Specialty gases. Specialty gases

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1 Specialty gases Specialty gases

2 Specialty gases The SIAD Group SIAD is one of the most important Italian chemical groups and operates in the industrial gases, engineering, healthcare, services and industrial goods sectors. With more than 85 years of consolidated experience in business, the SIAD Group has been able to integrate industrial development and sectorial and territorial expansion with policies focusing on safety and environmental awareness, as well as on social and cultural issues. Industrial gases Founded in Bergamo in 1927, SIAD is one of the most important companies in the Italian industrial gases market. The company produces, commercialises and supplies a complete range of technical, food grade, specialty, medical and refrigerant gases, as well as the relative services, distribution systems and equipment. In addition to Italy, the SIAD Group is present in the industrial gases sector in another twelve European countries - Austria, Bosnia-Herzegovina, Bulgaria, Croatia, Czech Republic, Hungary, Romania, Russia, Serbia, Slovakia, Slovenia, Ukraine - with a wide production, supply and sales network. The gases are used in industries as diverse as the food, automotive, chemical, metallurgy, glass, cement, rubber, metal working and pharmaceutical industries, as well as in analysis and research laboratories. Engineering The SIAD Group has extensive and consolidated experience in the engineering sector, through its engineering firm SIAD Macchine Impianti. The company designs, builds and installs air separation units (ASU) and compressors throughout the world, as well as automation, supervision and energy distribution systems. The Italargon division produces cells and complete turnkey lines for welding, cutting and handling. ESA Pyronics International and TPI Tecno Project Industrial, two affiliated companies, respectively produce industrial combustion systems and units of CO 2 production, recovery and extraction and for gas purification. SIAD Macchine Impianti and its affiliated companies are also present abroad with branches in China, Belgium and Brazil and with agents and assistance centres in more than 50 countries spread over five continents. Healthcare The SIAD Group operates in the medical sector, in the area of both hospital and homecare. SIAD Healthcare is considered one of the most accredited suppliers in the Italian public and private healthcare sectors, with a range of medical gases, surgical specialty devices and cryobiological and life science systems. Medigas Italia and Magaldi Life are company leaders in homecare, and over the years the two companies have also established themselves as suppliers of products and services for hospital and research facilities. Industrial goods and services The SIAD Group is active in the services sector with Tecnoservizi Ambientali, which specialises in waste disposal, reclamation and environmental management, and with the affiliated Arroweld Italia, that operates in the area of industrial goods and is leader in the supply of welding and tool products. Moreover, SIAD offers products connected to gases and destined for the mass market. For further information:

3 The SIAD Specialty Gas Laboratory Established in the 1930s and situated near the Osio Sopra plant, the SIAD Specialty Gas Laboratory is devoted to the production and analysis of pure and extra pure gases and gas mixtures, as well as to applied research in the service of innovative technologies. The Laboratory has a leadingedge filling system and a wide and diversified range of instruments and tools; it relies on a team of highly skilled technicians with long-standing experience in the field of specialty gases. Besides high-quality products and services, all this ensures the capacity to quickly adapt the production parameters as a function of user requests, which is confirmed by the wide gamut of gas blends produced. The SIAD Specialty Gas Laboratory was the first gas laboratory in Italy to obtain, in 1994, ISO 9001 quality certification; as further evidence of excellence, it has been accredited by Accredia as a LAT Calibration Centre (LAT Centre no. 143).

4 Specialty gases Helium and diving mixtures Liquid and gaseous helium Helium is the second lightest gaseous element, after hydrogen; it is characterised by being the smallest molecule and the chemical element with the lowest boiling point. Applications In both gaseous and liquid form, helium finds many applications: metal working sector; aerospace industry; semiconductor production; electronics industry. In particular, liquid helium is used to obtain temperatures very close to absolute zero in many hightech industry, research and medical sector applications, such as superconductivity, particle acceleration and MRI diagnostics. Other major uses of helium include: production of optical fibres for telecommunication systems; as carrier gas in gas chromatography; as leak detector medium in pressurised and vacuum systems and piping. artificial respiration in deep sea diving. Supply modalities Helium supply modalities and range of available services: transport in cylinders and cylinder bundles in gaseous form, in dewars in liquefied form; design and installation of gas distribution systems; supply of equipment for the proper utilisation of the gas: technical assistance and advisory service on gas transport, distribution and uses.

5 Diving gas mixtures SIAD is an industryleading supplier of diving gas mixtures, for use in a variety of applications, including artificial respiration, deep sea and hyperbaric chamber applications, sea bottom prospecting and oil search programs, installation and maintenance of underwater oil and gas pipelines. The SIAD range includes nitrogen-oxygen and heliumoxygen blends with variable contents, as a function of intended depth of use. Below a certain depth, in fact (60 m in water e 80 m in a hyperbaric chamber), nitrogen based mixtures may no longer be used for respiration, not even in short-duration dives; it is necessary to use oxygen and helium blends instead. All the gas blends produced by SIAD are characterised by high precision and constant quality levels, and are accompanied by certificates of analysis describing their exact composition. The new cylinder bundle for diving applications SIAD has recently developed a new dedicated cylinder bundle for diving applications, which has innovative characteristics: a volume 3 times smaller than a traditional container (2 m high, 2.10 m wide and 1.18 m deep); a filling pressure of 300 bar, with a gas content about 50% higher than in traditional 200 bar containers; 24 cylinders arranged horizontally, in 6 layers of 4. Thus, the new cylinder bundle developed by SIAD makes it possible to carry greater quantities of gas within the same overall dimensions. The cylinders and the bundles have been approved for maritime transport pursuant to RINA standards and are tested for conformity to the TPED regulations. In the open sea, their small size makes the cylinders ideally suited for their intended use. The new cylinder bundle is stackable, so that the cylinders may be stored with maximum ease, and the inner capacity of the containers is saturated more efficiently, which in its turn facilitates lifting and handling operations. A greater amount of gas in less space. The ideal solution for transport by boat and easier handling at end-use points.

6 Specialty gases Pure and cryogenic gases Pure gases SIAD produces and supplies high purity and extreme purity gases for use in analytical and research laboratories and in industrial processes required high quality products. During the production stage, special care is devoted to the preparation of the containers (cylinders, bundles, etc.) and the constancy of product characteristics, with a view to ensuring maximum repeatability of the results at the utilisation stage. SIAD s pure gases are grouped in different purity level classes (as shown in table 1), identified by the following acronym: P Pure grade; R Research and Chromatography grade; T Transistor grade; EP Extra Pure grade. Purity class Laboratory applications Industrial applications P Pure grade Technically pure gases R Research and Chromatography grade High purity gases with constant chemicalphysical properties, for widespread use T Transistor grade Extreme purity gases, fine-tuned in collaboration with the electronics industry EP Extra Pure grade Extreme purity gas earmarked for the most highly sophisticated applications - Research work - Analyses - Standard gases - Flame spectrophotometry Table 1 - Main applications of SIAD pure gases - Research work - Analyses, microanalyses - Gas chromatography: - flame ionisation - helium ionisation - thermal conductivity - Spectrography, spectrophotometry - Quantometry - Atomic absorption - Inductively coupled plasma (ICP) - Studies and research - Microanalyses - Elementary organic analyses - Electron-capture gas chromatography - Supercritical extraction - Research work - Mass spectrometry - Standard gases - Synthesis and polymerisation - Catalysis and catalyst regeneration - Chloridation, hydrogenation, reduction - Inert and controlled atmospheres - Chemical synthesis - Catalysis - Lamp manufacture - Heat treatments - Extra controlled atmospheres - Laser - Electronics (semiconductors, epitaxial techniques) - Single crystal growth - Metallization furnaces - Optical fibre production - Solar cell production - Lamps - Electronics Cryogenic gases Cryogenic gases - i.e., extremely low temperature liquefied nitrogen, oxygen and argon - are obtained from air separation processes. The cryogenic gas that is used most widely by hospitals and industrial plants for research and analysis purposes is liquid nitrogen, an inert gas with a boiling point at normal atmospheric pressure of -196 C. Here are some of the common uses of liquid nitrogen: cryobiology; dermatology; preservation of tissues, semen, plasma, etc.; MRI; laboratory instrumentation (electronic microscopes, gas chromatography, etc.); research. SIAD supplies these gases by means of super-insulated containers, which, depending on individual customer requirements, may consist of either dewars or fixed cryogenic tanks.

7 Gases and gas mixtures for the electronic industry To the electronic industry, SIAD supplies a wide range of pure gases and gas mixtures. Extremely pure gases in gaseous and liquid form: - Oxygen 5.0 and Argon 5.5 and Nitrogen 5.5. and 6.0 Extremely pure gases in cylinders, cylinder bundles, tube trailers: - Hydrogen 5.5 and Helium 5.5 and 6.0 Macro and micro electronic grade gas mixture, accompanied by a certificate of analysis. Also available are process gases and gas mixtures for special applications, such as: hydride mixtures for doping process; etching gases for surface cleaning process; gaseous silicon precursor mixtures for epitaxial deposition; mixtures for ion implantation. SIAD continuously improves the quality of its products to keep abreast of the evolving needs of the sector. In particular, SIAD has developed a range of gases and blends stored in aluminium containers fitted with stainless steel valves that offer the following benefits: absolutely rust-proof; minimal presence of particles; minimised moisture absorption; enhanced stability of the blends.

8 Specialty gases Calibration mixtures SIAD is an industry-leading supplier of extremely pure gas mixtures which are used in environmental, industrial, medical and scientific applications. The high purity gas mixtures produced by SIAD may be comprised of from 2 to over 50 components. These mixtures are produced according to strict safety and quality standards, using technologically advanced mixing systems. Utilisation sectors Users of calibration mixtures can be found in the following sectors: Automotive industries. Petrochemical and chemical industries. Universities and research institutes. Environmental control. Medical sector. Automotive industries SIAD supplies all the gas mixtures used by car manufacturers: from working gases characterised by different degrees of accuracy and uncertainty to mixtures conforming to metrological traceability standards. These gas blends, typically containing CO, NO, CO 2 and O 2 gases and hydrocarbons are used in engine performance tests and exhaust emission measurements according to the applicable European directives and US standards. Highest accuracy mixtures may be correlated with mixtures prepared by international metrology institutes or produced by SIAD s Accredia Centre. These mixtures combine the best metrological qualities and the lowest possible uncertainty levels. Petrochemical and chemical industries The oil refining, natural gas and chemical industries are major users of mixtures for the calibration or maintenance of: laboratory equipment chromatographs; process chromatographs; analysers; detectors. Universities and research institutes At universities and research institutes, these gas mixtures are used in laboratory and applied research tests. A few examples: sensing equipment; geochemical surveillance of volcanoes; the study of chemical processes, the climate, environmental pollution and its impact on human health. In particular, SIAD produces mixtures containing sulfonated aromatic compounds, inorganic acids, nitrogen oxide and carbon monoxide, substances marked with deuterium or stable isotopes.

9 Environmental Control European legislation establishes the maximum levels for emissions into the air of certain substances. SIAD responds to these new requirements in the most cost effective way by offering multicomponent mixtures for the control of these emissions. Medical sector In the medical sector, mixtures are used to calibrate instruments for haemo-gas analyses and for respiratory function. Other sectors Calibration mixtures are used in other sectors too, such as the metallurgical and thermotechnical industries, for chimney monitoring and burner and boiler functionality checks. Table 2 and Table 3 exemplify some uses of SIAD s calibration mixtures. Application area Examples Type of calibration mixture Production process monitoring Safety and Workplace monitoring Cracking, destillation LEL (Lower Explosive Limit) Hydrocarbon liquid mixtures Two component mixtures of flammables in air Reactive components in ppm/ppb range Emission control Stack monitoring BTX*, VOC*, SO 2, NO x, etc. in ppm/ppb range Quality control of base products Caloric value determination Ethylene, Propylene Natural gas Multisulphur components in ppm/ppb range Wobbe index mixtures High accuracy gravimetric Standards Table 2 - Applications in the Petrochemical/Chemical Industries and Refineries Application area Examples Type of calibration mixture Air quality monitoring Stationary emission control Emission control networks Air quality control laboratories Waste treatment installations Energy producers Industrial stack emission SO 2 /NO x /CO/CO 2 /C n H m /BTX* in ppm/ppb Multicomponent VOC* in ppb range SO 2 /NO x /CO/CO 2 /C n H m /NH 3 /HCl/HF, etc. in ppm range SO 2 /NO x /CO/CO 2 /C n H m in ppm range BTX*/VOC*/SO 2 /NO x /COCl 2 in ppm/ppb level Mobile emission control Car exhaust control CO/CO 2 /C 3 H 8 in N 2 Table 3 - Applications in Environmental Control *BTX: Benzene - Toluene - Xylene *VOC: Volatile Organic Compounds

10 Specialty gases Classification Uncertified and Batch-Analysed mixtures These mixtures are prepared by gravimetric or manometric means according to their components and concentration. Analyses are carried out on every production batch (and not on each individual cylinder) and consequently an individual certificate of analysis cannot be supplied. Mixtures in the liquid phase These mixtures are certified by using the data of the gravimetric or analytical preparation, or a combination of both, according to the nature and concentration of the components and the matrix. Further details are given in the Certificate of Analysis accompanying the cylinder. These standards are also used, with an overpressure of rare gas, to substitute gaseous mixtures. Major applications are in process control in petrochemical plants and refineries. SIAD actively participates in national and international work-groups on analytical techniques in the gaseous phase. Certified gas mixtures These mixtures are prepared using gravimetric and volumetric techniques and are then controlled by comparison to primary reference standards. These preparations and their analyses are based on international standards such as ISO 6142 and ISO High precision standards These mixtures are used for exceptionally accurate calibrations and processes in which are imposed very strict tolerances. The use of extremely pure gases and accurate preparation analysis methods permits a certification accuracy superior to sample gas mixtures. Special Certified Standard Equipment for automated analyses requires that the preparation of calibration mixtures has a high level of reproducibility. In some applications, such as measurements established by EPA protocols in the automotive industries and in the control of power station emissions, a correlation to primary reference standards supplied by official National Institutes (NIST, VSL, COFRAC, etc.) is requested. Thanks to its qualified experience, SIAD is able to satisfy even these requirements. Primary standard gas mixtures These are the highest metrology quality calibration gas mixture, prepared according to the gravimetric method, as required by standard ISO Primary Standard gas mixtures are produced by national and international Primary Metrology Institute (VSL, NIST, NPL ) and calibration centres that have been accredited by such institutes based on a detailed assessment of their technical and organisational capabilities. These mixtures are primary standards obtained through an absolute measurement process (weighing the gases with highprecision scales), and the measurement uncertainty determined on each individual preparation is extremely low. At its LAT accredited Research Laboratory, SIAD produces primary standard mixtures.

11 Disposable gas cylinders Where small amounts of gas are required and when, at the same time, it is important that the gas mixture supplied is of a guaranteed purity or certified accuracy, disposable LIGHTCYL gas cylinders offer the perfect solution. Characteristics Disposable LIGHTCYL gas cylinders: are exceptionally lightweight and, so, extremely easy to handle; prevent gas wastage (quantities are specifically measured out); are extremely simple to use; can be transported by any means as they are not subject to transportation limitations; take up a very little space and can be stored anywhere, even in a place of work; can be easily disposed of (the normal procedures for recyclable urban waste apply); do not attract ancillary charges; have simple labels which can be immediately consulted and offer the opportunity for customization with a company s own logo. The LIGHTCYL line can be used wherever the requirement for ease of handling and simplicity in use is essential. It is, above all, particularly well suited for use by the safety sector, for environmental monitoring and in laboratories. Gas mixtures, which are flammable, oxidising, atmospheric gases, and a wide range of pure gases are available. Express Gas Mixtures Express Gas Mixtures are certified calibration gas mixtures providing an innovative supply solution developed by SIAD. From careful statistical studies, SIAD identified the calibration gas mixtures most widely requested in the various areas of application and, by setting up a dedicated storage facility, launched a fast delivery service, with delivery times of between 3 and 5 days (excluding transport). The range of Express Gas Mixtures is very wide and diversified, with gas mixtures consisting of 1, 2, 3, or more components, earmarked for the most diverse applications: from environmental control to the electronics sector, from laser equipment to medical uses. An exhaustive list of the Express Gas Mixtures available may be consulted quickly and with ease by means of an online search engine. The Express Gas Mixtures search engine can be found at:

12 Specialty gases SIAD Metrology Laboratory LAT accredited Calibration Centre n.143 SIAD s Research Laboratory, with its experience, technical competency and high degree of know-how, has obtained accreditation as a LAT Calibration Centre (ISO 17025) for: the production of gaseous reference materials; gravimetric or analytic calibration of gas mixtures; calibration of analytic measurement equipment. Traceability Traceability is the process by means of which the indications of a given instrument can be compared, in one or more steps, with the national or international reference sample. In each of these steps, the calibration of the instrument must be done using samples of metrological quality compared with reference samples of the highest level. This yields a chain of traceability with a hierarchical structure in which each step documents (with accredited procedures) and calculates (with recognised methods) the uncertainty of the measurement. The traceability of our measurements means: improved quality of measurement systems and hence increased quality of the final product; alignment of measurement systems with (inter)national standards (accuracy of the measurement); international recognition of the measurement, in other words the potential to effectively compare the measurement with those effected by other laboratories; a competitive advantage in global markets at the highest level. Calibration of analytic measurement equipment The calibrations run by LAT Centre n. 143 stand out for their traceability in relation to standard units. The device being calibrated is an analytic measurement device, such as a gas chromatograph or IR analyzer. The calibration is done by means of analytical comparison (ISO 6143) with reference gas mixtures produced and/or certified by Metrological Institutes or laboratories. The number of certified gas mixtures used for this purpose depends on the complexity of the calibration, in other words, on the extent of the range of measurement and any nonlinearity in the response of the device. Recommended applications are: verification of the performance of analytic measurement equipment; compliance with standards (legislative parameters, specifications of supply, etc.). LAT Centre n. 143 SIAD is accredited for calibration of analytic measurement equipment both on-site and at our facility.

13 Calibration of gas mixtures The device being calibrated is a gas mixture. The scope is the calibration and/or verification of analytic measurement equipment. The types of mixtures offered by SIAD LAT Centre n. 143 are described below. G-CRM A gaseous mixture produced (ISO GUIDE 34) gravimetrically (ISO 6142). The gravimetric measurement, certified via concentration of the analytes in the mixture, is traceable by means of an uninterrupted chain of comparisons with national mass samples and, by analytic comparison, to reference gaseous mixtures produced and/or certified by Metrological Institutes or Laboratories. The mixture is characterised by the best preparation tolerance, defined as the difference between the requested value and the certified value, and by relative expanded uncertainties, at the best, of 0.03 %. It is also available as a multicomponent gas mixture according to the compatibility constraints due to the chemical and physical characteristics of the gas. The principal recommended applications are in relation to the calibration of equipment from which binding measurement performance is required (legislative parameters, specifications of supply, etc.). A-CRM A gaseous mixture calibrated by means of analytical comparison with reference gas mixtures produced and/or certified by Metrological Institutes or Laboratories. The certified analytic measurement is characterised by relative expanded uncertainties not less than those listed in the corresponding accreditation scope (from 1% to 3%). The gaseous mixture may be supplied by an outside laboratory and the analytes being calibrated may only be accredited ones. Recommended applications: verification of the calibration status of analytic measurement equipment; calibration of equipment from which strictly binding measurement performance is not required. W-CRM A working gaseous mixture prepared gravimetrically. Measurement is traceable, by means of an uninterrupted chain of comparisons, to national mass samples and/or, by analytic comparison, to reference gaseous mixtures produced and/ or certified by Metrological Institutes or Laboratories. It is characterised by wider accreditated ranges of concentration and relative expanded uncertainties not less than those listed in the corresponding accreditation scope (from 1 % to 6 %). It is also available as a multicomponent gas mixture according to the compatibility constraints due to the chemical and physical characteristics of the gas. Recommended applications include verification of measurement processes in the context of gas analysis.

14 Specialty gases Sterilisation gas mixtures SIAD supplies sterilisation mixtures based on ethylene oxide, which are used for the sterilisation of consumable medical products. Ethylene oxide has biocide properties, i.e., has the capacity to destroy microorganisms such as viruses, bacteria, spores, mould and fungi; in particular, it is used in thermosensitive products which cannot withstand heat or steam sterilization processes. Another benefit is its low impact on the products: ethylene oxide, in fact, does not alter the appearance of the materials and, in the case of plastic, it maintains its transparency. The sterilisation level obtained is a function of the temperature and time duration of the treatment, the concentration of the gas and humidity levels. Ethylene oxide and its mixtures with carbon dioxide are used by biomedical companies manufacturing sterile disposable plastic products for haemodialysis, cardiac surgery, blood filtration and the like. Table 4 shows the composition of the main sterilisation mixtures produced by SIAD. SIAD is the only manufacturer of ethylene oxide based gas mixtures in Italy and one of the most important in Europe. Mixture composition Carbon dioxide (2.5) Ethylene oxide (2.5) SIADTOX 10 SIADTOX 15 SIADTOX 20 SIADTOX % 85 % 80 % 10 % 10 % 15 % 20 % 90 % Valve outlet connection: UNI (formerly UNI 4408) 40-litre cylinders - 30 kg capacity Table 4 Composition of SIAD sterilisation gas mixtures

15 Laser mixtures and other gas mixtures Laser mixtures Laserstar is a range of dedicated products for laser applications that SIAD has developed in collaboration with major industry operators with the aim to follow and promote the ongoing evolution of laser technology. Some of these mixtures are produced as standard products of known composition, as can be seen from Tables 5 and 6. Product % CO 2 (4.8) % N 2 (5.0) % He (4.8) Laser Mixture A Laser Mixture B Laser Mixture C Laser Mixture D Laser Mixture E Laser Mixture F Laser Mixture G 4.5% 3.4% 3.5% 5.0% 4.0% 5.0% 6.0% Filling pressure: 150 bar Cylinder capacity: 40 l - Content 6.0 m 3 Cylinder capacity: 14 l - Content 2.1 m 3 Table 5 - CO 2 gas mixtures for laser applications 13.5% 15.6% 24.5% 15.0% 26.0% 55.0% 20.0% Q.S. Q.S. Q.S. Q.S. Q.S. Q.S. Q.S. Mixture composition 5% Hydrogen Chloride 95% Helium 5% Fluorine 95% Helium 0.25% Fluorine in Helium 0.16% Hydrogen Chloride 0.03% Hydrogen 1.50% Xenon in Neon Cylinder capacity Content (indicative values) Fill pressure 40 l 6 m bar 40 l 6 m bar 40 l 6 m bar 40 l 6 m bar Table 6 - Gas mixtures for excimer lasers Other gas mixtures Gases and mixtures for biological research SIAD supplies standard composition and tailor-made gas mixtures for cell culture growth in a controlled atmosphere: standard 5% CO 2 + oxygen, air or nitrogen atmospheres; anaerobic CO 2 -H 2 + nitrogen atmospheres. Argon methane gas mixtures SIAD supplies methane in argon mixtures, with typical methane concentrations of 5% or 10%, for use in gas chromatography and X-ray fluorescence detectors. Burner calibration bases and gas mixtures Special standards and regulations on the control of boiler and gas stove burner operation call for tests using reference gases and limit gases. SIAD is able to offer such gases and mixtures, which may be accompanied by certificates of analysis, issued for either the individual cylinder or the entire production batch.

16 Specialty gases Process gas Rare gases The rare gases, which include xenon, krypton and neon, are found in the air in very low concentrations. Rare gases play a major role in many sectors, in that, when electrically charged they give out light; they are used in lighting fixtures and lasers, for medical imaging applications and by research laboratories. They are also used in the production of thermally insulated windows. One of the very few European producers of carbon monoxide, SIAD can also supply this gas in ultra-pure form. Toxic gases The main toxic gases are hydrobromic acid, hydrogen chloride, hydrogen sulfide, sulfur dioxide, chlorine, carbon monoxide, ethylene oxide. Toxic gases are viewed by SIAD as a distinctive element in its production line-up. Ammonia (NH 3 ) Ammonia is a colourless, slightly flammable, toxic, corrosive, liquefied gas with a pungent odour. It is typically used in combination with silane or dichlorosilane to form silicon nitride layers in chemical vapour phase deposition processes. Silicon nitride films are used as passivation and dielectric layers in semiconductor devices. Carbon monoxide (CO) Carbon monoxide, CO, is a valuable chemical intermediate, used widely in the production of numerous chemical compounds, such as, for instance, polyurethanes and polycarbonates. Carbon monoxide is also used: by steel mills, as a reducing agent; in metal separation and purification processes, especially for nickel; in microelectronics applications (requiring higher purity levels); in environmental monitoring and process control mixtures. Hydrogen chloride (HCl) Hydrogen chloride is a colourless, poisonous, highly toxic, corrosive, non flammable liquefied gas with a pungent odour. It is used to polish and etch wafers prior to the deposition process. It is able to remove from the surface of the wafers the defects caused by mechanical polishing and handling. Combined with small percentages of oxygen, it is also used as a sequestering agent to remove metallic impurities which may have detrimental effects in the production of MOS (Metal Oxide Semiconductor) type devices. Other process gases Nitrous oxide (N 2 O) Nitrous oxide is a colourless, oxidiser, liquefied gas with a slightly sweet odour and taste. It is used as an oxygen source in the vapour phase deposition of silicon oxide films. This gas, available in liquid form, is a powerful oxidising agent at temperatures of over 300 C. Nitrous oxide is also used to remove photosensitive resins employed in photolithography processes. Sulfur hexafluoride (SF 6 ) Sulfur hexafluoride is a colourless, odourless liquefied gas, with high relative density. It is stable in normal conditions, but through thermal decomposition it may form toxic products that may be corrosive in the presence of humidity. It is widely used as an insulating material for switches, switchgear, high voltage electrical substations and gas-insulated transmission lines. When used in this sector, sulfur hexafluoride must conform to ASTM D or IEC 376/60376 standards. It is also used in the electronics industry as a plasma etchant gas and as a cleaning agent for etching chambers.

17 Materials and equipment The experience acquired by SIAD in over 85 years of activity enables the company to offer its customers a qualified technical service to ensure that its gases are used most efficiently. This includes the selection of appropriate equipment for the construction of centralised pure gas plants: pressure regulators; manual and automatic decompression panels; flow control instrumentation; pre-heaters; measurement, indicator and alarm systems; distribution lines and cabinets; leak detectors; gas generators; mixing systems. SIAD relies on a technical staff that is able to devise the most effective solutions for plants where leading-edge technology goes hand in hand with absolute safety and flexibility criteria. The materials selected ensure total compatibility with the gases to be used, while design and construction criteria rule out the combined use of devices reserved for mutually incompatible gases. In particular, pressure regulators and decompression systems meet rigorous safety standards, undergo stringent tests prior to being put to use, and may be accompanied by a helium mass spectrometer leak tightness certificate.

18 Specialty gases Services SIAD offers a wide range of services designed to meet the most highly sophisticated requirements, and is able to develop new, more efficient solutions for the use of gases in manufacturing processes. Platinum Total Gas Management SIAD offers its customers the Gas Management service (TGM). Gas Management is an integrated product management service: all the aspects relating to supply, transport, purity, maintenance and safety in the use of gases and related systems are left completely up to and in the hands of SIAD. In this way, SIAD experience, flexibility, reliability and professionalism are available to its customers, who can then focus all their activities on their core-businesses. The benefits of using this type of service are lower management costs and better production performance. SIAD s TGM services include: Remote control and detection Automatic reordering; Distribution system upkeep; Cylinder replacement at enduse point; Training and advisory services; Delivery to end-use point; Management of field storage facilities; Analyses at end-use point; Technical safety audits; Technological support services; Consulting on technical and regulatory issues; Remote control system. Analytical Assistance Service SIAD created its Analytical Assistance Service (SAA) to offer its customers a valid and effective support in gas analyses. The service is entrusted to specialist technicians who use highly sophisticated instruments and equipment to perform onsite analyses of the gases or take samples which are then analysed at SIAD s Central Laboratory. The main services offered are: Process gas analyses; Environmental analyses in operating rooms; Assistance with the utilisation of calibration mixtures; Training courses on the analysis of gases and gas mixtures; Gas analyser functionality checks; Advisory services on gas analysis instrumentation. The Analytical Assistance Service is made possible by SIAD s long-standing experience and know-how concerning the production of calibration mixtures and advanced gas analysis systems.

19 Flexigas Flexigas is a new SIAD service which guarantees gas users the correct amount of gas, based on measurement of the consumption requirements for the various applications. This innovative service came about, in fact, when a goal was set to combine the extremely high quality of SIAD gases, which has always been appreciated by the various sectors in which they find application, with flexibility in the choice of supply modes so that users can find the delivery mechanism most suited to their own specific production requirements. When it comes to supply, the classic supply modes include cylinders, bundles of cylinders (containing16 or 25 units) and fixed cryogenic storage tanks without, however, there being anything to cater for consumption requirements that fall somewhere in the middle. Flexigas has filled that gap. The new service is based on the use of a tank of the same dimensions and weight as a 25 unit bundle of cylinders, but containing gases in their liquid state, thereby, tripling capacity. Flexigas could be adopted for different types of gases and gas mixtures and, consequently, for more diverse application sectors, among which the research laboratories. Flexigas strengths are flexibility, simplicity and practicality of use, conformity to technical and safety requirements.

20 Services Industrial goods The SIAD Group Industrial gases Healthcare Engineering Industrial gases SIAD S.p.A. Via San Bernardino, 92 I BERGAMO Tel Fax siad@siad.com GPS: N E AUSTRIA SIAD Austria GmbH Bergwerkstrasse 5 A-5120 ST. PANTALEON Tel. +43 (6277) Fax +43 (6277) siad@siad.at GPS: N E BOSNIA AND HERZEGOVINA ISTRABENZ PLINI d.o.o. Potkraj bb BIH BREZA Tel Fax GPS: N E BULGARIA SIAD Bulgaria EOOD 4, Amsterdam str. P. O. Box 28 BG-1528 SOFIA Tel (2) Fax +359 (2) siad@siad.bg GPS: N E CROATIA ISTRABENZ PLINI d.o.o. Senjska cesta b.b. HR BAKAR (RIJEKA) Tel (51) Fax +385 (51) istrabenzplini@istrabenzplini.hr GPS: N E CZECH REPUBLIC SIAD Czech spol. s r.o. č.p. 193 CZ BRAŇANY U MOSTU Tel Fax siad@siad.cz GPS: N E HUNGARY SIAD Hungary Kft Zsigmondy u. 38 H-3527 MISKOLC Tel. +36 (46) Fax +36 (46) siad@siad.hu GPS: N E ROMANIA SIAD Romania s.r.l. Drumul Osiei, 75-79, Sector 6 RO BUCURESTI Tel. +40 (21) Fax +40 (21) siad@siad.ro GPS: N E RUSSIA OOO SIAD Rus Bolshaya Dmitrovka street 12/1 build 1, 3 floor MOSCOW Tel./Fax +7 (495) siad@siad.ru GPS: N E SERBIA ISTRABENZ PLINI d.o.o. Despota Stefana, 12 SCG-BEOGRAD Tel Fax GPS: N E SLOVAKIA SIAD Slovakia spol. s r.o. Rožňavská č. 17 SK BRATISLAVA Tel (2) Fax +421 (2) siad@siad.sk GPS: N E SLOVENIA ISTRABENZ PLINI d.o.o. Sermin 8/a SLO-6000 KOPER Tel (5) Fax +386 (5) info@istrabenzplini.si GPS: N E UKRAINE SIAD Ukraine t.o.v. Konstantinovskaya street, 2A UA KIEV Tel Remtechgas t.o.v. Kolomoytsevskaya street, 28 UA KRIVOY ROG Tel Engineering SIAD Macchine Impianti S.p.A. Via Canovine, 2/4 I BERGAMO, ITALY Tel Fax info@siadmi.com GPS: N E SIAD Macchine Impianti S.p.A. Italargon Division Via Canovine, 2/4 I BERGAMO, ITALY Tel Fax italargon@siadmi.com GPS: N E ESA S.p.A. Via Fermi, 40 I CURNO (BG), ITALY Tel Fax esa@esacombustion.it GPS: N E TPI Tecno Project Industriale S.r.l. Via Fermi, 40 I CURNO (BG), ITALY Tel Fax tpi@tecnoproject.com GPS: N E BELGIUM Pyronics International S.a. Zoning Industriel, 4ème rue B-6040 JUMET Tel Fax marketing@pyronics.be GPS: N E P.R. CHINA SIAD Macchine Impianti Trading (Shanghai) Co., Ltd Rm.56-57, T15-5, n 999, Ningqiao Rd. Pudong Jinqiao Export Processing Zone CN SHANGHAI Tel. +86 (0) Fax +86 (0) sales@siadmichina.com GPS: N E SIAD Engineering (Hangzhou) Co. Ltd. Room Yisheng Building, N 1 Wulin Lane, Xihu District, CN HANGZHOU Zhejiang Province Tel. +86 (0) Fax +86 (0) FRANCE SIAD Macchine Impianti France S.a.r.l. 114, Rue Saint Lazare F COMPIÈGNE Tel. +33 (0) Fax +33 (0) contact@siadmifrance.com GPS: N E Industrial goods Bieffe Saldatura S.r.l. Via Canubia, 9/1 I MADONNA DELL OLMO (CN), ITALY Tel Fax info@bieffesaldatura.com GPS: N E ARROWELD ITALIA S.p.A. Via Monte Pasubio, 137 I ZANÈ (VI), ITALY Tel Fax arroweld@arroweld.com GPS: N E Healthcare MEDIGAS ITALIA S.r.l. Via Edison, 6 I ASSAGO (MI), ITALY Tel Fax info@medigas.it GPS: N E MAGALDI LIFE S.r.l. Via Case Rosse, 19/a I SALERNO, ITALY Tel Fax info@magaldilife.it GPS: N E SIAD Healthcare S.p.A. Via Edison, 6 I ASSAGO (MI), ITALY Tel Fax info@siadhealthcare.com GPS: N E Services Tecnoservizi Ambientali S.r.l. Via San Bernardino, 92 I BERGAMO, ITALY Tel Fax info@tasrl.com GPS: N E SIAD S.p.A. Photo Francesco Rastrelli All rights reserved The information and the data published do not represent any guarantee that the service has the characteristics indicated. Any value, description, drawing, photograph etc. shown here is purely indicative and does not represent or guarantee the quality of the service that SIAD undertakes to supply, therefore the quality may be different from what is indicated here. SIAD reserves the right to make alterations to the products/services contemplated here at any time. Printed in Italy COM PUK /13 SOCIETÀ ITALIANA ACETILENE E DERIVATI S.I.A.D. S.p.A. I Bergamo - Via S. Bernardino, 92 V.A.T and Fiscal Number Share Capital euro i.v. N Reg. delle Imprese di Bergamo R.E.A. Bergamo N Telephone Fax siad@siad.com