Usage Policies Notebook for Quintel 2001 Mask Aligner

Transcription

1 Usage Policies Notebook for Quintel 2001 Mask Aligner Revision date September 2014

2 2 Emergency Plan for Quintel 2001 Mask Aligner Standard Operating Procedures for Emergencies Contact information Person Lab Manager Director Staff Super User Phone number Jake Hes, (day), (alternate) G.P. Li: (day), (alternate) Mo Kebaili: (day), (alternate) Carlos Ruiz (818) (Anytime, voic or text only) Hazardous chemicals, gases, and conditions Hazard name N 2 (nitrogen) gas High temperature Electrical Hazards Lamp Explosion Fingers could be jammed Radiation Hazards Description of hazard Asphyxiant Burn or ignition source Electrical shock, ignition source Mercury Vapors DO NOT Take any action during Operation High energy of UV light from exposure lamp Emergency shutdown plan #1 In the event of an emergency, when there is very little time, press the large red emergency shut-off button at the front of the Tool. This action will shutdown the system, and will stop and turn off the exposure lamp. Leave the facility at once, and contact the lab manager or the staff. Emergency shutdown plan #2 In the event of an emergency, when there are a few minutes available, place the tool in the standby mode. Leave the facility at once, and then contact the staff and the lab manager

3 3 Usage Policies for Quintel 2001 Mask Aligner Standard policies for usage The Quintel 2001 Mask Aligner uses 4 inch mask to expose photoresist on 3 inch or smaller size substrates. Contact information The INRF staff or the lab manager may be reached at or Authorized users Only INRF registered users who have completed the training and passed the certification may use this equipment. Users may only use the portion of the system for which they have been trained. Training Users must have received direct training from the staff in order to use this equipment. Users are expected to understand the nature of the system. Training varies slightly, depending on the process to be performed. Contact the staff for details and to arrange for a training session. Usage logs Users are required to log all activity in the log sheets provided. All users must log in when they used the Quintel 2001 Mask Aligner (date and time), which substrate and photoresist they used, and when they completed their process in the user log sheets. If users notice anything unusual, they should record it in the user log sheets, and add details in the maintenance log sheets. Any maintenance to the system must be logged in the maintenance log sheets (maintenance staff only). Safety equipment There is no specific safety equipment for use on this tool, however cleanroom gloves and tweezers should be used when handling and placing substrates on the chuck, care should be taken. Standard equipment and materials The laboratory provides the following: N 2 blow off gun and isopropanol solvent. User maintenance Users are requested to clean and wipe off the chuck after use. Spray the isopropanol into a lintfree cloth and wipe the chuck clean. Dispose of the cloth in a waste container marked for flammable solid waste.

4 4 Pollution Control Dispose of the alcohol soaked wipes in a waste container marked for flammable solid waste. Scheduling Reservations can be done online, also, the system can be used on a first come, first served usage if no reservation was made. Other issues Users should remain physically present in the cleanroom facility during the entire use of the Quintel 2001 Mask Aligner. At no time should a user adjust a pressure regulator on a gas line. Gas control should be on or off only, using only the valves appropriate. For most gases, this is usually the valve at the cylinder head. Non-standard use Users may not modify any hardware on this equipment. For use of non-standard processes, gases or materials, contact the staff or the lab manager.

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