Installation Requirements

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1 Carl Zeiss SMT - Nano Technology Systems Division Installation Requirements ULTRA plus Field Emission Scanning Electron Microscope with integral charge compensator and embedded EsB and AsB detectors

2 ULTRA plus - Installation Requirements Contents Introduction...3 Storage and Transport...3 System Layout...4 Location Requirements...5 Weights...5 Floor Stability...5 Assembly Plan...6 Electrical Supplies...7 Protective Ground...7 Cooling Water Supply...8 Gas Supplies...10 Energy Supply Connections...12 X-ray Information...12 Conformity...12 Environmental Requirements...13 Packaging...15 Seismic Protection...15 IR_ULTRAplus_en01 Page 2 of 16

3 Introduction This document describes the location requirements for the installation of a Field Emission Scanning Electron Microscope (FESEM). The aim of this document is to help the customer to determine a location within his/her facilities and to prepare the location before delivery of the FESEM. The suitability of a location depends on various factors such as: Room size Floor stability Environmental conditions Availability of supplies The room should not be chosen too small, as in most cases not only the FESEM itself, but also a certain number of accessories will be installed, probably not from the beginning but certainly later. Environmental conditions are often influenced also by installations more or less in the neighbourhood of the desired location. We can distinguish between: Vibrations Magnetic stray fields Electrical fields Acoustic noise To operate the FESEM a number of supplies such as electric power, gaseous nitrogen, compressed air and cooling water are mandatory. Detailed information can be found in this document. The NTS/SMT Technical Service will be happy to assist with examining environmental conditions and identifying appropriate measures. The compliance with the environmental conditions demanded in this document and the availability of the requested supplies is the responsibility of the customer and has to be provided at the time of installation. Carl Zeiss NTS holds all copyrights and rights of exploitation, including all translation of this material. No part of this documentation may be reproduced, edited, or provided to a third party without written permission from Carl Zeiss NTS, Oberkochen. Due to an ongoing process of improvement NTS/SMT reserves the right to make modifications of this document without notice. Storage and Transport The packed FESEM has to be stored in a dry place. In order to avoid damage of the FESEM by shock, the FESEM has to be exclusively transported in airsuspended vehicles. Temperature during storage and transport has to be between -10 C and +70 C. IR_ULTRAplus_en01 Page 3 of 16

4 System Layout No Description Size (mm) approx. Weight (kg) approx. Distribution of load (kg) Floor space required (mm) 1 Plinth + column 822 x 980 x x 220 Ø 80 2 Table + PC 1153 x 980 x x 24.3 Ø 50 3 EMO box 400 x 380 x x x 40 4 Dynamic damping block 200 x 200 x x x Static damping block 180 x 180 x x x Pre-vacuum pump 430 x 250 x x x 180 IR_ULTRAplus_en01 Page 4 of 16

5 Location Requirements Installation site Exclusively inside buildings Recommended Room Size Min. 3.5 m x 5 m x 2.3 m Service Area Min m at each side Entrance Min. 0.8 m wide Hallways Min. 1.0 m wide Corners Min. 1.2 m wide Transport Ways Free of staircases Installation Category II Weights Overall Weight Appr.1030 kg Plinth incl. Chamber Appr. 860 kg Table-console Appr. 85 kg Monitor Appr. 7 kg PC Appr. 5 kg Dynamic Damping Block Appr. 26 kg Static Damping Block Appr. 37 kg Pre-vacuum pump Appr. 25 kg Floor Stability Floor Loading >1000 kg/m 2 IR_ULTRAplus_en01 Page 5 of 16

6 Assembly Plan B A I C D E F G H J II III IV K VII VI V VII I EMO box (optional) A Mains power supply V/32A, 1/N(L2)/PE II Dynamic vibration damper B Equipotential bonding bar III Static vibration damper IV Pre-vacuum pump C Water solenoid valve D Pressure reducer (water, nitrogen, compressed air) V Computer workplace E Main shut-off valves VI Emergency Off (EMO) button (optional) F Water supply VII Adjusting feet G Water runback H J K Nitrogen supply Compressed air supply Exhaust line IR_ULTRAplus_en01 Page 6 of 16

7 Electrical Supplies Nominal AC Voltage 208 V VAC (+5% -10%), 1/ N (L2) / PE The provided electrical connection must be in accordance with the applicable electrical codes for the country of installation. In order to avoid disturbance from other installed machines Carl Zeiss NTS recommends using a separate power connection to the main distribution panel. Nominal Frequency Hz System Connection The FESEM is delivered with a power cord 3 x AWG10 UL-style (5 m long) and a CEE-connector (Type 32 A-6 h; 208 to 240 V, 2P+PE). Alternatively the FESEM can be installed directly to a switchable power distribution terminal which can be secured against accidental re-activation. Power Consumption max 3.5 kva, dependent on accessories Emergency-off Compliance with SEMI standard requires the installation of an emergency-off (EMO) box including a red mushroom shaped EMO button. A special emergency-off circuit is available (part no ). The EMO box should be mounted close to the system. Wiring that runs outside the FESEM should be laid and protected in appropriate cable ducts or trays. Moreover, it is recommended that you protect the complete room by installing a power switch next to the door of the room. Circuit Breaker Without EMO box: 25 A, with switch-off behaviour K on installation site With EMO box: 32 A Ampere Interrupting Capacity (AIC) 10,000 A (with EMO) 5,000 A (without EMO) Momentary Interruption Less than one cycle Protective Ground High leakage currents can be present in the FESEM. Therefore, the FESEM has to be connected to an equipotential bonding bar. An exclusive grounding connection to earth must be provided, i.e. the grounding terminal must not be common to other electrical equipment. A grounding wire AWG10 (5 m long) is delivered with the FESEM. Cross Section > 4 mm 2 Ground Resistance < 0.1 Ohm IR_ULTRAplus_en01 Page 7 of 16

8 Cooling Water Supply Major components of the FESEM such as electron-optic lenses, parts of the electronics and the turbo molecular pump are water-cooled. Water Flow Rate Min. 2 l/min Input Pressure 2 to 3 bar Water Temperature C Stability 0.5 C/10 min Heat Dissipation 1 kw Connection Hose 6 mm inside diameter. Two pieces 10 m each are delivered with the FESEM. System Connection Quick exchange connectors. Two are delivered with the FESEM. The connection must be equipped with a main shut-off valve that is secured against accidental re-activation, e.g. a ball valve AKT 15TN88 with optional lock 420-1/4-1/2 (manufacturer: G. Kromschröder AG, Osnabrück, Germany, resp. Kromschroder Inc, Hudson, OH 44236, USA) or equivalent. The user is responsible for the installation of a main shut-off valve at the site of installation. Main shut-off valves have to be easily accessible. They must close off the connections to the corresponding media when needed. The main shut-off valves have to be lockable in their off position in order to prevent accidential re-activation. As the user is responsible for installing the main shut-off valves, he/she should also provide instructions how to operate the main shut-off valves properly. Energy isolating devices should be mounted near the FESEM in such a way that the person actuating or inspecting an energy isolating device should not be exposed to serious risks. IR_ULTRAplus_en01 Page 8 of 16

9 Cooling Water Supply Remarks Using a closed-circuit cooling device Carl Zeiss NTS recommends using an air-cooled closed-circuit cooling device (part no ). Alternatively, a water-cooled closed-circuit cooling device can be used (part no , water consumption max. 120 l/h). Due to heat dissipation, acoustic noise and vibrations the closed-circuit cooling device should be installed in a separate room close to the FESEM. Using an in-house water supply When using an in-house water supply, the specified water temperature must be guaranteed. Otherwise the installation of a closed-circuit cooling device is mandatory. With an in-house cooling water supply, the following devices have to be installed: - main shut-off valve - water filter - pressure reducers with two manometers - water solenoid valve (interrupts water flow when FESEM is switched off) An installation kit is available (part no ). It must be possible to cut the water supply and lock the main shut-off valve so that the water cannot be turned back accidentally. For ecological reasons do not use water from the water supply with an open drain. IR_ULTRAplus_en01 Page 9 of 16

10 Gas Supplies Nitrogen Gaseous dry nitrogen is used to ventilate the specimen chamber during specimen exchange. The nitrogen can be taken either from a gas cylinder or from an in-house supply system. Flow Rate Approx. 3 l/min for ventilation of specimen chamber with chamber door open Pressure bar Quality 4.6 with nitrogen content > % Connection Hose 4 mm inside diameter. 10 m are delivered with the FESEM. System Connection Quick exchange connector. One is delivered with the FESEM. The connection must be equipped with an appropriate pressure reducer and a main shut-off valve that is secured against accidental re-activation, e.g. a ball valve AKT 10TN88 with optional lock 420-1/4-1/2 (manufacturer: G. Kromschröder AG, Osnabrück, Germany, resp. Kromschroder Inc, Hudson, OH 44236, USA) or equivalent. The user is responsible for the installation of a main shut-off valve at the site of installation. Main shut-off valves have to be easily accessible. They must close off the connections to the corresponding media when needed. The main shut-off valves have to be lockable in their off position in order to prevent accidential re-activation. As the user is responsible for installing the main shut-off valves, he/she should also provide instructions how to operate the main shut-off valves properly. Energy isolating devices should be mounted near the FESEM in such a way that the person actuating or inspecting an energy isolating device should not be exposed to serious risks. Concerning the hazards of nitrogen installations and associated safety precautions see guideline IGC Doc 44/00/E: Hazards of inert gases, published by EIGA (European Industrial Gases Association) which can be found on the EIGA homepage IR_ULTRAplus_en01 Page 10 of 16

11 Gas Supplies Compressed Air Compressed air is used to operate several valves and the auto levelling system. The necessary compressed air can be either generated by a compressor (part no ) or taken from a gas cylinder or from an inhouse supply system. Flow Rate Less than 1 l/min Pressure 6-8 bar Quality Oil-free Connection Hose 6 mm inside diameter. 10 m are delivered with the FESEM. System Connection Quick exchange connector. One is delivered with the FESEM. The connection must be equipped with an appropriate pressure reducer and a shut-off valve that is secured against accidental re-activation, e.g. a ball valve AKT 10TN88 with optional lock 420-1/4-1/2 (manufacturer: G. Kromschröder AG, Osnabrück, Germany, resp. Kromschroder Inc, Hudson, OH 44236, USA) or equivalent. The user is responsible for the installation of a main shut-off valve at the site of installation. Main shut-off valves have to be easily accessible. They must close off the connections to the corresponding media when needed. The main shut-off valves have to be lockable in their off position in order to prevent accidential re-activation. As the user is responsible for installing the main shut-off valves, he/she should also provide instructions how to operate the main shut-off valves properly. Energy isolating devices should be mounted near the FESEM in such a way that the person actuating or inspecting an energy isolating device should not be exposed to serious risks. Remarks Due to acoustic noise and vibrations the compressor should be installed in a separate room close to the FESEM. IR_ULTRAplus_en01 Page 11 of 16

12 Energy Supply Connections All energy supply connections such as electrical power, cooling water, gaseous nitrogen and compressed air, as well as attaching connectors for PC, monitor, rotary pump etc. are located at the rear of the microscope plinth. X-ray Information X-rays are generated in the column and the specimen chamber during operation of the FESEM. Therefore, the user of the FESEM must observe the specific national X-ray regulations on installation, start-up, operation and maintenance. The acceleration voltage of the FESEM is limited to 30 kv. The local dosage rate at a distance of 0.1 m from the accessible surface of the instrument does not exceed 1 µsv/h. Appropriate X-ray labelling should be attached to the FESEM according to the requirements of the local jurisdiction of the country of installation. Conformity The FESEM is in conformity with the following standards and directives: EN Conductive and Radiated Emissions (Class A on Radiated Emission) EN Immunity EN Safety Requirements for Electrical Equipment for Measurement Control and Laboratory Use 89/336/EEC Electromagnetic Compatibility, changed by 93/68/EEC 73/23/EEC Low Voltage Directive, changed by 2006/95/EG IR_ULTRAplus_en01 Page 12 of 16

13 Environmental Requirements Environmental effects like acoustic noise, floor vibration, magnetic stray fields and electrical fields, as well as the room temperature have a significant impact on the performance of the FESEM and the ability to achieve the specified figures. A site survey is carried out by the local NTS/SMT Technical Service prior to the installation. The local NTS/SMT Technical Service is being helpful to assist with the identification of the environmental status and if necessary shall recommend preventive measures. The compliance with the values demanded within this document is the responsibility of the customer and has to be provided at the time of installation. Vibrations Vibrations can be caused e.g. by heavy-duty machinery installed on the same floor or even in the same building as well as transport facilities operated nearby. Depending on the floor stability and construction, already walking in the room or in the hallways may effect the image quality. Allowable Vibration Values: (Corresponds to an image distortion of less than 1 nm. Imaging conditions: 20 kv, WD = 2 mm, 200 kx, Inlens-detector) Allow able vibration value s in x/y dire ction µm/s [rms] < 7.2 [µm/s] rms for f > 25 Hz Hz µm/s [rms] Allow able vibration values in z direction < 14 [µm /s] rm s fo r f > 2 5 H z Hz IR_ULTRAplus_en01 Page 13 of 16

14 Environmental Requirements Magnetic Stray Fields Magnetic stray fields can be generated e.g. by machines, by supply lines when carrying heavy loads, by power distribution panels and transformer stations. Avoid locations subject to varying fields, e.g. close to an elevator. Allowable magnetic Stray Field: (Corresponds to an image distortion of less than 1nm. Imaging conditions: 20 kv, WD = 2 mm, 200 kx, Inlens-detector) Less than 3 mg peak to peak at 50 and 60 Hz Acoustic Noise Sound waves e.g. vibration of the air caused by air-conditioning will effect the FESEM and may cause image distortion. Allowable Noise Level: (Corresponds to an image distortion of less than 1 nm. Imaging conditions: 20 kv, WD = 2 mm, 200 kx, Inlens-detector) Allow able noise level db Hz Electrical Field A large number of even small-sized electric equipment can be the source of electric fields. Wireless communication systems, ultrasonicwave equipment, medical equipment using high frequency, phase controlled power supplies, motor driven equipment, electrical railway, just to mention a few. Ambient Temperature Approx. 21 C +/- 4 C Stability: 0.5 C/h Relative Humidity Less than 65 % Altitude To guarantee an undisturbed operation, do not operate the FESEM at sites above 2000 m above sea level. Pollution degree 2 IR_ULTRAplus_en01 Page 14 of 16

15 Packaging Microscope Plinth Wrapped with recyclable polyethylene-foil and shipped in a reusable wooden box Dimensions and weight of box: 1300 x 1130 x 2000 mm³ (W x D x H), appr. 975 kg Microscope Console and Accessories Console, valve, damper, monitors, cables, pipes etc. are wrapped with recyclable polyethylene-foil or packed in separate cartons and shipped in a reusable wooden box. Dimensions and weight of box: 1450 x 1360 x 1180 mm³ (W x D x H), appr. 400 kg Seismic Protection In earthquake-prone areas the FESEM and its support equipment such as dampers and pre-pump have to be secured against tipping over by means of the seismic kit optionally available from Carl Zeiss NTS ( ). The seismic kit includes special heavy-duty anchors, which are fixed to the floor. The seismic kit will be installed by the NTS/SMT service staff during installation of the FESEM. During the run-up to the installation, the user should inform Carl Zeiss NTS/SMT if his/her facilities are located in areas that are susceptible to seismic activity. Besides, the user should inform about increased site vulnerability and local regulatory requirements concering seismic protection. Required concrete quality for floor fixing C20/25 (minimum) IR_ULTRAplus_en01 Page 15 of 16

16 Enabling the Nano-Age World Carl Zeiss NTS GmbH A Carl Zeiss SMT AG Company Carl-Zeiss-Str Oberkochen Germany Tel.: / Fax: / info-nts@smt.zeiss.com Carl Zeiss SMT Ltd. 511 Coldhams Lane Cambridge CB1 3JS UK Tel.: / Fax: / info-uk@smt.zeiss.com Carl Zeiss SMT Inc. One Corporation Way Peabody, MA USA Tel.: / Fax: / info-usa@smt.zeiss.com Carl Zeiss SMT S.a.s. Zone d Activité des Peupliers 27, rue des Peupliers Bâtiment A Nanterre France Tel.: / Fax: / info-fr@smt.zeiss.com Plus a worldwide network of distributors Due to a policy of continuous development, we reserve the right to change specifications without notice. Carl Zeiss NTS GmbH, Oberkochen Effective from: August 2007 Edition replaced: -

Oxford Instruments Plasma Technology. PlasmaPro NGP80. Installation Data Sheet. Original Instructions.

Oxford Instruments Plasma Technology www.oxford-instruments.com About this data sheet This data sheet provides basic information about the installation of a tool. Floor and wall loadings Table 1 lists