High Purity High Performance Point-of-Use Pressure Regulator

Transcription

1 High Purity High Performance L25 Series The Crown L25 Series Point-of-Use Pressure Regulator is designed to provide the optimum in performance and cleanliness for high purity semiconductor applications. The L25 Series is capable of controlling pressure for intermediate flow rates at point of use applications. The L25 Series is recommended for Chlorine(Cl2) service and Nitrous Oxide(N2O) service. The L25 Series is manufactured, cleaned and tested to rigorous standards using the most advanced technology available. Assembly, testing and packaging of all Crown high purity products are completed in a stateof-the-art Class 10 Clean Tunnel. An ISO 9001 Certified Company

2 High Purity High Performance Features s1/4 High Purity High Performance and Point-of-Use Pressure Regulator for intermediate flow rates at point-ofuse applications s1/4 Male Face Seal(Standard) Other connections available strue metal to metal diaphragm to body seals sstandard Free Poppet design Optional Tied Diaphragm design for positive shutoff also available s316l Stainless Steel construction or Hastelloy C-22 available s32 in. (0.80 m) Ra finishes are standard. 7 in. (0.18 m) Ra full internal electropolish available as option sdelivers precise and stable pressure control by square load spring s Materials Special fluoroplastics are recommended for Chlorine(Cl2) service and Vespel is recommended for Nitrous Oxide(N2O) service scertified Class 10 Clean Tunnel for cleaning assembly test and packaging operations scleaning is a multi-step process performed in a Class 100 clean room Parts are initially cleaned ultrasonically with a wetting agent and then progressively with DI water Cleaned parts are then blown dry with pure hot air prior to being baked completely dry in a vacuum oven seach regulator is individually assembled pressure tested functionally tested helium leak tested and particle tested sfinal packaging includes double bagging with N2 purge and vacuum sealing in a Class 10 Clean Tunnel Nut and Washer for Panel Mounting O-ring Diaphragm (Metal to metal seal to atmosphere.) Cross sectional drawing Tied Diaphragm (Optional) Diaphragm Linked Poppet Design for Positive Shutoff Fine Control Knob for High Solution Manual Delivery Pressure Adjustment Bonnet(B) Square Load Spring Bonnet(A) Cap Retainer Poppet Permanent lot number and serial number marking Flow characteristics OUTLET PRESSURE (PSIG) 0 MPaG MODEL:L25 INLET PRESSURE 870PSIG(6.0MPaG) 150PSIG(1.0MPaG) FLOW (LPM) (N2) 1. No filter in this unit. 2. Avoid turning the control knob excessively. 3. Operating the Tied Diaphragm Type : In order to minimize premature wear of regulator s internal parts. Be sure not to close regulator while under pressure. 4. For purging at 870 PSIG (6 MPaG) and higher operate the unit in consideration of changing the outlet pressure by the supply pressure effect. These tests were performed at ambient conditions.

3 High Purity High Performance L25 Series Materials of construction MODEL & TYPE L25SS L25SH L25SS-Cl2 L25SS-N20 L25SS-CO Wetted Parts Body 316L Stainless Steel Poppet & Retainer 316L Stainless Steel Hastelloy C L Stainless Steel Diaphragm Hastelloy C L Stainless Steel PCTFE PCTFE Special Fluoroplastics Vespel PCTFE Spring 316 Stainless Steel Co-Ni Alloy 316 Stainless Steel 316 Stainless Steel 316 Stainless Steel Non-wetted Parts Bonnet(A) 316 Stainless Steel Bonnet(B) Nickel Plated Brass Cap 304 Stainless Steel Control Knob ABS Resin O-ring VITON Inlet Pressure Max.870 PSIG(Max. 6 MPaG) Outlet Pressure 0 PSIG to 140 PSIG(0 MPaG to 0.99 MPaG) Supply Pressure 0.12 PSIG ( MPaG) Effect per 14.5 PSIG (0.1 MPaG) Proof Pressure PSI (22.2 MPa) Burst Pressure PSI (59.2 MPa) Temperature 40 F to +104 F ( 10 C to +40 C) 1MPa = 10 2 kgf/cm 2 = PSI 1MPa = mmhg = inhg Standard Ra (GRADE B & C ) Optional Ra (GRADE A ) Operating conditions Wetted surface finishes 32 in.(0.80 m) or less 7 in.(0.18 m) or less Standard connections 1/4 face to face length in.(94 mm) 1/4 Tube stubs and other connections available as options. 1. Any combination of Face Seal male and/or female fittings are available for inlet and outlet. 2. Size and configuration of pressure gauge port is 1/4 Face Seal male. Inboard Leakage Outboard Leakage Leakage Across Certified Particle Counts Internal Volume Installation 2 lbs.2 oz. (0.96kg) Functional performance 1x10 11 Pa m 3 /sec. He (1x10 10 atm cc/sec. He) 1x10 10 Pa m 3 /sec. He (1x10 9 atm cc/sec. He) 8x10 10 Pa m 3 /sec. He (8x10 9 atm cc/sec. He) GRADE A 0.3 m or less GRADE B 0.5 m or less GRADE C Not certified cc (0.28 in 3 ) w/o fittings Threaded holes on the rear surface or Panel mounting Approximate weight Approvals san ISO 9001 certified quality system since The first Japanese high purity regulator manufacturer to receive ISO certification. smiti(ministry of International Trade and Industry Japanese Government) certified self-inspecting manufacturer of regulators N-II fittings and gas heaters according to the Fifth Procedural Manual of the High Pressure Gas Safety Law(License No.MAB-472). smhw(ministry of Health and Welfare Japanese Government) certified medical equipment manufacturer (License No.( )No.2755).

4 Outline drawing OUTLET PRESSURE GAUGE Threaded holes for the rear surface installation 2-M5X mm(0.276in.)deep (153mm) (22.2mm) 1.89 dia (48mm dia) Dimensions are in inches and (mm) for reference only. Subject to change without notice. SERIES L = Series L Ordering information MODEL 25 = Max. Inlet Pressure : 870 PSIG MATERIAL SS = 316L Stainless Steel SH = 316L Stainless Steel with Hastelloy C 22 Internals L 25 SS A 3 W 04 R3 24M 24M Q GRADE A = Electropolish B= Standard C= Not certified paticle counts. PORTING 2 = 2 Ports 3 = 3 Ports 4 = 4 Ports PORT TYPE W = Welding Port G = Special Specification (17.5mm) 1.30 (33mm) 4.72 (120mm) MAX.INLET PRESSURE [PORT ONLY(NO GUAGE)] 04 = 870 PSIG OUTLET PRESSURE RANGE [PORT ONLY (NO GUAGE)] 10 = 0~140 PSIG 06 = 0~ 85 PSIG 04 = 0~ 55 PSIG 02 = 0~ 30 PSIG OUTLET PRESSURE GAUGE PP = 0~200 PSI C4 = 30in. Hg~0~60 PSI P7 = 0~100 PSI C2 = 30in. Hg~0~30 PSI P4 = 0~ 60 PSI PE = Others P2 = 0~ 30 PSI 4C = 30in. Hg~0~600 PSI CC = 30in. Hg~0~200 PSI C7 = 30in. Hg~0~100 PSI 1.46 dia(37mm dia) Hole Required For Panel Mounting Inlet 1/4 VCR -MALE 1/4 VCR -MALE Outlet OPTIONS A = Tied Diaphram D = Dome Loading 2= IN/OUT Reverse Position Q= Electropolish(GRADE"A") G= Special Specification DECREASE YUTAKA ENG. INCRESE CORP (94mm) CONNECTION Type Size Shape 1 = S VCR 2 = 1/8 M = Male 2 = VCR 4 = 1/4 F = Female 3 = S JSK 6 = 3/8 O = Others 4 = JSK 8 = 1/2 5 = MCG 0 = Others 6 = Swagelok 7 = UJR C= CVC 9 = Others Cl2 GAS APPLICATION Cl2 = Chlorine Gas N2O = Nitorous Oxide Gas CO = Carbon Monoxide Gas sproduct availability and specifications contained herein are subject to change without notice. Consult local distributor or factory for potential revisions. sbonnet vent relief porting(optional). sdome loading(optional). spressure Sensor available in place of pressure gauge. sto complete ordering information select SS or SH in the MATERIAL category. s Materials Special fluoroplastics are recommended for Chlorine(Cl2) service. s Materials Vespel is recommended for Nitrous Oxide(N2O) service. sstainless steel internals are recommended for Carbon Monoxide(CO) or Nickel Carbonyl service. scrown/yutaka and e-flow are registered trademarks of YUTAKA ENGINEERING CORPORATION. shastelloy is a registered trademark of Haynes International Inc. svespel and VITON are registered trademarks of DuPont Company. ss-vcr VCR and Swagelok are registered trademarks of Swagelok Marketing CO. ss-jsk and JSK are registered trademarks of SANKO KOGYO CO. LTD. smcg is a registered trademark of TOYOKO KAGAKU CO. LTD. sujr is a registered trademark of Fujikin Incorporated. scvc is a registered trademark of Benkan Corporation. swhen selecting a regulator the total system design must be considered to assure safe trouble-free regulator performance. Regulator function materials compatibility adequate ratings proper installation operation and maintenance are the responsibility of the system designer and user. scustom fittings porting testing and dimension options are also available upon customer request. sdo not mix or interchange parts with those of other manufacturers. For additional information on Crown products contact An ISO 9001 Quality System Certified Company MITI Certified Self Inspecting Manufacturer(No.MAB 472) MHW Certified Medical Equipment Manufacturer(( )No.2755) YUTAKA/CEEC Printing Printed in Japan ADDRESS , KUGAHARA, OHTA KU, TOKYO , JAPAN PHONE FAX No.1 Edition Mar.1999 CAT.NO C3

5 High Purity High Performance L35 Series The Crown L35 Series Point-of-Use Pressure Regulator is designed to provide the optimum in performance and cleanliness for high purity semiconductor applications. The L35 Series is capable of controlling pressure for intermediate flow rates at point of use applications. The L35 Series recommended for Chlorine(Cl2) service and Nitrous Oxide(N2O) service. The L35 Series is manufactured cleaned and tested to rigorous standards using the most advanced technology available. Assembly testing and packaging of all Crown high purity products are completed in a state- of-the-art Class 10 Clean Tunnel. An ISO 9001 Certified Company

6 High Purity High Performance Features s1/4 High Purity High Performance and Point-of-Use Pressure Regulator for intermediate flow rates at point-ofuse applications. s1/4 Male Face Seal(Standard). Other connections available. strue metal to metal diaphragm to body seals. sstandard Free Poppet design. s316l Stainless Steel construction or Hastelloy C-22 available. s32 in.(0.80 m)ra finishes(standard). 7 in.(0.18 m) Ra full internal electropolished finishes(optional). sdelivers precise and stable pressure control by square load spring. s Materials: Special fluoroplastics are recommended for Chlorine(Cl2) service and Vespel is recommended for Nitrous Oxide(N2O) service. scertified Class 10 Clean Tunnel for cleaning assembly test and packaging operations. scleaning is a multi-step process performed in a Class 100 clean room. Parts are initially cleaned ultrasonically with a wetting agent and then progressively with DI water. Cleaned parts are then blown dry with pure hot air prior to being baked completely dry in a vacuum oven. seach regulator is individually assembled pressure tested functionally tested helium leak tested and particle tested. sfinal packaging includes double bagging with N2 purge and vacuum sealing in a Class 10 Clean Tunnel. Nut and Washer for Panel Mounting O-ring Cross sectional drawing Fine Control Knob for High Solution Manual Delivery Pressure Adjustment Bonnet(B) Square Load Spring Bonnet(A) 1. No filter in this unit. 2. Avoid turning the control knob excessively. 3. For purging at 870 PSIG(6 MPaG) and higher, operate the unit in consideration of changing the outlet pressure by the supply pressure effect. Cap Diaphragm (Metal to metal seal to atmosphere.) Retainer Poppet Permanent lot number and serial number marking Flow characteristics MPaG OUTLET PRESSURE (PSIG) MODEL:L35 INLET PRESSURE 1.0PSIG(1.0MPaG) 100PSIG(0.7MPaG) 175PSIG(0.5MPaG) FLOW (LPM) (N2) These tests were performed at ambient conditions.

7 High Purity High Performance L35 Series Materials of construction MODEL & TYPE L35SS L35SH L35SS-Cl2 L35SS-N2O L35SS-CO Wetted Parts Body 316L Stainless Steel Poppet & Retainer 316L Stainless Steel Hastelloy C L Stainless Steel Diaphragm Hastelloy C LStainless Steel PCTFE Special Fluoroplastics Vespel PCTFE Spring 316 Stainless Steel Non-wetted Parts Bonnet(A) 304 Stainless Steel Bonnet(B) 304 Stainless Steel Cap 304 Stainless Steel Control Knob ABS Resin O-ring VITON Inlet Pressure Max.870 PSIG (Max. 6 MPaG) Outlet Pressure 0 PSIG to 140 PSIG (0 MPaG to 0.99 MPaG) Supply Pressure 0.10 PSIG ( MPaG) Effect per 14.5 PSIG (0.1 MPaG) Proof Pressure PSI (9.0 MPa) Burst Pressure PSI (59.2 MPa) Temperature 40 F to +104 F ( 10 C to +40 C) 1MPa = 10 2 kgf/cm 2 = PSI 1MPa = mmhg = inhg Standard Ra (GRADE B & C ) Optional Ra (GRADE A ) Operating conditions Wetted surface finishes 32 in.(0.80 m) or less 7 in.(0.18 m) or less Standard connections 1/4 face to face length in.(124 mm) 1/4 Tube stubs and other connections available as options. 1. Any combination of Face Seal male and/or female fittings are available for inlet and outlet. 2. Size and configuration of pressure gauge port is 1/4 Face Seal male. Inboard Leakage Outboard Leakage Leakage Across Certified Particle Counts Internal Volume Installation 4 lbs.5 oz. (1.95kg) Functional performance 1x10 11 Pa m 3 /sec. He (1x10 10 atm cc/sec. He) 1x10 10 Pa m 3 /sec. He (1x10 9 atm cc/sec. He) 8x10 10 Pa m 3 /sec. He (8x10 9 atm cc/sec. He) GRADE A 0.3 m or less GRADE B 0.5 m or less GRADE C Not certified cc (0.68 in 3 ) w/o fittings Threaded holes on the rear surface or Panel mounting Approximate weight Approvals san ISO 9001 certified quality system since The first Japanese high purity regulator manufacturer to receive ISO certification. smiti(ministry of International Trade and Industry Japanese Government) certified self-inspecting manufacturer of regulators N-II fittings and gas heaters according to the Fifth Procedural Manual of the High Pressure Gas Safety Law(License No.MAB-472). s MHW(Ministry of Health and Welfare Japanese Government) certified medical equipment manufacturer (License No.( )No.2755).

8 Outline drawing OUTLET PRESSURE GAUGE Threaded holes for the rear surface installation. 2-M5X mm(0.276in.)deep (22.2mm) 2.46 (60mm) 3.61 (168mm) 3.61 (168mm) 18.5 (18.5mm) 1.89 (48mm) 4.92 (125mm) 1.46 dia(37mm dia) Hole Required For Panel Mounting Dimensions are in inches and (mm) for reference only. Subject to change without notice. 1/4 VCR -MALE 1/4 VCR -MALE DECREASE YUTAKA ENG. INCRESE CORP (124mm) SERIES L = Series L Ordering information MODEL 35 = Max.Inlet Pressure: 870 PSIG MATERIAL SS = 316L Stainless Steel SH = 316L Stainless Steel with Hastelloy C-22 Internals L 35 SS A 3W 04 R3 24M 24M Q GRADE A = Electropolish B = Standard C = Not certified particle counts. PORTING 2 = 2 Ports 3 = 3 Ports 4 = 4 Ports PORT TYPE W = Welding Port G = Special Specification MAX.INLET PRESSURE [PORT ONLY(NO GAUGE)] 04 = 870 PSIG OUTLET PRESSURE RANGE [PORT ONLY(NO GAUGE)] 10 = 0~140 PSIG 06 = 0~ 85 PSIG 04 = 0~ 55 PSIG 02 = 0~ 30 PSIG Inlet OUTLET PRESSURE GAUGE PP = 0~200 PSI C4 = 30in. Hg~0~ 60 PSI P7= 0~100 PSI C2 = 30in. Hg~0~ 30 PSI P4= 0~ 60 PSI PE = Others P2= 0~ 30 PSI 4C = 30in. Hg~0~600 PSI CC = 30in. Hg~0~200 PSI C7 = 30in. Hg~0~100 PSI Outlet OPTIONS A = Tide Diaphragm D = Dome Loading 2 = IN/OUT Reverse Position Q= Electropolish(GRADE A ) G = Special Specification CONNECTION Type Size Configuration 1 = S VCR 2 = 1/8 M = Male 2 = VCR 4 = 1/4 F = Female 3 = S JSK 6 = 3/8 O = Others 4 = JSK 8 = 1/2 5 = MCG 0 = Others 6 = Swagelok 7 = UJR C= CVC 9 = Others Cl2 GAS APPLICATION Cl2 = Chlorine Gas N2O = Nitorous Oxide Gas CO = Carbon Monoxide Gas sproduct availability and specifications contained herein are subject to change without notice.consult local distributor or factory for potential revisions. sbonnet vent relief porting(optional). sdome loading(optional). spressure Sensor available in place of pressure gauge. sto complete ordering information, select SS or SH in the MATERIAL category. s Materials: Special fluoroplastics are recommended for Chlorine(Cl2) service. s Materials: Vespel is recommended for Nitrous Oxide(N2O) service. sstainless steel internals are recommended for Carbon Monoxide(CO) or Nickel Carbonyl service. scrown/yutaka and e-flow are registered trademarks of YUTAKA ENGINEERING CORPORATION. shastelloy is a registered trademark of Haynes International, Inc. svespel and VITON are registered trademarks of DuPont Company. ss-vcr, VCR and Swagelok are registered trademarks of Swagelok Marketing CO. ss-jsk and JSK are registered trademarks of SANKO KOGYO CO., LTD. smcg is a registered trademark of TOYOKO KAGAKU CO., LTD. sujr is a registered trademark of Fujikin Incorporated. scvc is a registered trademark of Benkan Corporation. swhen selecting a regulator, the total system design must be considered to assure safe, trouble-free regulator performance. Regulator function, materials compatibility, adequate ratings, proper installation, operation and maintenance are the responsibility of the system designer and user. scustom fittings, porting, testing and dimension options are also available upon customer request. sdo not mix or interchange parts with those of other manufacturers. For additional information on Crown products contact An ISO 9001 Quality System Certified Company MITI Certified Self Inspecting Manufacturer(No.MAB 472) MHW Certified Medical Equipment Manufacturer(( )No.2755) YUTAKA/CEEC Printing Printed in Japan ADDRESS , KUGAHARA, OHTA KU, TOKYO , JAPAN PHONE FAX No.0 Edition Mar.1999 CAT.NO C3

9 High Purity High Performance High Flow Pressure Regulator LH1 Series The Crown LH1 Series High Flow Rate Pressure Regulator is designed to provide the optimum in performance and cleanliness for high purity semiconductor applications. The LH1 Series is capable of controlling pressure for high flow rates at point of use applications. The LH1 Series is manufactured cleaned and tested to rigorous standards using the most advanced technology available. Assembly testing and packaging of all Crown high purity products are completed in a state-of-the-art Class 10 Clean Tunnel. An ISO 9001 Certified Company

10 High Purity High Performance High Flow Pressure Regulator Features s3/8 and 1/2 High Purity High Performance and High Flow Pressure Regulator for high flow rates at point of use applications. s 3/8 and 1/2 Male Face Seal(Standard). Other connections available. strue metal to metal diaphragm to body seals. sstandard Free Poppet design. s316l Stainless Steel construction or Hastelloy C-22 available. s32 in.(0.80 m)ra finishes(standard). 7 in.(0.18 m)ra full internal electropolished finishes(optional). sdelivers precise and stable pressure control by square load spring. scertified Class 10 Clean Tunnel for cleaning assembly test and packaging operations. scleaning is a multi-step process performed in a Class 100 clean room. Parts are initially cleaned ultrasonically with a wetting agent and then progressively with DI water. Cleaned parts are then blown dry with pure hot air prior to being baked completely dry in a vacuum oven. seach regulator is individually assembled pressure tested functionally tested helium leak tested and particle tested. sfinal packaging includes double bagging with N2 purge and vacuum sealing in a Class 10 Clean Tunnel. Flow characteristics O-ring Nut and Washer for Panel Mounting Cross sectional drawing Fine Control Knob for High Solution Manual Delivery Pressure Adjustment Bonnet(B) Square Load Spring Bonnet(A) 1. No filter in this unit. 2. Avoid turning the control knob excessively. 3. For purging at 870 PSIG(6 MPaG) and higher operate the unit in consideration of changing the outlet pressure by the supply pressure effect. Cap Diaphragm (Metal to metal seal to atmosphere.) Retainer Poppet OUTLET PRESSURE (PSIG) MPaG MODEL:LH1 INLET PRESSURE 150PSIG(1.0MPaG) 100PSIG(0.7MPaG) 175PSIG(0.5MPaG) FLOW (LPM) (N2) These tests were performed at ambient conditions.

11 High Purity High Performance High Flow Pressure Regulator LH1 Series Materials of construction MODEL & TYPE LH1SS LH1SH LH1SS-CO Wetted Parts Body 316L Stainless Steel Poppet & Retainer 316L Stainless Steel Hastelloy C L Stainless Steel Diaphragm Hastelloy C L Stainless Steel PCTFE Spring 316 Stainless Steel Non-wetted Parts Bonnet(A) 304 Stainless Steel Bonnet(B) 304 Stainless Steel Cap 304 Stainless Steel Control Knob ABS Resin O-ring VITON Inlet Pressure Max.870 PSIG (Max. 6 MPaG) Outlet Pressure 0 PSIG to 140 PSIG (0 MPaG to 0.99 MPaG) Supply Pressure 0.28 PSIG ( MPaG) Effect per 14.5 PSIG (0.1 MPaG) Proof Pressure PSI ( 9.0 MPa) Burst Pressure PSI (59.2 MPa) Temperature 40 F to +104 F ( 10 C to +40 C) 1MPa = 10 2 kgf/cm 2 = PSI 1MPa = mmhg = inhg Standard Ra (GRADE B & C ) Optional Ra (GRADE A ) Operating conditions Wetted surface finishes 32 in.(0.80 m) or less 7 in.(0.18 m) or less Standard connections 3/8 and 1/2 face to face length in.(162 mm) 3/8 and 1/2 Tube stubs and other connections available as options. 1. Any combination of Face Seal male and/or female fittings are available for inlet and outlet. 2. Size and configuration of pressure gauge port is 1/4 Face Seal male. Inboard Leakage Outboard Leakage Leakage Across Certified Particle Counts Internal Volume Installation 6 lbs.5 oz. (2.87kg) Functional performance 1x10 11 Pa m 3 /sec. He (1x10 10 atm cc/sec. He) 1x10 10 Pa m 3 /sec. He (1x10 9 atm cc/sec. He) 8x10 10 Pa m 3 /sec. He (8x10 9 atm cc/sec. He) GRADE A 0.3 m or less GRADE B 0.5 m or less GRADE C Not certified cc (1.95 in 3 ) w/o fittings Threaded holes on the rear surface or Panel mounting Approximate weight Approvals san ISO 9001 certified quality system since The first Japanese high purity regulator manufacturer to receive ISO certification. smiti(ministry of International Trade and Industry Japanese Government) certified self-inspecting manufacturer of regulators N-II fittings and gas heaters according to the Fifth Procedural Manual of the High Pressure Gas Safety Law(License No.MAB-472). s MHW(Ministry of Health and Welfare Japanese Government) certified medical equipment manufacturer (License No.( )No.2755).

12 Outline drawing OUTLET PRESSURE GAUGE Threaded holes for the rear surface installation. 2-M6X mm(0.39in.)deep (36mm) 3.15 dia (80mm dia) 7.17 (182mm) 4.61 (117mm) 1.77 (45mm) 4.06 (103mm) 10.5 (267mm) 1.46 dia(37mm dia) Hole Required For Panel Mounting 3/8 & 1/2 VCR -MALE Dimensions are in inches and (mm) for reference only. Subject to change without notice. DECREASE YUTAKA ENG. INCRESE CORP (162mm) 3/8 & 1/2 VCR -MALE Ordering information SERIES L = Series L MODEL H1 = Max.Inlet Pressure: 870 PSIG MATERIAL SS = 316L Stainless Steel SH = 316L Stainless Steel with Hastelloy C-22 Internals L H1 SS A 3 W 04 R3 24M 24M Q GRADE A = Electropolish B = Standard C = Not certified particle counts. PORTING 2 = 2 Ports 3 = 3 Ports 4 = 4 Ports PORT TYPE W = Welding Port G = Special Specification MAX.INLET PRESSURE [PORT ONLY(NO GAUGE)] 04 = 870 PSIG OUTLET PRESSURE RANGE [PORT ONLY(NO GAUGE)] 10 = 0~140 PSIG 06 = 0~ 85 PSIG 04 = 0~ 55 PSIG 02 = 0~ 30 PSIG Inlet OUTLET PRESSURE GAUGE PP = 0~200 PSI C4 = 30in. Hg~0~ 60 PSI P7= 0~100 PSI C2 = 30in. Hg~0~ 30 PSI P4= 0~ 60 PSI PE = Others P2= 0~ 30 PSI 4C = 30in. Hg~0~600 PSI CC = 30in. Hg~0~200 PSI C7 = 30in. Hg~0~100 PSI Outlet OPTIONS D = Dome Loading 2 = IN/OUT Reverse Position Q= Electropolish(GRADE A ) G = Special Specification CONNECTION Type Size Configuration 1 = S VCR 2 = 1/8 M = Male 2 = VCR 4 = 1/4 F = Female 3 = S JSK 6 = 3/8 O = Others 4 = JSK 8 = 1/2 5 = MCG 0 = Others 6 = Swagelok 7 = UJR C= CVC 9 = Others CO GAS APPLICATION CO = Carbon Monoxide Gas sproduct availability and specifications contained herein are subject to change without notice. Consult local distributor or factory for potential revisions. sbonnet vent relief porting(optional). sdome loading(optional). spressure Sensor available in place of pressure gauge. sto complete ordering information, select SS or SH in the MATERIAL category. scrown/yutaka and e-flow are registered trademarks of YUTAKA ENGINEERING CORPORATION. shastelloy is a registered trademark of Haynes International, Inc. sviton is a registered trademark of DuPont Company. ss-vcr,vcr and Swagelok are registered trademarks of Swagelok Marketing CO. ss-jsk and JSK are registered trademarks of SANKO KOGYO CO., LTD. smcg is a registered trademark of TOYOKO KAGAKU CO., LTD. sujr is a registered trademark of Fujikin Incorporated. scvc is a registered trademark of Benkan Corporation. swhen selecting a regulator, the total system design must be considered to assure safe, trouble-free regulator performance. Regulator function, materials compatibility, adequate ratings, proper installation, operation and maintenance are the responsibility of the system designer and user. scustom fittings, porting, testing and dimension options are also available upon customer request. sdo not mix or interchange parts with those of other manufacturers. For additional information on Crown products contact An ISO 9001 Quality System Certified Company MITI Certified Self Inspecting Manufacturer(No.MAB 472) MHW Certified Medical Equipment Manufacturer(( )No.2755) YUTAKA/CEEC Printing Printed in Japan ADDRESS , KUGAHARA, OHTA KU, TOKYO , JAPAN PHONE FAX No.0 Edition Mar.1999 CAT.NO C3

13 High Performance R25 Series The Crown R25 Series Point-of-Use Pressure Regulator is designed to provide the optimum in performance and cleanliness for high purity semiconductor applications. The R25 Series is capable of controlling pressure for intermediate flow rates at point of use applications. The R25 Series is recommended for Chlorine(Cl2) service and Nitrous Oxide(N2O) service. The R25 Series is manufactured, cleaned and tested to rigorous standards using the most advanced technology available. Assembly, testing and packaging of all Crown high purity products are completed in a stateof-the-art Class 10 Clean Tunnel. An ISO 9001 Certified Company

14 High Performance Features s1/4 High Performance and Point-of-Use Pressure Regulator for intermediate flow rates at point-of-use applications s1/4 Male Face Seal(Standard) Other connections available sstandard Free Poppet design Optional Tied Diaphragm design for positive shutoff also available s316l Stainless Steel construction or Hastelloy C-22 available s32 in. (0.80 m) Ra finishes are standard. 7 in. (0.18 m) Ra full internal electropolish available as option sdelivers precise and stable pressure control by square load spring s Materials Special fluoroplastics are recommended for Chlorine(Cl2) service and Vespel is recommended for Nitrous Oxide(N2O) service scertified Class 10 Clean Tunnel for cleaning assembly test and packaging operations scleaning is a multi-step process performed in a Class 100 clean room Parts are initially cleaned ultrasonically with a wetting agent and then progressively with DI water Cleaned parts are then blown dry with pure hot air prior to being baked completely dry in a vacuum oven seach regulator is individually assembled pressure tested functionally tested helium leak tested and particle tested sfinal packaging includes double bagging with N2 purge and vacuum sealing in a Class 10 Clean Tunnel Flow characteristics Nut and Washer for Panel Mounting O-ring Diaphragm w/teflon Cross sectional drawing Tied Diaphragm (Optional) Diaphragm Linked Poppet Design for Positive Shutoff Fine Control Knob for High Solution Manual Delivery Pressure Adjustment Bonnet Square Load Spring Nut Retainer Poppet Filter Permanent lot number and serial number marking MODEL:R OUTLET PRESSURE (PSIG) 0 MPaG FLOW (LPM) (N2) INLET PRESSURE 130PSIG(0.95MPaG) 73PSIG(0.5 MPaG) 144PSIG(0.3 MPaG) These tests were performed at ambient conditions. 1. Avoid turning the control knob excessively. 2. Operating the Tied Diaphragm Type : In order to minimize premature wear of regulator s internal parts. Be sure not to close regulator while under pressure. 3. For purging at 870 PSIG (6 MPaG) and higher operate the unit in consideration of changing the outlet pressure by the supply pressure effect.

15 High Performance R25 Series Materials of construction MODEL & TYPE R25SS R25SH R25SS-Cl2 R25SS-N20 R25SS-CO Wetted Parts Body 316L Stainless Steel Poppet 316L Stainless Steel Hastelloy C L Stainless Steel Diaphragm 316L Stainless Steel Hastelloy C L Stainless Steel PCTFE Special Fluoroplastics Vespel PCTFE Spring 316 Stainless Steel Non-wetted Parts Bonnet Nickel Plated Brass Nut 304 Stainless Steel Control Knob ABS Resin O-ring VITON Inlet Pressure Max.870 PSIG(Max. 6 MPaG) Outlet Pressure 0 PSIG to 140 PSIG(0 MPaG to 0.99 MPaG) Supply Pressure 0.27 PSIG ( MPaG) Effect per 14.5 PSIG (0.1 MPaG) Proof Pressure PSI (22.2 MPa) Burst Pressure PSI (59.2 MPa) Temperature 40 F to +104 F ( 10 C to +40 C) 1MPa = 10 2 kgf/cm 2 = PSI 1MPa = mmhg = inhg Standard Ra (GRADE B & C ) Optional Ra (GRADE A ) Operating conditions Wetted surface finishes 32 in.(0.80 m) or less 7 in.(0.18 m) or less Standard connections 1/4 Face Seal Male to Face Seal Male length in.(82 mm) 1/4 Tube stubs and other connections available as options. 1. Any combination of Face Seal male and/or female fittings are available for inlet and outlet. 2. Size and configuration of pressure gauge port is 1/4 Face Seal male. Inboard Leakage Outboard Leakage Leakage Across Certified Particle Counts Internal Volume Installation 2 lbs.2 oz. (0.96kg) Functional performance 1x10 11 Pa m 3 /sec. He (1x10 10 atm cc/sec. He) 1x10 10 Pa m 3 /sec. He (1x10 9 atm cc/sec. He) 8x10 10 Pa m 3 /sec. He (8x10 9 atm cc/sec. He) GRADE A 0.3 m or less GRADE B 0.5 m or less GRADE C Not certified cc (0.28 in 3 ) w/o fittings Threaded holes on the rear surface or Panel mounting Approximate weight Approvals san ISO 9001 certified quality system since The first Japanese high purity regulator manufacturer to receive ISO certification. smiti(ministry of International Trade and Industry Japanese Government) certified self-inspecting manufacturer of regulators N-II fittings and gas heaters according to the Fifth Procedural Manual of the High Pressure Gas Safety Law(License No.MAB-472). smhw(ministry of Health and Welfare Japanese Government) certified medical equipment manufacturer (License No.( )No.2755).

16 Outline drawing OUTLET PRESSURE GAUGE Threaded holes for the rear surface installation 2-M5X mm(0.276in.)deep (148mm) 3.65 (95mm) (22.2mm) 1.89 dia (48mm dia) Dimensions are in inches and (mm) for reference only. Subject to change without notice. SERIES R = Series R Ordering information MODEL 25 = Max. Inlet Pressure : 870 PSIG MATERIAL SS = 316L Stainless Steel SH = 316L Stainless Steel with Hastelloy C 22 Internals OUTLET PRESSURE RANGE [PORT ONLY (NO GUAGE)] 10 = 0~140 PSIG 06 = 0~ 90 PSIG 04 = 0~ 60 PSIG 02 = 0~ 30 PSIG R 25 SS A 3 W 04 R3 24M 24M Q GRADE A = Electropolish B= Standard C= Not certified paticle counts. PORTING 2 = 2 Ports 3 = 3 Ports 4 = 4 Ports PORT TYPE W = Welding Port G = Special Specification (17.5mm) 13.4 (34mm) 4.72 (118mm) MAX.INLET PRESSURE [PORT ONLY(NO GUAGE)] 04 = 870 PSIG PRESSURE GAUGE PP = 0~200 PSI C4 = 30in. Hg~0~60 PSI P7 = 0~100 PSI C2 = 30in. Hg~0~30 PSI P4 = 0~ 60 PSI PE = Others P2 = 0~ 30 PSI 4C = 30in. Hg~0~600 PSI CC = 30in. Hg~0~200 PSI C7 = 30in. Hg~0~100 PSI 1.46 dia(37mm dia) Hole Required For Panel Mounting Inlet 1/4 VCR -MALE 1/4 VCR -MALE Outlet OPTIONS A = Tied Diaphram D = Dome Loading 2= IN/OUT Reverse Position Q= Electropolish(GRADE"A") G= Special Specification DECREASE YUTAKA ENG. INCRESE CORP (82mm) (Male Face to Male Face Length) 3.90 (99mm) (Female Face to Female Face Length) CONNECTION Type Size Shape 1 = S VCR 2 = 1/8 M = Male 2 = VCR 4 = 1/4 F = Female 3 = S JSK 6 = 3/8 O = Others 4 = JSK 8 = 1/2 5 = MCG 0 = Others 6 = Swagelok 7 = UJR C= CVC 9 = Others Cl2 GAS APPLICATION Cl2 = Chlorine Gas N2O = Nitorous Oxide Gas CO = Carbon Monoxide Gas sproduct availability and specifications contained herein are subject to change without notice. Consult local distributor or factory for potential revisions. sbonnet vent relief porting(optional). sdome loading(optional). spressure Sensor available in place of pressure gauge. sto complete ordering information select SS or SH in the MATERIAL category. s Materials Special fluoroplastics are recommended for Chlorine(Cl2) service. s Materials Vespel is recommended for Nitrous Oxide(N2O) service. sstainless steel internals are recommended for Carbon Monoxide(CO) or Nickel Carbonyl service. scrown/yutaka and e-flow are registered trademarks of YUTAKA ENGINEERING CORPORATION. shastelloy is a registered trademark of Haynes International Inc. svespel and VITON are registered trademarks of DuPont Company. ss-vcr VCR and Swagelok are registered trademarks of Swagelok Marketing CO. ss-jsk and JSK are registered trademarks of SANKO KOGYO CO. LTD. smcg is a registered trademark of TOYOKO KAGAKU CO. LTD. sujr is a registered trademark of Fujikin Incorporated. scvc is a registered trademark of Benkan Corporation. swhen selecting a regulator the total system design must be considered to assure safe trouble-free regulator performance. Regulator function materials compatibility adequate ratings proper installation operation and maintenance are the responsibility of the system designer and user. scustom fittings porting testing and dimension options are also available upon customer request. sdo not mix or interchange parts with those of other manufacturers. For additional information on Crown products contact An ISO 9001 Quality System Certified Company MITI Certified Self Inspecting Manufacturer(No.MAB 472) MHW Certified Medical Equipment Manufacturer(( )No.2755) YUTAKA/CEEC Printing Printed in Japan ADDRESS , KUGAHARA, OHTA KU, TOKYO , JAPAN PHONE FAX No.1 Edition Apr.1999 CAT.NO C3

17 High Performance R35 Series The Crown R35 Series Point-of-Use Pressure Regulator is designed to provide the optimum in performance and cleanliness for high purity semiconductor applications. The R35 Series is capable of controlling pressure for intermediate flow rates at point of use applications. The R35 Series recommended for Chlorine(Cl2) service and Nitrous Oxide(N2O) service. The R35 Series is manufactured cleaned and tested to rigorous standards using the most advanced technology available. Assembly testing and packaging of all Crown high purity products are completed in a state- of-the-art Class 10 Clean Tunnel. An ISO 9001 Certified Company

18 High Performance Features s 1/4 High Performance and Point-of-Use Pressure Regulator for intermediate flow rates at point-of-use applications. s1/4 Male Face Seal(Standard). Other connections available. s Free Poppet design. s316l Stainless Steel construction or Hastelloy C-22 available. s32 in.(0.80 m)ra finishes(standard). 7 in.(0.18 m) Ra full internal electropolished finishes(optional). sdelivers precise and stable pressure control by square load spring. s Materials: Special fluoroplastics are recommended for Chlorine(Cl2) service and Vespel is recommended for Nitrous Oxide(N2O) service. scertified Class 10 Clean Tunnel for cleaning assembly test and packaging operations. scleaning is a multi-step process performed in a Class 100 clean room. Parts are initially cleaned ultrasonically with a wetting agent and then progressively with DI water. Cleaned parts are then blown dry with pure hot air prior to being baked completely dry in a vacuum oven. seach regulator is individually assembled pressure tested functionally tested helium leak tested and particle tested. sfinal packaging includes double bagging with N2 purge and vacuum sealing in a Class 10 Clean Tunnel. Flow characteristics Nut and Washer for Panel Mounting O-ring Retainer Cross sectional drawing Fine Control Knob for High Solution Manual Delivery Pressure Adjustment Bonnet Square Load Spring Diaphragm w/teflon 1. No filter in this unit. 2. Avoid turning the control knob excessively. 3. For purging at 870 PSIG(6 MPaG) and higher, operate the unit in consideration of changing the outlet pressure by the supply pressure effect. Poppet Permanent lot number and serial number marking MODEL:R INLET PRESSURE 150PSIG(1.0MPaG) 100PSIG(0.7MPaG) 187PSIG(0.6MPaG) OUTLET PRESSURE (PSIG) 0 MPaG FLOW (LPM) (N2) These tests were performed at ambient conditions.

19 High Performance R35 Series Materials of construction MODEL & TYPE R35SS R35SH R35SS-Cl2 R35SS-N2O R35SS-CO Wetted Parts Body 316L Stainless Steel Poppet & Retainer 316L Stainless Steel Hastelloy C L Stainless Steel Diaphragm 316L Stainless Steel Hastelloy C L Stainless Steel PCTFE Special Fluoroplastics Vespel PCTFE Spring 316 Stainless Steel Non-wetted Parts Bonnet Brass Nickel Plated Control Knob ABS Resin O-ring VITON Inlet Pressure Max.870 PSIG (Max. 6 MPaG) Outlet Pressure 0 PSIG to 140 PSIG (0 MPaG to 0.99 MPaG) Supply Pressure 0.10 PSIG ( MPaG) Effect per 14.5 PSIG (0.1 MPaG) Proof Pressure PSI (9.0 MPa) Burst Pressure PSI (59.2 MPa) Temperature 40 F to +104 F ( 10 C to +40 C) 1MPa = 10 2 kgf/cm 2 = PSI 1MPa = mmhg = inhg Standard Ra (GRADE B & C ) Optional Ra (GRADE A ) Operating conditions Wetted surface finishes 32 in.(0.80 m) or less 7 in.(0.18 m) or less Standard connections 1/4 Face Seal Male to Face Seal Male length in.(104 mm) 1/4 Tube stubs and other connections available as options. 1. Any combination of Face Seal male and/or female fittings are available for inlet and outlet. 2. Size and configuration of pressure gauge port is 1/4 Face Seal male. Inboard Leakage Outboard Leakage Leakage Across Certified Particle Counts Internal Volume Installation 4 lbs.5 oz. (1.95kg) Functional performance 1x10 11 Pa m 3 /sec. He (1x10 10 atm cc/sec. He) 1x10 10 Pa m 3 /sec. He (1x10 9 atm cc/sec. He) 8x10 10 Pa m 3 /sec. He (8x10 9 atm cc/sec. He) GRADE A 0.3 m or less GRADE B 0.5 m or less GRADE C Not certified cc (0.93 in 3 ) w/o fittings Threaded holes on the rear surface or Panel mounting Approximate weight Approvals san ISO 9001 certified quality system since The first Japanese high purity regulator manufacturer to receive ISO certification. smiti(ministry of International Trade and Industry Japanese Government) certified self-inspecting manufacturer of regulators N-II fittings and gas heaters according to the Fifth Procedural Manual of the High Pressure Gas Safety Law(License No.MAB-472). s MHW(Ministry of Health and Welfare Japanese Government) certified medical equipment manufacturer (License No.( )No.2755).

20 Outline drawing OUTLET PRESSURE GAUGE Threaded holes for the rear surface installation. 2-M5X mm(0.276in.)deep (22.2mm) 2.46 dia (60mm dia) 6.42 (163mm) 3.98 (101mm) (18.5mm) (48mm) 5.00 (127mm) 1.46 dia(37mm dia) Hole Required For Panel Mounting Dimensions are in inches and (mm) for reference only. Subject to change without notice. 1/4 VCR -MALE DECREASE YUTAKA ENG. INCRESE CORP (104mm) (Male Face to Male Face Length) 4.33 (110mm) (Female Face to Female Face Length) 1/4 VCR -MALE SERIES R = Series R Ordering information MODEL 35 = Max.Inlet Pressure: 870 PSIG MATERIAL SS = 316L Stainless Steel SH = 316L Stainless Steel with Hastelloy C-22 Internals R 35 SS A 3W 04 R3 24M 24M Q GRADE A = Electropolish B = Standard C = Not certified particle counts. PORTING 2 = 2 Ports 3 = 3 Ports 4 = 4 Ports PORT TYPE W = Welding Port G = Special Specification MAX.INLET PRESSURE [PORT ONLY(NO GAUGE)] 04 = 870 PSIG OUTLET PRESSURE RANGE [PORT ONLY(NO GAUGE)] 10 = 0~140 PSIG 06 = 0~ 90 PSIG 04 = 0~ 60 PSIG 02 = 0~ 30 PSIG Inlet PRESSURE GAUGE PP = 0~200 PSI C4 = 30in. Hg~0~ 60 PSI P7= 0~100 PSI C2 = 30in. Hg~0~ 30 PSI P4= 0~ 60 PSI PE = Others P2= 0~ 30 PSI 4C = 30in. Hg~0~600 PSI CC = 30in. Hg~0~200 PSI C7 = 30in. Hg~0~100 PSI Outlet OPTIONS 2 = IN/OUT Reverse Position Q= Electropolish(GRADE A ) G = Special Specification CONNECTION Type Size Configuration 1 = S VCR 2 = 1/8 M = Male 2 = VCR 4 = 1/4 F = Female 3 = S JSK 6 = 3/8 O = Others 4 = JSK 8 = 1/2 5 = MCG 0 = Others 6 = Swagelok 7 = UJR C= CVC 9 = Others Cl2 GAS APPLICATION Cl2 = Chlorine Gas N2O = Nitorous Oxide Gas CO = Carbon Monoxide Gas sproduct availability and specifications contained herein are subject to change without notice.consult local distributor or factory for potential revisions. sbonnet vent relief porting(optional). sdome loading(optional). spressure Sensor available in place of pressure gauge. sto complete ordering information, select SS or SH in the MATERIAL category. s Materials: Special fluoroplastics are recommended for Chlorine(Cl2) service. s Materials: Vespel is recommended for Nitrous Oxide(N2O) service. sstainless steel internals are recommended for Carbon Monoxide(CO) or Nickel Carbonyl service. scrown/yutaka and e-flow are registered trademarks of YUTAKA ENGINEERING CORPORATION. shastelloy is a registered trademark of Haynes International, Inc. svespel and VITON are registered trademarks of DuPont Company. ss-vcr, VCR and Swagelok are registered trademarks of Swagelok Marketing CO. ss-jsk and JSK are registered trademarks of SANKO KOGYO CO., LTD. smcg is a registered trademark of TOYOKO KAGAKU CO., LTD. sujr is a registered trademark of Fujikin Incorporated. scvc is a registered trademark of Benkan Corporation. swhen selecting a regulator, the total system design must be considered to assure safe, trouble-free regulator performance. Regulator function, materials compatibility, adequate ratings, proper installation, operation and maintenance are the responsibility of the system designer and user. scustom fittings, porting, testing and dimension options are also available upon customer request. sdo not mix or interchange parts with those of other manufacturers. For additional information on Crown products contact An ISO 9001 Quality System Certified Company MITI Certified Self Inspecting Manufacturer(No.MAB 472) MHW Certified Medical Equipment Manufacturer(( )No.2755) YUTAKA/CEEC Printing Printed in Japan ADDRESS , KUGAHARA, OHTA KU, TOKYO , JAPAN PHONE FAX No.1 Edition Apr.1999 CAT.NO C3