Titanium Etch. TAIWAX MAXWAVE Co., Ltd, No. 999, Bayiu 1 st Rd., Guanyin Township, Taoyuan County Taiwan. Evan Chen

Transcription

1 Titanium Etch TAIWAX MAXWAVE Co., Ltd, No. 999, Bayiu 1 st Rd., Guanyin Township, Taoyuan County Taiwan Evan Chen 216

2 Outline Relational Database Products Benefit Material Compatibility Performance Critical Dimension Loss and Undercutting Distance Temp. versus Etching Rate Life Time and Life Count Functional Test

3 Relational Database (1/2) Candidate Etching Rate _ Immersion (angstrom/sec) Process Basis Ti Etch Immersion Citric acid Ti Etch Immersion Fluoride Ti Etch Immersion Fluoride Ti Etch Immersion Fluoride They are suitable to use in either immersion or spray type process. A variety of agitation forms may be used including ultrasonic, N2 bubbling, spray-wash, or combinations thereof. It is a long bath life formulation, but the operating temperature, the size of the tank and metal loading determines the actual bath life of this titanium etch. If don t see what you are looking for, Taimax can custom-formulate something to meet your specific requirements.

4 Relational Database (2/2) Benefit A single-dose Short processing times: 1-1 minutes Low etching rates on many sensitive metals such as Al, Cu, Au, Sn, Ag and TiW Suitable for use in immersion, batch spray, and single wafer tools Long bath life Material Compatibility Polytetrafluoroethyene (PTFE) Polyvinylidene fluoride (PVDF) High-density polyethylene (HDPE) 316LEP Stainless Steel Propylene (P.P.)

5 Ti Etch-218

6 Wafer Level Chip Scale Package (WLCSP)

7 Etching rate(å/min) Just etching time(sec) Etching Rate versus Temp. 8 WLCSP Temperature 2 C 23 C 25 C 27C 3 C Ti Thickness(Å) 3 Just etching(sec) Etching rate(å/sec) Etching rate(å/min) Etching rate(å/min) Just etching(sec) Process: Spin Spray

8 Etching rate(å/min) Just etching time(sec) Performance _ Life Count 8 WLCSP 25±1 C Loading (piece) H2O2 % N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A E/P(sec) E/R(Å/min) E/R(Å/min) E/P(sec) Process: Spin Spray

9 Etching rate(å/min) Just etching time(sec) Performance _ Life Time 8 WLCSP Accumulated time (hr) H2O2 % N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A E/P(sec) E/R(Å/min) E/R(Å/min) E/P(sec) Process: Spin Spray

10 Performance _ Undercutting Distance (8 WLCSP) Before etching J/E 25% (O/E) 5% (O/E) Copper plating Copper sputtering Titanium layer Silicon layer.419 um.338 um.489 um After a examination the undercutting distance is less than.5um, including the J/E, 25%O/E and 5%O/E. 75% (O/E) 1% (O/E) 2% (O/E).85 um 1.4 um 1.7 um Process: Spin spray

11 Redistribution Layer (RDL)

12 Etching rate(å/min) Just etching time(sec) Etching Rate versus Temp. 12 RDL Temperature 2 C 23 C 25 C 27C 3 C Ti Thickness(Å) 3 Just etching(sec) Etching rate(å/sec) Etching rate(å/min) Etching rate(å/min) Just etching(sec) Process: Spin Spray

13 Etching rate(å/min) Just etching time(sec) Performance _ Life Count 12 RDL 25±1 C loading (piece) H2O2 % N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A E/P(sec) E/R(Å/min) E/R(Å/min) E/P(sec) Process: Spin spray

14 Etching rate(å/min) Just etching time(sec) Performance _ Life Time 12 RDL Accumulated time (hr) H2O2 % N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A N/A E/P(sec) E/R(Å/min) E/R(Å/min) E/P(sec) Process: Spin spray

15 Performance _ Critical Dimension Loss (12 RDL) Before etching Just Just etching (J/E) (J/E) 5% 5% O/E O/E 75% 75% O/E O/E 1% 1% O/E O/E 2% 2% O/E O/E Process: Spin spray

16 Performance _ Undercutting Distance (12 RDL) Before etching J/E 25% (O/E) 5% (O/E) Copper plating Copper Copper sputtering Titanium layer layer Silicon Silicon layer layer.373 um.524 um.711 um After a examination the undercutting distance is less than.5um, including the J/E and 25%O/E. 75% (O/E) 1% (O/E) 2% (O/E) 1.4 um 1.12um 2.3um Process: Spin spray

17 Metal Release Typical Material (Metal) Etching Rates 25 C Al <.1 Cu <.1 Ni <.1 Au <.1 Sn <.1 Ag <.1

18 Functional Test

19 Aluminum Corrosion Test Before etching Before etching After 6 min at 25 degree Celsius After 6min at 25 degree Celsius OM magnification: 2X OM magnification: 5X According to the results, the Ti Etch-218 has a high selectivity to aluminum.

20 If don t see what you are looking for, Taimax can custom-formulate something to meet your specific requirements. Thank you. TAIWAX MAXWAVE Co., Ltd, No. 999, Bayiu 1 st Rd., Guanyin Township, Taoyuan County Taiwan 216