M9N. Nil. s n. Type of auto switch. Refer to the table below for auto switch part numbers.

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eries XP/XP ir slide table ø, ø1, ø12, ø1 ow to Order lean series 11 acuum suction type 11 XP 12 1 9N 22 XP 12 1 9N opper, fluorine and silicon-free + low particle generation 22 acuum suction type ore size - troke mm ø ø1 ø12 ø1, 1 1, 2 1, 2 2, Nil ow to Order XP lean series 11 acuum suction type djuster option Rubber stopper etal stopper ithout adjuster djuster for series XP is available for one side only. ithout adjuster type is unavailable for series XP. uto switch Nil ith magnet and rail N ithout magnet and rail uto switch cannot be mounted on types without magnet and rail (N). Number of auto switches Nil s n Type of auto switch Nil 2 pcs. 1 pc. n pcs. ithout auto switch Refer to the table below for auto switch part numbers. XP 11 XP 1 22 XP 1 XP opper, fluorine and silicon-free + low particle generation 22 acuum suction type ith auto switch type is unavailable for XP. troke 1 mm 1mm uto switch specifications (Refer to est Pneumatics catalog for detailed specifications and auto switches not in the following table.) tyle Reed switch olid state switch pecial function Electrical entry rommet rommet ead wire symbol.m Nil (Example) 9 m 9 Refer to applicable auto switch list Page 12. Indicator light Yes Yes iring (Output) 2-wire -wire (NPN) 2-wire 2 2 oad voltage 12 12 12 1 uto switch model Electrical entry direction orizontal 9 9N 9 ead wire length (m). (Nil) () pplicable load Relay, P Relay, P P: Programmable ogic ontroller 9

ir slide table XP/XP pecifications ore size size luid ction Operating pressure /XP /XP /XP1 /XP12 /XP1 x. 1 ir ouble acting.1 to. Pa 12 x. 1 uction flow rate of vacuum type (Reference values) ize 1 12 1 uction flow rate l/min (NR) 1 ir cylinder Proof pressure mbient and fluid temperature Piston speed ushion Rubber bumper 1. Pa 1 to to 2 mm/s Rubber bumper (Rubber stopper) Rubber bumper (ithout adjuster) No (etal stopper) Rotary actuator ubrication troke adjuster troke adjustment range troke length tolerance rease Particle generation grade (Refer to front matter pages 1 to 22 for details.) Rubber stopper etal stopper ithout adjuster Rubber stopper etal stopper rade 1 rade 2 rade Non-lube tandard (XP : djustable on one side only) to mm on one side only to mm at both ends to mm on to mm one side only at both ends to mm at both ends +1 mm : luorine grease : ithium soap base grease rade 1 rade 2 rade ir gripper irectional control valve uto switches / Proper mounting position for stroke end detection / XP low control Reed switch -9 troke uto switch 1 operating range.. /XP 1. 1. olid state switch -9, -9N troke uto switch 1 operating range 2.. 2. 1. /XP 1. 1. 1. 19. ilter, Pressure control ittings & Tubing /XP1, 12, 1 Electrical entry from outside Electrical entry from inside Parallel electrical entry ir preparation Reed switch -9 /XP1 /XP12 /XP1 1 1 troke 1 2 2. 2. 1 1 2.. 9 9 uto switch operating range olid state switch -9, -9N /XP1 /XP12 /XP1 1 1 19 troke 1 2 1 29. 2. 2.. uto switch operating range Pressure switch lean gas filter 99

ir slide table imensions / XP/XP XP +. +. ounting base side +. /XP- epth 2.. - x. depth 1. ø (fitting seat surface dimension).2 ection. 1 1 1 1. 2 2. 2- x. E Prepared hole diameter. troke: 1 ø2. acuum suction port x. 2- x. epth 2. 1. 1. 2- x. (Plug: -P). 2. epth 2. 2. ø2. +. epth 2 /XP-1 - x. depth /XP-1 /XP-1 E 2 2 2 2 2 11 1 9 1

ir slide table imensions: XP/XP XP / XP- ir cylinder 9. 2. 11.2 depth 2. +. 2.. 1 - x. depth ±. 1 Rotary actuator 2- x. Prepared hole diameter. troke: E Y 2 +. ounting base side +. +. 2. 1 1 1 2 acuum suction port x. depth 2 2.. ø2. depth 2. x. 2- x. ax. 9. (Rubber stopper) idth across flats 1 ±. 1. 2- x. (Plug: -P) ir gripper irectional control valve low control 2. ø2. depth 2 ilter, Pressure control ithout magnet and switch rail ittings & Tubing 2-2 x. depth 2.2 12 etal stopper /XP-1 ir preparation ax. 1. Pressure switch 2-2 x. depth 12 - x. depth /XP-1 /XP-1 E 2 2 2.. 2 11 1 2 Y 22 2. 2 9. lean gas filter 11

ir slide table XP/XP imensions: XP1 2- x. depth etal stopper ax.. 2 ax.. N ithout stroke adjuster idth across flats 1. 1. troke: 2- x. depth /XP1-1 idth across 1 flats. x.. - x. depth 2- x. (Plug: -P) +. +..±. +. 1. ection ounting base side +. ax. 2. 2... 21 2. 19 2 ±. - x. Prepared hole diameter. depth 2. 1 ø depth 2. acuum suction port x. 2- x. 2 2 9. 1 depth 1. ø depth 1. ithout magnet and switch rail 2-2 x. depth /XP1-2 2- x. depth.. - x. depth 1 1 /XP1-1 /XP1-2 2 2 2. 2. 2 2 21 9 N.. 2 1 2 1 2 9 12

Precision air slide table imensions: XP/XP XP12 ax. etal stopper ir cylinder 2 idth across flats 2 1. ax. 2- x. depth troke:. 2- x. depth /XP12-1 idth across flats 1 - x. depth. x.. ithout stroke adjuster 2- x. (Plug: -P) 2 Rotary actuator 2.2 ir gripper. 1. 19 22±..±. - x. Prepared hole diameter.2 acuum suction port x. +. depth 2 ø +. depth 2- x. irectional control valve low control 2 9. 12 ection ounting base side depth 1. +. ø. 1 +. depth 1. ilter, Pressure control ittings & Tubing ithout magnet and switch rail 2-2 x. depth 2- x. depth... /XP12-2 - x. depth. 2 2 ir preparation Pressure switch /XP12-1 /XP12-2 1 9 22 2 2 29 9 1 2 1 2 9 9 1 lean gas filter 1

Precision air slide table imensions: XP/XP XP1 etal stopper 1 1. 11. ax. 2 ax. troke: 11 2- x. depth ithout stroke adjuster 2- x. depth idth across flats 2. idth across flats x 1 /XP1-2 - x. depth 2- x. (Plug: -P)... 19 2±. 1.±. - x 1 Prepared hole diameter.1 acuum suction port x. depth +. 9 ø9 +. depth 2- x. 1. 1. ection depth 2 +. 9 1. ø9 +. depth 2 ounting base side ithout magnet and switch rail 2-2 x. depth 2- x. depth. 1.. /XP1- - x. depth 2 2 /XP1-2 /XP1-1 2 9 119 2 22 29 2 2 1 12 12 1

Precision air slide table XP/XP ade to Order nti-corrosive specifications for guide unit -X2 /XP /XP tandard model no. -X2 tandard model no. -X2 artensitic stainless steel is used for body, table and guide block. Use this treatment if more effective anti-corrosiveness is necessary. nti-corrosive treatment Note 2) is applied to the body, table and guide block. Note 1) imensions are the same as standard type. Note 2) pecial anti-corrosive treatment makes the body, the table and the guide black. pecific Product Precautions e sure to read before handling. aution ounting ount the body on a flat surface in case of /XP series. /XP series has an opening on the bottom surface of the body and the opening is connected to the vacuum suction port. ufficient vacuum suction may not be achieved in presence of any clearances. X ir cylinder Rotary actuator ir gripper learance Opening lean gas filter Pressure switch ir preparation irectional control valve ilter, Pressure control ittings & Tubing low control 1