Regulators. For ultra high purity (UHP) For UHP gas delivery in semiconductor and other clean industries. AP1600/AP1900 AP1200. AP Series P.

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Regulators For ultra high purity (UHP) For UHP gas delivery in semiconductor and other clean industries. AP1600/AP1900 AP1400T AP1700 AP9000 AP1200 AP2700 AP P.

1 Regulators For ultra high purity (UHP) For UHP gas delivery in semiconductor and other clean industries. AP1600/AP1900 AP1400T AP1700 AP9000 AP1200 AP2700 AP P.666 to 687 AP1000/AP1100/AP1500 AP500 SL5500 SL5400/SL5800 SL P.688 to 695 SL5200 BP1000 AZ1200/AZ1300/AZ1400T AZ1000/AZ1100/AZ1500 AZ P.696 to 709 AZ9200 Back Pressure Regulator BP P.726, 727 A 638

<Air operated type> Regulators For ultra high purity (UHP) For UHP gas delivery in semiconductor and other clean industries. AP10PA/AP15PA AP12PA/AP14PAT AZ10PA/AZ15PA AZ12PA/AZ14PAT APPA P.

2 <Air operated type> Regulators For ultra high purity (UHP) For UHP gas delivery in semiconductor and other clean industries. AP10PA/AP15PA AP12PA/AP14PAT AZ10PA/AZ15PA AZ12PA/AZ14PAT APPA P.728 to 735 AZPA P.736 to 743 For general applications For wide variety of applications from semiconductor to general. AP SL AZ AK BP AK1700 BP1000 AK9200 Back Pressure Regulator AK BP P.710 to 723 P.724, 725 AK1000/AK1500 AK1200/ AK1300/ AK1400T <Air operated type> AK10PA/AK15PA AK12PA/AK14PAT AKPA P.744 to

3 Diaphragm Valves For ultra high purity (UHP) For UHP gas delivery in semiconductor and other clean industries. AP3800 AP3700 AP3100 AP3900 AP3000/AP3200 AP3130 AP3600/AP4600/AP3260 AP3150 AP3650/AP4650 AP3550/AP4550 AP3540/AP4540 AP3657/AP4657 Air operated type AP P.758 to 771 AP3571/AP4571 AP3125 AP3625/AP4625 Manually operated type AP P.772 to 781 Check Valve Vacuum Generators Flow Switches AP72 AP64 AP7 AP74B AP70 AP71 AP74 AP64 AP7,70/71/72 P.786, 787 P.788 to 793 P.794 to 797 AP74/74B Technical Data/Glossary of Terms P.826,

4 Features Standard Selectable by model or option AP AZ AK Application Ultra High Purity (UHP) General applications Body material 316L SS Secondary remelt 316L SS 316 SS Brass EP Surface finish µin. (µm) Ra max 15 µin. (0.4 µm) 10 µin. (0.25 µm) 7 µin. (0.18 µm) 5 µin. (0.13 µm) Electropolish + Passivation Passivation Ra 10 µin. (0.25 µm) 25 µin. (0.62 µm) 1) AP SL AZ AK BP type Fitting Face seal Tube stub weld Threaded NPT Compression Cleanroom Assembly N2 Testing Helium Testing 1) Optional finish not available on all AZ series. 641

Regulator AP/SL AP1000 Application Construction Material Max.

Body 1) Ni-Cr-Mo alloy Internal psig AP1100 4) 300 2.1 AP1500 SL5500 AP1600 100 0.

9 2300 3000 15.9 20.7 1700 11.7 1700 3000 11.7 20.7 AP9000 316L 1700 11.7 AP9100 800 5.

0 150 1.0 1.0 Two stage AP1700 AP2700 1) : 316L SS secondary remelt 316L : 316L SS 2)

5 Regulator AP/SL AP1000 Application Construction Material Max. inlet pressure Distribution Source Tied (Point of use) (Cylinder) diaphragm Springless Body 1) Ni-Cr-Mo alloy Internal psig AP1100 4) AP1500 SL5500 AP Single stage AP1900 SL SL AP1400T AP AP L AP AP L 1.7 Single stage (compact) AP500 SL Two stage AP1700 AP2700 1) : 316L SS secondary remelt 316L : 316L SS 2) In accordance with SEMI F32. 3) At 150 psig (1.0 MPa) inlet pressure. Figure varies depending on gas and operating pressures. 4) For low vapor pressure gases. 642

6 psig 1 to mmhg absolute to 10 psig Outlet pressure to kpa to 0.07 MPa 100 mmhg abs. to 30 psig -88 kpa to 0.2 MPa 1 to to to to to to to to to to mmhg abs. to 30 psig -88 kpa to 0.2 MPa 5 to to 0.7 Preset to 300 Preset to 2.1 Standard Selectable by model or option May be selected for source applications of inert gases, though tied diaphragm is recommended. Sub-atmospheric (Absolute) Cv 2) Flow, N2 3) slpm (HF opt.) (HF opt.) (HF opt.) 1500 (FC opt.) type Fittings Face seal Tube stub P.668 P.680 P.670 P.690 P.672 P.674 P.692 P.694 P.676 P.678 AP SL AZ AK BP 5 to to P mmhg abs. to 10 psig -88 kpa to 0.07 MPa 0.5 to to to to to to to to mmhg abs. to 10 psig -88 kpa to 0.07 MPa to to to to to to 30 1 to 60 1 to to to (HF opt.) (HF opt.) Face seal Tube stub Face seal Tube stub P.666 P.688 P.682 P.684 Please contact SMC if METI certification is required. 643 A

Regulator AZ AZ1000 Application Construction Material Max. inlet pressure Distribution Source Tied (Point of use) (Cylinder) diaphragm Springless Body 1) Ni-Cr-Mo alloy Internal psig AZ1100 4) 300 2.

7 Regulator AZ AZ1000 Application Construction Material Max. inlet pressure Distribution Source Tied (Point of use) (Cylinder) diaphragm Springless Body 1) Ni-Cr-Mo alloy Internal psig AZ1100 4) AZ1500 Single stage AZ1400T AZ L AZ AZ9200 Regulator AK Application Construction Material Max. inlet pressure Distribution Source Tied (Point of use) (Cylinder) diaphragm Springless Body 1) Ni-Cr-Mo alloy Internal psig AK1000 AK1500 Single stage AK1400T AK B AK AK9200 Two stage AK B 1) 316L : 316L SS 316 : 316 SS B : Brass 2) In accordance with SEMI F32. 3) At 150 psig (1.0 MPa) inlet pressure. Figure varies depending on gas and operating pressures. 4) For low vapor pressure gases. 644

psig 1 to 10 100 mmhg absolute to 10 psig 100 mmhg abs. to 30 psig Outlet pressure 0.007 to 0.07-88 kpa to 0.07 MPa -88 kpa to 0.

8 psig 1 to mmhg absolute to 10 psig 100 mmhg abs. to 30 psig Outlet pressure to kpa to 0.07 MPa -88 kpa to 0.2 MPa Standard Selectable by model or option May be selected for source applications of inert gases, though tied diaphragm is recommended. Sub-atmospheric (Absolute) Cv 2) Flow, N2 3) slpm (HF opt.) (HF opt.) 1500 (FC opt.) type Fittings Face seal Tube stub P.696 P.708 P.698 P.700 P.702 P.704 P.706 AP SL AZ AK BP psig 0.5 to 10 5 to to to to to to to mmhg abs. to 30 psig -88 kpa to 0.2 MPa 5 to 200 Outlet pressure to 1.4 Sub-atmospheric (Absolute) Cv 2) Flow, N2 3) slpm (HF opt.) (HF opt.) 1500 (FC opt.) type Threaded Threaded Fittings NPT Compression NPT Compression P.710 P.712 P.714 P.716 P.718 P.720 P.722 Please contact SMC if METI certification is required. 645 A

3000 15.9 20.7 AP12PA 1700 3000 11.7 20.7 AZ10PA Single stage AZ15PA AZ14PAT 316L 2300 3000 15.9 20.7 AZ12PA 1700 3000 11.7 20.7 AK10PA AK15PA AK14PAT 316 B 2300 3000 15.

9 Air Operated Regulator AP/AZ/AK Application Construction Material Max. inlet pressure Distribution Source Tied (Point of use) (Cylinder) diaphragm Springless Body 1) Ni-Cr-Mo alloy Internal psig AP10PA AP15PA AP14PAT AP12PA AZ10PA Single stage AZ15PA AZ14PAT 316L AZ12PA AK10PA AK15PA AK14PAT 316 B AK12PA ) : 316L SS secondary remelt 316L : 316L SS 2) In accordance with SEMI F32. 3) At 150 psig (1.0 MPa) inlet pressure. Figure varies depending on gas and operating pressures. 646

10 psig Outlet pressure Standard Selectable by model or option May be selected for source applications of inert gases, though tied diaphragm is recommended. Sub-atmospheric (Absolute) Cv 2) Flow, N2 3) slpm type Fittings (HF opt.) P (HF opt.) Face seal Tube stub P.730 P.732 P (HF opt.) Face seal Tube stub P.736 P.738 P.740 AP SL AZ AK BP (HF opt.) P (HF opt.) P Threaded NPT Compression P.746 P (HF opt.) P.750 Please contact SMC if METI certification is required. 647 A

3 Threaded Face seal Tube stub NPT Compression P.726 P.

11 Back Pressure Regulator BP Body material 1) Operating pressure psig Cv 2) Standard type Selectable by model or option Fittings BP B 0.5 to 10 5 to to to to to to to Threaded Face seal Tube stub NPT Compression P.726 P.724 1) : 316L SS secondary remelt 316L : 316L SS 316 : 316 SS S : 300 SS series B : Brass 2) In accordance with SEMI F32. Pressure Gauges (For UHP and general applications) P.752 A 648 Please contact SMC if METI certification is required.

12 AP SL AZ AK BP 649

13 Diaphragm Valves (Air operated) Application Status Body Distribution Source material 1) (Point of use) (Cylinder) N.C. N.O. AP3540 AP3550 AP3580 AP3000 AP4540 Air operated AP4550 AP4580 AP3113 AP3130 AP3700 AP3708 Diaphragm Valves (Two step mode) Distribution (Point of use) Application Status Source (Cylinder) N.C. N.O. Body material 1) Air operated Two step mode AP3571 AP4571 1) : 316L SS secondary remelt 2) In accordance with SEMI F

14 Max. operating pressure psig Cv 2) Standard Selectable by model or option Source applications for maximum source pressure of psig (1.7 MPa) or less. LOTO type Fitting P P AP Face seal Tube stub P.760 SL AZ AK BP P P.766 Max. operating pressure psig Cv 2) LOTO type Fitting Face seal Tube weld P.768 Please contact SMC if METI certification is required. 651 A

Diaphragm Valves (Manual) Distribution (Point of use) Application Source

knob AP3650 turn indicating round knob AP3657 Pull twist round knob AP4600 Multi

knob Pull twist round knob AP3100 Multi turn round knob AP3125 turn lever knob

AP3900 Pull twist round knob Diaphragm Valves (Metal seated) Distribution (Point

operated Manual AP3200 AP3260 1) : 316L SS secondary remelt 2) In accordance with

15 Diaphragm Valves (Manual) Distribution (Point of use) Application Source (Cylinder) Knob Body material 1) AP3600 Multi turn round knob AP3625 turn lever knob AP3650 turn indicating round knob AP3657 Pull twist round knob AP4600 Multi turn round knob AP4625 turn lever knob Manual AP4650 AP4657 turn indicating round knob Pull twist round knob AP3100 Multi turn round knob AP3125 turn lever knob AP3150 turn indicating round knob AP3157 Pull twist round knob AP3800 Round knob AP3900 Pull twist round knob Diaphragm Valves (Metal seated) Distribution (Point of use) Application Source (Cylinder) Status or Knob Body material 1) Air operated Manual AP3200 AP3260 1) : 316L SS secondary remelt 2) In accordance with SEMI F32. N.C. Multi turn round knob Option (LOTO, Operational Safety Device) P.782 Porting Guide P

16 Max. operating pressure psig Cv 2) Standard Selectable by model or option Source applications for maximum source pressure of psig (1.7 MPa) or less. LOTO type Fitting P P.774 AP SL Face seal Tube stub AZ AK BP P P.778 Maximum inlet pressure psig MPa Cv 2) LOTO s Fitting Face seal Tube weld P.770 P.780 Please contact SMC if METI certification is required. 653 A

3 0.023 0.4 max Face seal P.786 Tube stub Vacuum Generator Body material 1) Max. vacuum pressure in.

(100) -26 (100) -26 (100) -88-88 -88 3 0.023 Face seal Tube stub P.788 P.790 AP72-26 (100) -88 3 0.023 P.

69 MPa) N2 slpm s Fitting AP74 AP74B 316L 2400 16.3 2 5 10 25 50 100 225 350 500 950 1100 1650 2600 Face seal Tube stub P.

17 Check Valve Body Max. operating pressure material 1) psig Cracking pressure psid Cv 2) Standard Selectable by model or option type Fitting AP max Face seal P.786 Tube stub Vacuum Generator Body material 1) Max. vacuum pressure in.hg (Torr) (kpa) Modules 3) Check valve cracking pressure psid Constant bleed type Fitting AP7 AP70 AP71 316L 316L 316L -26 (100) -26 (100) -26 (100) Face seal Tube stub P.788 P.790 AP72-26 (100) P.792 Flow Switch Body material 1) Max. operating pressure psig MPa Flow, at 100 psig (0.69 MPa) N2 slpm s Fitting AP74 AP74B 316L Face seal Tube stub P.794 P.796 1) : 316L SS secondary remelt 316L : 316L SS 2) In accordance with SEMI F32. 3) Monoblock vacuum generator, N2 supply valve and check valve Regulator and Valve Selection Guide P.656 to 663 Technical Data/Glossary of Terms P.826, 827 A 654 Please contact SMC if METI certification is required.

HP/UHP Spring-Loaded Regulator

HP/UHP Spring-Loaded Regulator Description HP (High Purity) and UHP (Ultra High Purity) products are for service where the product must be kept free of contamination. The design is kept simple to minimise dead areas where contaminants