September TEESING

Transcription

1 Hi gh Pu rit yg as Pr es su re Re gu la to r

2 1 TEESING September 2013

3 High Purity Gas Pressure REGULATOR HIGH / LOW PRESSURE RG1 SERIES RG2 SERIES PRG1 SERIES PRG2 SERIES HFRG3 SERIES LOW PRESSURE MRG3 SERIES BRG3 SERIES MRG4 SERIES MRG5 SERIES HFRG SERIES HFRG2 SERIES HFRG4 SERIES AHFRG SERIES MISCELLANEOUS PROBLEM SOLVED High Purity Gas Pressure Regulator 2

4 High Purity Gas Pressure Regulator High Pressure RG1 RG1 Series 1/ / 30,60,100,150, E BA, P * Flow rate : N2 gas, at inlet pressure 1000psig and outlet pressure 100psig RG2 PRG1 RG2 Series * Flow rate : N2 gas, at inlet pressure 1000psig and outlet pressure 100psig 3/8, 1/ / 30,60,100, E BA, P PRG1 Series * Flow rate : N2 gas, at inlet pressure 1000psig and outlet pressure 100psig 1/4~1/ / 30,60,100, E BA, P PRG2 HFRG3 PRG2 Series * Flow rate : N2 gas, at inlet pressure 1000psig and outlet pressure 100psig 1/4~1/ / 30,60,100, E BA, P HFRG3 Series * Flow rate : N2 gas, at inlet pressure 1000psig and outlet pressure 100psig 3/8 ~ / 25,50,100,150, E BA, P Low Pressure RG2 RG1 Series 1/4 600 / 30,60,100,150, E BA, P * Flow rate : N2 gas, at inlet pressure 500psig and outlet pressure 100psig RG1 RG2 Series 3/8, 1/2 600,1000 / 30,60,100, E BA, P * Flow rate : N2 gas, at inlet pressure 500psig and outlet pressure 100psig PRG1 PRG1 Series 1/4~1/2 600,1000 / 30,60,100, E BA, P * Flow rate : N2 gas, at inlet pressure 500psig and outlet pressure 100psig 3 TEESING

5 PRG2 MRG3 PRG2 Series * Flow rate : N2 gas, at inlet pressure 500psig and outlet pressure 100psig 1/4~1/2 600,1000 / 30,60,100, E BA, P MRG3 Series 1/4, 3/8 150 / 30,60, E BA, P * Flow rate : N2 gas, at inlet pressure 80psig and outlet pressure 40psig BRG3 MRG4 BRG3 Series * Flow rate : N2 gas, at inlet pressure 80psig and outlet pressure 40psig 1/4, 3/8 150 / 30,60, E BA, P MRG4 Series 1/4 150 / 30,60, E BA, P * Flow rate : N2 gas, at inlet pressure 80psig and outlet pressure 40psig MRG5 HFRG MRG5 Series * Flow rate : N2 gas, at inlet pressure 80psig and outlet pressure 40psig 1/4 500 / 30,60, E BA, P HFRG Series * Flow rate : N2 gas, at inlet pressure 500psig and outlet pressure 100psig 1/4~1/2 200,500 / 30,75, E BA, P HFRG2 HFRG3 HFRG2 Series 1/4~3/4 250,150 / 30,60, E BA, P * Flow rate : N2 gas, at inlet pressure 200psig and outlet pressure 100psig HFRG3 Series 1/2 ~1 500 / 25,50,100,150, E-8 1 BA, P * Flow rate : N2 gas, at inlet pressure 500psig and outlet pressure 100psig HFRG4 AHFRG HFRG4 Series 1/2 ~1 300 / 30,60,100, E-8 5 BA, P * Flow rate : N2 gas, at inlet pressure 200psig and outlet pressure 100psig AHFRG Series 3/4~50A 300 / E-9 8 BA, P * Flow rate : N2 gas, at inlet pressure 200psig and outlet pressure 100psig High Purity Gas Pressure Regulator 4

6 High Purity Gas Pressure Regulator RG 1 Series Designed for point-of-use medium flow to be used in process gas cabinets for gas companies, equipment manufactures and semiconductor manufacturers. Precise control of gas pressure at or near the process tool for flow rates of up to 250 SLPM at 300 PSIG inlet. All internal surfaces are finished with 10Ra or 5Ra to ensure minimal particle generation and entrapment. Metal-to-metal diaphragm seals provide enhanced leak tight integrity. Every step of assembly, welding, testing and final cleaning finished in Class 100 or 10 Cleanrooms. 5 TEESING

7 RG 2 Series Designed for point-of-use high flow to be used in process gas cabinets for gas companies, equipment manufactures and semiconductor manufacturers. The RG2 provides precise control of process gas pressure at or near the tool for flow rates of up to 600 SLPM at 300 PSIG inlet. All internal surfaces are finished with 10Ra or 5Ra to ensure minimal particle generation and entrapment. Metal-to-metal diaphragm seals provide enhanced leak tight integrity. Every step of assembly, welding, testing and final cleaning finished in Class 100 or 10 Cleanrooms. High Purity Gas Pressure Regulator 6

8 High Purity Gas Pressure Regulator PRG 1 Series No internal springs and threadless design to minimize particle entrapment areas. Positive shutoff seal reduces pressure creep. Metal to metal diaphragm seal enhances leak tight integrity. 7 TEESING

9 PRG 2 Series No internal springs and threadless design to minimize particle entrapment areas. Metal to metal diaphragm seal enhances leak tight integrity. A strong mechanical link between the diaphragm and the valve stem prevents pressure creep. High Purity Gas Pressure Regulator 8

10 High Purity Gas Pressure Regulator MRG3 Series Compact size High performance with low hysteresis. 9 TEESING

11 BRG3 Series Compact size High performance with low hysteresis. High Purity Gas Pressure Regulator 10

12 High Purity Gas Pressure Regulator MRG4 Series Compact size High performance with low hysteresis. 11 TEESING

13 MRG5 Series Compact size High performance with low hysteresis. High Purity Gas Pressure Regulator 12

14 High Purity Gas Pressure Regulator HFRG Series 13 TEESING

15 HFRG2 Series High Purity Gas Pressure Regulator 14

16 High Purity Gas Pressure Regulator HFRG3 Series A 15 TEESING

17 HFRG4 Series High Purity Gas Pressure Regulator 16

18 High Purity Gas Pressure Regulator AHFRG Series 17 TEESING

19 PROBLEM SOLVED ADDITIONAL SERVICES Teesing Cleanroom We have a cleanroom where we can double pack all our products in clean air, nitrogen or helium. Teesing has the unique capability to assemble UHP fittings, hoses, valves regulators and tubing in a class 100 cleanroom. For small assemblies it is possible to produce class 10. Teesing Valves From the same range as the Teesing Regulators we can provide you a Ultra high purity valves. Our range offers diaphragm valves, bellow valves and check valves specially made for the semiconductor industry. Ask for our brochure! ENGINEERING In close co-operation with the customer and supported by the latest technology, Teesing can develop the right products and assemblies for your specific requirements. We can also provide additional engineering services like CAD-files of most of our products. "WE ENGINEER FROM SOURCE TO PROCESS" High Purity Gas Pressure Regulator 18

20 Contact our sales engineers to receive detailed product information. We recommend to visit our website for regularly updated product information. TEESING TAIWAN LTD. 4F-15, No.36, Taiyuan St. Zhubei City Hsinchu County Taiwan Tel Fax teesingtaiwan@teesing.com