DFC NIST DIGITAL MASS FLOW CONTROLLERS. DFC with optional LCD readout PROG RS485. Programmable Mass Flow Controller with Digital Signal Processing

Size: px

Start display at page:

Download "DFC NIST DIGITAL MASS FLOW CONTROLLERS. DFC with optional LCD readout PROG RS485. Programmable Mass Flow Controller with Digital Signal Processing"

Pierce Bennett
5 years ago
Views:

Cotrollers ca be programmed for various cotrol fuctios icludig flow set poit, totalizer, stop totalizer, read totalizer, totalizer from

1 Programmable Mass Flow Cotroller with Digital Sigal Processig Microprocessor drive digital flow cotrollers allow oe to program, record, ad aalyze flow rates of various gases with a computer via a RS-485 iterface. Optioal RS-22 is available. Cotrollers ca be programmed for various cotrol fuctios icludig flow set poit, totalizer, stop totalizer, read totalizer, totalizer from preset flow, stop at preset total, auto zero, ad more. with optioal LCD readout NIST Traceable Calibratio PROG RS485 BULLETIN EM (72)

2 Desig Features Digital ad Aalog modes operate simultaeously. Programmable Flow Cofiguratios. Multi-Drop Capability of up to 256 uits. Stores calibratio data for up to 10 gases. Auto Tue fuctio for optimum cotrol respose. Free PC Software with Gas Bledig ad Programmable Flow fuctios. Totalizer idicates total gas quatity. Alarm limits for high ad low gas flow. Coversio factors for up to 256 gases. Self-Diagostic Tests. BULLETIN EM Priciples of Operatio Metered gases are divided ito two lamiar flow paths, oe through the primary flow coduit, ad the other through a capillary sesor tube. Both flow coduits are desiged to esure lamiar flows ad therefore the ratio of their flow rates is costat. Two precisio temperature sesig widigs o the sesor tube are heated, ad whe flow takes place, gas carries heat from the upstream to the dowstream widigs. The resultat temperature differetial is proportioal to the chage i resistace of the sesor widigs. A Wheatstoe bridge desig is used to moitor the temperature depedet resistace gradiet o the sesor widigs which is liearly proportioal to the istataeous rate of flow. The output of the Wheatstoe bridge is coverted to digital format with a 12 Bit ADC (aalog to digital coverter). A o-board microprocessor ad o-volatile memory store all calibratio factors ad directly cotrol a proportioatig electromagetic valve. The digital closed loop cotrol system cotiuously compares the mass flow output with the selected flow rate. Deviatios from the set poit are corrected by compesatig valve adjustmets, with PID algorithm thus maitaiig the desired flow parameters with a high degree of accuracy. Output sigals of 0 to 10Vdc, 0 to 5Vdc or 4 to 20mA are geerated idicatig mass molecular based flow rates of the metered gas. Iterface The digital RS-485 (optioal RS-22) iterfaceprovides access to applicable iteral data icludig FLOW SET POINT, ACTUAL FLOW, ZERO ADJUSTMENTS, ad LINEARIZATION TABLE ADJUSTMENTS. The aalog iterface provides 0 to 5Vdc, 0 to 10Vdc ad 4 to 20 ma iputs ad outputs. Auto Zero The automatically ulls the sesor zero offset wheever the flow set poit is below 2% of full scale. To accommodate this feature the cotrol valve must fully close uder that coditio. Provisios are made to either disable, force or store the curret auto zero via digital commads. Totalizer The firmware for the provides fuctios to register total gas quatity. The total mass of gas is calculated by itegratig the actual gas flow rate with respect to time. Digital iterface commads are provided to: Set the totalizer to zero. Start /stop totalizig the flow. Read the totalizer. Start the totalizer at a preset flow. Stop the flow at a preset total. (72)

3 Multi-Gas Calibratio The is capable of storig primary calibratio data for up to 10 gases. This feature allows the same to be calibrated for multiple gases while maitaiig the rated accuracy o each. Coversio Factors Coversio factors for up to 256 gases are stored i the. Coversio factors may be applied to ay of the te gas calibratios via digital iterface commads. Flow Alarms High ad Low gas flow ALARM limits are programmed usig the digital iterface. Alarm coditios are reported via the digital iterface or ca activate the cotact closure outputs. Gas Bledig Feature Aalborg free software allows cotrollig flow of the Gas mixture of up to eight differet gases (for RS-485 bus with 8 cotrollers) with preset values of the ratio i % for each chael. The flow rate of the Gas Mixture ca be icremeted or decremeted withi allowable rage (based o Full Scale rage of all cotrollers i the mixture system) by chagig the Gas Mixture set poit settigs. The software will automatically adjust idividual set poit for each device accordig to set ratios. Programmable Flow Aalborg software supports programmable flow modes, allowig executio of custom programmig of up to te steps. Various flow cofiguratios iclude rampig, liearized icreasig ad decreasig modes. Auto Tue The AUTO TUNE fuctio allows the to automatically optimize cotrol respose for the gas uder actual process coditios. Durig the AUTO TUNE process, the istrumet adjusts PID gais for optimum step respose ad determie key cotrol valve characteristics (oly available o uits with less tha 80 L/mi maximum flow). Cotact Closure Two sets of dry cotact relay outputs are provided to actuate user supplied equipmet. These are programmable via the digital iterface such that the relays ca be made to switch whe a specified evet occurs (e.g. whe a low or high flow alarm limit is exceeded or whe the totalizer reaches a specified value). Valve Override Meas are provided to force the cotrol valve fully ope (purge) or fully closed via either the aalog or digital iterfaces. Self-Diagostics Wheever power is first applied, the rus a series of SELF-DIAGNOSTIC TESTS to esure that it is i optimum workig coditio. Egieerig Uits The flow set poit, measured gas flow ad associated totalizer data is scaled directly i egieerig uits via digital iterface commads. The followig uits of measure are supported:% of FS, ml/mi, ml/hr, scfm, scfh, L/mi, L/hr, lbs/hr, lbs/mi, ad oe user defied uit of measure. Leak Itegrity 1 x 10-9 sml/sec of Helium maximum to the outside eviromet. Balaced Power Supply The operates o ±15Vdc. The curret requiremets for the positive ad egative power supplies are balaced such that the curret i the power supply commo coectio is miimized. Maximum power cosumptio is 1.5 watts at ±15Vdc. BULLETIN EM (72)

4 TABLE 22 - SPECIFICATIONS ACCURACY: CALIBRATIONS: REPEATABILITY: RESPONSE TIME: TEMPERATURE COEFFICIENT: PRESSURE COEFFICIENT: OPTIMUM GAS PRESSURE: MAXIMUM GAS PRESSURE: ±1% of FS at calibratio temperature ad pressure. Performed at stadard coditios [14.7 psia (101.4 kpa) ad 70 F F (21.1 F C)] uless otherwise requested. ±0.15% of full scale. 1.0 to 2.0 secod to withi ±2% of set poit over 20% to 100% of full scale. 0.05% of full scale/ F F or better. 0.01% of full scale /psi (0.07 bar) or better. 25 psig (1.7 bars) psig (70 bars). MAXIMUM DIFFERENTIAL PRESSURE: 50 psig (.4 bars) for 26 ad 6 40 psig (2.8 bars) for 46 MAX PRESSURE DROP: Refer to Table 2. GAS ad AMBIENT TEMP: COMMUNICATION INTERFACE: OUTPUT SIGNALS: CIRCUIT PROTECTION: 2 F F to 122 F F (0 F C to 50 F C). 14 F F to 122 F F (-10 F C to 50 F C) - Dry gases oly. RS485 - Stadard. RS22 - Optioal. Liear 0-5 Vdc (2000 ohms mi load impedace); impedace); 0-10Vdc (4000 ohms mi impedace); 4-20 ma optioal (0-500 ohms\ loop resistace). Maximum oise 20mV peak to peak. Circuit boards have built-i polarity reversal protectio. Resettable fuses provide power iput protectio. **MATERIALS IN FLUID CONTACT: 16 stailess steel, 416 stailess steel, Vito O-rigs. Optioal O-rigs: Bua, EPR ad Kalrez. ATTITUDE SENSITIVITY: CONNECTIONS: No greater tha +15 degree rotatio from horizotal to vertical; stadard calibratio is i horizotal positio. Model 26/6: Stadard 1/4" compressio fittigs. Optioal: 6mm compressio fittigs or /8" compressio fittigs or 1/4" VCR or 1/8" compressio fittigs ( 26). Model 46: stadard /8" compressio fittigs. LEAK INTEGRITY: TRANSDUCER INPUT POWER: CALIBRATION OPTIONS: CE COMPLIANCE: 1 x 10-9 sml/sec of helium maximum to the outside eviromet. +15Vdc, 450 ma maximum. Stadard 10 poit NIST traceable calibratio. Optioal up to 9 additioal 10 poit calibratios may be ordered for a additioal charge. EN class 1, class B; EN **The selectio of materials of costructio, is the resposibility of the customer. The compay accepts o liability. BULLETIN EM (72)

5 26 Mass Flow Cotroller 24-PIN D-CONNECTOR MALE 6/46 Mass Flow Cotroller 25-PIN D-CONNECTOR MALE * FOR HIGH FLOW MASS FLOW CONTROLLERS * BULLETIN EM (72)

6 TABLE 2 - FLOW RANGES FOR 26 LOW FLOW CONTROLLERS 6 MEDIUM FLOW CONTROLLERS 46 HIGH MASS FLOW CONTROLLERS CODE Uits [Nitroge] CODE L/mi [N2] CODE L/mi [N2] 01 0 to 10 ml/mi 11 0 to 15 L/mi 40 0 to 60 L/mi 02 0 to 20 ml/mi 0 0 to 20 L/mi 41 0 to 80 L/mi 0 0 to 50 ml/mi 1 0 to 0 L/mi 42 0 to 100 L/mi 04 0 to 100 ml/mi 2 0 to 40 L/mi 05 0 to 200 ml/mi 0 to 50 L/mi 06 0 to 500 ml/mi 07 0 to 1 L/mi 08 0 to 2 L/mi 09 0 to 5 L/mi 10 0 to 10 L/mi TABLE 24 - ACCESSORIES AND READOUTS FOR CBL- CBL--DPM-AIO CBL-PROC PS--110NA-5-S PS--110NA-5-A PS--20EU-5-S PS--240UK-5-S PS--240AU-5-S BCKUP PS--110NA-5-S-D PS--110NA-5-A-D 25 pi D-coector with 6 ft. wire to computer port stripped, Brach 6ft. wire to customers power supply. Cable stripped for with LCD jack ad aalog iput/output. 25 pi D-coector with 6ft. wire to 15 pi DM, Brach 6ft. wire to computer port stripped. Power supply with 25 pi female D-coector 110/vac (±15Vdc.) Brach 6ft wire to computer port stripped /North America. Power supply with 25 pi D-coector, aalog iterface 110/vac (+ - 15Vdc.) (North America). Power supply with 25 pi female D-coector 20/vac (±15Vdc.) Brach 6ft wire to computer port stripped /Europe. Power supply with 25 pi female D-coector 240/vac (±15Vdc.) Brach 6ft wire to computer port stripped /Uited Kigdom. Power supply with 25 pi female D-coector 240/vac (±15Vdc.) Brach 6ft wire to computer port stripped /Australia. Digital pael meter / led backlight. Power supply 110/Vac ±15Vdc stadard iterface ad LCD jack. (Uited States). Power supply 110/Vac ±15Vdc aalog iterface ad LCD jack. (Uited States). TABLE 25 - MAXIMUM PRESSURE DROP FOR BULLETIN EM MODEL NO. MAX. FLOW (N2) MAXIMUM PRESSURE DROP [mm H 2 O] [psid] [mbar] 26 up to (72)

7 Cable Optios Stadard Cable (supplied with Trasducer) CBL- D FC C 25 PINS 6 FEET POWER SUPPLY COMPUTER COMMUNICATION D FC C 25 PINS 6 FEET CBL--SDPROC 15 PINS COMMAND MODULE PROC COMPUTER COMMUNICATION PS--110NA-5-S 20EU /240UK /240AU D F C 25 PINS 6 FEET POWER SUPPLY COMPUTER COMMUNICATION POWER 110/20/240V D F C PS--110NA-5-A 20EU /240UK /240AU 25 PINS 6 FEET POWER SUPPLY 9 ANALOG SETPOINT ANALOG OUTPUT PURGE CLOSE RELAY OTHER-SEE MANUAL COMPUTER COMMUNICATION POWER 110/20/240V BULLETIN EM (72)

8 ORDERING INFORMATION DIGITAL MASS FLOW CONTROLLERS MODEL MAX. FLOW (N2) L/mi 6 50 L/mi L/mi MATERIAL S Stailess Steel SEALS V Vito B Bua E EPR T PTFE / Kalrez FITTINGS MODEL A 1/4" Compressio 26, 6 B 1/8" Compressio 26 C 1/4" VCR 26, 6 D /8" Compressio 26, 6, 46 H 6mm Compressio 26, 6 DISPLAY N No Display L LCD Readout (Special iterface cable is required). POWER Vdc INPUT / OUTPUT SIGNAL C 0-5Vdc/ 0-5Vdc D 0-5Vdc/ 4-20mA E 4-20mA/ 4-20mA F 4-20mA/ 0-5Vdc H 0-5 Vdc/ 0-10Vdc I 0-10Vdc/ 0-5 Vdc J 0-10Vdc/ 0-10 Vdc K 4-20 ma/ 0-10 Vdc L 0-10 Vdc/ 4-20 ma DIGITAL INTERFACE 2 RS22 5 RS485 BULLETIN EM S V A N 5 C 5 EXAMPLE: 6S-VAN5-C5 50 L/mi [N2] 20 psig SPECIFY: FLOW RANGE, GAS ad PRESSURE. 6 stailess steel, Vito seals, 1/4" compressio fittigs, No display, +15 Vdc power, 0-5 Vdc/0-5 Vdc iput output sigal, RS485 digital iterface. (72)

GFC NIST MASS FLOW CONTROLLERS. Typical Stainless Steel GFC Mass Flow Controller. Design Features. General Description. Principles of Operation

GFC NIST MASS FLOW CONTROLLERS. Typical Stainless Steel GFC Mass Flow Controller. Design Features. General Description. Principles of Operation BULLETIN EM20180402 Model thermal Mass Flow Cotrollers are desiged to idicate ad cotrol set flow rates of gases. The combies the characteristics ad accuracy of covetioal mass flow devices ito a uique compact