Advancing the Standard. GenISys Support Team. v Thursday, July 3, 2014 BEAMER Raith/Vistec 1
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1 GenISys Support Team v4.7.0 Thursday, July 3, 2014 BEAMER Raith/Vistec 1
2 Outline Productivity Enhancements PEC + Fracturing Enhancements EBPG - GPF Sequences Thursday, July 3, 2014 BEAMER Raith/Vistec 2
3 PRODUCTIVITY ENHANCEMENTS Thursday, July 3, 2014 BEAMER Raith/Vistec 3
4 Import GDSII Performance 1.62 GB (typical manhattan) GDSII File From 80MB/s to 180MB/s Thursday, July 3, 2014 BEAMER Raith/Vistec 4
5 Import GDSII Performance 1.51 GB (highly irregular) GDSII File From 28MB/s to 115MB/s Thursday, July 3, 2014 BEAMER Raith/Vistec 5
6 TextLib TXL TEXTLIB UNIT MICRON RESOLVE BEGLIB STRUCT circle LAYER 0 DATATYPE 0 C ,0.00 ( ) ENDC ENDSTRUCT STRUCT photonic_crystal_array AREF circle (0,0) 1000 (0.150,0.000) 1000 (0.000,0.150) ENDSTRUCT ``` ENDLIB Thursday, July 3, 2014 BEAMER Raith/Vistec 6
7 TextLib TXL Ellipse Ellipse (ELP) is now supported! TEXTLIB UNIT MICRON RESOLVE BEGLIB ENDLIB STRUCT ellipse LAYER 20 DATATYPE 0 ELP , ENDELP ELP , ENDELP ELP , ENDELP ENDSTRUCT Thursday, July 3, 2014 BEAMER Raith/Vistec 7
8 TextLib TXL Shapes TextlLib Shapes: Circles Straight paths Circular paths Boundary Shapes Rectangles Trapezoids Polygons Ellipses ``` Thursday, July 3, 2014 BEAMER Raith/Vistec 8
9 Multiple Top Cells Multiple Top Cells Auto-Detection Warning given Thursday, July 3, 2014 BEAMER Raith/Vistec 9
10 Multiple Cell Extraction Extracting multiple cells required some effort For some customers the effort was Thursday, July 3, 2014 BEAMER Raith/Vistec 10
11 Unnecessarily Complex v4.6 Thursday, July 3, 2014 BEAMER Raith/Vistec 11
12 Multiple Cell Extraction Thursday, July 3, 2014 BEAMER Raith/Vistec 12
13 Multiple Cell Extraction v4.7 Thursday, July 3, 2014 BEAMER Raith/Vistec 13
14 Extent Management Extent management is cleaned-up now: Manual fields, floating fields and multipass GPF and Elionix: earlier versions did grow the extent (symmetrically); with v4.7, the extent is not grown anymore Jeol and VEP: If the extent has to be grown (because of a field partially outside of the extent) than it is grown by a full field size (was half field before). That keeps for manual fields the position of the remainder fields. Importing of machine formats maintains the extent including the individual field extents Extract, Merge, Size, FDA, Filter maintain cell-extent WARNING: The extent change may lead to changed position of field cuts when using manual fields. Please check your sensitive flows using manual field positioning. Thursday, July 3, 2014 BEAMER Raith/Vistec 14
15 PEC MODULE ENHANCEMENTS Thursday, July 3, 2014 BEAMER Raith/Vistec 15
16 The PEC Module Dialog Thursday, July 3, 2014 BEAMER Raith/Vistec 16
17 Layer Specific Correction Specific layers can be corrected. The influence of other shapes on layers that are not defined in the list will not be considered in the correction. This feature facilitates the processing of region layers used for manual field control. See the following example. Thursday, July 3, 2014 BEAMER Raith/Vistec 17
18 PEC + Field Control by Layer PEC only Layers 100 and 101 Defined Field Position by Region Layers Thursday, July 3, 2014 BEAMER Raith/Vistec 18
19 PEC + Field Control by Layer v4.6 Thursday, July 3, 2014 BEAMER Raith/Vistec 19
20 PEC with Layer Selection v4.7 Thursday, July 3, 2014 BEAMER Raith/Vistec 20
21 Layer Specific Correction We correct specific layers only Thursday, July 3, 2014 BEAMER Raith/Vistec 21
22 PSF Viewer Short Range Mid-Range Long Range New PSF Viewer dynamically illustrates the chosen PSF. If a user changes the Effective Short Range Blur, short range separation, and/or midrange activation threshold, the PSF is redrawn accordingly. Thursday, July 3, 2014 BEAMER Raith/Vistec 22
23 Start w/ 10nm Blur 10nm Blur Thursday, July 3, 2014 BEAMER Raith/Vistec 23
24 Change to 30nm Short Range grows 30nm Blur Thursday, July 3, 2014 BEAMER Raith/Vistec 24
25 Mid-Range Adjustment 50nm SR Separation Value Mid-range grows Thursday, July 3, 2014 BEAMER Raith/Vistec 25
26 Minimum Dose Factor Lowest Doses are now pushed to the specified minimum dose factor. The dose values below the specified minimum dose are merged to the minimum dose class without adjusting the influence to neighbors. WARNING: The correction result has changed from the previous BEAMER version. The minimum dose was ignored for the long range correction in v4.6. In v4.7, the minimum dose limit is adjusted for both LR and SR correction. Thursday, July 3, 2014 BEAMER Raith/Vistec 26
27 PEC Min. Figure Size v4.6.x Thursday, July 3, 2014 BEAMER Raith/Vistec 27
28 SR + LR Min. Figure Size (MFS) The LR and SR minimum figure size (MFS) can be defined separately to optimize the shape count. Thursday, July 3, 2014 BEAMER Raith/Vistec 28
29 SR + LR Specific Correction Under the Advanced tab, shapes assigned to specific layers can be Short Range (SR) or Long Range (LR) corrected. Thursday, July 3, 2014 BEAMER Raith/Vistec 29
30 Fine fractures by SR PEC (v4.6) Using short range correction requires a small minimum figure size (MFS) which allows local dose modulation The small MFS is applied on the whole pattern regardless of figure size Structure for SR PEC Large structure Thursday, July 3, 2014 BEAMER Raith/Vistec 30
31 Fracture Results in v4.6 Critical structures are finely corrected The small MFS is also applied to the large pads Thursday, July 3, 2014 BEAMER Raith/Vistec 31
32 Min. Figure Size v4.6 28,032 Shapes Thursday, July 3, 2014 BEAMER Raith/Vistec 32
33 Advanced Min. Figure Size v4.7 1,281 Shapes Thursday, July 3, 2014 BEAMER Raith/Vistec 33
34 MFS Control w/ SR+LR PEC Huge reduction in shape count is realized using the Layer specific SR+LR PEC in v4.7 with advanced minimum figure size (MFS) control. Thursday, July 3, 2014 BEAMER Raith/Vistec 34
35 VISTEC GPF SEQUENCES Thursday, July 3, 2014 BEAMER Raith/Vistec 35
36 Vistec Sequences v4.6 Small circles and rings can now be generated using Vistec sequences. Thursday, July 3, 2014 BEAMER Raith/Vistec 36
37 Sequences from v4.6 Courtesy: IMEL Demokritos, Greece Thursday, July 3, 2014 BEAMER Raith/Vistec 37
38 Vistec Sequences v4.7 With BEAMER v4.7.0, a first implementation of Sequences for arbitrary polygons The usage of this feature requires that you update to the latest software version for your GPF tool! Thursday, July 3, 2014 BEAMER Raith/Vistec 38
39 Fracturing and Sequences Thursday, July 3, 2014 BEAMER Raith/Vistec 39
40 Circles and Sequences Circles are still converted to sequences as in v4.6. Thursday, July 3, 2014 BEAMER Raith/Vistec 40
41 Sleeving and Sequences Arbitrary polygons are also automatically sleeved with sequences. The shots are positioned to the subfield resolution for accurate and smooth edges. Thursday, July 3, 2014 BEAMER Raith/Vistec 41
42 Shot Fill Accuracy LRFT + Trapezoid filling 5 sleeves of sequences (accurate shot placement) Thursday, July 3, 2014 BEAMER Raith/Vistec 42
43 Curved Shapes + Seq. Sleeving Thursday, July 3, 2014 BEAMER Raith/Vistec 43
44 Without Sequences v4.7 Thursday, July 3, 2014 BEAMER Raith/Vistec 44
45 With Sequences 4.7 Thursday, July 3, 2014 BEAMER Raith/Vistec 45
46 Summary Productivity Enhancements GDSII Import Multiple Top Cells Speed-up Advanced TXL Extract Multiple Cells PEC + Fracturing Enhancements Selective Correction by Layer PSF Viewing Minimum Dose Advanced PEC LR+SR Min. Figure Size Raith/Vistec GPF Sequences Thursday, July 3, 2014 BEAMER Raith/Vistec 46
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