ULTRA HIGH PURITY BELLOWS VALVES. VCB Series.
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1 UTRA IG PURITY BEOS VAVES VCB Series
2 Features Compact designed body wit minimal dead space Body material comply wit SEMI F-20, Specification 316SS Materials for UP (Ultra ig Purity) Grade Semiconductor Manufacturing Applications Panel and Bottom ow actuation torque Mountable Minimal particle generation Minimal contributions of moisture, oxygen and ydrocarbon wit Uni-ok s own special cleaning process in a certified clean room Excellent finis level of wetted areas wit Uni-ok s own electro polis process 316SS precision formed and electro-polised bellows for long cycle life PCTFE stem tip material wit remarkable cemical and termal resistance Bot panel and bottom mounting available Visible Indicator andle Precision Formed and Electro Polised Bellows Excellent Finis for Minimal Particle Generation Standard Type ow Pressure Bellows Valves Materials of Construction No. Description Materials Operation Type Manual Pneumatic 1 Body 316SS 316SS 2 Gasket PCTFE PCTFE 3 Bellows 316SS 316SS 4 Stem 316SS 316SS 5 Bonnet 316SS 316SS 6 Panel Nut 316SS 316SS 7 andle Aluminum - 8 Actuator - Aluminum 5 Internal Surface Finis evels Manual Indicator andle Designator Surface Finis( μm ) Average Maximum BA < 0.4 < 1.6 EP < < Pneumatic Actuator 2
3 elium eak Test Every VCB series valves are inboard elium leak tested to a rate of 4x10-9 atm.cc/s at seat and all seals. Particle Contribution Test According to ASTM F Moisture Contribution Test According to SEMA B-STD. Cleaning All components are precisely cleaned wit 18 MΩ deionized water after te passivation procedure in accordance wit our own UP cleaning process Reference specification : SEMI E49.6. ow To Order Uni-ok VCB series valves are ordered by part number as sown as below. Assembling According to SEMI E49.6. Packaging Eac component is double bagged to ensure component cleanliness and to protect tem from environmental contamination. Referenced specification : SEMI E49.1. Important Notification Proper installation, materials compatibility, operation and maintenance of tese valves are te responsibility of te user. Te total system design must be taken into consideration to ensure optimal performance and safety. Overall process of testing, cleaning, assembling and packaging for every VCB series valves are performed in a certified clean room. Example : Te following part number,vcbu-08- SS-BA is designated for ow Pressure Bellows Valve, bot 1/2 Uni-ok Tube Fittings, 316SS, BA. VC B U 08T SS BA Uni-ok Clean Valves Valve Type Connection Type Connection Size Operation Type Material Surface Finis evel Valve Type B Standard ow Pressure BF Forged Body Connection Type U Uni-ok Tube Fitting C-*M Male UCR C-*F Female UCR B-*T Butt eld -Tube B-*P Butt eld - Pipe F Flanged Tube O.D. Connection Size Fractional(Inc) Tube O.D. Designation inc 1/4 3/8 1/2 3/4 1 mm Designator Pipe Size Designator Pipe Size 15A 20A 25A Designator 15A 20A 25A UCR (Metal Face Seal) Size Designator UCR Size 1/4 1/2 3/4 Designator 04M/04F 08M/08F 12M/12F Operation Type None Manual Indicator andle PO Pneumatic - Normal Open PC Pneumatic - Normal Close Material DM 316SS - Double Melting SM 316SS - Single Melting SS 316SS Surface Finis evel BA BA EP EP - Electro Polised 3
4 VCB series - 1/4 ~1/2 (Standard Type ow Pressure Bellows Valve - Manual Operation) Specification Size 1/4" 3/8", 1/2" Orifice Size Cv Value Max. orking Pressure Max. orking Temperature Internal eakage (olding Time - Min 30 sec) External eakage (olding Time - Min 1 min) 10 bar (145 psig) -10~80 C (-23~176 F) F K andle Position J 1 G 45 o E Bottom Mounting Open Close Male UCR Uni-ok Tube Fitting Female UCR Tube Butt eld Ordering Information & Dimensions Inlet Outlet 1 F E K (Ø) G J(Ø) U-04T- 1/4" Uni-ok 64.2 U-06T- 3/8" Uni-ok 77.6 U-08T- 1/2" Uni-ok 83.0 C-04M- 1/4" Male UCR 58.0 VCB C-08M- 1/2" Male UCR 63.0 C-04F- 1/4" Female UCR M C-08F- 1/2" Female UCR 90.0 B-04T- 1/4" Tube Butt eld B-06T- 3/8" Tube Butt eld B-08T- 1/2" Tube Butt eld Dimensions are for reference only and are subject to cange witout prior notice. 4
5 VCB series - 3/4 (Standard Type ow Pressure Bellows Valve - Manual Operation) Specification Size 3/4" Orifice Size 12 Cv Value 2.6 Max. orking Pressure Max. orking Temperature Internal eakage (olding Time - Min 30 sec) External eakage (olding Time - Min 1 min) 10 bar (145 psig) -10~80 C (-23~176 F) F K E 45 o Bottom Mounting Uni-ok Tube Fitting Male UCR Female UCR Tube Butt eld Ordering Information & Dimensions Inlet Outlet F E(Ø) K (Ø) U-12T- 3/4" Uni-ok C-12M- 3/4" Male UCR 84.0 VCB M C-12F- 3/4" Female UCR B-12T- 3/4" Tube Butt eld Dimensions are for reference only and are subject to cange witout prior notice. 5
6 VCB series - 1/4 ~1/2 (Standard Type ow Pressure Diapragm Valve - Pneumatic Actuating Operation) Specification Size 1/4" 3/8", 1/2" Orifice Size Cv Value Max. orking Pressure Max. orking Temperature ActuatorPressure Rating Internal eakage (olding Time - Min 30 sec) External eakage (olding Time - Min 1 min) 10 bar (145 psig) -10~80 C (-23~176 F) 4~7 bar (58~101 psig) Actuator Configuration F K N.O. AIR INET PORT Rc(PT) 1/8 N.C. AIR INET PORT Rc(PT) 1/8 45 o E Bottom Mounting Normal Open Normal Close Female UCR Uni-ok Tube Fitting Ordering Information & Dimensions Male UCR Inlet Outlet (Ø) F E K U-04T- 1/4" Uni-ok 64.2 U-06T- 3/8" Uni-ok 77.6 U-08T- 1/2" Uni-ok 83.0 C-04M- 1/4" Male UCR 58.0 VCB C-08M- 1/2" Male UCR 63.0 C-04F- 1/4" Female UCR M5 C-08F- 1/2" Female UCR 90.0 B-04T- 1/4" Tube Butt eld B-06T- 3/8" Tube Butt eld B-08T- 1/2" Tube Butt eld Tube Butt eld Dimensions are for reference only and are subject to cange witout prior notice. 6
7 VCBF series - 1, 15A, 20A, 25A (Forged Body ow Pressure Diapragm Valve - Manual Operation) Specification Size 1" 15A 20A 25A Orifice Size Cv Value Max. orking Pressure 10 bar (145 psig) Max. orking Temperature -10~80 C (-23~176 F) Internal eakage (olding Time - Min 30 sec) External eakage (olding Time - Min 1 min) 1x10-5 atm.cc/s 1x10-5 atm.cc/s Stop Nut maintain predetermined flow level Materials of Construction No. Description Materials 1 Body 316SS 2 Gasket PCTFE 3 Disk PTFE 4 Bellows 316SS 5 Stem 316SS 6 O-ring Viton 7 Packing PCTFE 8 Bonnet 316SS 9 Stop Nut Brass Ni coated 10 andle Aluminum Dimensions are for reference only and are subject to cange witout prior notice. 7
8 1 size 1, 15A, 20A, 25A size 1, 15A, 20A, 25A size C D d Uni-ok Tube Fitting K Tube Butt eld Flanged T F E Bottom Mounting Ordering Information & Dimensions Uni-ok Tube Fitting - 1 size Inlet Outlet F(Ø) E K (Ø) VCBF U-16T- 1" Uni-ok M Tube Butt eld - 1, 15A, 20A, 25A size Inlet Outlet (Ø) B-16T- 1" Tube Butt eld B-15AP- 15A Pipe Butt eld VCBF 60.0 B-20AP- 20A Pipe Butt eld B-25AP- 25A Pipe Butt eld Flanged - 1, 15A, 20A, 25A size Inlet Outlet (Ø) D(Ø) C(Ø) d(ø) T F-16 1" Flanged F-15A 15A Flanged VCBF 60.0 F-20A 20A Flanged F-25A 25A Flanged Dimensions are for reference only and are subject to cange witout prior notice. CONNECTS TE ORD SINCE 본사및제 1 공장인천광역시남동구고잔동 번지남동공단 152 블럭 12 롯트 우 전화 : 팩스 : 제 2 공장인천광역시남동구고잔동 번지남동공단 114 블럭 8 롯트 우 전화 : 팩스 : eadquarters &1 st Factory 152 Block-12 ot, Namdong Indus-Park,725-13, Gojan-Dong, Namdong-Gu, Inceon, Korea Tel : Fax : n d Factory 114 Block-8 ot, Namdong Indus-Park, 684-7, Gojan-Dong, Namdong-Gu, Inceon, Korea Tel : Fax :
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