High-Flow Mass Flow Meter

Transcription

1 No. CP-SS-789E High-Flow Mass Flow Meter Overview The mass flow meter incorporates thermal microflow sensors developed by Azbil Corporation, providing measurement of gas with high accuracy, wide measurement range, and high reliability. The tiny flow velocity sensors are made by utilizing silicon micromachining technology. By integrating these sensors with advanced channel design technology, it was possible to achieve new levels of accuracy, high rangeability of 6:, and minimum flow rate sensitivity of 8:. Features Because the is a thermal mass flow meter, temperature and pressure do not affect the measurements. No expensive temperature and pressure compensation device is needed, realizing a significant cost reduction. The functions include LCD display, analog output, totalization, totalizer pulse output, and alarm output, making the flowmeter usable for various applications. Communication capability is also provided as a standard function, allowing a substantial reduction in instrumentation costs. To cover high and low flow rate ranges, two sensors for each range are mounted 9 apart on the wall of the gas flow path. By switching between the sensor groups according to the flow rate range, the can achieve high accuracy (± % rdg.) and high rangeability (6:) in flow rate measurement. Because of its structure, which minimizes pressure loss (.9 kpa max. when the inlet pressure is 5 kpa), energy loss in measurement can be reduced. With the photoelectric touch sensor switches, settings of the device can be changed without opening the case. Models for various flow rate ranges are available. Diameter 5A: 6 m 3 /h (normal*) 8A: 4 m 3 /h (normal*) A: 65 m 3 /h (normal*) 5A: 6 m 3 /h (normal*) * Normal refers to the volumetric flow rate converted to the conditions of C and.35 kpa ( atm). Specifications Item Measurable gases Flow rate range (for air/nitrogen use) Measurement accuracy (overall accuracy including repeatability) Minimum measurable flow rate Temperature characteristics (for air) Pressure characteristics (for air) Operating pressure range Description Air/nitrogen, argon, natural gas 3A (LNG * ), propane,* butane,* 3 carbon dioxide, oxygen Note: The gas must not contain corrosive components (chlorine, sulfur, or acid). 6 m 3 /h (normal) 4 m 3 /h (normal) 65 m 3 /h (normal) 6 m 3 /h (normal) Normal refers to the volumetric flow rate converted to the conditions of C and.35 kpa ( atm). The accuracy depends on the range of measured flow rate (X m 3 /h (normal)).. X < 8. ±3 % rdg. 8. X 6. ± % rdg..5 X <. ±3 % rdg.. X 4. ± % rdg. 4. X < 3.5 ±3 % rdg. 3.5 X 65. ± % rdg.. X < 8. ±3 % rdg. 8. X 6. ± % rdg.. m 3 /h (normal).4 m 3 /h (normal).6 m 3 /h (normal).3 m 3 /h (normal).5 % rdg./ C (-5 to +6 C). % rdg./. MPa ( to. MPa) to (but not including). MPa Sampling cycle 6 ms ± % Output signal Contact output (3) Specifications Instantaneous flow rate output: 4 ma DC (allowable load resistance: 6 Ω max.) 3. ma max. Output resolution: /5 (approx. 4 μa), output accuracy: ±. % FS (FS: 6 ma) SPST relay contacts (shared common terminal) Contact rating: 5 V AC / 3 V DC, 3 A max. (resistive load) Minimum open/close load: mv DC, μa

2 Contact output (3) Totalizer pulse output () External contact input function Item Description Function Event No. Function (assignment unchangeable) Setting range Operating differential ON delay EV Instantaneous flow rate high Display range for to m 3 /h, changeable to 6 s, limit instantaneous flow rate changeable EV Instantaneous flow rate low limit Instantaneous flow rate low limit: same as EV or pressure drop Pressure drop: to kpa (in increments of kpa) EV3 Alarm output (self-diagnostic function) Pulse output Open collector Contact rating: 3 V DC, 5 ma max. (P) Pulse weight: L/pulse, L/pulse, L/pulse (selectable by the keys) Pulse frequency:.3 to 53 Hz Pulse width: 9.5 to ms (duty ratio is always 5 %) Pulse output (P) Input specifications Open collector Contact rating: 3 V DC, 5 ma max. Pulse weight: L/pulse (unchangeable) Pulse frequency:.78 to 533 Hz Pulse width:.95 to ms (duty ratio is always 5 %) Required circuit type: Nonvoltage contacts or open collector Terminal voltage (contacts OFF): 3.5 ± V Terminal current (contacts ON): approx..5 ma (current to contacts) Allowable ON contact resistance: 5 Ω max. Allowable OFF contact resistance: 5 kω min. Allowable ON residual voltage:.8 V max. (for open collector) Allowable OFF leakage current:.8 ma max. (for open collector) Number of inputs Function Dedicated for total flow count reset Communications RS-485 interface, 5-wire system Maximum wiring distance: 3 m Connection to CMC5G is possible. Communication speed: 96/48 bps Total flow, instantaneous flow rate, and alarms can be read out. Display and Flow rate indication Instantaneous flow rate indication: 4 +-digit LCD. Total flow indication: 7 +-digit LCD setting Indication range. to 9. m 3 /h. to 48. m 3 /h. to 78. m 3 /h. to 9. m 3 /h section for instantaneous (normal) (normal) (normal) (normal) flow rate Total flow Indication unit.m 3 Indication range to (7 + digits) Data storage Automatic backup at power-off Pressure indication The approximate pressure inside the can be indicated. Indication range: to MPa, resolution: kpa, accuracy: ±5 kpa Temperature indication The approximate temperature inside the can be indicated. Indication range: - to +6 C, resolution: C, accuracy: ±3 C Status indication Instantaneous flow rate / total flow / setup Setting section Four photoelectric touch sensor switches are built in (for specifying various settings) Rated voltage to 4 V AC, 5/6 Hz Supply voltage range 85 to 64 V AC, 5/6 Hz Power consumption VA max. Mounting orientation Horizontal/vertical (depending on the model) Operating temperature -5 to +6 C Storage temperature -3 to +7 C Operating humidity to 9 % RH (without condensation) Connection rating JIS K RF Pipe size 5A (B) 8A (3B) A (4B) 5A (6B) Required straight pipe length See Straight pipe section on page 4. Main unit and gas-contacting Main unit: SUS34/SCS3A, flow straightening section: SUS63 materials O-ring material Neoprene (Viton for degreased models) Case material Aluminum alloy Case coating material Acrylic resin corrosion-resistant coating Color: light beige (Munsell 4Y7./.3) Wiring port G / female thread with a waterproof gland Display and setting Tempered glass, 5 mm thick section glass material Protective structure IP65 (JIS C 9 and IEC 59, waterproof and dust-proof structure premised on outdoor use) Weight (kg) * For natural gas 3A, the device is calibrated based on either of the following gases (gas type can be changed by the keys) For other types of natural gas, please contact the azbil Group. Function setup mode Gas type (as used by Calorific value Methane (%) Ethane (%) Propane (%) Butane (%) Azbil Corporation) (MJ) 4 Natural gas 3A-46MJ Natural gas 3A-45MJ * If propane is selected, the device is calibrated based on a reference gas of 98 % propane and % isobutane. *3 If butane is selected, the device is calibrated based on a reference gas of 98 % butane and % propane. For a gas with a different composition, a change in the factory defaults might be necessary. Please contact the azbil Group.

3 Internal Structure Converter Built-in filter (upstream) All models are equipped with this filter for protection of the device. Do not remove it in normal operation. Detector Flow direction Wire mesh Honeycomb Microflow sensor Built-in filter (downstream) All models are equipped with this filter for protection of the device. Do not remove it in normal operation. If dust, oil, or water accumulates on the wire mesh and flow sensors, measurement error or device failure may result. See Filters and make sure to install a filter of an appropriate type. The built-in filters are for temporary protection from dust during installation of the device. If there is a possibility that dust will usually enter the device, make sure to install an additional filter. Piping Precautions for piping work This device is a precision instrument. If even a small amount of foreign matter like dust, moisture, or oil mist enters the device, measurement error or device failure may result. During piping work, follow the instructions below to keep foreign matter out of the device. When installing the device, be sure to provide bypass piping as shown below. Also, valves both before and after the device should be of a type that does not disturb the gas flow, such as ball valves. Spare filter element for FC filters (manufactured by Azbil Corporation) Pipe size 5A 8A A 5A Part No FDSNC filter (manufactured by Azbil Kimmon) Operating pressure range: to.98 MPa Filter element: A special element if incorporated. () Upstream piping (3) Downstream piping () Be sure to install a filter (see Filters ) upstream of the device. () Before installing the device, thoroughly flush the inside of piping that is upstream and downstream of this device to remove welding fumes and dust. (3) Thoroughly clean the inside of piping that is directly connected to the device. (4) After steps () and (3), make sure that there are no welding fumes and dust before installation. Filters If foreign matter in the gas adheres to one of the s sensors, faulty operation or errors may result. Be sure to install one of the following filters. () Filters for natural gas FC filter (manufactured by Azbil Kimmon) Operating pressure range: to.3 MPa Filter element: A special element made by Azbil Corporation is incorporated. FDSNC filter (manufactured by Azbil Kimmon Co., Ltd.) Spare filter element for FDSNC filters (manufactured by Azbil Corporation) Pipe size 5A 8A A 5A Part No MFF3 series Operating pressure range: to. MPa Filter element: A special element if incorporated. FC filter (manufactured by Azbil Kimmon) Y filter L filter () For a gas that always contains oil mist (e.g., compressed air, propane, butane), be sure to install a mist separator. Model No.: MFF series (3) For nitrogen, argon, carbon dioxide, if pipe rust or welding fumes may enter the device, install a type of filter described in (). Note that the filters are not degreased. 3

4 Straight pipe section Install straight pipe lengths upstream and downstream of the device. Refer to the figures below for the required straight pipe length. D represents the pipe s internal diameter. If the pipe and the flowmeter have the same internal diameter, a downstream straight pipe is not needed. Upstream FC filter (manufactured by Azbil Kimmon) L filter No straight pipe section is needed. No straight pipe section is needed. Y filter 9 elbow No straight pipe sectio is needed. No straight pipe section is needed. T-piping MFF filter 5D min. No straight pipe section is needed. Fully open gate valve Conical expander with an angle of more than 5 (A pipe section with an angle of less than 5 angle is considered to be a straight pipe section.) Other valves 5D min. 5D min. Reducer (considered to be a straight pipe section) 5D min. 5D min. 4

5 Model Selection Standard models I II III IV V VI VII VIII IX X XI XII XIII Example: 8SJND I II III IV V VI VII VIII IX X XI XII XIII Description Basic model No. Pipe size Type Material Gas type Output Power Comm. Direction Option High-flow mass flow meter 5 Pipe size: 5A (B) 8 Pipe size: 8A (3B) Pipe size: A (4B) 5 Pipe size: 5A (6B) Operating pressure range: to MPa S Main unit material: SUS34/SCS3A J JIS K RF flange N Air/nitrogen, 3 4 to ma DC output with pulse output F Multi-voltage power supply 85 to 64 V AC, 5/6 Hz RS-485 communications Horizontal (left to right flow) Horizontal (right to left flow) Vertical (bottom to top flow) 3 Vertical (top to bottom flow) None Degreasing for gas-contacting parts D With inspection report Y Option for model D + traceability certificate K Option for model Y + flowmeter calibration certificate Product version Oxygen models I II III IV V VI VII VIII IX X XI XII XIII Example: 8SJSD I II III IV V VI VII VIII IX X XI XII XIII Description Basic model No. Pipe size Type Material Connection Connection Gas type Output Power Comm. Direction Option High-flow mass flow meter 5 Pipe size: 5A (B) 8 Pipe size: 8A (3B) Pipe size: A (4B) 5 Pipe size: 5A (6B) Operating pressure range: to MPa S Main unit material: SUS34/SCS3 J JIS K RF flange S Oxygen 4 to ma DC output with pulse output F Multi-voltage power supply 85 to 64 V AC, 5/6 Hz RS-485 communications Horizontal (left to right flow) Horizontal (right to left flow) Vertical (bottom to top flow) 3 Vertical (top to bottom flow) Degreasing for gas-contacting parts D With inspection report Y Option for model D + traceability certificate K Option for model Y + flowmeter calibration certificate Product version Notes. Gas type and flow rate range Gas type Gas type setting Flow rate range [m 3 /h (normal)] S Air/nitrogen to 6 to 4 to 65 to 6 Oxygen * to 6 to 4 to 65 to 6 Carbon dioxide (CO) to to 3 to 48 to Argon 3 to 6 to 4 to 65 to 6 Natural gas 3A (46MJ) * 4 to 6 to 4 to 65 to 6 Natural gas 3A (45MJ) * 9 to 6 to 4 to 65 to 6 Propane * 6 to 6 to 4 to to 5 Butane * 5 to 5 to to 9 to 48 * ": Oxygen" can be selected only for oxygen models. * For the composition of the gases, see * to *3 on page.. Select the flow direction from the following four options. With vertical mounting, the LCD is beside the piping. Option Option Appendix Appendix Horizontal mounting, left to right flow 3. Gas type can be specified at the time of ordering. Horizontal mounting, right to left flow Vertical mounting, bottom to top flow Vertical mounting, top to bottom flow 5

6 Function Settings Item Function Factory default S- Key lock* S- Display mode S-4 Event setting (EV) S-5 On-delay setting (EV) S-6 On-delay setting (EV) S-7 Event standby S-8 Gas type selection* 3 (oxygen models) Settings Description Remarks S- Low flow cutoff 3 S-4 Pulse weight* S-5 Burnout Off On Displays only instantaneous flow rate. Displays instantaneous flow rate and total flow. Displays instantaneous flow rate, total flow, pressure, and temperature. Instantaneous flow rate low limit event Pressure drop event Not used Used Not used Used Not used Used Air/nitrogen Oxygen Carbon dioxide (CO ) Argon Natural gas 3A (LNG) 46MJ Butane Propane Natural gas 3A (45MJ) No deadband Qmax (/8) Qmax (/3) Qmax (/6) L/pulse L/pulse L/pulse Downscale Upscale S-3 Station address to 7 : Communication disabled to 7: Station address S-3 Transmission speed S-3 Data format 96 bps 48 bps 8-bit data, even parity stop bit 8-bit data, no parity stop bits * If S-: Key lock is set to : On, S- to S-3 cannot be displayed or specified. Note that parameters P - to P-6 also cannot be displayed or specified. If the setting for S- is changed to : Off, all functions and parameters can be displayed and specified. Even if the key lock is turned on and off repeatedly, function settings and parameters will be retained. * If gas type or pulse weight is specified by the customer, the setting will be set as a factory default. When keys are locked, functions S- to S-4 and parameters P- to P-8 cannot be specified and the settings cannot be checked. To display the temperature or pressure, press the and keys. Specify a value for parameter P-. Specify a value for parameter P-. EV is for the instantaneous flow rate high limit output. (other functions cannot be assigned) EV is for the instantaneous flow rate high limit output or pressure drop event output. (other functions cannot be assigned) Only for EV For oxygen models, the default setting is : Oxygen. Qmax is the maximum value in the flow rate range. For totalizer pulse output (P). The pulse weight for totalizer pulse output (P) is always L/pulse. If downscale is selected, approx.. ma is output. For upscale, the value set for parameter P-5 is output. If is set for the address, communication will be disabled. Set a unique address for each slave station. Set a speed that is appropriate for the communicating device. Set a speed that is appropriate for the communicating device. Parameter List Parameter No. Name Factory default Setting range P- Event (EV) 6 (5) to 9999 m 3 /h 4 (8) 65 () 6 (5) P- Event (EV) to 9999 m 3 /h P-3 EV hysteresis to m 3 /h P-4 EV hysteresis to m 3 /h or kpa P-5 EV on-delay to 6 (s) P-6 EV on-delay to 6 (s) P-8 Gas type conversion factor.. to 45. (%) P- Reference temperature to 35 C P- Pressure drop event (EV) to kpa P-5 Burnout value 5 to 5 % P-6 4 ma output span * to 9999 m 3 /h * If 4- ma output span is specified by the customer, the setting will be set as a factory default. 6

7 MODE EV EV EV3 Mass kpa 3 m/h l/min 3 m ENT External Dimensions (Unit: mm) 5 (pipe size: 5A) La Lb 8 (pipe size: 8A) La Lb Db Da Db Da Meter Flow h 4-φ9 φ5 φ h φ55 5A-JISKRF L 8A-JISKRF L Note: Three waterproof glands are attached to the wiring ports in the above figures. (pipe size: A) La Lb 5 (pipe size: 5A) La Lb Db Da Db Da h h A-JISKRF L Note: Three waterproof glands are attached to the wiring ports in the above figures. 5A-JISKRF Note: Three waterproof glands are attached to the wiring ports in the above figures. L Symbols L h La Lb Da Db Dimensions Face-to-face Height Converter length from the center, terminal box side Converter length from the center Converter depth (front) Converter depth (back)

8 Filters FC filter (manufactured by Azbil Kimmon) (Unit: mm) 5A 55 5 Space for maintenance: at least A Space for maintenance: at least A Space for maintenance: at least φ Space for maintenance: at least A

9 Spare filter element for FC filters (manufactured by Azbil Corporation) (Unit: mm) (5A) Perforated metal φ94 φ56 6 (6) (8A) Perforated metal (A) Perforated metal (5A) Perforated metal φ48 φ6 φ7 φ6 φ3 φ8 6 () (44) (46)

10 FDSNC filter (manufactured by Azbil Kimmon Co., Ltd.) (Unit: mm) 5A φ39 8 φ Flow direction 8A φ46.4 φ67.5 Flow direction A Flow direction 5A 4 Flow direction

11 MFF3 L filter (Unit: mm) 5A 5 8A 33 5A-JISK.RF (SS4) 8A-JISK.RF (SS4) Weight: approx. kg Weight: approx. 4 kg A 5A A-JISK.RF (SS4) 5A-JISK.RF (SS4) A-JISK.RF (SS4) 85 8A-JISK.RF (SS4) A-JISK.RF (SS4) Weight: approx. 47 kg 7 8 5A-JISK.SO.RF (SS4) Weight: approx. 9 kg MFF3 Y filter 5A 37 5A-JISK.RF (SS4) 8A 48 8A-JISK.RF (SS4) 55 5 Weight: approx. kg Weight: approx. 44 kg A 5A 53 A-JISK.RF 7 (SS4) A-JISK.RF (SS4) Weight: approx. 5 kg Weight: approx. kg

12 Terminal Layout External wiring example 9 FG 8 ACL Power circuit 7 6 ACN Terminals 7 and 9 are connected with a jumper. Multi-voltage power 85 to 64 V AC, 5/6 Hz 5 GND 4 P Totalizing counter, etc. Totalizing counter, etc. Pulse output circuit 3 P SG DC power (3 V max.) IN Input circuit Total flow count reset input SDB RS-485 communication circuit SDA RDB RDA Connect a terminating resistor (5 Ω, / W) to use communication functions. RS-485 communication device (Terminating resistors are not included with the.) EV COM 6 Relays EV to EV3 5 4 EV3 EV Load at EV3 output Load at EV output Load at EV output DC power (3 V max.) or AC power (5 V max.) 3 EV I 4 ma output circuit Internal power 4 V DC Internal power GND I+ 5 Ω resistor or 4 ma input device Terminal block Frame ground GND P IN SDA RDA EV3 EV I+ POWER AC L N P S.G. SDB RDB EV COM EV I * { Terminal Symbols Description No. I+ 4- ma instantaneous flow rate output (+) 3 EV Event output (instantaneous flow rate high limit) 5 EV3 Self-diagnosis output 7 RDA RS-485 communications 9 SDA RS-485 communications IN Total flow count reset input 3 P Totalizer pulse output (pulse weight can be selected from,, L/pulse) 5 GND Total flow output, reset input common 7 Internal GND (wiring not required) 9 Frame Ground ground * Terminals 7 and 9 are connected with a jumper. Terminal Symbols Description No. I 4 ma instantaneous flow rate output (-) 4 EV Event output (instantaneous flow rate low limit) 6 EV COM Event output common 8 RDB RS-485 communications SDB RS-485 communications S.G. RS-485 communications 4 P Totalizer pulse output (pulse weight is always L/pulse) 6 ACN Power 8 ACL Power There is no isolation between any inputs and outputs. An internal power is provided for 4 ma output, so external power supply and distributer are not required. Use a terminating resistor of 5 Ω and / W for RS-485.

13 Pressure Loss (flow rate and pressure loss characteristics) With the upstream and downstream built-in filters mounted The graphs below show the data for air. Inlet pressure: 5 kpa G Inlet pressure: 3 kpa G Inlet pressure: 5 kpa G Inlet pressure: 7 kpa G If a gas other than air is used, multiply the value by the specific gravity in the table below. Specific gravity of gases (when air =.) Argon.38 Carbon dioxide.53 Natural gas 3A (88 % methane).64 % propane.56 % butane.8 Example: The pressure loss of the 5 for natural gas 3A at inlet pressure: 7 kpa and flow rate: m 3 /h (normal) In the Inlet pressure: 7 kpa G graph, the pressure loss for air is approx.. kpa when the flow rate is m 3 /h (normal). The pressure loss for natural gas 3A is calculated as follows:. kpa.64 (specific gravity) =.768 kpa. 3

14 With the upstream built-in filter mounted The graphs below show the data for air. Inlet pressure: 5 kpa G Inlet pressure: 3 kpa G Inlet pressure: 5 kpa G Inlet pressure: 7 kpa G

15 With the upstream and downstream built-in filters removed The graphs below show the data for air. Inlet pressure: 5 kpa G Inlet pressure: 3 kpa G Inlet pressure: 5 kpa G Inlet pressure: 7 kpa G If a gas other than air is used, multiply the value by the specific gravity in the table below. Specific gravity of gases (when air =.) Argon.38 Carbon dioxide.53 Natural gas 3A (88 % methane).64 % propane.56 % butane.8 Example: The pressure loss of the 5 for natural gas 3A at inlet pressure: 7 kpa and flow rate: m 3 /h (normal) In the Inlet pressure 7 kpa G graph, the pressure loss for air is approx..7 kpa when the flow rate is m 3 /h (normal). The pressure loss for natural gas 3A is calculated as follows:.7 kpa.64 (specific gravity) =. kpa. 5

16 Filter installation If oil, moisture, or dust is contained in the fluid, install a device such as a filter that can remove the foreign matter. If foreign matter is included, measurement error or device failure may result. - Remove moisture using a dryer to prevent condensation in the pipe. - If a dust filter is used, the mesh size must be μm or smaller. - If a mist separator is used to remove oil, the concentration of residual oil content must be. mg/m3 or less. This device may be installed outdoors, but it is advisable to shield it from direct sunlight. The temperature of the device will rise in direct sunlight, possibly causing malfunction or device failure. Do not install the device where it is subject to a pulsating flow or uneven flow. Do not install the device near the outlet of a compressor. Compressor Compressor (screw type, etc.) Air tank Filter Dryer Mist separator Receiver tank Flow is greatly uneven near the outlet of a compressor and, depending on the compressor type, iron powder, etc., may be dispersed, which can result in the failure of this device. As shown in the above figure, install a filter for eliminating foreign matter such as oil, moisture, and iron powder. In addition, to avoid the influence of uneven flow, install the on the other side of an intermediary object such as a receiver tank. Take sufficient countermeasures if the device is installed near a pump or roots blower that causes a pulsating flow. If the device is installed near a pump, it may be affected by a pulsating flow. In this case, install a volume tank, etc., between the pump and the flow meter to minimize the influence of pulsation. If the device is installed downstream of branched piping, it may mistakenly detect a flow because of effects from a reverse flow, etc. Take the following countermeasures. Example: Line A is in use and line B is not in use. The should detect a flow rate of for line B, but due to the effect of the flow in line A, it detects a false flow rate and increments the amount of total flow. A B Countermeasure Valve Valve Install a valve on both lines upstream of the and close the valve of the unused line to avoid influence from the flow in the other line. A B Countermeasure Design the system so that the equipment upstream ignores the output from the (4 ma or pulse) on the unused line. 6

17 Instructions for Proper Use If foreign matter enters the device, failure may result. Before piping work, purge and thoroughly clean the inside of the piping that is upstream and downstream of the to remove welding fumes and dust. Purge the piping only after removing the from it. Be sure to install bypass piping. Each model is designed for specific gases. Do not use the device for a fluid other than the gases specified for the model. If this device is used for a gas with an ignition temperature lower than the specified gases, and if air should enter the piping, turning the gas into an explosive mixture, the heating element in the sensor may cause an explosion inside the piping. Once an oxygen model is used for some other type of gas, do not use it for oxygen again. If it must be used for oxygen, an overhaul is required at our factory (fee-based). Built-in filters Filters are built in on the upstream and downstream sides of the. These filters are not for removing dust that continually enters the device. If a large amount of dust accumulates, the pressure loss will increase, blocking the gas flow and damaging the filters. If there is a possibility of dust constantly entering the device after piping work, be sure to install an additional filter on the upstream side. See page 3 for additional filters. 7

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20 Please read Terms and Conditions from the following URL before ordering and use. Specifications are subject to change without notice. -- Kawana, Fujisawa Kanagawa 5-85 Japan (3) st edition: Nov. 7 No part of this publication may be reproduced or duplicated without the prior written permission of Azbil Corporation.