges 0-1 to 0-0 PSIG Broad range of applications 00 PSIG inlet pressure rating Safe use with high pressure cylinders Bulk gas distribution systems Gas and liquid chromatography High purity carrier gases Zero, span and calibration gases High purity chamber pressurization Liquefied hydrocarbon gas control Control of cryogenic gases Corrosive service 00 Series Advantage Materials Specifications Metal-to-metal diaphragm seal No possibility of gas contamination Capsule seat Increased serviceability and life 316L stainless steel diaphragm No inboard diffusion Orientable captured vent capable Safety in any installation Low wetted surface area Minimal purge requirements Field-adjustable pressure limit Safeguard downstream equipment Pipe away relief valve Safely vent exhaust gases Delivery pressure range easily changed Maximum flexibility 316L stainless steel barstock Chrome-plated brass barstock Seat Filter micron stainless steel multi-layer mesh 316L stainless steel Internal Seals Maximum Pressure 00 PSIG (2 BAR) Temperature Range -0 F to F (-0 C to 60 C) 2 diameter stainless steel Ports ¼ FPT Helium Leak Integrity 1 x -9 scc/sec Cv 0.1 (Max outlet PSIG or below) 0.2 (Max outlet above PSIG) Weight (-21-TF) 2.7 lbs. (1.17 kg).

4 Flow Performance 0 0 (3.) 90 (6.2) 80 (.) (31) 00 (27.6) 00 PSIG (138 BAR) OUTLET PRESSURE - PSIG (BAR) 70 (.8) 60 (.1) (3.) 0 (2.8) (2.0) 0 PSIG (13.8 BAR) OUTLET PRESSURE - PSIG (BAR) 3 (2.1) 0 (.7) 2 (17.2) 0 (13.8) 1 (.3) (1.) 0 PSIG (13.8 BAR) 0 (0.7) 0 PSIG (13.8 BAR) (12) 1 (2) (66) (3.) (12) 1 (2) (66) 2 (708) (8) 3 (991) 0 (1133) Ordering Information and Configuration Options A B C D - Options Series Pressure 1: 0-1 2: 0-3: 0-0 : 0-2 : 0-0 7: PSIG 0: None -0-0 PSIG -0-0 PSIG 0-00 PSIG 0-00 PSIG -0-0 PSIG Assemblies 0: ¼ FPT Port 1: ¼ MPT 2: ¼ Tube Fitting 3: Valve ¼ Tube Fitting : Valve ¼ MPT : Needle Valve ¼ MPT 6: ⅛ Tube Fitting 7: ⅜ Tube Fitting 8: Valve ⅛ Tube Fitting 9: Valve ¼ FPT M: 6mm Tube Fitting S: Valve 6mm Tube Fitting Assembly/ s 0: Bare 1: Standard Assembly (PSIG/kPa ) Connections 000: ¼ FPT TF2: ⅛ Tube TF: ¼ Tube 2: Standard Assembly TF6: ⅜ Tube (BAR/PSIG ) M06: 6mm Tube : Cleanroom Assembly (PSIG/kPa ) : Cleanroom Assembly (BAR/PSIG ) Installed Options S: Stainless Steel Related Options Panel Mount Kit (-0002) Captured Vent Kit (-0001) Helium Leak Certification ( ) Passivation for Fluorine Service.31

5 83 Series high flow, single stage, brass barstock line regulator Description Advanced Features Typical Applications The 83 Series regulator applications are wide and varied including high flow purging, semiconductor manufacturing, manifold and line regulation. Ultra High Flow Bulk gas distribution systems Gas and liquid chromatography High purity carrier gases Zero, span, and calibration gases High purity chamber pressurization Liquefied hydrocarbon gas control Brass barstock body Smooth surface finish Rear panel mountable Versatile system configuration Pressure ranges 0-1 to 0-2 PSIG Broad range of applications 00 PSIG inlet pressure rating Safe use with high pressure cylinders 00 Series Advantage Materials Specifications Metal-to-metal diaphragm seal No possibility of gas contamination Capsule seat Increased serviceability and life 316L stainless steel diaphragm No inboard diffusion Orientable captured vent capable Safety in any installation Low wetted surface area Minimal purge requirements Field-adjustable pressure limit Safeguard downstream equipment Pipe away relief valve Safely vent exhaust gases Delivery pressure range easily changed Maximum flexibility Brass barstock Chrome-plated die cast zinc Seat PCTFE Filter 0 micron 316L stainless steel 316L stainless steel Internal Seals Maximum Pressure 00 PSIG (2 BAR) Temperature Range -0 F to F (-0 C to 60 C) 2 diameter brass Ports ½ FPT (inlet/outlet) ¼ FPT (gauge/relief valve) Helium Leak Integrity 1 x -8 scc/sec Cv 1.0 Weight (83-01-TF8).79 lbs. (2.17 kg).32

6 Flow Performance 2 (17.2) 83 Series High Flow Regulator 22 (1.) 0 (13.8) 00 PSIG () 00 PSIG () 0 PSIG () 0 PSIG () 17 (12.1) 0 PSIG () OUTLET PRESSURE PSIG (BAR) 1 (11.7) 12 (8.6) 0 7 (.2) (3.) 00 PSIG () 0 PSIG () 0 PSIG () 00 PSIG () 0 PSIG () 2 (1.7) 0 PSIG () 0 PSIG () 00 (28.3) 00 (6.7) 00 (8.9) 000 (113.3) 00 (11.6) 6000 (170) 7000 (198.3) 8000 (226.6) FLOW RATE - SCFH (NM 3 /H) N2 Ordering Information and Configuration Options 83 A B C D - Options Series 83 Pressure 1: 0-1 2: 0-0 3: 0-1 : 0-0 : PSIG 0-60 PSIG 0-0 PSIG 0-00 PSIG 0-00 PSIG 0: None Assemblies 0: ½ FPT Port 1: ½ Tube Fitting P: 12mm Tube Fitting Assembly/ s 0: Bare 1: Standard Assembly (PSIG/kPa s) 2: Standard Assembly (BAR/PSIG s) 6: Mirror Image Assembly (PSIG/kPa s) 7: Mirror Image Assembly (BAR/PSIG s) Connections 000: ½ FPT TF8: ½ Tube M12: 12mm Tube Installed Options None Related Options None.33

8 Series high flow, single stage, stainless steel barstock line regulator Description Advanced Features Typical Applications The 8 Series regulator applications are wide and varied including high

7 8 Series high flow, single stage, stainless steel barstock line regulator Description Advanced Features Typical Applications The 8 Series regulator applications are wide and varied including high flow purging, semiconductor manufacturing, manifold and line regulation. Ultra High Flow Bulk gas distribution systems Gas and liquid chromatography High purity carrier gases Zero, span, and calibration gases High purity chamber pressurization Liquefied hydrocarbon gas control 316L stainless steel barstock body Smooth surface finish Rear panel mountable Versatile system configuration Pressure ranges 0-1 to 0-2 PSIG Broad range of applications 00 PSIG inlet pressure rating Safe use with high pressure cylinders 00 Series Advantage Materials Specifications Metal-to-metal diaphragm seal No possibility of gas contamination Capsule seat Increased serviceability and life 316L stainless steel diaphragm No inboard diffusion Orientable captured vent capable Safety in any installation Low wetted surface area Minimal purge requirements Field-adjustable pressure limit Safeguard downstream equipment Pipe away relief valve Safely vent exhaust gases Delivery pressure range easily changed Maximum flexibility 316L stainless steel barstock Chrome-plated die cast zinc Seat PCTFE Filter 0 micron 316L stainless steel 316L stainless steel Internal Seals Maximum Pressure 00 PSIG (2 BAR) Temperature Range -0 F to F (-0 C to 60 C) 2 diameter stainless steel Ports ½ FPT (inlet/outlet) ¼ FPT (gauge/relief valve) Helium Leak Integrity 1 x -8 scc/sec Cv 1.0 Weight (8-11-TF8).2 lbs. (2.0 kg).3

8 Flow Performance 2 (17.2) 8 Series High Flow Regulator 22 (1.) 0 (13.8) 00 PSIG () 00 PSIG () 0 PSIG () 0 PSIG () 17 (12.1) 0 PSIG () OUTLET PRESSURE PSIG (BAR) 1 (11.7) 12 (8.6) 0 7 (.2) (3.) 00 PSIG () 0 PSIG () 0 PSIG () 00 PSIG () 0 PSIG () 2 (1.7) 0 PSIG () 0 PSIG () 00 (28.3) 00 (6.7) 00 (8.9) (113.3) (11.6) FLOW RATE - SCFH (NM 3 /H) N (170) 7000 (198.3) 8000 (226.6) Ordering Information and Configuration Options 8 A B C D - Options Series 8 Pressure 1: 0-1 2: 0-0 3: 0-1 : 0-0 : PSIG 0-60 PSIG 0-0 PSIG 0-00 PSIG 0-00 PSIG 0: None Assemblies 0: ½ FPT Port 1: ½ Tube Fitting P: 12mm Tube Fitting Assembly/ s 0: Bare 1: Standard Assembly (PSIG/kPa s) 2: Standard Assembly (BAR/PSIG s) Connections 000: ½ FPT TF8: ½ Tube M12: 12mm Tube Installed Options None Related Options None.3

28 Series single stage, stainless steel barstock line regulator Description Advanced Features Typical Applications The 28 Series regulators are intended for secondary pressure control of the highest

9 28 Series single stage, stainless steel barstock line regulator Description Advanced Features Typical Applications The 28 Series regulators are intended for secondary pressure control of the highest purity gases or as point of use pressure control in high purity gas distribution systems. Butt-welded VCR connections Highest leak integrity available 316L stainless steel barstock body Increased corrosion resistance Front and rear panel mountable Versatile system configuration 00 PSIG inlet pressure rating Safe use with high pressure cylinders Semiconductor process gases Gas and liquid chromatography Ultra-high purity carrier gases Zero, span and calibration gases Liquefied hydrocarbon gas control Control of cryogenic gases 00 Series Advantage Materials Specifications Metal-to-metal diaphragm seal No possibility of gas contamination Capsule seat Increased serviceability and life 316L stainless steel diaphragm No inboard diffusion Orientable captured vent capable Safety in any installation Low wetted surface area Minimal purge requirements Field-adjustable pressure limit Safeguard downstream equipment Pipe away relief valve Safely vent exhaust gases Delivery pressure range easily changed Maximum flexibility 316L stainless steel barstock Chrome-plated brass barstock Seat Filter micron stainless steel multi-layer mesh 316L stainless steel Internal Seals Maximum Pressure 00 PSIG (2 BAR) Temperature Range -0 F to F (-0 C to 60 C) 2" diameter stainless steel Ports ¼ VCR Helium Leak Integrity 1 x -9 scc/sec Cv 0.1 Weight (28-12) 2.6 lbs. (1.12 kg).2

10 Flow Performance 0 0 (3.) 90 (6.2) 80 (.) (31) 00 (27.6) 00 PSIG (138 BAR) OUTLET PRESSURE - PSIG (BAR) 70 (.8) 60 (.1) (3.) 0 (2.8) (2.0) 0 PSIG (13.8 BAR) OUTLET PRESSURE - PSIG (BAR) 3 (2.1) 0 (.7) 2 (17.2) 0 (13.8) 1 (.3) (1.) 0 PSIG (13.8 BAR) 0 (0.7) 0 PSIG (13.8 BAR) (12) 1 (2) (66) (3.) (12) 1 (2) (66) 2 (708) (8) 3 (991) 0 (1133) Ordering Information and Configuration Options 28 A B C Series 28 Pressure 1: 0-1 2: 0-3: 0- : 0-0 : 0-2 6: 0-0 7: 0-1 0: None 1: "-0- PSIG 2: "-0-60 PSIG 3: "-0-0 PSIG : "-0-0 PSIG : 0-00 PSIG 6: 0-00 PSIG 0: None D Connections 1: FVCR in/mvcr out 2: MVCR in/mvcr out 3: MVCR in/fvcr out : FVCR in/fvcr out Related Options Option Order No. Description Panel Mount Kit Captured Vent Kit Helium Leak Certification Special Treatment 0.01 micron filter To mount the regulator using bonnet threads. Material: Nickel-plated brass 360 orientation for easy piping of vented gases to a safe location in the event of diaphragm failure. Material: Nickel-plated brass Inboard Helium leak certification to less than 1 x -8 scc/sec Regulator preconditioned in actual gas usage (required for some fluoridated compounds) Attached at outlet for low particle count gases (with ¼ VCR connections only).3

29 Series corrosion resistant, single stage, stainless steel barstock line regulator Description Advanced Features Typical Applications The 29 Series regulators are intended for primary pressure

11 29 Series corrosion resistant, single stage, stainless steel barstock line regulator Description Advanced Features Typical Applications The 29 Series regulators are intended for primary pressure control of the highest purity gases or for applications where minor fluctuations in outlet pressure due to diminishing inlet supply pressure can be tolerated. Semiconductor process gases Gas and liquid chromatography Ultra-high purity carrier gases Zero, span and calibration gases Liquefied hydrocarbon gas control Control of cryogenic gases Butt-welded VCR connections Highest leak integrity available 316L stainless steel barstock body Increased corrosion resistance Front and rear panel mountable Versatile system configuration 00 PSIG inlet pressure rating Safe use with high pressure cylinders 00 Series Advantage Materials Specifications Metal-to-metal diaphragm seal No possibility of gas contamination Capsule seat Increased serviceability and life 316L stainless steel diaphragm No inboard diffusion Orientable captured vent capable Safety in any installation Low wetted surface area Minimal purge requirements Field-adjustable pressure limit Safeguard downstream equipment Pipe away relief valve Safely vent exhaust gases Delivery pressure range easily changed Maximum flexibility 316L stainless steel barstock Chrome-plated brass barstock Seat Filter micron stainless steel multi-layer mesh 316L stainless steel Internal Seals Maximum Pressure 00 PSIG (2 BAR) Temperature Range -0 F to F (-0 C to 60 C) s 2" diameter stainless steel Ports ¼ VCR Helium Leak Integrity 1 x -9 scc/sec Cv 0.1 Weight ( ) 2.73 lbs. (1.2 kg).

12 Flow Performance 0 0 (3.) 90 (6.2) 80 (.) (31) 00 (27.6) 00 PSIG (138 BAR) OUTLET PRESSURE - PSIG (BAR) 70 (.8) 60 (.1) (3.) 0 (2.8) (2.0) 0 PSIG (13.8 BAR) OUTLET PRESSURE - PSIG (BAR) 3 (2.1) 0 (.7) 2 (17.2) 0 (13.8) 1 (.3) (1.) 0 PSIG (13.8 BAR) 0 (0.7) 0 PSIG (13.8 BAR) (12) 1 (2) (66) (3.) (12) 1 (2) (66) 2 (708) (8) 3 (991) 0 (1133) Ordering Information and Configuration Options 29 A B C Series 29 Pressure 1: 0-1 2: 0-3: 0- : 0-0 : 0-2 6: 0-0 7: 0-1 0: None 1: "-0- PSIG 2: "-0-60 PSIG 3: "-0-0 PSIG : "-0-0 PSIG : 0-00 PSIG 6: 0-00 PSIG 0: None 1: PSIG 2: 0-00 PSIG 3: 0-00 PSIG : 0-00 PSIG : "-0-0 PSIG 6: "-0-0 PSIG 7: "-0-60 PSIG 8: "-0- PSIG D Connections 1: FVCR in/mvcr out 2: MVCR in/mvcr out 3: MVCR in/fvcr out : FVCR in/fvcr out Related Options Option Order No. Description Panel Mount Kit Captured Vent Kit Helium Leak Certification Special Treatment 0.01 micron filter To mount the regulator using bonnet threads. Material: Nickel-plated brass 360 orientation for easy piping of vented gases to a safe location in the event of diaphragm failure. Material: Nickel-plated brass Inboard Helium leak certification to less than 1 x -8 scc/sec Regulator preconditioned in actual gas usage (required for some fluoridated compounds) Attached at outlet for low particle count gases (with ¼ VCR connections only).

demand flow regulator Series 39 Description This new single stage design using balanced valve stem technology is more sensitive than older two stage technologies providing g better performance even

13 demand flow regulator Series 39 Description This new single stage design using balanced valve stem technology is more sensitive than older two stage technologies providing g better performance even with high inlet pressures. This regulator is designed for use with instruments that use a pump to draw the calibration gas into the instrument. The 39 series demand flow regulator provides the exact amount of calibration gas the instrument pump requires. This simple to use regulator makes calibration quick and easy by eliminating the need for sample bags, flowmeters, or special operator training. Features Precise delivery of calibration gas required by instrument pump. New single stage balanced valve stem technology. Simple easy to use operation. Various cylinder connections available: C-, CGA 600, other CGAs. 0 micron inlet filter. Materials Specifications clear anodized aluminum clear anodized aluminum Buna-N hose barb for 3/16 ID hose clear anodized aluminum Main valve seat Viton and Teflon Pressure gauge stainless steel case with brass socket clear anodized aluminum Viton Main valve seat Viton and Teflon Pressure gauge stainless steel case with stainless steel socket Flow of H2O vacuum pressure gauge 0-00 psig with GCA connection 0-10 psig with C conntection Ordering Information Model 391-C CGA 392-C 392-CGA Description Demand Flow Regulator with C- inlet connection Demand Flow Regulator with CGA 600 inlet connection Demand Flow Regulator with selected CGA connection Demand Flow Regulator with C- inlet connection Demand Flow Regulator with selected CGA connection.61

Series 3980 adjustable fixed flow regulator Description The 3980 series provides the control of the single fixed flow regulators with the advantage of being able to change flow rates as required for

14 Series 3980 adjustable fixed flow regulator Description The 3980 series provides the control of the single fixed flow regulators with the advantage of being able to change flow rates as required for different applications. This regulator eliminates the need to have multiple regulators on-site. Commonly called the click regulator it has 12 flow positions, OFF, 0.3, 0., 1.0, 1., 2.0, 2., 3.0,.0, 6.0, 7.0, and 8.0 slpm. There are models suitable for use with noncorrosive gases and mildly corrosive gases. 12 fixed flow settings. Features 0-00 psig cylinder pressure gauge. Max. inlet pressure 00 psig. Available with standard C- (/8-18 UNF) or a standard CGA cylinder connection. 3/16 hose barb outlet. 0 micron inlet filter. Materials clear anodized aluminum Main valve seat Teflon clear anodized aluminum Main valve seat Teflon Piston brass Piston Seals Viton Piston stainless steel Piston Seals Viton Orifice Plate ceramic Pressure gauges SS case with brass socket Orifice Plate ceramic Pressure gauges stainless steel Ordering Information Model Description 3981 non-corrosive gas regulator with C- connection 3981-CGA* non-corrosive gas regulator with standard CGA connection 3982 corrosive gas regulator with C- connection 3982-CGA* corrosive gas regulator with standard CGA connection *Specify CGA connection when ordering..62

SPECIFICATIONS. Approximate Weight: 10 oz. Surface Finish: Ra micro inch or less MATERIALS OF CONSTRUCTION

SPECIFICATIONS. Approximate Weight: 10 oz. Surface Finish: Ra micro inch or less MATERIALS OF CONSTRUCTION DIFFUSION-RESISTANT, DIAPHRAGM SEAL, EXCESS FLOW SHUT-OFF VALVES (FS SERIES) FS Series Excess Flow Shut-Off Valves are designed to automatically shut-off the delivery of gas in a line if the flow exceeds