Scott Veirs September Safety and Environmental Impact for SubFab Operations

Size: px

Start display at page:

Download "Scott Veirs September Safety and Environmental Impact for SubFab Operations"

David Griffith
5 years ago
Views:

1 Scott Veirs September Safety and Environmental Impact for SubFab Operations

2 In Collaboration with GLOBALFOUNDRIES New Leader in Foundry Technologies Fab 8, Malta NY 1

3 Motivation Ensure customer experience by providing reliable vacuum and abatement availability equipment design, implementation, and modifications as needed network monitoring for proactive and predictive maintenance These actions reduce impact on the environment and improve safety

4 Pump and Abatement System Overview chamber Pump produces the chamber s vacuum condition Abatement treats chamber s process waste abatement pump 3

5 ixh Pump for Harsh Duty Designed for extremely harsh processes Controlled temperature profile Selective gas dilution Large interstage ports with short gas paths Multi-parameter monitoring of performance

6 Atlas Abatement for Harsh Duty Designed for extremely harsh processes Selective gas injection to enhance DRE Effectively destroys precursors Destruction of greenhouse gases Multi-parameter monitoring of performance

Corrosion resistance Minimal restrictions Atlas Kronis

7 Integrated Sub-fab System for SACVD EZenith - Integrated sub-fab system ixh1220ht SACVD Temperature control Torque Corrosion resistance Minimal restrictions Atlas Kronis Proven DRE Powder handling Process step specific operation 6

8 Simple System Architecture for SCADA FabWorks System Customer PCs FabWorks viewable in web browser Fab Network Tool Network Edwards FabWorks SCADA Data Collection and monitoring EADS Process specific algorithms Edwards Advanced Diagnostic Systems Prescribed alerts to targeted users before normal warning or alarm levels are achieved AutoPager Automatic messaging for tool alerts Messages can be targeted to individual users and can be filtered for specific tools and schedules 7

Edwards Powder Handling Project Improve waste removal and treatment from process chamber Harsh duty processes make large quantities of by-products Can form blockages in pumps and

9 Edwards Powder Handling Project Improve waste removal and treatment from process chamber Harsh duty processes make large quantities of by-products Can form blockages in pumps and abatement Increases risk of unplanned maintenance impacts manufacturing Hazardous waste accumulation Exposure risk to service team Increases materials usage Pumps, abatement parts, consumables 8

10 Flow Control Orifice Heating BEFORE AFTER Improved MTBS from 30 to >180 days Eliminated pump failures Eliminated exposure to this hazardous material 10

11 Inward Fired Combustor 6 The Atlas uses a porous ceramic wall flameless combustion system. Provides and inward fired flow Standard height is 6 Blockages can occur from powder impaction in the liner 11

12 Powder Impaction in Ceramic liner Decreases MTBS/MTBF Increases accumulation of hazardous waste Hazard exposure, especially critical if toxics present Increases materials usage Ceramic liner and consumables 12

13 Inward Fired Combustor Modification 3 Reduced 6 height to 3 Decreases area for impaction Prevents nucleation Increases liner gas velocity Pushes powder away 13

14 Powder Impaction in Ceramic liner Prevention BEFORE AFTER Improved MTBS from 14 to >90 days Eliminated corrective maintenance Increased liner life and reduced materials usage Significantly reduced exposure to hazardous material 14

15 Information Used to Manage Sub Fab Operation In addition to hardware changes, equipment information can also reduce environmental impact and improve safety Maintain system as needed Minimize exposure to hazardous materials Prevent damage to equipment Chamber back-streaming Example from GLOBALFOUNDRIES follows Predictive pump and abatement maintenance APC 2013 at The University of Michigan 15

16 Josh Ratchford, Antonio Serapiglia, Michael Mooney, Scott Veirs and Bill Shumek EDWARDS Val Parks and Matthew Kowalski GLOBALFOUNDRIES Predictive Maintenance and Contamination Control

17 Content Overview Integrated Edwards EZENITH FabWorks Edwards Advanced Diagnostic Services (EADS) Predictive pump and abatement maintenance EADS Trial on CVD processes at GLOBALFOUNDRIES Results Summary and Conclusions 17

18 Overview CVD Process with Large Flows CVD processes Can challenge equipment reliability Cause wafer scrap, chamber dusting, etc. Specially designed subfab systems Chamber The Vacuum System Inside Tool Frame Isolation / throttle valve Process chamber Valves Piping Line heating Seals Dry pump Abatement Continuous equipment monitoring and proactive maintenance Supported by Edwards Advanced Diagnostic Service (EADS) Predictive maintenance to avoid unplanned downtime Dry Pump Abatement 18

19 GLOBALFOUNDRIES-Edwards EADS Trial CVD process: Heavy process byproducts from liquid precursors Pump seizures and abatement faults Sudden fault leads to chamber dusting Developed and empirically refined algorithms Show Direct cost savings Chamber parts, wafers and additional labor Chamber downtime, reduced yield, etc not considered 19

20 Simple System Architecture for SCADA FabWorks Server EADS Customer PCs FabWorks Browser Fab Network Tool Network Edwards Fabworks SCADA Data Collection and monitoring EADS Process specific algorithms Edwards Advanced Diagnostic Systems Prescribed alerts to targeted users before normal warning or alarm levels are achieved ADVISORY: Predictive Monitoring Start Equipment operation differs from usual WARNING: Recommend PM Service equipment earliest opportunity ALARM: Do Not Start a New Process High risk of an in-process failure 20

21 Chamber Dusting: EADS Results - Tool1 Pump EADS Issue Cause Down Nov 2012 N/A Pump seized Exhaust block 36 hr Dec 2012 Advisory 12 hr Jan 2013 Advisory Foreline powder Leak 12 hr Feb 2013 Advisory/Warning Valve on powder Leak 12 hr 1. Pump seized causing chamber dusting 2. EADS started 3. Adjusted after each advisory Now driving proactive maintenance No chamber dusting since EADS implemented and verified 21

22 Maintenance: EADS Results - Tool1 Abatement EADS Issue Cause Down Jan 2013 Advisory/Warning Combustor temp Solids build up 6 hr Jan 2013 Advisory/Warning Inlet pressure Solids build up 8 hr Feb 2013 Advisory Inlet pressure Solids build up 8 hr 1. EADS started 2. Advisory/warnings predict maintenance requirement Driving scheduled maintenance 22

23 Chamber Dusting: EADS Results Tool2 Pump EADS Issue Cause Down Dec 2012 Advisory/Warning Exhaust blockage Process build up 12 hr Feb 2013 Advisory Exhaust blockage Deposit in pump 12 hr 1. EADS algorithum applied from Tool 1 2. Advisories working 3. Proactivley Swapped pump Driving proactive maintenance No alarm shut downs since EADS implemented 23

24 Maintenance: EADS Results Tool2 Abatement EADS Issue Cause Down Mar 2013 Advisory/Warning Combustor temp Solids build up 6 hr Apr 2013 Advisory/Warning/Alarm Combustor temp Cracked liner 6 hr 1. EADS algorithum applied from Tool 1 2. Service aligned with tool maintenance Driving scheduled maintenance 24

25 Summary of EADS Results Reduced direct cost and tool downtime Alerts were consistent with service findings Enabled equipment maintenance alignment Cooperative knowledge sharing and proactive scheduling necessary 25

26 Conclusion Environmental impact and safety can be improved Impliment best equipment design Corrective hardware modifications Network monitoring for equipment information Supports proactive and predictive maintenance 26

Performance Monitoring Examples Monitor, Analyze, Optimize

Performance Monitoring Examples Monitor, Analyze, Optimize BETA's Performance Assessment service is a low cost remote monitoring service for reciprocating compressors, centrifugal compressors, engines,