Sensorik für Inertiale Messtechnik

Size: px

Start display at page:

Download "Sensorik für Inertiale Messtechnik"

Janel Copeland
5 years ago
Views:

1 Sensorik für Inertiale Messtechnik Daniel Meisel Robert Bosch GmbH NAVIGARE

2 Outline The Bosch Group Automotive MEMS Inertial Sensors Automotive Applications Technology Packaging and Roadmaps Bosch MEMS for Consumer Electronics 2

3 Bosch - Three business sectors Automotive Technology Industrial Technology Consumer Goods and Building Technology 3

4 Global presence Development, manufacturing, and service network across 126 locations in 29 countries Europe: 62 production sites in 17 countries Americas and Africa: 22 production sites in 4 countries Asia Pacific: 42 production sites in 8 countries We have a global-local presence: we are present wherever our partners need us, and that means we understand our customers, and markets. As of January 1,

5 Outline The Bosch Group Automotive MEMS Inertial Sensors Automotive Applications Technology Packaging and Roadmaps Bosch MEMS for Consumer Electronics 5

6 Product portfolio Automotive market AE products Multimarket ECUs, mechatronics sensors safe MEMS sensors Consumer Electronics more economical ebike semiconductors 6 more comfortable MEMS: Micro-electromechanical systems Photovoltaics

Wafer fab in Reutlingen Employees 2 758 Production area Minifactories Products 34 300 sqm Wafer fab, sensor frontend, sensor backend, test center IC, power S/C (chip and packaged), sensors (packaged,

7 Wafer fab in Reutlingen Employees Production area Minifactories Products sqm Wafer fab, sensor frontend, sensor backend, test center IC, power S/C (chip and packaged), sensors (packaged, customer specific mold package) 150 mm module 200 mm module sqm wafers/day Technologies: BCD1, 2, 3, 3s, 4, 4s CMOS, Bipolar, PSC bipolar, MOS Pressure sensors Inertial sensors Process: 0.5 µm sqm 800 wafers/day Technologies: BCD4, 4s, 6, 6sCu Advanced CMOS, HVCMOS Pressure sensors Inertial sensors Process 0.18 µm 7

8 Outline The Bosch Group Automotive MEMS Inertial Sensors Automotive Applications Technology Packaging and Roadmaps Bosch MEMS for Consumer Electronics 8

Benefits: Safe 110% 100% 51 314 000 Relative changes in % 90% 80% 70% 320 614 409 066 60% 50% Registered vehicles Accidents w/ injuries

9 Benefits: Safe 110% 100% Relative changes in % 90% 80% 70% % 50% Registered vehicles Accidents w/ injuries Fatalities Injured Source: Statistisches Bundesamt (Fachserie 8, Reihe 7, 2008) and Bosch 9

10 Sensors for braking systems Differential Pressure Sensor DS-Dx Inertial Sensor DRS Steering Angle Sensor LWS Pedal Travel Sensor PWG Pressure Sensor DS Wheel Speed Sensor DF 10

11 ESP system - working principle Understeering Oversteering Angular rate sensor: Full scale: ± 100 /s Resolution: ~ 0.1 /s 11

12 Rollover sensing system click here to view SMG10x-Rollover animation Airbag Control Unit with Integrated angular rate sensor Combined low-g sensor in y- & z-direction 12

13 MEMS Sensor MEMS = Micro-Electro-Mechanical System (Systems with mechanical structures in micrometer range and electronic structures, combined on a substrate or chip) Micromechanical sensor element ASIC e.g.: acceleration sensor 50 µm 13

14 Outline The Bosch Group Automotive MEMS Inertial Sensors Automotive Applications Technology Packaging and Roadmaps Bosch MEMS for Consumer Electronics 14

etching for release of the structures Thin film encapsulation for hermetical

15 5 Key Technologies developed by Bosch Growth of extremely thick layers of polysilicon High-precision and fast deep etching ( Bosch process ) Gas phase etching for release of the structures Thin film encapsulation for hermetical sealing APSM process exact vacuum cavities in silicon (Advanced Porous Silicon Membrane) 15

16 Micromachined gyroscope sensor chip 21

17 Outline The Bosch Group Automotive MEMS Inertial Sensors Automotive Applications Technology Packaging and Roadmaps Bosch MEMS for Consumer Electronics 22

Milestones in packaging technology Yaw rate

PLCC44 MM3 Silicon surface micromachining

SOIC16w MM4 SMM First ESPi sensor SMI540

18 Milestones in packaging technology Yaw rate sensors (VDC and RoSe) DRS50/100 Precisionmechanics metal housing (Electromechanical) MM1 BMM - Silicon bulk micromachining metal can (1 st gen.) SMG06x SMM Silicon surface micromachining PLCC44 MM3 Silicon surface micromachining (2 nd gen) PM20 MM3R SMM PM16 SMG10x SOIC16w MM4 SMM First ESPi sensor SMI540 SMM Comboinertial sensor for ESP in mold-package

(Automotive) 2002 SOIC14n (Automotive) 2006 4x4

19 Evolution of MEMS requirements Acceleration sensor packages PLCC28 (Automotive) 1996 SOIC16w (Automotive) 2002 SOIC14n (Automotive) x4 QFN (CE) x3 QFN (CE) x2 LGA (CE)

SMI540 Features Integration of angular rate (Ω z ) and two-axis acceleration sensors (a x /a y ) in one small standard mold package allowing cost-efficient system integration on PCB Small standard

20 SMI540 Features Integration of angular rate (Ω z ) and two-axis acceleration sensors (a x /a y ) in one small standard mold package allowing cost-efficient system integration on PCB Small standard SMD package for ease of mounting 16 bit digital output via Serial Peripheral Interface 27 Customer Benefits Superior signal performance and implemented self-tests enabling advanced system concepts for reliable safety relevant applications Excellent stability over temperature and lifetime Target Application Combined inertial sensor for active safety systems Vehicle Dynamics Control applications Combi-sensor for AB-ECU

high reliability/quality (15 years, < 1 ppm, extreme environmental conditions) 3.

21 Market drivers for MEMS sensors Automotive applications 1. high functional requirements (high accuracy, selftest, advanced safety concepts) 2. high reliability/quality (15 years, < 1 ppm, extreme environmental conditions) 3. low price Consumer applications 1. Low price (<< 1 EUR high volume) 2. Small size (~ 2 x 2 x 0.9 mm³) 3. Ultra-low power consumption (<< 125 µa) 28

22 Outline The Bosch Group Automotive MEMS Inertial Sensors Automotive Applications Technology Packaging and Roadmaps Bosch MEMS for Consumer Electronics 29

Bosch Sensortec Headquarters, Reutlingen Provides MEMS solutions for the consumer electronics market Strong technological foundation Strong global customer sales and application support In 2010,

23 Bosch Sensortec Headquarters, Reutlingen Provides MEMS solutions for the consumer electronics market Strong technological foundation Strong global customer sales and application support In 2010, Bosch Sensortec remained the fastest-growing company in the consumer accelerometer area, ahead of all its competitors in the consumer MEMS segment. isuppli, March 2011 Complete portfolio of relevant smartphone sensors 30

24 MEMS sensors a multitude of markets Mobile devices Security Gaming White goods Portable Computing Remote control DCS Logistics Appliances Sports 31

Product portfolio Gyroscopes Acceleration

sensors Very small LGA package Low power

in LGA housing Use case optimized products

geomagnetic sensor + 3-axis accelerometer

25 Product portfolio Gyroscopes Acceleration sensors ecompass Jan 2012 Nov 2011 Pressure sensors Very small LGA package Low power consumption Leading with smallest g- sensors in LGA housing Use case optimized products Sensor fusion in 3x3 mm² LGA package 3-axis geomagnetic sensor + 3-axis accelerometer Ultra low power Highest precision Software and sensor fusion 32

Consumer MEMS success story 2005 2006 2007 2008 2009 2010 2011 2012 First triaxial acceleration sensor World s smallest

Strongest growing consumer acceleration company Bosch receives German innovation and advanced technology prize First 2x2 mm

26 Consumer MEMS success story First triaxial acceleration sensor World s smallest digital pressure sensor World s smallest digital acceleration sensor Full portfolio of acceleration and pressure sensors Strongest growing consumer acceleration company Bosch receives German innovation and advanced technology prize First 2x2 mm acceleration sensor 6DoF ecompass in 3x3 World s smallest triaxial gyroscope in 3x3 Complete 6-14 Bit acceleration sensor portfolio in 2x2 33

27 Capability of consumer acceleration sensors Example: BMA180 from Bosch Sensortec digital triaxial acceleration sensor package LGA 3 x 3 x 0.9 mm³ resolution 0.25 mg (1G = earth s gravity) An airplane s tilt of 5 mm at the end of its wings can be detected! 34

28 All relevant sensors for smartphones + tablets Geomagnetic sensors Acceleration sensors Gyroscopes 6DoF 9DoF 10 DoF Pressure sensors Hybrid sensor fusion software for up to 10 degrees-of-freedom available 35

29 Thank you for your attention! 36

MEMS for automotive and consumer electronics

MEMS for automotive and consumer MEMS for automotive and consumer electronics Dr. Jiri Marek Senior Vice President Engineering Sensors Robert Bosch GmbH, Automotive Electronics 1 Automotive Electronics