High Purity Gas Handling Equipment

Transcription

1 High Purity Gas Handlg Equipment EDITION 1/211

2 GCE Group - the European market leader gas control equipment GCE world-wide: GCE is an experienced developer and producer of gas control equipment sce the begng of the 2th Century. GCE is one of the world s leadg manufacturers this field and now employs over 87 people around the world. The company has grown through a combation of a dedicated workforce and an depth knowledge of pressure and flow control related to gas weldg and cuttg technology, medical systems, process applications and high purity requirements. GCE aim is to support its customers their demands for safe and reliable products manufactured accordance with the latest governg standards

3 Contents 1. Product Information Product Range Product Basics Product Selection Guide Order Codes Regulators Overview Standard Equipment Regulator Series Regulator Series Cylder Regulator FMD Ultra High Purity Gas Equipment Gas Panels DGS Acetylene/Propane Gas Supply Valves Special Gases Equipment Laser Gas Supply Equipment Calibration Gas Measurg Laboratory Equipment Accessories Gas Management System DGM Gas Monitorg System GasCom Gas Safety Protection System GSPS Gas Cylder Cabets Filtration Gas Preheaters Diverse Accessory Charts Regulator Performance and Flow Charts Recommendations for Tube Dimensions Conversion Tables Gases Data

4 Product Range Standard equipment 1. Pressure stage Brass or staless steel Cylder pressure regulators FMD Sgle cylder gas panelssmd : Sgle-stage Dual-stage With process or ert gas purgg Multi cylder gas manifolds BMD Sgle-stage, with manual switch over Sgle-stage, with automatic switch over With process or ert gas purgg 2. Pressure stage Le pressure regulators LMD Pot-of-use pressure regulators EMD Accessory for wall mounted supply pressure regulators: Tube fittgs Hose nozzles Flame arrestors Flow meters Regulatg and shut-off valves Valves, brass: Diaphragm valves Pneumatic valves Valves, staless steel: Packed valves Diaphragm valves Pneumatic valves Valve tableaus Cylder valves Solenoid valves, brass + staless steel Ball valves, brass + staless steel Cylder-Kombivalvee Accesories Connection material Assemblg material: Tube fittgs C-profile rails Valve mountg Elbow tube fittgs Straight tube fittgs Adapter fittgs Hose nozzles Others Pressure gauges: Bourdon gauges Contact gauges Cylder connections: Flexibe hoses Coils Extension bars Screwed connections Accessory for wall mounted pot-of-use tableaus Flame arrestors Flow meters Filters Cylder cabets: Safety cabets acc DIN Sheet steel cabets, TRG 28 Electric and electronic device: Gas sufficency warng system Signal boxes Control device Gas warng systems Cylder scales Gas heaters Monitorg device for pressure and flow Gas management: Devices Software Gas safety systems Ultra High Purity equipment Pressure regulators, 316L, AOD/VAR Le pressure regulators Supply pressure regulators Diaphragm valves Pneumatic valves Process panels (1. pressure stage) Accessory: Coils Screwed connections, VCR-type Connection adapters Vacuum generators Filters Weldg fittgs Electric and electronic devices: Monitorg systems Laboratory equipment Valves, brass and staless steel: Shut-off and regulatg diaphragm valves Pot-of-use pressure regulators Pot-of-use equipment for laboratory furniture mountg Pot-of-use panels Accessory for laboratory furniture Screwed connections Tube fittgs Hose nozzles Connection adapters Flame arrestors Flow meter Installation International Certification and Product Testg Institutes GCE high purity gas systems have been developed and certified accordance with diverse national and ternational product safety guideles. For further details please contact our offices. The BAM Federal Agency for materials research and testg - is a scientific, technical federal authority for the busess sector of the Federal Mistry for busess and technology. TSSA is a Canadian, non-profit, selffanced; admistratively-similar agency which admisters und promotes the safety laws, the technical norms and the safety regulations. GOST: Certificates and licenses are issued through the Institute und testg laboratories for quality assurance and safety, which are accredited through the Russian agency for standardisation, metrology and certification: ROSTECHREGULATION. The FDA - Food and Drug Admistration - is an agency side the "US Department of Health and Human Services". FDA is responsible for protection of the public health through verifyg the safety of medices, vacces, biological products from medical production, food supply, cosmetics, dietary supplements and production, radiation emission. 4

5 Speciality Gas Equipment Know How High-purity gases require high-quality regulators Proper handlg of expensive high-purity gases requires the highest quality of valves and pipeles, not at least of the design, planng, stallation and commissiong of the entire gas distribution system. The fulfillment of user-specific demands such as pressure stability, flowcapacity and matag of the gas composition needs to be guaranteed the same way as the prevention of contamation from the gas source down to the pot-of-use. Handlg of compressed gases presupposes tensive knowledge of regulations and technical rules which form the basis for a safe lay of any gas-supply system. The quality of GCEDruVa High-Purity Gas distribution system is determed by a large number of features: - leak-tightness, - dead-space-mimized design, - high safety due to Hastelloy diaphragms, - patented dampg system, - purgeability, - tuitive concept for jog and safety aspects. These pots require the same attention as the fal assembly and preventive ma te nance. Pot-of-use pressure regulator EMD A close cooperation with our customers is very important to us A close dialogue with our customers and designers enables us to develope products today which suit the market requirements of tomorrow. Years of experience, the latest tests and measurg equipment and CAD- Technology build a basis for solutions beyond the usual expectations. Advanced product quality guarantees contuous process supply and avoids unnecessary system downtime. Therefore the GCEDruVa technology is the sure foundation for solutions matchg the customer s dividual needs Accuracy and safety are the foundations for the handlg of high purity gases The selection of gas resistant and gas neutral materials, combed with precision manufacturg on numeric controlled machg centres, guarantees the utmost accuracy durg the entire production process. The mechanical manufacturg process is followed by an automated cleang bath carefully removg any grease, emulsion, debris and solvents from the gas wetted surface. Assembly and pressure testg is performed clean rooms usg high purity test gases. Diverse quality spections such as material examations, surface roughness measurements, dimensional control, functional tests with nitrogen, pressure examations and leakage test examations with helium, and quality spection of TIG-weldg, safeguard the function and safety of all components and systems. Pressure regulators, valves and accessories of high purity and accuracy GCEDruVa products meet the special requirements of high quality pure-gas distribution systems terms of purity, pressure stability and operational safety. The supervision and control of the material quality is decisive for quality and safety of the products. Components which undergo electro -polishg and multi stage cleang processes achieve highest quality surface, are generally ECD-suitable and combation with 316L, Hastelloy ner parts and properly purged, are extremely corrosion resistant. Mimal leakage rates avoid any gas contamation and crease the safety for the operators. semi-automatic manifold BMD Both the design of the metal diaphragm, valves and regulators as well as solely usg HASTELLOY material for the diaphragms, guarantees highest safety agast leakage the regulator or damage to the. Le regulator LMD Cylder pressure regulator FMD Fe controllablility of pressure and flow The quality control of all components guarantees a problem-free, safe, process gas supply, avoids unnecessary extra costs and protects the contug efficiency of a GCEDruVa Special Gas Supply System. Mimized leakage guarantees the necessary safety durg operation ensurg, that process gases are not contamated and ensure gas purity at the pot-of-use. areas for GCEDruVa Special Gas Equipment Analysis technology Gas chromatography Atomic-Adsorption-Spectrometry Exhaust-gas measurement for environmental control Chemical process technology Laser technology Pharmaceutical dustry Petrochemical dustry Food / drugs sector Semiconductor technology Fibre optical dustry 5

6 Quality Standards GCE Quality Management GCEDruVa clean-gas systems prove its quality by performance and reliability. The production process of the regulators is certified accordg to ISO91 and ISO13486 at regular tervals. This certification is considered by GCEDruVa as only one step the long path towards not only gag and keepg the confidence of our customers our products but also to strengthen it. Unannounced re-audits by ternal and external supervisors assure a contuous quality level. Therefore our customers can rely on these certificates not beg used as a basis to relax but as a steppg stone to new heights with regards to quality and performance. It is our aim to be a reliable partner to our customers all questions ab pure gas technology with economical solutions to their dividual problems through well engeered technology. The most important steps for the fulfilment of these expectations are: optical measurement control max. 1%, microscopic and endoscopic test of all bored holes, multi-stage special cleang with DI-water cleang process, clean air flushg and material friendly dryg, functional tests, 12-hour-pressure test at nomal pressure, Helium-leakage-test with mass spectrometer. 1% function and tightness control of basic components. Servicg To guarantee the safety, dependability and longevity of an stalled special gas supply system every company should make sure that the necessary safety-related equipment-parts are tested, for condition and functionality at reasonable tervals, not more than one year, accordance with BGV B6 53 Article 2. Purge Purge utilises a sequence of pressurisation followed by de-pressurisation by ventg. It is recommended to repeat this simple sequence 1 times. The so called process gas purgg uses the process gas for purgg, ert gas purgg is performed with an ert gas through a special let connection. Purgg with an external ert gas is an extremely important factor when changg cylders for the followg reasons: 1. Purgg the gas remag the system before cylder changg improves the safety level for the operator. 2. Matag gas purity by purgg the atmospheric air which has penetrated the system after cylder changg. 3. Purgg with dry ert gas reduces humidity and extends the expected lifespan, when corrosive gases are used. For high purity gases purgg will remove air/moisture from the system before process gas is troduced order to preserve the purity of the gas and to promote system reliability. For toxic gases purgg will remove process gas of the system before the system is opened to atmosphere and will therefore mimise the risk of operator's exposure. For corrosive gases purgg will remove moisture from the system. Moisture can produce strong acids and potentially solid material which can cause system failure through corrosion and/or particular contamation. Flow capabilities - performance charts For regulators the concept of flow coefficient is only partially useful demonstratg the performance (Kv is dependent upon upstream and downstream pressure). GCEDruVa uses, as a rule, performance charts pursuant of ISO 253 (upstream pressure of approximately double the downstream pressure. E.g. : p 1 = 11 bar and p 2 = 5 bar) as a result the performance of the GCEDruVa regulator flow charts are based on a comparable test method. Sce the upstream pressure of a regulator is usually higher than double the downstream pressure (pursuant ISO) the resultg actual flow rates to be expected will be considerably higher than the ISO performance charts are showed. For more detailed formation concerng maximum and mimum obtaable flow rates, dependent upon type of gas, temperature etc. - please contact our technical division. Helium leak rate certification Helium leak testg Helium leak testg is performed usg a mass spectrometer. This technique is particularly effective at detectg and quantifyg very small leaks. For example a typical regulator might have a helium leak rate of mbar l/sec He equivalent. This is equal to a leak of just 1 cm³ 3 years with a pressure difference of 1 bar at the component. Some products for the electronics dustry or high corrosion service will be separately helium leak tested and certified as standard to guarantee maximum tegrity. Many other components are given a guaranteed but uncertified maximum leak rate. For these components helium leak testg is available upon request and certification is an optional. Pressure regulators denotation Cylder pressure regulators (FMD) Cylder regulators are used to reduce the cylder pressure to a lower usable level. Le pressure regulators (LMD) Le regulators are designed to reduce le pressure for subsequent equipment Pot-of-use regulators (EMD) Pot-of-use regulators are used to give maximum accuracy and shut-off capability at the Pot-Of-Use - POU. Gas panels (SMD, BMD) Gas supply panels are stalled the gas storage area (cylder stock room or gas cabet). They reduce cylder / tank pressure to the desired le pressure for -house use. Via the subsequent pipg system the gas will be guided to the pot-of-use. Ultra high purity regulators These Ultra high purity regulators were specially designed to mata the ultra high purity of the gas side the regulators. Polished surfaces, the use of metal diaphragms, mimized dead space and specially designed seals and seats mimizes or rather elimates the risk of gassg and board diffusion or gasket contamation. 6

7 Product Selection Guide Questions to be answered selectg a regulator Do you need a standard regulator/ valve (gas purity < 6.) for ultra high-purity use (higher 6.)? Do you need a sgle-stage or dual-stage regulator? Do you need a purge system? See formation on previous page. The construction material does not need be specified as it depends on gas type. GCEDruVa will automatically taylor it s proposal to makes a proposal to the chosen gas. Which let pressure range is required (specification Technical data )? Which flow rate is required (Specification on product specific flow charts, precise formation for specific gases and types can be obtaed from our technical department)? Do you have a 2 or a 3 bar gas supply level? Which type of let connection (cylder connection) do you need, DIN or another national norm? Which kd of let connections do you need: tube fittgs, hose nozzles etc.? Gas purity values Max. Gas Purity- Purity Contamation type [degrees] (ppm) Pure gas % % 1 High purity gas % % % % % % 1. Ultra pure gas %.1 Sgle-stage regulators High pressure mediums enter through the let of the regulator to the high pressure chamber. When the hand wheel is turned clockwise, it compresses the sprg and creates a force on the diaphragm, which pushes the regulator's poppet open. This releases the gas to the low-pressure chamber, exertg an opposg force on the diaphragm which then closes the passage. Equilibrium is reached, when the sprg force on the diaphragm is equal to the opposg force of the gas the low-pressure chamber. In a sgle-stage regulator, delivery pressure creases as cylder pressure falls, because there is less gas pressure exerted on the diaphragm. Thus, frequent adjustment of the control knob is required to mata a constant delivery pressure. Therefore a two-stage regulator is recommended for applications requirg constant let pressure, With the two stage regulator the pot of use pressure stays practically constant, irrespectively of the cylder pressure which sks progressively as the cylder empties. Dual-stage regulators A dual-stage regulator functions like two sgle-stage regulators connected le. The first stage reduces the let pressure to a preset termediate pressure. By adjustg the control knob the second stage reduces the termediate pressure to the desired delivery pressure. Like the sgle-stage regulator, let pressure from the first stage of the two-stage regulator rises as cylder pressure decreases. However, the second-stage of the dual-stage regulator regulates, accordg to the preset level entered with the control knob, the pot of use pressure as desired. Thus, delivery pressure remas constant even as the cylder pressure lowers, elimatg the need for frequent control knob adjustment needed for a sgle-stage regulator. Central Gas Supply 6) 5) 5) 5) 5) 5) 6) 3) 3) 3) 3) 3) 3) 3) 3) 5) 3) 5) 5) 5) 5) 3) 3) 3) 3) 3) 3) 3) 3) 3) 5) 5) 3) 5) 5) 9) 3) 2) 3) 3) 3) 3) 3) 3) 4) 3) 1) Gas panel SMD, 2) Gas manifold BMD, 3) Pot/of/use regulator EMD, 4) Pot-of-use shut- off, 5) Room shut-off, 6) Floor shut-off 7) Central shut-off, 8) Gas management, 9) Le regulator 7) 8) 7) 1) 2) 1) 1) 1) 2) 2) 1) 2) 1) 8) 3) 5) 5) 5) 9) 5) 5) 4) 3) 4) 7) 4) 3) 4) 7

8 for your pressure regulators Series Purity < 6. < 6. < 5. for techn. Gases and Laser gases Standard Laboratory diverse diverse FMD 5-16 B F 2 DIN CL6 BC O Gas area FMD = cylder pressure regulator SMD = gas supply panel for 1 cylder BMD = gas supply manifold for 2 or more cylder LMD = le regulator EMD = pot-of-use regulator of pressure reducg 5 = standard regulators 51/52 = supply to vacuum 54/56 = low let pressure 53 = special 315 bar let pressure regulators Pressure stages = sgle-stage 2 = dual-stage (identified by let and purgg) -14 = with let tube fittg -16 = let shut-off valve -18 = let meterg valve -21 = external gas purgg -24 = panel with process gas purgg -25 = panel with process gas purge and downstream shut-off valve -26 = ert gas purgg -27 = ert gas purgg and downstream shut-off valve -29 = for acetylene (C 2 H 2 ) -3 = panel with let shut-off valve, no purge -32 = panel with let shut-off valve, with process gas purge -34 = panel with semi-automatic switch-over, with ert gas purge -35 = panel with semi-automatic switch-over, with process gas purge -39 = panel with semi-automatic switch-over, with purge Material B = brass BC = brass chromeplated SS = staless steel Example Order Code Armature FMD * Material let pressure BC G BC = brasschrome plated G = 315 bar SS = staless steel * recommended Standard model = prted BOLD 8 Outlet pressure 1 3 =.2-3 bar 6 =.5-6 bar 1 = bar let DIN DIN ANSI AFNOR NBN Outlet CL6 BC CL6 (standard) CL 1/8" CL 1/4" BC = brass-chrome pl. SS = staless steel Gas type Optional = with KI = contact gauge Material of Outlet fittg B = brass BC = chrome-plated brass SS = staless steel Outlet fittg CL = with, CL3, CL6, CL8*, CL1, CL12 (CL6 = NPT-tube fittg for tube side diam. 6 mm) NO6, NO8, NO1 = hose nozzle for tube with side diameter 6/8/1 mm Cylder connection DIN = DIN A = ANSI F = AFNOR B = NBN UK = BS 341 US = CGA NL = NEN others on request Outlet pressure levels (depends on series type) bar psi abs 3-3 abs abs 3-45 abs Inlet pressure (depends on series type) bar psi C = 6 85 D = 12/14 175/2 E = 4/5 6/72 F = G = Contactgauge Ki = with Ki = with Ventpipg A = with A = with (only conjunction with RV) Gas type Gas Please specify

9 Pressure regulators overview Cylder pressure regulators 5 overview Outlet: tube fittg Outlet: shut-off valve Outlet: regulatg valve With ert gas purgg Staless steel Sgle-stage - 2 bar -27 with shut-off valve at let -26 with FMD 5-14 Inlet pressure: 23 bar / 33 psi Outlet pressure: 6, 14, 28, 5, 2 bar 85, 2, 4, 72, 29 psi FMD 5-16 Inlet pressure: 23 bar / 33 psi Outlet pressure: 6, 14, 28, 5, 2 bar 85, 2, 4, 72, 29 psi FMD 5-18 Inlet pressure: 23 bar / 33 psi Outlet pressure: 6, 14, 28, 5 bar 85, 2, 4, 72 psi FMD 5-26/-27 Inlet pressure: 23 bar / 33 psi Outlet pressure: 6, 14, 28, 5, 2 bar 85, 2, 4, 72, 29 psi FMD Inlet pressure: 12 bar / 175 psi Outlet pressure:.2 3 bar abs 3 45 psi abs FMD Inlet pressure: 12 bar / 175 psi Outlet pressure:.2 3 bar abs 3 45 psi abs FMD Inlet pressure: 12 bar / 175 psi Outlet pressure:.2 3 bar abs 3 45 psi abs FMD 51-26/-27 Inlet pressure: 12 bar / 175 psi Outlet pressure:.2 3 bar abs 3 45 psi abs FMD Inlet pressure: 12 bar / 175 psi Outlet pressure:.2 2 bar 3 3 psi FMD Inlet pressure: 12 bar / 175 psi Outlet pressure:.2 2 bar 3 3 psi FMD Inlet pressure: 12 bar / 175 psi Outlet pressure:.2 2 bar 3 3 psi FMD 54-26/-27 Inlet pressure: 12 bar / 175 psi Outlet pressure:.2 2 bar 3 3 psi Dual-stage - 2 bar FMD Inlet pressure: 23 bar / 33 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi FMD Inlet pressure: 23 bar / 33 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi FMD Inlet pressure: 23 bar / 33 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi FMD 52-26/-27 Inlet pressure: 23 bar / 33 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi FMD Inlet pressure: 23 bar / 33 psi Outlet pressure:.2 3 bar abs 3 45 psi abs FMD Inlet pressure: 23 bar / 33 psi Outlet pressure:.2 3 bar abs 3 45 psi abs FMD Inlet pressure: 23 bar / 33 psi Outlet pressure:.2 3 bar abs 3 45 psi abs FMD 522/-27 Inlet pressure: 23 bar / 33 psi Outlet pressure:.2 to 3 bar abs 3 45 psi abs FMD Inlet pressure: 23 bar / 33 psi Outlet pressure:.2 2 bar 3 3 psi FMD Inlet pressure: 23 bar / 33 psi Outlet pressure:.2 2 bar 3 3 psi FMD Inlet pressure: 23 bar / 33 psi Outlet pressure:.2 2 bar 3 3 psi FMD 562/-27 Inlet pressure: 23 bar / 33 psi Outlet pressure:.2 2 bar 3 3 psi Sgle-stage - 3 bar FMD Inlet pressure: 315 bar / 45 psi Outlet pressure: 6, 14, 28, 5, 2 bar 85, 2, 4, 72, 29 psi FMD Inlet pressure: 315 bar / 45 psi Outlet pressure: 6, 14, 28, 5 bar 85, 2, 4, 72 psi FMD Inlet pressure: 315 bar / 45 psi Outlet pressure: 6, 14, 28, 5 bar 85, 2, 4, 72 psi FMD 53-26/-27 Inlet pressure: 315 bar / 45 psi Outlet pressure: 6, 14, 28, 5 bar 85, 2, 4, 72 psi Dual-stage - 3 bar FMD Inlet pressure: 315 bar / 45 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi FMD Inlet pressure: 315 bar / 45 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi FMD Inlet pressure: 315 bar / 45 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi FMD /-27 Inlet pressure: 315 bar / 45 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi 9

10 Gas supply panels, series 5 and Acetylene SMD 5/ Sgle-stage Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 28, 5, 2 bar / 2, 4, 72, 29 psi SMD 52/ Dual-stage Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi SMD 5/ Sgle-stage Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 28, 5, 2 bar / 2, 4, 72, 29 psi SMD 5/ Sgle-stage Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 28, 5, 2 bar / 2, 4, 72, 29 psi SMD 5/ Sgle-stage, with ert gas purgg Staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 28, 5, 2 bar / 2, 4, 72, 29 psi SMD 52/ Dual-stage Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi SMD 52/ Dual-stage, with ert gas purgg Staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 3, 6, 1.5 bar 45, 85, 15 psi BMD 5/532-3 Sgle-stage, max. 2 4 cylders Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 28, 5, 2 bar 2, 4, 725, 29 psi BMD 5/ Sgle-stage, max. 2 4 cylders Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 28, 5, 2 bar / 2, 4, 72, 29 psi 1 BMD 5/ Sgle-stage, max. 2 5 cylders With ert gas purgg Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 5 bar / 2, 72 psi BMD 5/ Sgle-stage, max 2 5 cylders With process gas purgg Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 5 bar / 2, 72 psi BMD 5/ Sgle-stage, max. 2 5 cylders Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 14, 5 bar / 2, 72 psi BMD 52/ Dual-stage, max. 2 5 cylders With ert gas purgg Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 3, 6, 1 bar / 45, 85, 145 psi BMD 52/ Dual-stage, max. 2 5 Cylder With process gas purgg Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 3, 6,1 bar / 45, 85/ 145psi BMD 52/ Dual-stage, max. 2 5 cylders With purgg Brass or staless steel Inlet pressure: 23 /315 bar 33/45 psi Outlet pressure: 3, 6, 1 bar / 45, 85, 145 psi BMD 2-29 Sgle-stage, For Acetylene Brass Outlet pressure: 1.5 bar / 22 psi SMD 2-29 Sgle-stage, For Acetylene Brass Outlet pressure: 1.5 bar / 22 psi BMD dual-stage, For Acetylene Brass Outlet pressure: 1.5 bar / 22 psi

11 Le pressure regulators series 5 LMD 5-1/-3/-4/-5 Sgle-stage Brass or staless steel Inlet pressure: 23 bar / 33 psi Outlet pressure:.2-3 /.5-6 / 1-14 bar 3-45 / / psi LMD 52-3/-5 Dual-stage Brass or staless steel Inlet pressure: 23 bar / 33 psi Outlet pressure:.2-3 /.5-6 / bar 3-45 / / psi LMD 51-1/-3/-4/-5 Sgle-stage Brass or staless steel Inlet pressure: 12 bar / 175 psi Outlet pressure:.2-2 /.2-3 bar abs / 3-45 psi abs. LMD 522-3/-5 Dual-stage Brass or staless steel Inlet pressure: 23 bar / 33 psi Outlet pressure:.2-2 /.2-3 bar abs / 3-45 psi abs. Sgle-stage -1 Sgle-stage -4 Dual-stage -3 Dual-stage -5 LMD 53-1/-3/-4/-5 Sgle-stage Brass or staless steel Inlet pressure: 315 bar / 45 psi Outlet pressure:.2-3 /.5-6 / bar 3-45 / / psi LMD 545-1/-3 Sgle-stage Brass or staless steel Inlet pressure: 4 / 12 bar - 58 /175 psi Outlet pressure:.2 / 1.3 bar - 3/ 19 psi 4 bar :.5 / 3. bar - 7 / 45 psi LMD 5-PA Sgle-stage, remote control Brass or staless steel Inlet pressure: 2, 4, 2 bar / 29, 58, 29 psi Outlet pressure:.5-6 bar/ psi LMD 532-3/-5 Dual-stage Brass or staless steel Inlet pressure: 315 bar / 45 psi Outlet pressure:.2-1 /.5-3 /.5-6 / bar 3-15 / 3-45 / 7-85 / psi LMD Port- LMD Port- Sgle-stage -3 Pot-of-use regulators series 5 EMD 5-6 Sgle-stage Brass or staless steel Inlet pressure: 4 bar / 6 psi Outlet pressure: /.2-6 / bar 3-22 / 3-85 / 7-15 psi EMD 51-6 Sgle-stage Brass or staless steel Inlet pressure: 12 bar /175 psi Outlet pressure:.2-2 /.2-3 bar abs / 3-45 psi abs. Sgle-stage -5 Laboratory gas supply Pot-of-use regulators EMD 31 Sgle-stage Brass or staless steel Inlet pressure: 4 bar / 6 psi Outlet pressure: /.2-4 / bar 3-22 / 3-6 / 7-15 psi Analysis Version: Inlet pressure: 1 bar / 145 psi Outlet pressure: 2.2/4.4 bar - 33/66 psi Basic body Plate mounted Wall assembly with wall adaptor Wall assembly Bench version Hangg version 11

12 Valve Overview Diaphragm shut-off valve MVA 5/53 Model: In-le Material: Brass chrome-plated/ Staless steel Upstream pressure: 23 /315 bar 33/45 psi Nomal width: DN5 - Kv-Value:.25 Inlet/Outlet: NPT 1/4" Diaphragm shut-off valve MVA 4 G Model: Straight Material: Brass chrome-plated / Staless steel Upstream pressure: 4 bar / 6 psi Nomal width: DN5 - Kv-Value:.2 Inlet/Outlet: G3/8"f - G3/8"m MVA 4 G Diaphragm regulatg valve MVR-A 5 G Model:In-le Material: Brass chrome-plated / Staless steel Upstream pressure: 4 bar (O2) /5 bar 6/725 psi Nomal width: DN2 - Kv-Value:.2 Inlet/Outlet: NPT 1/4" Diaphragm shut-off valve MVA 4 W Model: Elbow design Material: Brass chrome-plated/ Staless steel Upstream pressure: 4 bar / 6 psi Nomal width: DN5 - Kv-Value: 25 Inlet/Outlet: G1/4"f - G3/8"m MVA 4 W Diaphragm shut-off valve MVA 51 G Model: In-le Material: Brass / Brass chrome-plated / Staless steel Upstream pressure: 4 bar (O2) / 5 bar 6 (O2) / 725 psi Nomal width: DN8 - Kv-Value:.5 Inlet: NPT 1/4"f or G3/8"f Outlet: NPT 1/4"f or G3/8"f Packed regultag valve FAV 115 Model: Elbow design Material: Staless steel FAV 115 V - KVR 6 mm Upstream pressure: 23 bar /29 psi Nomal width: DN2 Inlet: cylder connector DIN 477 Outlet: tube fittg 6mm or hose nozzel 8 mm Diaphragm regulatg valve MVR-A 4 W Model: Elbow design Material: Brass chrome-plated / Staless steel Upstream pressure: 4 bar / 6 psi Nomal width: DN2 - Kv-Value:.2 Inlet - let: G1/4"m - G1/4"f Diaphragm regulatg valve MVR-A 4 G Model: Straight Material: Brass chrome-plated / Staless steel Upstream pressure: 4 bar / 6 psi Nomal width: DN2 - Kv-Value:.2 Inlet - let: G1/4"f - G1/4"f MVR-A 4 W MVR-A 4 G FAV 115 T - ST 8 mm Cylder connection valve FAV 5-36 Model: Elbow design Material: Brass chrome-plated / Staless steel Upstream pressure: 5 bar / 725 psi Nomal width: DN2 - Kv-Value:.2 Inlet: cylder connector DIN 477 Outlet: tube fittg 6mm FAV 5-36 Cylder connection valve FAV 5-37 with gauge Model: Elbow design Material: Brass chrome-plated / Staless steel Upstream pressure: 5 bar / 725 psi Nomal width: DN2 - Kv-Value:.2 Inlet: cylder connector DIN 477 FAV

13 High Purity Regulators Series 5 Adjustable let pressure range between.2 bar and 2 bar optional.2 bar abs. and 1.5 bar with the dual-stage version (series specific) State-of-the-art fittg and connection technology, Body 6-port configuration Pressure Gauge safety model accordg to EN 837 Inlet pressure 23 bar optional 315 bar Cylder connection, gas specific, accordg to national standards like DIN, AFNOR,... available for special gases of gas purity max. 6. Elgiloy diaphragm regultag and shut-off valve, protected by mesh filters 1 µm, let and let 1/4" f, seat sealg PCTFE. Higher safety level through tegrated relief valve. Vent pipg can be directly fitted on the NPT 1/4"f-threaded let. Ergonomic, clean, long lastg and ATEX compliant adjustg knob Higher burst and corrosion protection through the Hastelloy diaphragm. Long life expectancy through the patanted dampg system. Cleanness and leak tightness satisfy all the demands of high purity applications. Outlet gauge NPT 1/4"f Connections 6-Port-Version (Frontal view) 6 Inlet gauge NPT 1/4"f Adjustment knob Adjustment sprg Connections 4-Port-Version (Frontal view) Outlet gauge NPT 1/4"f Downstream pressure let NPT 1/4"f 6 6 Outlet NPT 1/4"f gas-tight Inlet NPT 1/4"f, gas-tight High pressure let NPT 1/4"f Pressure plate Diaphragm Actuator Encapsulated valve Low pressure Bonnet Seat seals Poppet High pressure Downstream pressure let NPT 1/4"f Outlet NPT 1/4"f gas-tight High pressure let NPT 1/4"f Body base M6 Series specific Data* Body material Staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated. Seal material PCTFE, FKM, EPDM, etc., dependant on gas specification and purity requirements. Material is specified Technical data. Inner parts Pressure regulator unit with tegrated mesh 25 Cross-section MD filter from 1 µm mesh openg at let and 1 µm at let. Diaphragm Good protection agast burst and corrosion due to diaphragm material Hastelloy. Performance data See chart chapter at the end of this catalog, for different performance data please contact GCEDruVa. Guaranteed leakage rates < mbar l/s Helium (body). < mbar l/s Helium (seat). Workg temperatures -25 C to +7 C / -13 F to 158 F Purity < 6. Cylder / Inlet connections Compliant with German national standard: DIN 477. Other connections such as US-Norm CGA, British Standard BS etc. are available upon request. *Differg data of specific components of the series 5 are listed product Technical data. 13

14 Cylder pressure regulators FMD 5-14/-16/ Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., cylder pressure 23 bar / 33 psi, downstream pressure range.5-2 bar / 3-29 psi Diaphragm valve with 9 shut-off function (FMD 5-16) or regulatg valve (FMD 5-18) Diaphragm pressure regulator ATEX compliant adjustment knobs These pressure regulators consists of a cylder connection, pressure regulator body, upstream and downstream pressure gauges, diaphragm shut-off valve (type -16) regulatg valve (type -18), relief valve (by downstream pressure >5bar RV on request) and let tube fittgs. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The cylder pressure regulator series FMD 5 offers a wide range of uses and great performance. The FMD 5-14 is the basic model. The FMD 5-16 allows shut-off of the gas flow while matag the pressure regulator s adjustment. The regulatg valve of the FMD 5-18 allows a fer apportiong of gas flow. Flow schematic BA BA / Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated PCTFE PCTFE (SS), PVDF (brass) let NPT1/4"f, by downstream pressure >5bar RV* SS: FKM, (EPDM, FFKM)*, MS: EPDM, (FKM)* Seat seals: Seal material: Relief valve: Relief valve seat seal: Pressure gauge range: -1-1 bar ( psi) - 25 bar ( psi) - 4 bar ( - 6 psi) - 8 bar ( psi) bar ( - 45 psi) Performance data: see chapter 5 Basic design aspects: see page 13 Weight: approx. 1.5 kg (type -14), 1.8 kg (type -16/18) Dimensions (w h d): approx mm Cylder connections: accordg to gas type, see chapter 5 Outlet: NPT 1/4"f, optional tube fittg * on request 1 Cylder connection 2 Pressure regulator 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream shut-off valve ( -16) / regulatg valve ( -18) BA Process gas let FMD 5-14 FMD 5-14 FMD 5-16 FMD 5-18 Material BC BC = brass chrome-plated SS = staless steel Upstream pressure F F = 23 bar/33 psi Downstream pressure 6 6 =.5-6 bar/ 3-85 psi 14 = 1-14 bar /15-2 psi 28 = bar / psi 5 = bar / psi 2 = 1-2 bar/ psi (2 bar not with FMD 5-18) Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN, UNI Outlet CL6 =NPT 1/4"f CL6** CL8 CL 1/8" CL 1/4" NO6 Contact gauge Ki = with Ki = with Gas type Gas Please specify ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 14

15 Cylder pressure regulators FMD 52-14/-16/ Dual-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6. cylder pressure 23 bar / 33 psi downstream pressure range bar / psi Outlet pressure virtually dependent of let pressure due to dual-stage design Diaphragm valve with 9 -shut-off function (FMD 52-16) or regulatg valve (FMD 52-18) Diaphragm pressure regulator ATEX compliant adjustment knobs -16 These pressure regulators consists of a cylder connection, pressure regulator body, upstream and downstream pressure gauges, relief valve, diaphragm shut-off valve (type -16) diaphragm regulatg valve (type -18) and let tube fittgs. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. Flow schematic BA BA /18 3 The cylder pressure regulator series FMD 52 offers a wide range of uses and great performance. The FMD allows shut-off/openg of the gas flow while matag the pressure regulator s adjustment. The FMD allows for pressure settg as well as a fer apportiong of gas flow. The dual-stage design ensures the uniformity of the downstream pressure irrespectively of the level of the cylder pressure. Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated PCTFE PTFE PCTFE (SS), PTFE (brass) Seat seals 1st stage: Seat seals 2nd stage: Seal material: Relief valve seat seals: Staless steel: FKM, (EPDM, FFKM) * Brass: EPDM, (FKM)* Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: -1-5 bar ( psi) -1-1 bar ( psi) bar ( psi) bar ( - 45 psi) Weight: approx. 2.1 kg (type -14), 2.4 kg (type -16/18) Dimensions (w h d): approx mm Cylder connections: compliance with DIN 477 Cylder connections: accordg to gas type, see chapter 5 Outlet: NPT 1/4"f, optional tube fittg *on request 1 Cylder connection 2 Pressure regulator 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream shut-off valve (type -16) / regulatg valve (type -18) BA Process gas let FMD FMD FMD FMD Material upstream pressure BC F BC = brass F = 23 bar/33 psi chrome-plated SS = staless steel Downstream pressure 3 1 =.2-1 bar / 3-15 psi 3 =.2-3 bar / 3-45 psi 6 =.5-6 bar / 3-85 psi 1 = bar / 7-15 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL6 =NPT 1/4"f CL6** CL8 CL 1/8" CL 1/4" NO6 Contact gauge Ki = with Ki = with ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. Gas type Gas Please specify 15

16 Cylder pressure regulators FMD 5-26/-27 Flow schematic Flow schematic BA 11 BA shown with vent pipg shown with vent pipg 1 Cylder connection 2 Purge let valve 3 Purge let valve 4 Upstream shut-off valve 5 Cylder pressure regulator 6 Upstream pressure gauge 7 Downstream pressure gauge 8 Relief valve 1 Check valve 11 Downstream shut-off valve (only type -27) BA Process gas let SE Purge let SA Purge let SA 1 SA 3 3 SE 1 2 SE 1 2 Sgle-stage, with ert gas purgg, for reactive, flammable, oxidizg and corrosive gases and gas mixtures, not for oxygen, purity max. 6., cylder pressure 23 bar downstream pressure range.5-2 bar /7-29 psi Diaphragm shut-off valve Diaphragm pressure regulator ATEX compliant adjustment knobs Optionally with sub-atmospheric pressure regulation (FMD 51) Optional gas-tight welded connections for optimum purge conditions and maximum safety These pressure regulators consists of a cylder connection, purge valve block with a check valve, purge let and let valve, pressure regulator body, upstream and downstream pressure gauges, relief valve (by downstream pressure >5bar RV on request), and let tube fittgs, (FMD 5-27 with diaphragm shut-off valve MVA 5 G). Optionally the pressure regulator, purge valve block and cylder connection can be joed with one another usg orbital weldg for a gas-tight connection. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The cylder pressure regulator series FMD 5 stands for its wide range of uses and excellent performance. The upstream purge valve block allow as an external gas purgg with ert gas. The purge volume is kept to a mimum (only cylder connection) and the purge gases can be separately conveyed. Therefore this regulator is especially suited to use with reactive, flammable, oxidizg and corrosive gases. It guarantees optimum purge conditions and with toxic gases maximum safety for the application and for the operator. Body: staless steel 316L (1.444) specially cleaned and electro-polished Seals: PCTFE Relief valve seat seals: FKM, (EPDM, FFKM) * Pressure gauge range: -1-1 bar / - 25 bar / - 4 bar / - 8 bar / bar Weight: approx. 2.9 kg (type -26), 3.3 kg (type -27) Dimensions (w h d): approx mm Performance data: see chapter 5 Basic design aspects: see page 13 Purge let: check valve, tube fittg 6 mm Purge let: NPT 1/4"f, optional tube fittg Cylder connections: accordg to gas type, see chapter 5 Outlet: NPT 1/4"f, optional tube fittg * on request FMD 5-26 FMD 5-26 FMD 5-27 Material SS SS = staless steel Upstream pressure F F = 23 bar Downstream pressure 6 6 =.5-6 bar 14 = 1-14 bar 28 = bar 5 = bar 2 = 1-2 bar Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN, UNI Outlet CL6 =NPT 1/4"f CL3** CL6(Standard) CL8 CL 1/8" CL 1/4" Contact gauge Ki = with Ki = with Vent pipg A = with A = with (Only conjunction with RV) ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter Gas type Gas Please specify (no O2)

17 Cylder pressure regulators FMD 52-26/-27 Flow schematic BA shown with vent pipg Cylder connection 2 Purge let valve 3 Purge let valve 4 Upstream shut-off valve 5 Cylder pressure regulator 6 Upstream pressure gauge 7 Downstream pressure gauge 8 Relief valve 9 Downstream shut-off valve (only type -27) 1 Check valve BA Process gas let SE Purge let SA Purge let 4 SE SA Dual-stage, with external gas purgg, for ert, reactive, flammable and oxidizg gases and gas mixtures, not for oxygen, purity max. 6., cylder pressure 23 bar / 33 psi, downstream pressure range.2-6 bar / 3-85 psi With ert gas purgg Optimum purge conditions with purge valve block Downstream pressure virtually dependent of upstream pressure due to dual-stage design With diaphragm shut-off valve Diaphragm pressure regulator ATEX compliant adjustment knobs These pressure regulators consists of a cylder connection, purge valve block with a check valve, purge let and let valve, pressure regulator body, upstream and downstream pressure gauges, diaphragm relief valve MVA 5 (only type -27), reflief valve, and let tube fittgs. Optionally the pressure regulator, purge valve block and cylder connection can be joed with one another usg orbital weldg for a gas-tight connection. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The pressure regulator series FMD 5 stands for its wide range of uses and excellent performance. The dual-stage design ensures the uniformity of the downstream pressure irrespectively of the level of the cylder pressure. The upstream purge valve block allow as an external gas purgg with ert gas. The purge volume is kept to a mimum (only cylder connection) and the purge gases can be separately conveyed. Therefore this regulator is especially suited to use with reactive, flammable, oxidizg and corrosive gases. It guarantees optimum purge conditions and with toxic gases maximum safety for the application and for the operator. Body: staless steel 316L (1.444) specially cleaned and electro-polished Seat seals 1st stage: PCTFE Seat seals 2nd stage: PTFE Body seals: PCTFE Relief valve seat seals: FKM, (EPDM, FFKM)* Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: -1-5 bar ( psi) -1-1 bar ( psi) bar ( - 45 psi) Weight: approx. 3.5 kg (type -26), 3.9 kg (type -27) Dimensions (w h d): approx mm Purge let: check valve, tube fittg 6 mm Purge let: NPT 1/4"f, optional tube fittg Cylder connections: accordg to gas type, see chapter 5 Outlet: NPT 1/4"f, optional tube fittg * on request FMD FMD FMD Material SS SS = staless steel Upstream pressure F F = 23 bar /33 psi Downstream pressure 3 3 =.2-3 bar / 3-45 psi 6 =.5-6 bar / 3-85 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN, UNI Outlet CL6 =NPT 1/4"f CL3** CL6 (standard) CL8 CL 1/8" Contact gauge Ki = with Ki = with Vent pipg A = with A = with (Only conjunction with RV) Gas type Gas Please specify (no O2) ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 17

18 Cylder pressure regulators FMD 51/54-14/-16/ Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6. cylder pressure 12 bar / 175 psi, FMD 51: downstream pressure range.2-3 bar abs / 3-45 psi abs, FMD 54: downstream pressure range.2-2 bar / 3-3 psi For low downstream pressure Subatmospheric-pressure regulation (FMD 51) Diaphragm valve with 9 -shut-off function (FMD -16) or regulatg valve (FMD -18) Diaphragm regulator ATEX compliant adjustment knobs These pressure regulators consists of a cylder connection, pressure regulator body, upstream and downstream pressure gauges, diaphragm shut-off valve MVA 5 (type -16), regulatg valve MVR 5 (type -18), relief valve and let tube fittgs. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. Flow schematic -18 The pressure regulator series FMD 51/54 reduces low upstream pressure to a very low downstream pressure : FMD 51 down to.2 bar absolut and is suitable for Subatmospheric-pressure regulation, the FMD 54 down to.2 bar. The FMD 51/54 would be selected dependg on the requirements and needs of the downstream use, regards of the shut-off or rather regulatg of the gas stream and Subatmospheric-pressure regulation. BA BA /18 1 Cylder connection 2 Pressure regulator 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream shut-off valve (type -16) / regulatg valve (type -18) BA Process gas let Body: Seat seals: Brass: Seal material: Relief valve seat seals: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: bar (-15-4 psi) -1-5 bar ( psi) bar ( psi) Staless steel 316L (1.444) specially cleaned and electro-polished or brass specially cleaned, nickel-plated and chrome-plated Staless steel: FFKM, (EPDM)* EPDM, (FKM)* PCTFE (staless steel), PVDF (brass) Staless steel: FKM, (EPDM, FFKM)* Brass: EPDM, (FKM)* Optional: - 6 mbar ( psi) with diameter 63 mm Weight: approx. 1.5 kg (type -14), 1.8 kg (type -16/18) Dimensions (w h d): approx (-14), 223 (-16 and -18) mm Cylder connections: accordg to gas type, see chapter 5 Outlet: NPT 1/4"f, optional tube fittg * on request FMD FMD FMD FMD FMD FMD FMD Material BC BC = brass chrome-plated SS = staless steel Upstream pressure D D = 12 bar /175 psi Downstream pressure 2 FMD 51: 2a =.2-2 bar abs. /3-3 psi abs. 3a =.2-3 bar abs. /3-45 psi abs. FMD 54: 1 =.2-1 bar/3-15 psi 2 =.2-2 bar/3-3 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL6 =NPT 1/4"f CL6** CL8 CL 1/8" CL 1/4" NO6 Contact gauge Ki = with Ki = with ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter Gas type Gas Please specify

19 Cylder pressure regulators FMD 51/54-26/-27 BA Flow schematic shown with vent pipg SA 1 Cylder connection 2 Purge let valve 3 Purge let valve 4 Upstream shut-off valve 5 Pressure regulator 6 Upstream pressure gauge 7 Downstream pressure gauge 8 Relief valve 1 Check valve 11 Downstream shut-off valve (only type -27) BA Process gas let SE Purge let SA Purge let 4 SE Sgle-stage, with ert gas purgg, for ert, reactive, flammable and oxidizg gases and and gas mixtures, purity max. 6., cylder pressure 12 bar / 175 psi FMD 51: downstream pressure range.2-3 bar abs / 3-45 psi abs FMD 54: downstream pressure range.2-2 bar / 3-3 psi For low downstream pressure With external gas purgg Subatmospheric-pressure regulation (FMD 51) With diaphragm shut-off valve Diaphragm regulator ATEX compliant adjustment knobs These pressure regulators consists of a cylder connection, purge valve block with a check valve, purge let and let valve, pressure regulator body, upstream and downstream pressure gauges, diaphragm shut-off valve MVA 5 (only type-27), relief valve and let tube fittgs. Optionally the pressure regulator, purge valve block and cylder connection can be joed with one another usg orbital weldg for a gas-tight connection. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The pressure regulator series FMD 51/54 reduces low upstream pressure to a very low downstream pressure : FMD 51 down to.2 bar absolut and is suitable for Subatmospheric-pressure regulation, der FMD 54 down to.2 bar. The type of regulator is selected accordg to the requirements of the downstream uses with regards to the shut-off or rather regulatg of the gas stream. The upstream purge valve block allows for an external gas purgg with ert gas. The purge volume is kept to a mimum (only cylder connection) and the purge gases can be separately conveyed. For this reason these regulators are especially suited for use with reactive, flammable, oxidizg and corrosive gases. It guarantees optimum purge conditions and with toxic gases maximum safety for the application and for the operator. Body: staless steel 316L (1.444) specially cleaned and electro-polished Seat seals: FFKM, (EPDM *) Seals: PCTFE Relief valve seat seals: FKM, (EPDM, FFKM) * Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: bar (-15-4 psi) -1-5 bar ( psi)/-1-18 bar ( psi) Optional: - 6 mbar (8.7 psi) with Ø 63 mm Weight: approx. 3.3kg (type-26), 3.7kg (type-27) Dimensions (w h d): approx mm Purge let: check valve, tube fittg 6 mm Purge let: NPT 1/4"f, optional tube fittg Cylder connections: accordg to gas type, see chapter 5 Outlet: NPT 1/4"f, optional tube fittg * on request FMD FMD FMD FMD FMD Material SS SS = staless steel Upstream pressure Downstream pressure D 2 D = 12 bar FMD 51: /175 psi 2 a=.2-2 bar abs. /3-3 psi abs. 3a =.2-3 bar abs. /3-45 psi abs. FMD 54: 1 =.2-1 bar / 3-15 psi 2 =.2-2 bar /3-3 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL6 =NPT 1/4"f CL3, CL8** CL 1/8" Contact gauge Ki = with Ki = with Vent pipg A = with A = with (Only conjunction with RV) ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. Gas type Gas Please specify 19

20 Cylder pressure regulators FMD 522/562-14/-16/-18 Flow schematic Dual-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., cylder pressure 23 bar / 33 psi, FMD 522: downstream pressure range.2-3 bar abs / 3-45 psi abs, FMD 562: downstream pressure range.2-2 bar / 3-3 psi For low downstream pressure Subatmospheric-pressure regulation (FMD 522) Downstream pressure is virtually dependent of upstream pressure due to dual-stage design Diaphragm valve with 9 -shut-off function (type -16) or regulatg valve (type -18) Diaphragm regulator ATEX compliant adjustment knobs These pressure regulators consists of a cylder connection, pressure regulator body, upstream and downstream pressure gauges, diaphragm shut-off valve MVA 5 (only type-16), regulatg valve MVR 5 ( -18), relief valve and let tube fittgs. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The pressure regulator series FMD 522/562 reduces high upstream pressure to low downstream pressure : FMD 522 down to.2 bar absolute and is therefore suitable for subatmospheric-pressure regulation, the FMD 562 down to.2 bar. This type of regulator is selected accordg to the requirements of the downstream uses with regards to the shut-off or rather regulatg of the gas stream. BA BA / Cylder connection 2 Pressure regulator 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream shut-off valve (type -16) / regulatg valve (type -18) BA Process gas let Body: Seat seals 1st stage: Seat seals 2nd stage: Body seals: Relief valve seat seals: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated PCTFE Staless steel: FFKM, (EPDM)*, Brass: EPDM, (FKM)* PCTFE (Staless steel), PVDF (Brass) SS: FKM, (EPDM, FFKM)* Brass: EPDM, (FKM)* Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: bar (-15-4 psi) -1-5 bar ( psi) bar ( - 45 psi) Weight: approx. 2.1 kg (type -14), 2.4kg (type -16/18) Dimensions (w h d): approx mm Cylder connections: accordg to gas type, see chapter 5 Outlet: NPT 1/4"f, optional tube fittg * on request FMD FMD FMD FMD FMD FMD FMD Material BC BC = brass chrome-plated SS = staless steel Upstream pressure F F = 23 bar/33 psi Downstream pressure 2 FMD a=.2-2 bar abs. /3-3 psi abs. 3a =.2-3 bar abs. /3-45 psi abs. FMD =.2-1 bar / 3-15 psi 2 =.2-2 bar /3-3 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL6 =NPT 1/4"f CL6** CL8 CL 1/8" CL 1/4" NO6 Contact gauge Ki = with Ki = with ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 2 Gas type Gas Please specify

21 Cylder pressure regulators FMD 522/562-26/ Flow schematic BA shown with vent pipg 1 Cylder connection 2 Purge let valve 3 Purge let valve 4 Upstream shut-off valve 5 Pressure regulator 6 Upstream pressure gauge 7 Downstream pressure gauge 8 Relief valve 1 Check valve 11 Downstream shut-off valve (only type -27) BA Process gas let SE Purge let SA Purge let 4 SE 3 SA Dual-stage, with ert gas purgg, for ert, reactive, flammable and oxidizg gases and gas mixtures (not oxygen), purity max. 6., cylder pressure 23 bar / 33 psi, FMD 522: downstream pressure range.2-3 bar abs / 3-45 psi abs, FMD 562: downstream pressure range.2-2 bar / 3-3 psi Inert gas purgg Optimum purge conditions with purge valve block Subatmospheric-pressure regulation (FMD 522) Downstream pressure virtually dependent of upstream pressure due to dual-stage design Diaphragm shut-off valve Diaphragm regulator ATEX compliant adjustment knobs These pressure regulators consists of a cylder connection, purge valve block with a check valve, purge let and let valve, pressure regulator body, upstream and downstream pressure gauges, diaphragm shut-off valve MVA 5 (only type- 27), relief valve and let tube fittgs. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The upstream purge valve block allows for an external gas purgg with ert gas. The purge volume is kept to a mimum (only cylder connection) and the purge gases can be separately conveyed. For this reason these regulators are especially suited to use with reactive, flammable, oxidizg and corrosive gases. It guarantees optimum purge conditions and with toxic gases maximum safety for the application and for the operator. The dual-stage design ensures the uniformity of the downstream pressure irrespectively of the level of the cylder pressure. Body: staless steel 316L (1.444) specially cleaned and electro-polished Seat seals 1st stage: PCTFE Seat seals 2nd stage: FFKM, (EPDM *) Body seals: PCTFE Relief valve seat seals: FKM, (EPDM, FFKM *) Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: bar (-15-4 psi) -1-5 bar ( psi) bar ( - 45 psi) Option: - 6 mbar (8.7 psi) with Ø 63 mm Weight: approx. 3.5 (type -26) / 3.9 kg (type -27) Dimensions (w h d): approx mm Purge let: check valve, tube fittg 6 mm Purge let: NPT 1/4"f, optional tube connection Outlet: NPT 1/4"f, optional tube fittg Cylder connections:: accordg to gas type, see chapter 5 *on request FMD FMD FMD FMD FMD Material SS SS = staless steel Upstream pressure F F = 23 bar /33 psi Downstream pressure 2 FMD 522 2a =.2-2 bar abs. /1-3 psi abs. 3a=.2-3 bar abs. /1-45 psi abs. FMD =.2-1 bar / 1-15 psi 2 =.2-2 bar /1-3 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL6 =NPT 1/4"f CL3** CL6 (standard) CL8 CL 1/8" Contact gauge Ki = with Ki = with Vent pipg A = with A = with (Only conjunction with RV) ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. Gas type Gas Please specify (no O2) 21

22 Cylder pressure regulators FMD 53-14/-16/ Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., cylder pressure 315 bar/ 45 psi, downstream pressure range.5-2 bar / 7-29 psi -16 For 3 bar cylders Diaphragm regulator ATEX compliant adjustment knobs The FMD consists of a cylder connection, pressure regulator body, upstream and downstream pressure gauges, relief valve (by downstream pressure >5bar RV on request) and let tube fittgs. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. Flow schematic BA -14 BA -16 /18-18 The cylder pressure regulator series MD 53 has a broad range of uses and excellent performance. -14 is the basic model for dependent gas supply with 3 bar cylder. The type-16 allows shut-off/openg of the gas flow while matag the pressure regulator s adjustment and type-18 allows for pressure regulatg as well as a fer control of gas flow. Body: staless steel 316L (1.444) specially cleaned and electro-polished or Brass specially cleaned, nickel-plated and chrome-plated PCTFE PCTFE (Staless steel), PVDF (Brass) Outlet NPT1/4"f, for downstream pressure >5bar AV* SS: FKM, (EPDM, FFKM)*, Brass: EPDM, (FKM)*, Seat seals: Body seals: Relief valve: Relief valve seat seals: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: -1-1 bar ( psi) - 25 bar ( psi) - 4 bar ( - 6 psi) - 8 bar ( psi) bar ( - 45 psi) - 4 bar ( - 58 psi) Weight: approx. 1.5 kg (type -14), 1.8 kg (type -16/18) Dimensions (w h d): approx x 125 mm Outlet: NPT 1/4"f. optional tube fittg Cylder connections: accordg to gas type, see chapter 5 *on request 1 Cylder connection 2 Pressure regulator 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream shut-off valve (type -16) / regulatg valve (type -18) BA Process gas let FMD FMD FMD FMD Material BC BC = brass chrome-plated SS = staless steel Upstream pressure G G = 315 bar /45 psi Downstream pressure 14 6 =.5-6 bar / 7-85 psi 14 = 1-14 bar/15-15 psi 28 = bar / 35-4 psi 5 = bar/35-72 psi 2 = 1-2 bar /15-29 psi (not -18) Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL6 BC =NPT 1/4"f CL3** CL6 (standard) CL 1/8" CL 1/4" NO6 Contact gauge Ki = with Ki = with ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter Gas type Gas Please specify

23 Cylder pressure regulators FMD /-16/ Dual-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, not for oxygen, purity max. 6., cylder pressure 315 bar/ 45 psi, downstream pressure range bar/ 3-15 psi For 3 bar cylders Downstram pressure is dependent of the upstream pressure due to the dual-stage design Higher reliablity through the use of a relief valve -16 The FMD 532 consists of a cylder connection, pressure regulator body, upstream and downstream pressure gauges, relief valve and downstream regulatg valve (FMD ) or shut off valve (FMD ). The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. -18 Flow schematic BA BA /18 The cylder pressure regulator series MD 532 has a broad range of uses and excellent performance. The FMD is the basic model for location-dependent gas supply with 3 bar cylder. The FMD allows shut-off/openg of the gas flow while matag the pressure regulator s adjustment. The FMD allows for pressure regulatg as well as a fer apportiong of gas flow. Body: Dimensions (w h d): Seat seals: Body seals: Relief valve seat seals: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: - 4 bar ( - 58 psi) -1-5 bar ( psi) -1-1 bar ( psi) bar ( psi) staless steel 316L (1.444) specially cleaned and electro-polished or brass specially cleaned, nickel-plated and chrome-plated approx mm PCTFE PCTFE (Staless steel), PVDF (Brass) SS: FKM, (EPDM, FFKM)*, Brass: EPDM, (FKM)*, Weight: approx. 2.1kg (type-14), 2.4kg (type-16/18) Dimensions (w h d): approx mm, 175 mm (-14), 223 mm (-16 and -18) Cylder connections: accordg to gas type, see chapter 5 Outlet: NPT 1/4"f, optional tube fittg *on request 1 Cylder connection 2 Pressure regulator 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream shut-off valve (type -16) / regulatg valve (type -18) BA Process gas let FMD FMD FMD FMD Material BC BC = brass chrome-plated SS = staless steel Upstream pressure G G = 315 bar /45 psi Downstream pressure 1 3 =.2-3 bar / 3-45 psi 6 =.5-6 bar/7-85 psi 1.5 = bar/15-15 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN, UNI Outlet CL6 =NPT 1/4"f CL6 (standard) CL 1/8" CL 1/4" NO6 Contact gauge Ki = with Ki = with Gas type Gas Please specify * *Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 23

24 Le pressure regulators LMD 5/53-1/-3/-4/-5 LMD 5/53-4 LMD 5/53-1 Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure LMD 5: 4 bar / 6 psi, optional 23 bar / 33 psi, LMD 53: 315 bar /45 psi, downstream pressure range LMD 5:.2-5 bar / psi, LMD 53: bar / 7-15 psi Excelent pressure adjustment Compact design 4 or 6 port configuration A broad application spectrum through the 4-port configuration(type -1/-4) or 6-Port-configuration (type -3/-5), which can be delivered respectivly, with (type -4/-5) or with(type -1/-3) a relief valve. With type-3 and type-5 the use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. LMD 5/53-5 The LMD 5/53 reduces le pressure to give a lower supply pressure. Through its compact design this regulator is especially well suited for use analytical or chemical apparatuses or processes. Connections (Front view) -1/-4 Downstream -let NPT 1/4"f LMD 5/ /-5 Outlet pressure gauge NPT 1/4"f 9 9 let NPT 1/4"f gas-tight 9 9 High pressure -let NPT 1/4"f Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated PCTFE PCTFE, PVDF (Brass) SS: FKM, (EPDM, FFKM)*, Brass: EPDM, (FKM)* Seat seals: Body seals: Relief valve seat seals: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: -1-5 bar ( psi) / -1-1 bar ( psi), - 25 bar ( psi) / - 4 bar ( - 6 psi), - 8 bar ( psi) / bar ( - 45 psi) - 4 bar ( - 58 psi) Weight: approx. 1.1kg (type -1), 1.2kg (type -3) Dimensions (w h d): Inlet/Outlet: *on request Dimensions approx to 14 mm NPT 1/4"f, optional tube fittg Outlet pressure gauge NPT 1/4"f 6 Inlet pressure gauge NPT 1/4"f approx. 111 approx. 128 Downstream -let NPT 1/4"f 6 6 Outlet NPT 1/4"f gas-tight Inlet NPT 1/4"f, gas-tight High pressure -let NPT 1/4"f approx Mountg: 2 drill hole M6 7 mm deep LMD 5-1 LMD 5-1 LMD 5-3 LMD 5-4 LMD 5-5 LMD 53-1 LMD 53-3 LMD 53-4 Material Upstream pressure BC E BC = brass E = 5 bar chrome-plated / 72 psi SS = staless F = 23 bar steel /33 psi LMD 53: G=315 bar/ 45 psi Downstream pressure 3 3 =.2-3 bar/3-45 psi 6 =.5-6 bar/7-85 psi 14 = 1-14 bar/15-2 psi 5 = bar/35-72 psi LMD 53: 6 =.5-6 bar/7-85 psi 1.5 = bar/15-15 psi Inlet Outlet CL6 BC CL6 BC =NPT 1/4"f same as CL6** let CL8 CL1 CL12 BC = brass chromeplated Contact gauge Ki = with Ki = with (only for -3 and -5 LMD 53-5 SS = staless steel ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter Gas type Gas Please specify

25 Le pressure regulators LMD 52-3/-5 LMD 52-3 Dual-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6. let pressure 23 bar / 33 psi, downstream pressure range bar / 3-15 psi Downstream pressure is dependent of upstream pressure Precise pressure allocation Space savg multi-connection possibilities This pressure regulator reduces the upstream pressure to a lower downstream pressure. The dual-stage design ensures the uniformity of the downstream pressure irrespectively of the upstream pressure. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. A broad application spectrum through the the multiple let/let connections. LMD 52-5 The LMD 52-3 stands for its precise pressure allocation, mimum space requirement and uniformity of downstream pressure. For this reason this series is particularly suited to high-performance and stabil gas supply as would be needed for analytical applications or where space savg pressure regulatg with short connection ways to pot-of-use lets are required. Connections (Front view) Outlet pressure gauge NPT 1/4"f Downstream -let NPT 1/4"f 6 6 Outlet NPT 1/4"f gas-tight Inlet pressure gauge NPT 1/4"f High pressure -let NPT 1/4"f Inlet NPT 1/4"f, gas-tight Body: Seat seals 1st stage: Seat seals 2nd stage: Body seals: Relief valve seat seals: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: -1-5 bar ( psi) -1-1 bar ( psi) bar ( psi) bar ( - 45 psi) Weight: Dimensions (w h d): Inlet-/Outlet: * on request staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated PCTFE PTFE PCTFE (Staless steel), PTFE (Brass) Staless steel: FKM, (EPDM, FFKM)* Brass: EPDM, (FKM)* approx. 1.8kg (type-3), 1.9kg (type-5) approx to 211 mm NPT 1/4"f, optional tube fittg LMD 52-3 LMD 52-3 LMD 52-5 Material BC BC = brass chrome-plated SS = staless steel Upstream pressure F F = 23 bar /33 psi Downstream pressure 3 1 =.2-1 bar / 3-15 psi 3 =.2-3 bar / 3-45 psi 6 =.5-6 bar / 7-85 psi 1 = bar / psi Inlet CL6 BC =NPT 1/4"f CL6** CL8 CL1 CL12 BC = brass chromeplated Outlet CL6 BC =NPT 1/4"f CL6** CL8 CL1 CL12 BC = brass chromeplated Contact gauge Ki = with Ki = with SS = staless steel SS = staless steel ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. Gas type Gas Please specify 25

26 Le pressure regulators LMD 51-1/-3/-4/-5 Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure 12 bar/ 175 psi, downstream pressure range.2-3 bar abs. / 3-45 psi abs. LMD 51-1 LMD 51-4 Subatmospheric-pressure regulation Compact design 4 or 6 port configuration A broad application spectrum through the 4-port configuration(type -1/-4) or 6-Port-configuration (type -3/-5), which can be delivered respectivly, with (type -4/-5) or with(type -1/-3) a relief valve. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. LMD 51-5 The pressure regulator series MD 51 reduces low upstream pressure to a very low downstream pressure down to.2 bar absolut and is suitable for subatmospheric-pressure regulation. Connections (Front view) -1/-4 Downstream -let NPT 1/4"f LMD 51-3 Outlet pressure gauge NPT 1/4"f 9 9-3/-5 Outlet NPT 1/4"f gas-tight 9 9 High pressure -let NPT 1/4"f Body: Seat seals: Brass: Body seals: Relief valve seat seals: Brass: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: bar (-15-4 psi) -1-5 bar ( psi) bar ( psi) staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Staless steel: FFKM, (EPDM)* EPDM, (FKM)* PCTFE (Staless steel), PVDF (Brass) Staless steel: FKM, (EPDM, FFKM)* EPDM, (FKM)* Optional: - 6 mbar ( psi) with diameter 63 mm Weight: approx. 1.1 kg (type -1), 1.2kg (type -3) Dimensions (w h d): approx x12 to 14 mm Inlet/Outlet: NPT 1/4"f, optional tube fittg Dimensions + drawg: see page 22 *on request Outlet pressure gauge NPT 1/4"f 6 Inlet pressure gauge NPT 1/4"f Downstream -let NPT 1/4"f High pressure -let NPT 1/4"f Outlet NPT 1/4"f gas-tight LMD 51-3 LMD 51-3 LMD 51-1 LMD 51-4 LMD Inlet NPT 1/4"f, gas-tight Material BC BC = brass chrome-plated SS = staless steel Upstream pressure D D = 12 bar /175 psi Downstream pressure 2 2 =.2-2 bar abs./ 3-3 psi abs. 3 =.2-3 bar abs./ 3-45 psi abs. Inlet CL6 BC =NPT 1/4"f CL6** CL8 CL1 CL12 BC = brass chromeplated Outlet CL6 BC =NPT 1/4"f CL6** CL8 CL1 CL12 BC = brass chromeplated Contact gauge Ki = with Ki = with (only for -3 and -5) SS = staless steel SS = staless steel ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter Gas type Gas Please specify

27 Le pressure regulators LMD 522-3/-5 LMD Dual-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., upstream pressure 23 bar / 33 psi, downstream pressure range.2-3 bar abs. / 3-45 psi abs. Subatmospheric-pressure regulation Downstream pressure is dependent of upstream pressure These pressure regulators offer a broad application spectrum through the 4-port or 6-port configurations available. LMD is delivered with a relief valve. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The pressure regulator series MD 522 reduces cylder pressure to diverse very low downstream pressures down to.2 bar. The dual-stage design ensures that the upstream pressure remas dependent of the downstream pressure. Subatmospheric-pressure regulation possible. LMD Connections (Front view) Outlet pressure gauge NPT 1/4"f Downstream -let NPT 1/4"f Inlet pressure gauge NPT 1/4"f 6 6 High pressure -let NPT 1/4"f Body: Seat seals 1st stage: Seat seals 2nd stage: Body seals: Relief valve seat seals: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: bar (-15-4 psi) -1-5 bar ( psi) bar ( - 45 psi) staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated PCTFE Staless steel: FFKM, (EPDM)*, Brass: EPDM, (FKM)* PCTFE (SS), PVDF (Brass) Staless steel: FKM, (EPDM, FFKM)* Brass: EPDM, (FKM)* Option: - 6 mbar (8.7 psi) with Ø 63 mm Weight: approx. 1.8 kg ( -3), 1.9 kg ( -5) Dimensions (w h d): approx mm Inlet-/Outlet: NPT 1/4"f, optional tube fittg *on request Outlet NPT 1/4"f gas-tight Inlet NPT 1/4"f gas-tight LMD LMD LMD Material BC BC = brass chrome-plated SS = staless steel Upstream pressure F F = 23 bar /33 psi Downstream pressure 2 2 =.2-2 bar abs./ 3-3 psi abs. 3 =.2-3 bar abs./ 3-45 psi abs. Inlet CL6 BC =NPT 1/4"f CL6** CL8, CL1 CL12 BC = brass chromeplated SS = staless steel Outlet CL6 BC =NPT 1/4"f CL6** CL8, CL1 CL12 BC = brass chrome-plated SS = staless Contact gauge Ki = with Ki = with steel ** Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. Gas type Gas Please specify 27

28 Le pressure regulators LMD 5-PA Outlet pressure gauge NPT 1/4" Downstream let NPT 1/4" Inlet pressure gauge NPT 1/4" High pressure let NPT 1/4" Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., upstream pressure: 2/4/2 bar downstream pressure range.5 to 6 bar control pressure bar Downstream-let for pressure transmitter Control pressure NPT 1/4" lte/let NPT 1/4" Configuration Diagram Safetyrelief let NPT 1/8" Pneumatic control Electronic control with magetic valve (optional) High precision adjustability The pressure regulator is equipped with upstream and downstream pressure gauges (also available with). A second downstream pressure let serves as let for a pressure transmitter. The regulation of the downstream pressures is achieved by way of a pneumatic control with the help of a control block and a process regulator (available optionally). The downstream pressure can this way be very precisely adjusted (see regulatg characteristics). The control and viewg element of this regulator is fitted with 3 buttons and an LCD Matrix-display. A manual mode, a configuration mode and an automatic mode are provided. Pressure transmitter Relief le 22V /.8A The LMD 5-PA reduces le pressure to a lower supply pressure and is a good solution when the downstream pressure cannot or should not be set directly at the pressure regulator. The tegration of an automatic electronic control can be done best this manner. Control block Process gas regulator Pressure regulator Body: Configuration: Seat seal: Body seals: Downstream pressure: Control pressure: Pressure gauge range: Weight: Dimensions (w h d): Porcess gas--/let: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated 4- or 6-Port PCTFE PCTFE, PVDF (Brass).5-6 bar bar -1-1 bar, - 5 bar, - 8 bar, bar approx. 1.1 kg approx to 14 mm NPT 1/4"f, optional tube fittg Process regulator Power consumption: 24V DC / 1A Samplg frequency: 3 Hz Installation position: any direction Ambient temperature: -25 C to 7 C (not for electronic) Protection category: IP65 accord. with EN 6529 Down stream pressure Control pressure Flow.5 [Nm³/h N 2] HP=7,bar HP=14,bar HP=21,bar HP=2bar HP=2bar Flow rate [Nm³/h N 2] Outlet pressure LMD 5-PA LMD 5-PA Material BC SS = staless steel BC = brass chromeplated Upstream pressure E D = 2 bar E = 4 bar F = 2 bar Downstream pressure 6 6 =.5-6 bar Inlet CL6 SS =NPT 1/4"f CL6* BC = brass chromeplated SS = staless steel Outlet CL6 SS =NPT 1/4"f CL6* BC = brass chrome-plated SS = staless steel Gas type Gas Please specify 28 * Outlet: CL6 = tube fittg for 6 mm side diameter

29 Le pressure regulators LMD 545-1/-3 Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., upstream pressure: 12 /4 bar downstream pressure range.2-3 bar -1 Low downstream pressure Very fe adjustments possible Higher Flow rates The large housg diameter of these pressure regulators allows for a large metal diaphragm and with it a very fe adjustment of the downstream pressure by comparatively high flow rates of up to.2 bar. The Pressure regulator can be supplied either 4-Port (LMD 545-1) or 6-Port (LMD 545-3) versions. The LMD 545 reduces the le pressure by very small crements to a very low supply pressure. Connections (Front view) -1 Downstream -let NPT 1/4"f Outlet pressure gauge NPT 1/4"f High pressure -let NPT 1/4"f Body: staless steel 316L (1.444) specially cleaned and electro-polished or Brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Upstream pressure: 12 / 4 bar Configuration: 4-Port-Version ( -1) or 6 Port-Version ( -3) Downstream pressure: 2-25 mbar / 1-13 mbar (12 bar Version) 15-5 mbar / 15-3 mbar (4 bar Version) Performance data: see chapter 5 Basic design aspects: see page 13 Seat seals: EPDM, FKM (Brass) Body seals: PCTFE, PVDF (Brass) Pressure gauge range: 6 mbar / 1.5 bar / 5 bar Weight: approx. 2.4 ( -1) / 2.5 kg ( -3) Dimensions (w h d): approx mm Inlet-/Outlet: NPT 1/4"f, optional tube fittg -3 Outlet NPT 1/4"f gas-tight Dimensions: Outlet pressure gauge NPT 1/4"f 6 Inlet pressure gauge NPT 1/4"f Downstream -let NPT 1/4"f 6 6 Outlet NPT 1/4"f gas-tight High pressure -let NPT 1/4"f Inlet NPT 1/4"f, gas-tight approx. 179 Ø1 n 55 approx. 97 M6 SW 5 LMD LMD LMD Material BC BC = brass chrome-plated SS = staless steel Upstream pressure = 12 bar 4= 4 bar 8 19 approx. 119 Downstream pressure = 2-25 mbar 13 = 1-13 mbar 4 bar Version: 5 = bar 3 = bar Inlet CL6 BC =NPT 1/4"f CL6* BC = brass chrome-plated SS = staless steel Outlet CL6 BC =NPT 1/4"f CL6* BC = brass chrome-plated SS = staless steel Gas type Gas Please specify * Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter

30 Gas supply panels SMD 5/53-16/-24/-25 Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6. let pressure 23/315 bar / 33/45 psi downstream pressure range 1-2 bar / psi -16 Gas supply panel for standard applications ( -16) Process gas purgg ( -24) Process gas purgg and process gas let shut-off valve ( -25) -24 These gas supply panels are mounted onto a staless steel panel and consist of a pressure regulator, let and let pressure gauges, a relief valve (by downstream pressure>5bar RV on request) and shut-off valves(type -16 at the let, type -24 at the let, type -25 at let and let) for the process gas. A choice of staless steel coils or flexible high pressure hoses is available for the connection to the gas cylder. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. Vent pipg connected to the relief valve can be ordered optionally. Gas panels are permanently stalled the cylder stock room or cabet near the pot of use and reduce the cylder pressure to a lower le pressure. Through the subsequent pipg system the gas is taken to the pot of use. The type -24 allows for process gas purgg to be carried while cylders are beg changed. The type-25 design allows shuttg-off of gas flow durg cylder change from the panel itself. Standard application for these panels: centralized or decentralized gas supply for highly sensitive analysis devices Flow schematic shown with vent pipg Cylder connection 2 Coil 3 Purge let valve (not -16 ) 4 Pressure regulator - Sgle-stage 5 Upstream pressure gauge 6 Downstream pressure gauge 7 Process gas let shut-off valve ( -25 only) 8 Process gas let 9 Relief valve 1 Purge let valve (not -16 ) Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Outlet NPT 1/4"f, downstream pressure > 5 bar RV on request PCTFE PCTFE (SS), PVDF (Brass) SS: FKM, (EPDM, FFKM)*, Brass: EPDM, (FKM)* Relief valve: Seat seals: Body seals: Relief valve seat seals: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: -1-1 bar ( psi) - 25 bar ( psi), - 4 bar ( - 6 psi) - 8 bar ( psi), bar ( - 45 psi) - 4 bar ( - 58 psi) Weight: approx. 2.5 kg (type -16) / 2.74 kg (type -24)/ 3 kg (type -25) Dimensions (w h d): Purge let: Inlet: *on request approx mm NPT 1/4"f or tube fittg NPT 1/4"f, M (optional) SMD 5-16 SMD 5-16 SMD 5-24 SMD bar Versions: SMD SMD SMD Material BC BC = brass chromeplated SS = staless steel Upstream pressure F F = 23 bar /33 psi G = 315 bar /45 psi Downstream pressure = 1-14 bar /15-2 psi 28 = bar /35-4 psi 5 = bar /35-72 psi 2 = 1-2 bar / psi) Inlet N14 N14 = NPT 1/4"f M (optional) Outlet CL6 BC =NPT 1/4"f CL6, CL8** CL1, CL12 BC = brass chrome-plated Contact gauge Ki = with Ki = with Vent pipg A = with A = with (Only conjunction with RV not available for -16) Gas type Gas Please specify It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station, see accessories chapter cylder connection FA 5". **Outlet: CL6 = tube fittg for tube 6 mm, ( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 3

31 Gas supply panels SMD 5/53-27 Flow schematic BA 9 5 SMD SE SA Sgle-stage, with ert gas purgg, for reactive, toxic, oxidizg and corrosive (optional Hastelloy ner parts) gas and gas mixtures, no oxygen purity max. 6., let pressure 23/315 bar / 33/45 psi, downstream pressure range.5-2 bar / 7-29 psi With ert gas purgg Optimum purge conditions with purge valve block Inlet and let shut-off valve Optional Hastelloy ner parts for corrosive gases The SMD 5-27 is mounted on a staless steel panel and consists of a purge valve block with check valve, a purge let and purge let valves, pressure regulator, let and let pressure gauges, a relief valve and let and let shut-off valves for - and let of the process gas. Staless steel coils for connection to the gas cylders are available. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. Vent gas pipg for attachment to the relief valve can be ordered as an optional extra (by downstream pressure of >5bar RV on request). 1 Inlet connection 2 Purge let valve 3 Purge let valve 4 Upstream shut-off valve 5 Pressure regulator 6 Upstream pressure gauge 7 Downstream pressure gauge 8 Relief valve 9 Downstream shut-off valve 1 Check valve SE Purge let SA Purge let BA Process gas let Gas panels are permanently stalled the cylder stock room or cabet near the pot of use and reduce the cylder pressure to a lower le pressure. Through the subsequent pipg system the gas is taken to the pot of use. The positiong of the purge block on the let side reduces the purge volume to a mimum (only with cylder connection) and allows for a separate discharge for the purge gases. The SMD 5-27 guarantees optimum purge conditions even when usg toxic gases and so offers maximum safety for the user and the application. This design with external gas purgg offers the followg advantages: 1. Purgg the residual gas the system before a cylder change improves personnel safety levels. 2. Matag gas purity by purgg the atmospheric air which has penetrated the system durg cylder changg. 3. Purgg with dry ert gas reduces humidity and extends the expected live span when corrosive gases are used. Body: staless steel 316L (1.444) specially cleaned and electro-polished Relief valve: Outlet NPT 1/4"f, downstream pressure > 5 bar RV * Seat seals: PCTFE Relief valve seat seals: FKM, (EPDM, FFKM) * Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: -1-1 bar ( psi), - 25 bar ( psi) - 4 bar ( - 6 psi), - 8 bar ( psi) bar ( - 45 psi) Weight: approx. 4. kg Dimensions (w h d): approx mm Purge let: check valve, Tube fittg 6 mm Purge let: NPT 1/4"f, optional tube fittg Inlet: NPT 1/4"f, M 14 1,5 (optional) Outlet: NPT 1/4"f, optional Tube fittg *on request SMD 5-27 SMD 5-27 SMD Material SS SS = staless steel Upstream pressure F F = 23 bar /33 psi G = 315 bar /45 psi Downstream pressure 6 6 =.5-6 bar / 7-85 psi 14 = 1-14 bar /15-2 psi 5 = bar /35-72 psi 2 = 1-2 bar / psi Inlet N14 N14 = NPT 1/4"f M (optional) Outlet CL6 SS =NPT 1/4"f CL6** CL8 CL1 CL12 SS = staless steel Contact gauge Ki = with Ki = with Vent pipg A = with A = with (Only conjunction with RV) Gas type Gas Please specify (no O2) It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station, see accessories chapter cylder connection FA 5". **Outlet: CL6 = tube fittg for tube 6 mm ( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 31

32 Gas supply panels SMD 52/532-16/-24/-25 Dual-stage, for ert and flammable gases and gas mixtures, purity max. 6., let pressure 23/315 bar / 33/45 psi, downstream pressure range bar / 1-15 psi -16 Downstram pressure is dependent of the upstream pressure due to the dual-stag design Gas supply panel for standard applications ( -16) Process gas purgg ( -24) Process gas purgg and process gas let shut-off valve ( -25) -24 These gas supply panels are mounted onto a staless steel console and consist of a pressure regulator, let and let pressure gauges, a relief valve and shut-off valve (type -16 at the let, type -24 at the let, type -25 at let and let) for the process gas. A choice of staless steel pigtails or flexible high pressure hoses is available for the connection to the gas cylder. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. Vent gas pipg for attachment to the relief valve can be ordered as an optional extra. -25 Flow schematic BA shown with vent pipg 5 1 Cylder connection 2 Coil 3 Upstream shut-off valve ( ) 4 Pressure regulator - dual-stage 5 Upstream pressure gauge 6 Downstream pressure gauge 7 Process gas let shut-off valve ( ) 8 Process gas let 9 Relief valve 1 Pugre gas let valve ( ) SA Purge let BA Process gas let 3 SA Dual station pressure regulators are permanently stalled the cylder stock room or cabet near the pot of use and reduce the cylder pressure to a lower, constant let pressure for the user. The type -24 allows for process gas purgg to be carried while cylders are beg changed. The type-25 design allows shuttg-off of gas flow durg cylder change from the panel itself. Standard application for these panels: centralized or decentralized gas supply for highly sensitive analysis devices. Body: Relief valve: Seat seals 1st stage: Seat seals 2nd stage: Body seals: Relief valve seat seals: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Outlet NPT 1/4"f PCTFE PTFE PCTFE (SS), PTFE (Brass) Staless steel: FKM, (EPDM, FFKM)* Brass: EPDM, (FKM)* Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: -1-5 bar ( psi), -1-1 bar ( psi) bar ( psi), bar ( - 45 psi) - 4 bar ( - 58 psi) Dimensions (w h d): approx mm Weight: approx. 3.5 ( -16) / 4.1 kg ( -24) / 4.4 kg ( -25) Inlet: NPT 1/4"f, M (optional) Outlet: NPT 1/4"f, optional tube fittg *on request SMD SMD SMD SMD bar Versions: SMD SMD SMD Material BC BC = brass chromeplated Upstream pressure F F = 23 bar /33 psi G = 315 bar SS = staless /45 psi steel Downstream pressure 3 3 =.2-3 bar /3-45 psi 6 =.5-6 bar /7-85 psi 1.5 = bar /7-145 psi Inlet N14 N14 = NPT 1/4"f M (optional) Outlet CL6 BC =NPT 1/4"f CL6, CL8** CL1, CL12 BC = brass chrome-plated SS = staless steel Contact gauge Ki = with Ki = with Vent pipg A = with A = with (Only conjunction with RV, not available for -16.) Gas type Gas Please specify It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station, see accessories chapter cylder connection FA 5". **Outlet: CL6 = tube fittg for tube 6 mm,( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 32

33 Gas supply panels SMD 52/ Flow schematic BA Inlet connection 2 Purge let valve 3 Purge let valve 4 Upstream shut-off valve 5 Cylder pressure regulator 6 Upstream pressure gauge 7 Downstream pressure gauge 8 Relief valve 9 Downstream shut-off valve 1 Check valve SE Purge let SA Purge let BA Process gas let SA 2 1 SE Dual-stage, with ert gas purgg, for reactive, toxic, highly corrosive, oxidizg and corrosive gases and corrosive gas and gas and gas mixtures, no oxygen purity max. 6., let pressure 23/315 bar / 33/45 psi, downstream pressure range bar / 1-15 psi With ert gas purgg Optimum purge conditions with purge valve block Inlet and let shut-off valve Optional Hastelloy ner parts for corrosive gases These gas supply panels are mounted onto a staless steel console and consist of a purge valve block with a check valve, purge let and let valves, pressure regulator, upstream and downstream gauges, a relief valve and shut-off valve for - and let of the process gas. Staless steel coils are available for the connection to the gas cylder. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. Vent gas pipg for attachment to the relief valve can be ordered as an optional extra. Dual station pressure regulators are permanently stalled the cylder stock room or cabet near the pot of use and reduce the cylder pressure to a lower pressure for the user. Through the subsequent pipg system the gas is taken to the pot of use. The positiong of the purge block on the let side reduces the purge volume to a mimum and allows for a separate discharge for the purge gases. These pressure regulators guarantees optimum purge conditions even when usg toxic gases and so offers maximum safety for the user and the application. This design with ert gas purgg offers the followg advantages: 1. Purgg the residual gas remag the system before a cylder change improves personnel safety levels. 2. Matag gas purity by purgg the atmospheric air which has penetrated the system durg cylder changg. 3. Purgg with dry ert gas reduces humidity and extends the expected life span when corrosive gases are used. Body: staless steel 316L (1.444) specially cleaned and electro-polished Relief valve: Outlet NPT 1/4"f Seat seals 1st stage: PCTFE Seat seals 2nd stage: PTFE Body seals: PCTFE Performance data: see chapter 5 Basic design aspects: see page 13 Relief valve seat seals: FKM, (EPDM, FFKM) * Pressure gauge range: -1-5 bar ( psi), -1-1 bar ( psi) bar ( - 45 psi) Dimensions (w h d): approx mm Weight: approx. 5.1 kg Purge let: check valve, tube fittg 6 mm Purge let: NPT 1/4"f, optional tube fittg Inlet: NPT 1/4"f, M (optional) Outlet: NPT 1/4"f, optional tube fittg * on request SMD SMD SMD Material SS SS = staless steel Upstream pressure F F = 23 bar /33 psi G = 315 bar /45 psi Downstream pressure 3 3 =.2-3 bar/ 3-45 psi 6 =.5-6 bar/ 7-85 psi 1.5 = bar/ psi Inlet Outlet N14 CL6 N14 = =NPT 1/4"f NPT 1/4"f CL6** M CL8 (optional) CL1 CL12 Contact gauge Ki = with Ki = with Vent pipg A = with A = with (Only conjunction with AV) Gas type Gas Please specify (no O2) It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station, see accessories chapter cylder connection FA 5". **Outlet: CL6 = tube fittg for tube 6 mm,( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 33

34 Gas supply manifolds BMD 5/53-3/-32 Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure 23/315 bar / 33/45 psi, downstream pressure range 1-2 bar / (33) psi 8 BA Contuous gas supply even durg cylder change Fast manual switch-over to the reserve side Optional contact pressure gauges to monitor for gas supply failure Process gas purgg (BMD 5-32) Connection for 2 1 cylders, upgradable for 2 4 cylders, These gas supply panels reduce the upstream pressure from 23 bar to downstream pressures of 1 to 2 bar. The BMD 5/53 is mounted onto a staless steel console and consist of a pressure regulator and let and let gauges. The upstream shut-off valve enables the unterrupted gas supply even while changg cylders. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The additional purge valve permits for purgg the station with ternal gas and thereby matag the gas purity even durg a cylder change. Vent pipg for connection to the relief valve (by downstream pressure >5bar RV on request) can be ordered optionally for type -32. The manifold enables a contuous gas supply. The manifolds ma advantage here is the ability to quickly change over to the reserve cylder and the unterrupted gas supply durg the cylder switch over. Standard application for these panels: centralized or decentralized gas supply for highly sensitive analytical devices. Flow schematic BA Inlet connection 2 Coil 3 Process gas let shut-off valve 4 Regulator sgle-stage 5 Upstream pressure gauge 6 Downstream pressure gauge 8 Relief valve 9 Purge let valve SA Purge let BA Process gas let 4 3 SA (with vent pipg) Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Relief valve: Outlet NPT 1/4"f (downstream pressure > 5 bar RV *) Seat seals: PCTFE Body seals: PCTFE (SS), PVDF (Brass)* Relief valve seat seals FKM, (EPDM, FFKM)*, EPDM, (FKM)* Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: bar ( psi), - 8 bar ( psi) bar ( - 45 psi), - 4 bar ( - 58 psi) Weight: approx. 2.9 /3.8 kg Dimensions (w h d): approx mm (BMD 5-3); mm (BMD 5-32) Inlet: NPT 1/4"f, M (optional) Outlet: NPT 1/4"f, optional tube fittg *on request BMD 5-3 BMD 5-3 BMD bar Versions: BMD 53-3 BMD Material BC BC = brass chromeplated SS = staless steel Upstream pressure F F = 23 bar /33 psi G = 315 bar /45 psi Downstream pressure Inlet 14 N14 14 = 1-14 bar N14 = /15-2 psi NPT 1/4"f 5 = bar M /35-72 psi (optional) 2 = 1-2 bar / psi) Outlet CL6 BC =NPT 1/4"f CL6, CL8** CL1, CL12 BC = brass chrome-plated Contact gauge Ki = with Ki = with Vent pipg A = with A = with (On type-32 only combation with RV) Upgrade M = with M2 = 2 2 Cylder M3 = 2 3 Cylder M4 = 2 4 Cylder Gas type Gas Please specify It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station, see accessories chapter cylder connection FA 5". **Outlet: CL6 = tube fittg for tube 6 mm,( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 34

35 Gas supply manifolds BMD 5/53-34/-35/ (with ert gas purgg) -35 (with process gas purgg) Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure 23/315 bar / 33/45 psi, preset downstream pressure 14 / 5 bar - 2 / 72 psi Unterrupted gas supply with semiautomatic switch over Indicator for active cylder Low gas alarm signal with contact gauges (optional) Upgradable to max. 2 4 cylders Pressure decreases the active cylder (or bundle) below a preset level which causes a semi-automatic switch to switch over to the full cylder. This is achieved by two tegrated pressure regulators (preset to slightly different delivery pressure levels), connected at their let ports. Movg the lever towards the full bank allows for the disconnection and replacement of empty cylders with terruption to the gas flow. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The BMD 5-34 has an external gas purge, the BMD 5-35 an ternal gas purge. Vent pipg for connection to the relief valve (on type -34 cluded) can be ordered optionally for type Pressure regulator 2 Upstream pressure gauge 3 Downstream pressure gauge 4 Process gas valve 5 Purge gas let valve 5a Purge gas let valve 6 Relief valve 7 Connection spirals 8 Gas cylder 9 Check valve H Lever BA Process gas let SA Purge gas let SE Purge gas let Flow schematic These gas supply panels, with semi-automatic switch over, are optimally used when it is when unterupted gas supply is required. Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Relief valve: Outlet NPT 1/4"f Body seals: PCTFE (SS), PVDF (Brass) Seat seals: PCTFE Relief valve seat seals: FKM, (EPDM, FFKM)*, EPDM, (FKM)* Pressure gauge range: bar ( psi)/ bar ( - 45 psi) - 4 bar ( - 58 psi) Dimensions (w h d): approx mm Weight: approx. 5.5 kg (BMD 5-35) Preset downstream pressure: 14 bar +/-2 bar ; 2 +/- 3 psi Flow rate: 25 Nm³/h N ² (14 bar - type at 29 bar let pressure.) Purge let and let: Tube fittg 6 mm (BMD 5-34) Inlet: NPT 1/4"f, M (optional) Outlet: NPT 1/4"f, optional tube fittg *on request SE SA SE 9 5a BMD 5-35 BMD 5-34 BMD 5-35 BMD bar Versions: BMD BMD BMD Material BC 2 1 BC = brass chromeplated 3 Typ -34 SS = staless steel Upstream pressure F F = 23 bar /33 psi G = 315 bar /45 psi a Downstream pressure = 14 bar/ 2 psi 5 = 5 bar /72 psi Inlet N14 N14 = NPT 1/4"f M (optional) Outlet CL6 BC =NPT 1/4"f CL6, CL8** CL1, CL12 BC = brass chrome-plated Contact gauge Ki = with Ki = with Vent pipg A = with A = with (On type-35 only combation with RV) Extension bar M = with M2 = 2 2 Cylder M3 = 2 3 Cylder M4 = 2 4 Cylder Gas type Gas Please specify It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station, see accessories chapter cylder connection FA 5". **Outlet: CL6 = tube fittg for tube 6 mm,( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter Typ Typ

36 Gas supply manifolds BMD 52/532-34/-35/ (with ert gas purgg) Dual-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure 23/315 bar / 33/45 psi, downstream pressure range bar/ 1-15 psi Unterrupted gas supply with semi-automatic switch over Downstream pressure is dependent of the upstream pressure Active cylder dicator Low gas alarm signal with contact gauges (optional) Upgradable to max. 2 4 Cylder -35 (with process gas purgg) Pressure decrease the active cylder (or bundle) below a preset level causes a semi-automatic switch over to the full cylder. Movg the lever towards the full bank allows for the disconnection and replacement of empty cylders with terruption of gas supply. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. Vent pipg for connection to the relief valve (on type -34 cluded) can be ordered optionally for type Pressure regulator 1st stage 1a Pressure regulator 2nd stage 2 Upstream pressure gauge 3 Downstream pressure gauge 3a Middle pressure gauge 4 Process gas valve 5 Purge let valve 5a Purge let valve 6 Relief valve 7 Connection spirals 8 Gas cylder 9 Check valve H Lever BA Process gas let SA Purge let SE Purge let This gas supply panels are always chosen when a low and constant downstream pressure is required, dependent of the changes the upstream pressure and an unterrupted gas supply with semi-automatic change over is needed. Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Relief valve: let NPT 1/4"f Seat seals 1st stage: PCTFE, 2nd stage PTFE Body seals: PCTFE (SS), PTFE (Brass) Relief valve seat seals: SS: FKM, (EPDM, FFKM)*, Brass: EPDM, (FKM)*, Pressure gauge range: -1 5 bar ( psi), -1 1 bar ( psi), bar ( psi), 315 bar ( 45 psi), 4 bar ( 58 psi) Dimensions (w h d): approx mm Weight: approx. 6.7 kg (BMD 52-35) Purge let and let: Tube fittg 6 mm (BMD 52-34) Inlet: NPT 1/4"f, M (optional) Outlet: NPT 1/4"f, optional tube fittg *on request SE SE a 1a 1a 5a 2 3a 2 2 3a 2 2 3a 2 BMD BMD BMD BMD bar Versions: BMD BMD BMD a Typ -34 Typ -35 Typ -39 Material BC BC = brass chromeplated SS = staless steel Upstream pressure F F = 23 bar /33 psi G = 315 bar /45 psi Downstream pressure 3 3 =.2-3 bar/ 3-45 psi 6 =.5-6 bar/ 7-85 psi 1 = bar /15-15 psi Inlet N14 N14 = NPT 1/4"f M (optional) Outlet CL6 BC =NPT 1/4"f CL6, CL8** CL1, CL12 BC = brass chromeplated SS = staless steel Contact gauge Vent pipg Ki A = with = with Ki = with A = with (On type-35 only combation with AV) Extension bars M = with M2 = 2 2 Cylder M3 = 2 3 Cylder M4 = 2 4 Cylder It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station, see accessories chapter cylder connection FA 5". **Outlet: CL6 = tube fittg for tube 6 mm, ( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter Gas type Gas Please specify

37 Extension kits MFOLD Extension kit, for ert, corrosive, flammable and oxidizg gas and gas mixtures, purity max. 6., let pressure 315 bar / 45 psi Flow chat 1 Shut off valve 2 Non return valve Highlights For 3 bar cylders Cleaned for O2 service ATEX compliant Suitable for ECD service Modular concept Extension kit consist of a NPT lets, SS bar and NPT let to manifold. Upon request it can be equipped with non return valves and/or shut off valves on let. The extension kit is designed for safe handlg of high purity gases. Body material: Weight: Dimensions (w h d): Inlet: Outlet: staless steel 316L (1.444) specially cleaned and electropolished approx. 1.2kg (NPT 1/4"f lets) mm (with 2 lets) NPT 1/4"f NPT 1/4"m approx. 47 approx. 7 approx. 2 approx. 3 Installation example MFOLD Material BC SS=staless steel BC = brass*) *) Shut off valve material Inlet Ports 2 2=2 lets 3=3 lets 4=4 lets Shut off Valve MVA = no valve MVA = with valve Check Valve CV = no CV CV= CV on each let Gas type Gas 37

38 Pot-of-use regulators EMD 5/51-6 Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure: 4 bar/ 6 psi /EMD 5 12 bar/ 175 psi /EMD 51 downstream pressure range: EMD 5:.2 bar bar / 3 psi - 85 psi, EMD 51:.2 bar abs. - 3 bar / 3 psi abs psi. Upstream valve with 9 -shut-off function Clear open/closed dicator for shut-off valves The EMD 5-6 consists of an upstream shut-off valve, pressure regulator, downstream gauges and Alumium panel for wall mountg. A relief valve can be ordered as an optional extra. Flow schematic let let 1 Upstream shut-off valve 2 Pressure regulator 3 Downstream gauge 4 Relief valve The EMD 5/51-6 is designed as an access pot to a central gas supply system and thereby designed as a second stage, whereby the le pressure of apparatuses up to.2 bar absolute can be regulated downward. The EMD 51 is also suitable for sub-atmospheric pressure regulation. Body: Seat seals: Body seals: Performance data: see chapter 5 Basic design aspects: see page 13 Pressure gauge range: bar ( - 4 psi) - 5 bar ( - 75 psi) - 1 bar (- 145 psi) - 18 bar (- 26 psi) Weight: Dimensions (w h d): Inlet/Outlet: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated PTFE PCTFE (SS), PVDF (Brass) approx kg approx mm NPT 1/4"f, optional tube fittg EMD 5-6 EMD 5-6 EMD 51-6 Material BC BC = brass chrome-plated SS = staless steel Upstream pressure E EMD 5-6: E = 4 bar /6 psi EMD 51-6: D =12 bar / 175 psi Downstream pressure 1 EMD 5-6: 1 =.2-1 bar/3-15 psi 6 =.5-6 bar/7-85 psi 1 = bar/ psi EMD 51-6: 2 =.2-2 bar abs./3-3 psi abs. 3 =.2-3 bar abs./3-45 psi abs. Inlet CL6 BC =NPT 1/4"f CL6, CL8* CL1, CL12 BC = brass chromeplated SS = staless steel Outlet CL6 BC =NPT 1/4"f CL6, CL8* CL1, CL12 BC = brass chromeplated SS = staless steel *Outlet: CL6 = tube fittg for tube 6 mm. Please note the "burst rate chart" when choosg the tube fittgs chapter Relief Valve RV = with A = with Gas type Gas Please specify

39 Purge Block DPB 5 SE For pure gases and gas mixtures, no oxygen, purity max. 6., 2- or 3-port version, for manual purgg, nomal pressure 23 bar / 33 psi DPB 53 (3-Port-Version) SE SA SE SA 6 Matag gas purity near to the gas source No contact between the process gas and the ambient air Quick operation of shut-off valve with only quarter turn Clearly visible open/closed position Optimum purge conditions Wide range of applications Inlet- and let filters The 2-Port-purge block consists of a cylder connection, check valve, purge gas let and purge gas let shut-off valves. The 3-Port-configuration also cludes a process gas shut-off valve. The regular re surface cleansg and ensug quality control mimises the potential of contamation. The orbital welded connection fittgs are optional and longer cylder connections (1 mm) can also be offered as an alternative to standard. The triple valve block is used for external gas purgg of high purity or corrosive gases and ensures contued of gas purity durg the cylder switch over. This purge unit guarantees the necessary safety when toxic gases are used. The benefit of these purge blocks with its wide range of applications lies the optimum safety for the application and for the operator. DPB 52 (2-Port-Version) SE SA 6 Body: Staless steel specially cleaned Diaphragm: Hastelloy, Elgiloy Body seals: PCTFE Performance data: comparable to MVA 5 shut-off valve, chapter 5 Nomal width: DN 5 KV-value:.15 Weight: approx. 1. kg (2-port), 1.4 kg (3-port) Dimensions: DPB 52: approx mm DPB 53: approx mm Inlet- and let filters: 1 µm mesh Purge gas let: check valve, tube fittg 6 mm Purge gas let: NPT 1/4"f, optional tube fittg Inlet: Cylder connection DIN 477 longer cylder connections optional Outlet: NPT 1/4"f, optional tube fittg SA 1 Purge gas let shut-off valve 2 Purge gas let shut-off valve 3 Shut-off valve 4 Process gas let 5 Cylder connection 6 Gas cylder 7 Check valve SE Purge let SA Purge let DPB-53 DPB-53 DPB-52 Material SS SS = staless steel BC = brass chrome-plated (DPB-2 only) Upstream pressure F F = 23 bar/33 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL6 =NPT 1/4"f CL6* CL8 CL1 CL12 Gas type Gas Please specify (no O2) *Outlet: CL6 = tube fittg for tube 6 mm. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 39

40 4f Pressure regulators Series 32 Wide downstream pressure range from.5 bar to 5 bar,.3 bar to 14 bar with the dual-stage version Pressure gauges safety version accordg to DIN EN 837 Upstream pressure 23 bar State-of-the-art fittgs and connection technology, body 6-port technology Cylder connection, gas specific, accordg to national standards such as DIN, AFNOR,... available for special gases of gas purity max. 5. Pressure regulator-diaphragm of Staless steel Metal diaphragm, regulatg and shutoff valve protected by mesh filter with 1 µm particle size. High safety level through tegrated relief valve NPT 1/4" The GCEDruVa-pressure regulatg unit guarantees easy matenance and service with tegrated particle filters 1 µm particle size. Cleanness and leak tightness fulfillg the demands of high purity applications. Ergonomic, clean, long lastg and ATEX conform adjustment knobs Connections (Front view) Outlet pressure gauge NPT 1/4"f Downstream-let NPT 1/4"f Inlet pressure gauge NPT 1/4"f 6 6 High pressure-let NPT 1/4"f Basic design aspects* Material Body: staless steel 316L (1.444) specially cleaned or brass CW614 (CuZn39Pb3) nickel-plated and chrome-plated. Sealg material PCTFE, PTFE, FKM etc., dependent upon gas specification and purity requirements. Material is specified Technical data. Inner parts Low matenance, service friendly regulator unit, with a 1 µm particle filter on let and 1 µm on the let. Diaphragm The staless steel material offers ample protection agast damage and corrosion. Performance data See perfomance charts section 5, for differg pressure ranges please contact GCE GmbH. 4 Guaranteed leakage rates < mbar l/s Helium (board). < mbar l/s Helium (across the seat). Workg temperture -25 C to +7 C / -13 F to 158 F Purity 5. Outlet NPT 1/4"f gas-tight Cylder connections In accordance with German national standards DIN 477. Other connections such as US-Norm CGA, British Standard BS etc. are available. *Data other then that given for the Series 32 can be found listed the "" of the dividual pressure regulator. 6 Inlet NPT 1/4"f, gas-tight

41 Cylder pressure regulators FMD 32-14/-16/ Sgle-stage, for ert, reactive and oxidizg gases and mixtures, no acetylene, purity max.5., cylder pressure 23 bar / 33 psi, downstream pressure range.5-5 bar / 7-72 psi. Diaphragm valve (FMD with 9 -shut-off function) Pressure regulator with staless steel diaphragm ATEX conform adjustment knob Gauge safety version accordance with DIN EN These pressure regulators consist of cylder connections, pressure regulator, let- and let gauges, diaphragm shut-off valve ( -16) regulatg valve ( -18), relief valve, tube fittg on let. The FMD is the base model. The FMD permits shuttg-off of the gas flow while matag the pressure regulator settgs, the regulatg valve on the FMD enables a fe apportiong of the gas flow. Flow schematic BA Cylder connection 2 Pressure regulator 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream shut-off valve (only type -16) / regulatg valve (only type -18) BA Process gas let Body: Seat seals: Body seals: Diaphragm: Leakage rate: Relief valve seat seals: Pressure gauge range: Staless steel 316L (1.444) specially cleaned or Brass CW614 (CuZn39Pb3) specially cleaned PCTFE PCTFE (Staless steel), PVDF (Brass) Staless steel < mbar l/s Helium (board) < mbar l/s Helium (across the seat) SS: FKM, (EPDM*, FFKM*), Brass: EPDM, (FKM*) to 25 bar ( psi), - 8 bar ( psi), bar ( - 45 psi) Workg temperature: -25 C to +7 C / -13 F to 158 F Weight: approx. 1.5 kg ( -14), 1.8 kg ( -16/18) Performance data: see chapter 5 Basic design aspects: see page 4 Cylder connection: Outlet: *on request Dimensions approx.112 accordg to gas type NPT 1/4"f, optional tube fittg ca. approx SW x M6 3 approx.225 FMD FMD FMD FMD Material B B = brass SS = staless steel Upstream pressure F F = 23 bar /33 psi Downstream pressure 6 6 =.5-6 bar /15-2 psi 14 = 1-14 bar / 15-2 psi 5 = bar / psi Inlet DIN DIN ANSI/ AFNOR/ NBN/BS 341/ CGA/NEN/UNI Outlet CL6 =NPT 1/4"f CL6/ CL8** CL 1/8" /CL 1/4" NO6 Gas type Gas Please specify ** = Outlet: (CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 41

42 Cylder pressure regulators FMD /-16/-18 Dual-stage, for ert, reactive, flammable and oxidizg gases and mixtures, not suitable for acetylene, purity max. 5. cylder pressure 23 bar / 33 psi, downstream pressure range bar / 7-15 psi -14 Downstream pressure is dependent of the upstream pressure due to the dual-stage design Diaphragm valve (FMD with 9 shut-off function) Pressure regulator with staless steel diaphragm ATEX conform adjustment knob Gauge safety version accordance with DIN EN These pressure regulators consist of cylder connections, pressure regulator, let- and let gauges, diaphragm shut-off valve ( -16) regulatg valve ( -18), relief valve, tube fittg on let. BA Flow schematic Cylder connection 2 Dual-stage pressure regulator 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream shut-off valve (only type -16) / downstream regulatg valve (only type -18) BA Process gas let The FMD is the base model. The FMD permits shuttg-off of the gas flow while matag the pressure regulator settgs, the regulatg valve on the FMD enables a fe controlg of the gas flow. The dual-stage pressure regulator ensures the uniformity of the downstream pressure dependent of the level of the cylder pressure. Body: Staless steel 316L (1.444) specially cleaned or Brass CW614 (CuZn39Pb3) specially cleaned Seat seals: 1st stage: PCTFE, 2nd stage: PTFE Body seals: PCTFE (Staless steel), PVDF (Brass) Diaphragm: Staless stee Leakage rate: < mbar l/s Helium (board) < mbar l/s Helium (across the seat) Relief valve seat seals: Staless steel: FKM, (EPDM, FFKM) * Brass: EPDM, (FKM) Pressure gauge range: -1 to 1 bar (-15 to 145 psi), -1 to 18 bar (-15 to 26 psi), bar ( - 45 psi) Weight: approx. 2.1 kg ( -14), 2.4 kg ( -16/18) Workg temperature: -25 C to +7 C / -13 F to 158 F Performance data: see chapter 5 Basic design aspects: see page 4 Cylder connection: accordg to gas type *on request Dimensions approx. 112 approx. 2 approx approx. 225 FMD FMD FMD FMD Material B B = brass SS = staless steel Upstream pressure F F = 23 bar /33 psi Downstream pressure 6 6 =.5-6 bar / 7-85 psi 1 = bar / psi Inlet DIN DIN ANSI/ AFNOR/ NBN/BS 341/ CGA/NEN/UNI Outlet CL6 =NPT 1/4"f CL6/ CL8** CL 1/8" /CL 1/4" NO6 Gas type Gas Please specify ** = Outlet: (CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 42

43 Cylder pressure regulators FMD 3-14/-18, FMD 32-14/-18 FMD 3-14 FMD Flow schematic FMD 3-14 FMD 3-18 Sgle-stage / dual-stage, for ert gases and gas mixtures and oxygen, purity to 5., cylder pressure 23 bar downstream pressure range.2-12 bar / psi Clear position dicator Easy to operate Inlet on back side Integrated relief valve Diaphragm material Hastelloy Seat seals PCTFE FMD 3/32-18: with regulatg valve Constant downstream pressure though dual-stage design ( 32) The FMD 3-14 consists of manual cylder connection with knurled nut (supplied), pressure regulator, upstream pressure gauge, downstream pressure gauge, relief valve and screw connections. The FMD 3/32-18 has addition a regulatg valve at the let. The customary hose fittgs and couplgs are available as accessories (see orderg formation). The let on the back end allows for particularly space savg stallation. The dual-stage FMD 32 is deployed where ever high pressure consistency is needed. The cylder pressure regulator series FMD 3/32 is attractive for its high flow rate values and good regulatg characteristics. The FMD 3-14 is used anywhere where gas is directly taken from the cylder and greater flexibility for the end user when choosg a location for use. Body: Brass, specially cleaned, nickel-plated and chrome-plated Seat seals: PCTFE (FMD 32 PCTFE, PTFE) Relief valve: triggered at 1.4- to 1.8- times nomal pressure Purity: 5. Leakage rate: < mbar l/s Helium (board) < mbar l/s Helium (across the seat) Workg temperature: -25 C to +7 C / -13 F to 158 F Filter at let: 5 µm Weight: approx kg (FMD 3-14) / 1.34 kg (FMD 3-18) approx kg (FMD 32-14) / 1.89 kg (FMD 32-18) Dimensions (w h d): approx mm ( FMD 3 with cylder connection) approx mm ( FMD 32 with cylder connection) Gauge: - 3, - 1, - 16 bar and bar Performance data: see chapter 5 Inlet: Cylder connection as per DIN 477, see chapter 5 Outlet: Tube fittg 6 mm (standard) 1 Cylder connection 2 Pressure regulator (FMD 32 dual-stage) 3 Upstream pressure gauge 4 Downstream pressure gauge 5 Relief valve 6 Downstream regulatg valve ( -18) Material Upstream pressure Downstream pressure connection Cylder- Outlet Gas type FMD 3-14 BC F C DIN CL6 Gas FMD 3-14 BC = brass F = 23 C = 1-6 bar DIN CL3* Please FMD 3-18 D= 1-12 bar CL6 specify FMD FMD 32: CL 1/8" FMD B =.2-2 bar NO4 C =.5-6 bar N8 * Outlet: CL6 = tube fittg for 6 mm side diameter, NO6 = hose connector for 6 mm hose side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 43

44 Ultra high purity gas equipment Pressure regulator and valves for the micro- and optoelectronics Marketg Consultation and Service In 1994 GCE has taken on the marketg of APTech pressure regulators and valves to compliment its established, traditional, ultra high purity gas equipment product range. With the existg marketg organisation our customers, the micro and optoelectronics, have a wide choice of high quality products for every application on offer. for gas purity > 6. as well as for corrosive and toxic mediums H 2 S AsH 3 B 2 H 6 /Ar GeH 4 SiH 4 Cl 2 HBr SiH 2 Cl 2 PH 3 BF 3 BCl 3 WF 6 Sce its foundation 1987 the success of APTech is based on a consistent product le and marketg strategy: novative products of highest quality are complemented by exceptional technical background and customeroriented service. APTech is the global market leader for gas handlg products the semiconductor field and has furthermore an standg market position Sheast Asia and Europe. 44 AP Tech s Quality Guarantee The quality management at APTech attaches great importance to designg, manufacturg and marketg high quality products that are safe, reliable and meet or even exceed the requirements of our customers. Then high quality products and superior service are for APTech the foundation necessary to atta the highest customer satisfaction.

45 Gas panels DGS / DGS 1 Sgle-stage, for low flow of non corrosive special gases, purity max. 7., let pressure 23 bar / 33 psi, adjustable downstream pressure.7-7 bar / 2-1 psi DGS DGS Process gas purgg All connections welded or VCR Pressure regulator with tied diaphragm Sprgless diaphragm valve with 9 turn lever Rupture disc limits max. pressure Safety gauge RM 63 Pressure regulator and valve material 316L/AOD/VAR This sgle-stage gas supply panel is mounted onto a staless steel console and consists of a pressure regulator with let and let pressure gauges, shut-off valve and rupture disk. These gas supply panels are used for low flow rates of high purity gases and special gases. 1 Cylder valve 3 Cylder connection 5 Purge let valve 6 Inlet gauge 7 Outlet gauge 8 Pressure regulator 9 Rupture disc 12 Purge let 13 Rupture disc let 14 Process gas let 15 Process gas let shut-off valve 16 Process gas let shut-off valve Flow rate data Cv: Pressure regulator.9, valve.29 Diaphragm: 316L Seat: PCTFE Process gas let: VCR 1/4"m Purge let: VCR 1/4"f Workg temperature: -4 C to +7 C / 4 F to 158 F Surface fish:.4 µm / 15 µ. Ra max. standard Outboard leakage: cm³/sec He by 1 bar/15 psig Seat leakage: cm³/sec He by 7 bar/1 psig For special gases, purity max. 7., let pressure vacuum to 17 bar / 25 psi, downstream pressure vacuum to let pressure DGS 1 DGS DGS DGS Cylder valve 1 Check valve 2 Purge valve block 12 Purge let 3 Cylder connection 4 purge let valve 5 Purge let valve 6 Inlet gauge 9 Rupture disc Rupture disc let 14 Process gas let 15 Process gas let shut-off valve 16 Process gas let shut-off valve Gas type Gas Please specify DGS 1 For low flow rates and low downstream pressures External gas purgg with FAV 93 Sprgless diaphragm valve with 9 turn lever Rupture disc limits max. pressure Valve material 316L/AOD/VAR This sgle-stage gas supply panel is mounted onto a staless steel console and consists of a gauge, shut-off valve and rupture disk. The gas stock is connected via a purgeable cylder valve so that the station can be purged with external gas. These gas supply panels are used for low flow rates of high purity gases and special gases. Flow rate data Cv: Valve.5 Seat : PCTFE Diaphragm: Elgiloy Inlet/Outlet: VCR 1/4"m Workg temperature: -4 C to +7 C / 4 F F Surface fish:.4 µm / 15 µ. Ra max. standard Outboard leakage: cm³ /sec He by 17 bar/25 psig Seat leakage: cm³ /sec He by 17 bar/25 psig 45

46 Gas panels DGS 2 / DGS 3 Sgle-stage, with external gas purgg, for low flow rates reactive and corrosive special gases, purity max. 7., let pressure 23 bar / 33 psi, adjustable downstream pressure.15-1 bar / psi Flow schematic Process gas let 2 Purge valve block 3 Cylder connection 4 Purge let valve 5 Purge let valve 6 Inlet gauge 7 Outlet gauge 8 Pressure regulator 9 Rupture disc 1 Check valve Purge let 12 Purge let 13 Process gas let 14 Process gas let shut-off valve 15 Process gas let shut-off valve 16 Vacuum generator 17 Vacuum generator valve DGS 2 Pressure regulator with tied diaphragm Sprgless diaphragm valve with 9 turn lever Rupture disc limits max. pressure Safety gauge RM 63 Pressure regulator and valve material 316L/AOD/VAR This sgle-stage gas supply panel is mounted onto a staless steel console and consists of a pressure regulator with let and let pressure gauges, downstream shut-off valve and rupture disk. The gas stock is connected via a purgeable cylder valve so that the station can be purged with ert gas. These gas supply panels are used for low flow rates by low pressure for reactive or corrosive gases. Flow rate data Cv: Pressure regulator.9, valve.29 Seat: PCTFE Diaphragm: Hastelloy C22 Process gas let: VCR 1/4"f Purge let + let: VCR 1/4"m Workg temperature: -4 C to +7 C / 4 F F Surface fish:.4 µm / 15 µ. Ra max. standard Outboard leakage: cm³ /sec He by 1 bar/15 psig let pressure Seat leakage: cm³ /sec He by 7 bar/1 psig let pressure Sgle-stage, with external gas purgg, for special gases, purity max. 7., let pressure 23 bar / 33 psi, adjustable downstream pressure.15-1 bar / psi Flow schematic DGS 3 External gas purgg with FAV 93 and vacuum generation with VG 8 Pressure regulator with tied diaphragm Sprgless diaphragm valve with 9 turn lever Rupture disc limits max. pressure Safety gauge RM 63 Pressure regulator and valve material 316L/AOD/VAR This sgle-stage gas supply panel is mounted onto a staless steel console and consists of a pressure regulator with let and let pressure gauges, downstream shut-off valve and burst disk. The gas stock is connected via a purgeable cylder valve so that with the help a vacuum generator the station can be purged extremely effectively with ert gas. 1 2 DGS 2 DGS 2 DGS Gas type Gas Please specify These gas supply panels are used for low flow rates of high purity, reactive corrosive gases and special gases. Flow rate data Cv: Pressure regulator.9, valve.29 Seat: PCTFE Diaphragm: Hastelloy C22 Process gas let/ Purge let: VCR 1/4"m Vacuum generator: Outlet: VCR 1/4"m, let: VCR or tube welded Workg temperature: -4 C to +7 C / 4 F F Surface fish:.4 µm / 15 µ. Ra max. standard Outboard leakage: cm³ /sec He by 1 bar/15 psig Inlet pressure Seat leakage: cm³ /sec He by 7 bar/1 psig Inlet pressure

47 Gas panels BMD/SMD 2-29 Flow schematic SMD 2-29 SMD 2-29 Sgle-stage, for acetylene average purity, let pressure 25 bar downstream pressure approx. 1.5 bar Sgle-stage version for conventional gas usages Gas failure monitorg via contact gauges and signal boxes (optional) Sgle components with type approval Connections for 1 or 2 1 cylders AAS suitable (Atomic Absorption Spectrometer) Station with let ball valve, upstream and downstream pressure gauges, relief valve, flashback arrestor and connections for 1 cylder (SMD) or 2 cylders (BMD). As first stage of a central gas supply. This gas supply panel together with contact gauge and signal box ensures an unterrupted gas supply. The switch-over from the empty cylder to the full supply cylder is operated manually. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. BMD 2-29 Flow schematic Upstream pressure: 25 bar Downstream pressure: approx. 1.5 bar Body: Brass Diaphragm: Rubber Flow rate: to 11 m³/h (pa = 1.26 bar) Workg temperature: -2 to +6 C / -4 to 14 F Dimensions (w h d): approx mm Weight: approx. 4.6/5.5 kg (SMD / BMD) Performance data: see chapter 5 Inlet gauge: contact gauge (optional) Pressure gauge range: - 4 bar, - 58 psi (let), bar, - 36 psi (let) Relief valve let: Tube Ø 12 mm Safety feature: Flashback arrestor GVA G3/8 lh Inlet: W21,8 1/14" Outlet: Tube Ø 12 mm 7 mm BMD Cylder 2 Cylder valve 3 Connectg hose 4 Ball valve 5 Pressure regulator 6 Upstream pressure gauge 7 Downstream pressure gauge 8 Relief valve 9 GVA SMD 2-29 SMD 2-29 BMD 2-29 Material BC BC = brass chrome-plated Downstream pressure = 1.5 bar/22 psi Inlet DIN* DIN, ANSI AFNOR, NBN BS 341, CGA NEN, UNI Outlet = Tube with 12 mm side diameter, side diameter 7 mm Contact gauge Ki = with Ki = with Gas type Gas C2H2 * It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station. See Accessories chapter. 47

48 Semi-automatic switch-over Acetylen BMD Dual-stage, for average purity acetylene, let pressure 25 bar, downstream pressure 1.5 bar NPT 1/4" Unterrupted gas supply with semi-automatic switch over High flow rate Low supply pressure alarm (optional) Connections for 6 cylders AAS suitable (Atomic Absorption Spectrometer) The gas supply panel BMD guarantees an unterrupted acetylene supply through the automatic switch-over from the empty side to the full reserve side. This pressure regulatg station is approved for the connection of maximum 6 cylders. A flashback arrestor is stalled on the let side. The use of contact gauge (accessories) conjunction with alarm box (accessories) facilitates the monitorg of gas reserves. The station is mounted on a staless steel plate and equipped with staless steel fittgs on the let side (optional). NPT 1/4" This gas supply panel is deployed where large amounts of acetylene are used and where the gas flow cannot be terrupted. W21.4x1/14" W21.4x1/14" Upstream pressure: 25 bar Downstream pressure, max.: approx. 1.5 bar Average switch over pressure: approx. 4 bar Reserve pressure: approx. 3 bar Flow rate: 7.5 m³/h Upstream pressure gauge: 2 gauges (4 bar) accordance EN 562 (2 contact gauges Ki 63-4/I1 optional), 1 gauge (4 bar) accordance EN 562 Downstream pressure gauge: (2.5 bar) accordance EN 562 Shut-off valve: ball valve 3/8" Workg temperature: -25 to 7 C / -13 F to 158 F Safety feature: Flashback arrestor GVA G3/8 LH Relief valve let: NPT 1/4"f Inlet: W21,8x1/14" Outlet: NPT 1/4"f, optional tube fittg (SS) BMD BMD Material B B = brass Downstream pressure = 1.5 bar /22 psi Inlet DIN* DIN, ANSI AFNOR, NBN BS 341, CGA NEN, UNI Outlet CL8 SS = with, CL6, CL8, CL1, CL12* Material Staless steel (SS) Contact gauge Ki = with Ki = with Gas type Gas C2H2 It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station, see "Accessories" chapter. * Outlet: CL6 = tube fittg for tube 6 mm, ( = with) 48

49 Propane gas panels Sgle cylder station Sgle or double cylder stations, for propane gas cylders up to 33 kg, let pressure 1-16 bar downstream pressure 5 mbar Individual parts DIN-DVGW tested Double cylder station with semi-automatic switch-over valve Low gas pressure alarm (optional) The sgle cylder station consists of a low pressure regulator, 4 mm medium pressure hose with a safety shut-off valve and a safety relief valve. The double cylder station consists of a low pressure regulator, a safety shut-off valve (connected upstream) and safety relief valve, 2 high pressure hoses with cylder connections, a support rail, semi-automatic switchover valve PN 16, the extraction is rotationally achieved. Both stations conform to the requirements of the TRF 1996 and/ or the BGV D para. 4. Upstream pressure: Downstream pressure: Flow rate: Inlet: Double cylder station: Outlet: Double cylder station: 16 bar.5 bar max. 4 kg/h Sgle cylder station: cylder connection hose Sgle cylder station: medium pressure hose hose connection tube Ø 12 mm Double cylder station fully mounted Propane hose Outlet Inlet Example configuration: sgle cylder station with contact gauges Example configuration: double cylder station with contact gauges SMD 9 SMD 9 BMD 92 Contact gauge Ki = with Ki = with 49

50 Diaphragm shut-off valves MVA 5/53 For ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure: MVA 5: 23 bar/ 33 psi MVA 53: 315 bar /45 psi Mountg Quick operation through 9 shut-off function Clearly visible open/closed position Increased lifespan through the fe adjustment of the closg pressure The diaphragm valve MVA 5 is characterized through its standg functional safety and high leak-tightness. The open/closed position on the valve is achieved through a 9 -turn of the handle (with a click to the end position). As a le shut-off a centralized high purity gas supply. As a system component high and low pressure areas. 15 The MVA 5 has 2 bore holes M6 on the bottom. Cross section Body: Diaphragm: Body seals: Leakage rate: Dimensions (w h d): Nomal width: DN 5 Workg temperature: -25 to 7 C / -13 F to 158 F Kv-value:.25 Inlet/let filter: Vacuum capable: Weight: Staless steel specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Elgiloy PCTFE < mbar l/s Helium (seats), < mbar l/s Helium (board) approx mm 1 µm mesh yes approx. 28 g Adjustment knob Spdel Diaphragm Seat seal Outlet Inlet 19 approx. 77 Filter 53 Filter MVA 5 MVA 5 MVA 53 Material BC BC = brass chrome-plated SS = staless steel Inlet CL6 BC =NPT 1/4"f CL6* CL8 CL1 CL12 BC = brass SS = staless steel Outlet CL6 BC =NPT 1/4"f CL6* CL8 CL1 CL12 BC = brass SS = staless steel Gas type Gas Please specify * Outlet: CL6 = tube fittg for tube 6 mm, ( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 5

51 Diaphragm regulatg valves MVR-A 5 G For ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure: 5 bar / 6 psi oxygen (O2): 4 bar / 725 psi Mountg The valve has 2 bore holes M6 on the bottom. Cross section Handwheel Spdel Very fe gas flow adjustment Wide flow rate range for high and low pressure applications Hardened staless steel cone for a longer life span High leak tightness through appropriate diaphragm construction Very easily purged With shut-off function (leak tightness mbar l/s Helium) The regulatg valve MVR 5 has a very good regulatg characteristic and is very fely adjustable both by greater as also by lesser flow rate values. Space savg through tegrated shut-off function, sce only one valve is required. As a system component and low pressure areas. As accessory for cylder and pot-of-use regulators for fe adjustment of the gas flow. As system element apparatus and analytical equipment. Body: Staless steel specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Body seals: hardened staless steel cone Diaphragm: Hastelloy Leakage rate: < mbar l/s Helium (seat) < mbar l/s Helium (board) Nomal width: DN 2 Dimensions (w h d): approx mm Workg temperature: -25 to 7 C / -13 F to 158 F K v -value: <.2 Filter: 1 µm mesh on let and let Vacuum capable: yes Operation: adjustment knob with approx. 1 turns Weight: approx. 28 g Inlet/Outlet: NPT 1/4"f, optional tube fittg Diaphragm Seat seal let let approx Filter Filter 53 MVR-A 5 G MVR-A 5 G Material BC BC = brass chrome-plated SS = staless steel Upstream pressure E E= 4 bar/6 psi oxygen (O2) E = 5 bar/725 psi Inlet CL6 BC =NPT 1/4"f CL6* CL8 CL1 CL12 BC = brass chrome-plated SS = staless steel Outlet CL6 BC =NPT 1/4"f CL6* CL8 CL1 CL12 BC = brass chrome-plated SS = staless steel Gas type Gas Please specify * Outlet: CL6 = tube fittg for tube 6 mm, ( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 51

52 Diaphragm shut-off valves MVA 51 G For ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure 4 bar / 6 psi Higher flow rates Leakage rate less than mbar l/sec Gas wetted surfaces are specially cleaned and diffusion tight The diaphragm valve MVA 51 G with shut-off function, enables the easy shut-off of the gas flow with the turn of an adjustment knob. Mountg 15 The valve has 2 bore holes M6 on the bottom. Dimensions The valve is particularly suitable as system component for applications low pressure areas for high gas flow. Body: Staless steel specially cleaned and electro-polished or Brass CW614 (CuZn39Pb3), specially cleaned or Brass CW614 (CuZn39Pb3) chrome-plated Body seals: Diaphragm Hastelloy C Seals: PCTFE Leakage rate: < mbar l/s He (seats), < mbar l/s He (board) Nomal width: DN 8 Kv-value:.5 Dimensions (w h d): approx mm Workg temperature: -25 to 7 C / -13 F to 158 F Weight: approx. 38 g Turns: approx. 1.5 Inlet filter: 1 µm mesh Vacuum capable: yes Inlet/Outlet: NPT 1/4"f or G3/8"f Label 1 MVR 51 G MVR 51 G Material BC B = brass - G3/8"f BC = brass chrome-plated - NPT 1/4" SS = staless steel - NPT 1/4"f SS = staless steel - G3/8"f Upstream pressure 4 4 bar / 6 psi Inlet G38F G38F = G3/8"f N14F = NPT 1/4" N14F = NPT 1/4" G38F = G3/8"f * Outlet G38F G38F = G3/8"f N14F = NPT 1/4" N14F = NPT 1/4" G38F = G3/8"f * Gas type Gas Please specify * Tube fittgs on request. 52

53 Packed regulatg valves FAV 115 V/T FAV 115 V - with tube fittg 6 mm FAV 115 V - with tube fittg 8 mm Valve with cylder connection, for corrosive gases/gas mixtures, with oxygen/synthetic air, let pressure: FAV 115V: 23 bar / 29 psi FAV 115T: 1 bar / 145 psi Housg and cylder connection made of electro-polished staless steel Regulatg cone made of hard metal Stuffg box material woven PTFE Angle formed, nomal width DN 2 These packed valves are mounted directly on the cylder valve. For the extraction and adjustment of corrosive gases from pressurised gas cylders. The cylder valve serves, for example, the constant adjustment of gases pressureless polymerisations process. Information The secure handlg of highly toxic gases absolutely requires the use of valves with metal bellows or a metal diaphragm. Where constant let pressure and precise flow control are necessary, then chose one of the pressure regulators from the GCEDruVa program. Mountg The use of hose clips is highly recommended when usg hoses. To avoid diffusion of nitrogen or helium through the hoses please consider the stallation of metal tubes or take make the necessary security precautions. Body: Staless steel specially cleaned and electro-polished Workg temperature: max. -2 to 5 C / 122 F -25 to 7 C / -4 F to 158 F Leakage rate: mbar l/s Helium, seats and board Inlet Filter: 1 µm mesh Body seals: PTFE Nomal width: DN2 Outlet: FAV 115 V: tube fittg 6 mm FAV 115 T: hose fittg 8 mm (to max. 1 bar) Cylder connection sizes : see chapter 5 FAV 115V FAV 115 V FAV 115 T Material SS SS = staless steel Upstream pressure F F = 23 bar /33 psi for FAV 115 V 1 = 1 bar for FAV 115 T Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN Outlet CL6 CL6* NO8 = with hose connection 8 mm others on request Gas type Gas Please specify (no oxygen) UNI * Outlet: CL6 = tube fittg for tube 6 mm, ( = with, NO8 = with hose connector for 8 mm other sizes upon request). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 53

54 Cylder connection valves FAV 5-36/-37 Valve with cylder connection, for ert, reactive, flammable and oxidizg gases and gas mixtures, no oxygen, purity max. 6., let pressure 5 bar / 725 psi FAV 5-36 Cylder connection valve diaphragm format Precise regulation of gas flow Hardened staless steel cone for longer life span Optimum purge conditions through mimised dead space A new generation of diaphragm valves was developed with the series MVR-A 5, which are characterized through its standg functional safety and high leak-tightness. This lay as cylder valve FAV 5 is available with or with a gauge. FAV 5-37 As cylder valve for gas cylders with a low cylder pressure, less than 5 bar, for the adjustment of the gas flow. Body: Staless steel specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Body seals: hardened metal (Staless steel), SS-cone hardened (Brass ) Diaphragm: Hastelloy, Elgiloy Leakage rate: < mbar l/s He (seats) < mbar l/s He (board) Nomal width: DN2 Kv-value: <.2 Vacuum capable: yes Filter: 1 µm on let and let Weight: approx. 5 g ( -36), 8 g ( -37) Dimensions (w h d): approx mm ( -36) approx mm ( -37) Operation: approx. 1 turns Outlet: Tube fittg 6 mm Cylder connection sizes : see chapter 5 FAV 5-36 FAV 5-36 FAV 5-37 Material BC BC = brass chrome-plated SS = staless steel Upstream pressure E E = 5 bar/72 psi Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL6 BC CL6 (standard) CL8* CL1 CL12 BC = brass chrome-plated SS = staless steel Gas type Gas Please specify (no O2) * Outlet: CL6 = tube fittg for tube 6 mm, ( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter f

55 4f Laser process gas supply Cylder pressure regulator FMD 1/13-14 For the laser gas supply with gas cylders Sgle-stage, with automatic switch over, for cylder and bundle supply. Inlet pressure 23/315 bar Outlet pressure: - 4 bar Outlet: NPT 1/4"f Pot-of-use regulator EMD 1-6 For the decompression of laser gases at the pot-of-use. Sgle-stage, brass. mounted on an alumium plate. Inlet pressure 4 bar, 6 psi (O2), 2 bar, 29 psi (N2). Downstream pressure 3 bar / 43 psi (2), 16 bar / 235 psi (N2) Inlet: Ball valve G 1/2"female Outlet: G 3/8"female Gas supply panel TDS For high pressure tank supply. Sgle-stage Inlet pressure: 33 bar Downstream pressure: 18 bar (O2), 29 bar (N2) Inlet/ Outlet: Ball valve 1"f Please note: Gas panel for unterrupted gas supply with semi-automatic switch over, for bundle These pages comprise only a limited selection of laser regulators. For the complete selection please see the separate catalogue: "Laser Gas Supply" In the ternet under: Or order the prted catalogue, which will be sent to you the mail Gas panel for 2 cylders BMD 1-39 Sgle-stage, with automatic switch over, for cylder and bundle supply. Inlet pressure 315 bar (45 psi). Inlet: Staless steel pigtail connection or flexible convaluted hose Outlet: Ball valve G 1/2"f Please note: The use of contact gauges and a signal box recommended with gas panels with semiautomatic switch over, to ensure an unterrupted gas supply 55

56 Cylder pressure regulators FMD 1/13-14 Sgle-stage, for technical gases and laser gases, let pressure 23 bar / 33 psi (FMD 1-14) or 315 bar / 45 psi (FMD 13-14), downstream pressure range - 4 bar / - 6 psi For laser process gases For high flow rates Safety gauge pursuant to EN 562 Relief valve on let The pressure reduction takes place here a sgle-stage pressure regulator with let and let gauges. The relief valve protects from over pressure. The cyclder pressure regulators are the simplest and reasonably priced solution cases where gas supply of the lasermaterial processg can be terrupted. Among other applications, this pressure regulator can be used for the itial operation of laser stallations. Body: Brass 2.42 (CuZn4Pb2) Housg: Zc alloy Zn Al3 Body seals: NBR 7 IRH Seat seals: PA 6.6 Zytel 13 Dupont Piston seals (for N 2 ): Silicon rubber 8 IRH Diaphragm (for O 2 ): EPDM Workg temperature: -4 C to 5 C, -4 F to 148 F Dimensions (w h d): approx mm Weight: approx. 1.4 kg Performance data: see chapter 5 Pressure gauge range: - 4 bar / 58 psi, bar / 745 psi - 65 bar / 95 psi Downstream pressure: - 4 bar/58 psi (N2) - 16 bar/23 psi (O2) Cylder connection sizes : see chapter 5 Inlet: manual cylder connection DIN for 3 bar/45 psi or pursuant to DIN for 2 bar /29 psi Outlet: NPT 1/4"f, optional tube fittg FMD 1-14 FMD 1-14 FMD Material B B = brass Upstream pressure F F = 23 bar/33 psi (FMD 1-14) G = 315 bar/45 psi (FMD 13-14) Downstream pressure 4 4 = - 4 bar/ 6 psi (N 2 ) 16 = - 16 bar/ 23 psi (O 2 ) Inlet DIN DIN ANSI AFNOR NBN BS 341 CGA NEN UNI Outlet CL12 = NPT1/4"f CL1 CL12* Gas type N2 Nitrogen Argon Oxygen *Outlet: (eg.: = with, CL12 = tube fittg for 12 mm, other sizes upon request). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 56

57 Gas panels TDS Sgle-stage, for high pressure tank supply, let pressure 33 bar / 48 psi, downstream pressure O2: 18 bar / 26 psi, N2: 29 bar / 42 psi For laser process gases For high flow rates For mor pressure differentials between upstream and downstream pressure level This gas panel, with control regulator and ma pressure regulator, is protected by a zc coated steel housg. It is particularly suitable for tank gas supply with a high flow rate and downstream pressures of max. 18 bar for oxygen and 29 bar for nitrogen and dicated by the downstream pressure gauge. Improper pressure levels are controlled by a relief valve, actuatg at 19/32 bar. The desired flow rate is set by way of the ball valves at the let and let. These stations deliver extreme high flow rates with constant pressure level for oxygen and nitrogen process gas and tank gas supply. Body: Brass 2.42 (CuZn4Pb2) Seat seals: EPDM Ball valve seals: PTFE Workg temperature: -2 C to 1 C / -4 to 21 F Dimensions (w h d): approx mm Gauges: RM 63-4 Flow rate: >15 Nm 3 /h N2 / 88 SCFM Performance data: see chapter 5 Pressure level: 19 bar for O2 / 275 psi 32 bar for N2 / 465 psi Downstream pressure: 18 bar O2 / 26 psi 29 bar N2 / 42 psi Inlet/Outlet: Ball valve 1"f, Option 2"female Dimensions TDS 18 TDS 18 TDS 29 Gas Oxygen Nitrogen 57

58 Gas panels BMD 1-39 Sgle-stage, for cylder or bundle supply, for technical gases and laser gases, let pressure 315 bar / 45 psi, downstream pressure - 4 bar/ 6 psi (N 2 ) or - 16 bar/ 23 psi (O 2 ) 1 Cylder connection 3 Flexible convoluted hose 4 Pressure regulator 5 Inlet gauge (KI) 6 Outlet gauge 7 Solenoid valve 9 Outlet ball shut-off valve 1 Relief valve 11 Process gas let For the supply with laser process gases Unterrupted gas supply with automatic switch over The solenoid valve guarantees maximum flow rate Acoustic and optical gas supply monitorg with contact gauges The BMD 1-39 consists of two sgle-stage pressure regulators with let gauges, the downstream pressure on this pressure regulator can be dividually adjusted left and right and monitored on the let gauge. The solenoid valve block and control unit allows for the switch over through settgs on the contact gauges to optional pressure levels. A 3/2 way direct actg solenoid valve for high purity gases prevents the back flow of gases to the empty cylder. This gas panel is used for process gases such as nitrogen as well as rare gases (Argon) from cylder or cylder packs for laser material processg. It is also used when an unterrupted process gas supply with fully automatic switch over is required. Pressure regulator Body: Brass 2.42 (CuZn4Pb2) Housg: Zc alloy Zn Al3 Body seals: NBR 7 IRH Seat seals ( for N 2 ): PA 6.6 Zytel 13 Dupont Seat seals ( for O 2 ): PA 6.6 Zytel 13 Dupont Piston sealg (for N 2 ): Silicon rubber 8 IRH Diaphragm (for O 2 ): Neoprene Ball valve seals: PTFE, chambered Workg temperature: -2 C to 5 C, -4 F F Performance data: see chapter 5 Dimensions (w h d): approx mm Weight: approx. 5.9 kg Pressure gauge range: - 4 bar, - 65 bar, - 6 psi, - 85 psi Flow rate: performance data see chapter 5 Inlet: W21.8 1/14 Outlet: Ball valve G 1/2"female Control Unit Power supply: 23 V, 5 Hz Workg temperature: to 55 C Dimensions (l w h): approx mm Weight: approx. 1.2 kg Signal lamps: yellow: active gas cylder, red: gas supply run, green: power supply OK Input keys: Manual selection gas cylder A, Manual selection gas cylder B, Acknowledge fault/ alarm BMD 1-39 Material B B = brass Downstream pressure G E = - 4 bar / 6 psi (N 2 ) D = - 16 bar /235 psi (O 2 ) Outlet V22 = with CL22* Gas type N2 Nitrogen Oxygen Argon It is necessary to have a gas specific connection to the gas supply for an efficient stallation and use of this station. See Accessories chapter cylder connection FA 5. *Outlet: CL6 = tube fittg for tube 6 mm, ( = with). Please note the "burst rate chart" when choosg the tube fittgs chapter 5. 58

59 Calibration gas measurg Excerpt of references for GCEDruVa equipment AUDI BOSCH DAIMLER CHRYSLER FORD German Automobile Club HONDA HORIBA IAV MAGNETI MARELLI NISSAN OPEL SUZUKI VDO VOLKSWAGEN Belgium Cha Germany Hungary Sh Africa Turkey GCEDruVa's Customer service Right from the start GCEDruVa supports planng engeers, operators and users, manufacturers, general enterprises and architechs offices begng with the planng phase. On the basis of many years of experience GCEDruVa gives support for selection and organization of first and second stage pressure gas supply, for tubg and tube lay, cylder stock rooms and monitorg devices. areas Research and development of combustion enges Development and production of Catalysts Development of jection systems Control units for fundamental research Support for Combustion research Ignition system development Exhaust gas measurg Pot-of-use cabet Scope of Delivery Planng Pot-of-use cabet Central gas supply Tubg systems Pot-of-use cabet with tegrated low gas signallg Central gas supply 59

60 4f Laboratory pressure regulator EMD 31 Gauge, safety model, bar and psi accordance with DIN EN 562 Inlet G1/4"f Outlet G1/4"f Inlet G3/8"f Adjustment knob decal for gas type identification accordance with DIN EN Dual colour position dication (green/red) to specify open/closed selection 9 shut-off function with flow direction dicator Outlet G1/4"f Outlet G1/4"f Mountg nut for flexible, rotatg mountg of the armature G 1/4"f G 1/4"f G 1/4"f Connections (Front view) G 3/8"f G 1/4"f Meterg with an ergonomic, plastic adjustment knob Pressure regulator with shut-off function This highly compact version of a pressure regulator combes, a very small space, pressure regulation and shut-off function of gas flow. This is achieved through a successful combation of the pressure regulator parts with few extra shut-off components. Thereby reducg the pressure regulator and shut-off valve, normally as separate components, to a mimum. The structural size achieves the mimum dimensions. With this construction the let and let can be attached and terchanged with the greatest flexibility. The use of perfected, core components of the Series 4, available sce decades, together with a few new elements ensures the performance and high quality of this construction from the begng. Modular system for maximum flexibility of configuration and scope of application The basic version is available the form of flush or surface wall mountg, bench mounted or hangg version. The use of system components from the similar series 4 further allowg for countless variations the combation possibilities with the configurations of lets and lets, which can be tailored to the customers wishes: with regulatg valve elbow and straight versions (DN5), with additional let shut-off valve ( elbow or straight form), with flow meter or with diverse wall adaptors. In this modular form this pot-of-use system is particularly compatible and suitable for all lab applications and lab furnishgs. Series specific Data* Version Sgle-stage pressure regulator with high performance values (see chapter 5). Inlet pressure 4 bar. Downstream pressure range bar / 7-15 psi, Analysis version (EMD 314) bar / psi. Material Staless steel 316L (1.444) specially cleaned and electro-polished or brass nickel-plated and chrome-plated. Seal material Seat: FKM and FFKM with staless steel, FKM and EPDM with brass. Seals: PCTFE with staless steel and PVDF with brass dependent upon gas used. Material is specified each case the. Inner parts Low-maenance, easy to service, pressure regulatg unit, with particle-filter staless steel and 5 µm mesh at let G3/8"f eg. 1µm at let G1/4"f. 6 Diaphragm Increased safety agast burst and corrosion defects with the Hastelloy diaphragm. Guaranteed leakage rates < mbar l/s Helium (board), < mbar l/s Helium (seat) Purtiy Purity and leakage rates comply with the requirements for applications with high gas purity 6.. Workg temperature -25 C to +7 C / -13 to 16 F. Inlet / Outlet connections Inlet G 3/8"f, adaptors for other connections. Outlet connection for 6 mm tube, others upon request. *Differg data of the dividual products this section are listed each case under "".

61 Laboratory pressure regulators EMD 31 Basic Body Dimensions Wall mounted with cover plate let and let behd (Version D) Wall mounted let wall side (Version W) Wall mounted with cover plate, let behd let front (Version Z) Wall mounted let wall side from top (Version P) 5 Sgle-stage, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., EMD 31: Inlet pressure 4 bar, downstream pressure.1-1 bar EMD 314 (analysis version): Inlet pressure 12 bar, Downstream pressure bar Pressure regulator with tegrated shut-off function Coloured identification of shut-off positions Highly compact form ECD-compliant Ergonomic positiong of the operational elements User-friendly system solutions for laboratory applications though optimum arrangement of components with one another Gas type specific adjustment knob identification accordg to DIN EN Analysis version optionally available The basic version of this pressure regulator with gauge cludes an tegrated quick- closg function. The gas type is dicated on the front side of the pressure regulator with the appropriate decal. The flush mounted version is mounted complete with cover, regulatg valve with shut-off function and gauge, whereby the gauge, can be rotated 9 each way dependg on the mountg orientation for readg. The wall mountg is achieved usg a wall adapter and wall mountg plate, the gas supply is brought through the wall. Further stallation versions (on mountg plates) allow for the gas supply to come from the top or the bottom. The bench mountg or the wallmounted version is simply and flexibly accomplished with the help of the same adaptor (delivered accordgly mounted). Numerous other variations are possible, see separate data sheet. This highly compact, space savg designed laboratory pot-of-use regulator is suitable for flush or surface wall mountg, for stallation on tables or a wallmounted version as well as the stallation diverse supply channels. This systems versatile configuration options cover all the customary lab applications and fits to all laboratory furnishgs. An analysis version (LAB 314) is specially designed for low pressure applications and offers extremely fe adjustment possibilities for pressure and flow rate. approx Body: Staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Gauge: safety gauge accordg to EN 562 Nomal width 5 mm, class of accuracy 2.5 Pressure gauge range: / 6 / 16 bar, - 3 / 6 bar ( 314) Dimensions (w h d): Weight: Inlet - Outlet: approx mm approx..64 kg (Basic body) G 3/8"f or G 1/4"f or NPT1/4"f G 1/4" (dependg on version) EMD 31 EMD 31 = Standard EMD 314 = Analysis version Periphery -1-1= Pressure regulator (MD) -6= MD + HP-shut-off valve -7= MD +LP-flame arrestor -8= MD +LP-MVAR -1= MD + HP-shut-off valve + LP-MVAR Material BC BC = brass SS = staless steel Upstream pressure E E= 4 bar D= 12 bar A= 1.5 bar (only C2H2) Downstream pressure 6 1.5= bar 6=.5-6 bar 1= bar Version** Surface mounted = Basic module P= Mountg plate W= with backg plate adaptor T= Bench mount H= Hangg version Flush mounted D= let and let from behd Z= Inlet from behd, let front Pressure gauge adjustment knob orientation N N= upwards E= right S= down W= left (For the flush mounted version) Inlet CL8 =with * CL8** CL1 Outlet Gas type CL1SS Gas =with * Please CL8** specify CL1 *G1/4"F, G3/8"F or NPT1/4"F (dependg on version). **CL8 = tube fittg 8 mm, material as pressure regulator. * Versions see page

62 Laboratory press regulators EMD 31 - Variations Combable with EMD 31 shut-off valves and regulatg valves with shut-off function Shut-off valve elbow design (MVA W) or -le (MVA G) EMD 31 Combation possibilities Regulatg valve elbow design (MVR-AW) or -le (MVR-AG) MVA G Wall mountg adaptor and cover rosette MVR-AW Elbow adaptor for wall mountg Wall mountg plate MVR-AG MVA W EMD 31 as bench mount (version T) EMD 31 as hangg version (version H) with pre shut-off valve MVA 4 G and let regulatg valve MVR G EMD 31 Wall mounted version (Z) with variable adjustment knob orientation with pre shut-off valve MVA 4 G and let regulatg valve MVR G EMD 31 as surface mounted (W) with wall adaptor EMD with rear wall adapter with with regulatg valve pre shut-off valve MVR G MVA G EMD 31 on plate (version P) EMD mounted on plate with regulatg valve MVR G with pre shut-off valve MVA W E N S 62 W

63 Shut-off valves MVA 4 G/W In-le or elbow form, for ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure 4 bar / 6 psi. MVA 4 G Open/close with only quarter turn, clicks to place Clearly visible open/closed position Wide range of applications due to modular format Gas type specific identification accordg to DIN Diaphragm shut-off valve The MVA 4 G is an -le version with G3/8". Inlet and let The tegrated connectg nut allows for screwg the valve on any position with only one gasket. The MVA 4 W is the elbow version with let from the side G1/4"f and let straight G3/8"m. The MVA 4 W is mounted with 2 M6 mountg screws, 25 mm apart on the backside. Mountg MVA 4 W 2 bore holes M6 are provided on the MVA 4 W for mountg. 25 These valves can be combed many ways with the components of the lab system (see overview on page 62). Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass pecially cleaned, nickel-plated and chrome-plated Diaphragm: Hastelloy Nomal width: DN 5 Leakage rate: < mbar l/s Helium (board), < mbar l/s Helium (seat) MVA 4 G Kv-value:.2 Seat seals: PCTFE Weight: approx. 6 g Inlet/Outlet: G 3/8"f G 3/8"m MVA 4 W Kv-value:.25 Seat seals: PCTFE Weight: approx. 5 g Inlet / Outlet: G 1/4"f / G 3/8"m MVA 4 G Material BC Gas type Gas MVA 4 G MVA 4 W BC = brass chrome-plated SS = staless steel Please specify 63

64 Shut-off valves MVR 4 G/W For ert, reactive, flammable and oxidizg gases and gas mixtures, purity max. 6., let pressure 4 bar / 6 psi MVR-A 4 W Very fe flow rate adjustment Shut-off function Gas type specific identification accordg to DIN Diaphragm shut-off valve These valves can be combed many ways with the numerous components of the lab system particular with the pressure regulator EMD 4. These regulatg valves are characterized by their standg operational reliability and extreme leak-tightness. They have very good regulatg characteristics and allow for exact delivery for both very small as very large amounts of gas. Mountg MVR-A 4 G Body: Staless steel specially cleaned and electro-polished or brass specially cleaned, nickel-plated and chrome-plated Diaphragm: Hastelloy Body seals: hardened staless steel cone Seat seals: PCTFE Leakage rate: < mbar l/s Helium (seat) < mbar l/s Helium (board) Vacuum capable: yes Fe meterg: the adjustment knob has approx. 1 turns Nomal width: DN 2 Kv-value: <.2 Workg temperature: -25 C to 7 C / -13 F to 158 F Weight: approx. 28 g Inlet - Outlet: MVR-A 4W: G1/4"m - G1/4"f MVR-A 4G: G1/4"f - G1/4"f 15 2 bore holes M6 are provided on the MVR-A 4 G for mountg. MVR-A 4 W MVR-A 4 W MVR-A 4 G 64 Material BC BC = brass chrome-plated SS = staless steel Gas type Gas Please specify

65 Signal boxes DGM-SK 2 /4 /6 /1 Signal box, for optical and acoustic signalg of fault reportg, 2, 4, 6 and 1-channel versions Signal box Intrsically safe barriers Available Accessories Solenoid valve control and regulator DGM-MV, relay box DGM-IT, contact gauges and operation termal DGM- AX for gas management system, mass flow controller, cylder scales, rupture disks, floater, flow switch and cable monitorg. Installation The housg is designed for wall mountg side of a ex-area. Four mountg holes are provided the back of the housg for this purpose. These can be accessed by unscrewg the cover. Optional Fax-/SMS alarm Low supply pressure monitorg with contact gauges Collective alarm for control room Fast system overview Installation side the Ex-Zone The gas management signal box DGM-SK it a fault dicatg unit and can monitor up to ten electrical circuits for deviation from the norm. An tegrated lamp and signal horn allow for testg the correct operation of the strument. If one or more alarm signals are triggered (e.g. gas failure) an acoustic (buzzg noise) and an optical signal (red LED) are emitted for each channel. The acoustic signal is acknowledged by pressg a button, the optical signal does not switch off until all malfunctions have been remedied. The strument is equipped with a collective alarm to notify a ma central office, a control unit or an external signallg device. Any equipment is possible for use as a signal transmitter as long as it has either a mechanical contact or an ductive-contact accordance with DIN NAMUR. The DGM-SK is used for all kds of alarm signallg, predomantly for monitorg gas supply or metered flow gas applications. Monitorg of gas supply can be done by controllg the upstream or downstream pressure (usg contact gauges), the weight of the bottle or through monitorg rupture disks, dependent upon model for as many as 1 cylders simultaneously. Flow-switches, floaters or mass flow controllers are suitable as signal transmitters for the monitorg of metered flow. In connection with these new IT relay stations dividual faults can be passed on by SMS or fax. For every dividual alarm you can program an dividual text or an SMS and also a separate target number. Connection load Power supply: Fuse: Note: 23 V AC, 5 Hz, 5 VA 3,15 ma slow-blow defective fuses may only be replaced by the manufacturer Inlets Signal transmitter: zero potential, mechanical contacts, itiators comply with DIN (NAMUR) Effective direction: NC (normally closed) Connection system: 2 wires Signal transmitter supply: 1 V max. through the strument, 1 ma max. (short circuit proof ) Max. load/circiut: 33 mh/ 4. µf (EEx ib IIC) 1 mh/ 3. µf (EEx ib IIB) Cabel monitorg (optional): Short circuit I> 6 ma, cable break I<8 µa Connection cross section: 2.5 mm² max. Outlet (Collective alarm) Alarm put: Contact load: 2* relay put ( 1 change over contact) max. 23 V ~, 5 Hz, 1 VA max. 48 V, 1A DGM-SK 2 DGM-SK 4 DGM-SK 6 DGM-SK 1 Power supply = 23V 5 Hz 11 = 115V 5 Hz Internal alarm equipment Signal lamp: LED green 5 mm Acoustic alarm: Piezo buzzer, f = 3.3 khz Collective alarm: via zero potential break contact Ambient conditions Ambient temperature: max. 4 C Humidity: - 95 % rel. humidity, not condensg Design Housg: Polystyrene colour similar to RAL 735 (light grey) Protection category: IP 54 Dimensions (w h d): mm Installation position: upright Cable glands: blue: 1 each of PG 9 and PG 11; grey: 1 each of PG 11 and PG 13.5 Ex-protection = with EX = with 65

66 Signal boxes DGM-SK 6-2/4 Signal box, for optical and acoustic signalg of fault reportg, 2 or 4-channel versions EX-protection Low supply pressure monitorg with contact gauges Collective alarm for control room Fast system overview The gas management signal DGM-SK 6 monitors 2 or 4 control circuits for deviation from the norm. This strument is equipped with a collective alarm to notify a ma central office, a control unit (ZLT, SPS, and dustry-pc) or an external signallg device. Signal transmitters with the effective direction NC and NO are acceptable. Also the feed les to the signal transmitters can be monitored for short circuits or cable breaks. An tegrated lamp and signal horn allow for testg the correct operation of the struments. Zero potential contacts (e.g. contact gauges, limit switch) or proximity switches accordance with NAMUR are suitable as signal transmitters the control circuits of the SK 6-4. The herently safe control circuits for the signal transmitters are galvanically separated from the power supply and suitable for the use explosion prone areas. Additional series connection units such as an Ex-isolatg switchg unit are not necessary. The alarm signal activates an optical (LED) and acoustic (buzzer) signal. A buzzer is set off for each new alarm which must be acknowledged by pressg a button (acoustical early warng). The optical signal does not switch off until all malfunctions have been remedied. The SK 6 is used for all kds of alarm signallg, predomantly for monitorg gas supply or metered flow gas applications. Monitorg of gas supply can be done by controllg the upstream or downstream pressure (usg contact gauges), the weight of the bottle or through monitorg rupture disks, dependent upon model as many as 4 channels can be monitored simultaneously. Flow-switches, floaters or mass flow controllers are suitable as signal transmitters for the monitorg of metered flow. The Ex-protection allows for the operation of this strument even explosion prone rooms. Available Accessories Solenoid valve control and regulator DGM- MV, contact gauges, mass flow controller, cylder scales, rupture disks, floater, flow switch and cable monitorg. Installation The housg is designed for wall mountg. Four mountg holes are provided the back of the housg for this purpose. These can be accessed by unscrewg the cover. Connection load Power supply: 23 V AC, 5 Hz, 5 VA Fuse: 32 ma T, Wickmann 1921 Note: defective fuses may only be replaced by the manufacturer Inlets Signal transmitter: zero potential, mechanical contacts, itiators comply with DIN (NAMUR) Effective direction: operatg current or closed circuit current prciple e.g. closed or open mechanical contact Connection system: 2 wires Signal transmitter supply: 1 V max. through the strument, 1 ma max. (short circuit proof ) Max. load/circiut: 41 mh / 3. µf (EEx ib IIC) 1 mh / 2 µf (EEx ib IIB) Cabel monitorg (optional): Short circuit I> 6 ma, cable break I<8 µa Ex protection s of protection: Outlet (Collective alarm) Alarm put: Contact load: Internal alarm equipment Signal lamp: Acoustic alarm: Collective alarm: II G, EEx ia IIB, EEx ia IIC, EEx ib IIB, EEx ib IIC relay put ( 1 change over contact) max. 23 V ~, 5 Hz, 1 VA, max. 48 V, 1A LED red 4 mm Piezo buzzer, 3.3 khz via zero potential break contact Ambient conditions Ambient temperature: max. 4 C Humidity: - 95 % rel. humidity, not condensg DGM-SK 6-4 DGM-SK 6-4 DGM- SK Power supply = 23V 5 Hz 11 = 115V 5 Hz Design Housg: Polystyrene, RAL 735 Protection category: IP 54 Dimensions (w h d): mm Installation position: upright, side the Ex area! Cable glands: blue: 1 each of PG 9 and PG 11 grey: 1 each of PG 11 and PG 13.5 EX protection: applicable operatg material compliance with EN 514 and EN 52 (1977 +A1-A5) Ex -protection = with Ex = with

67 Solenoid valves DGM MV-5 /-1 Soleniod valve control and regulation Accesories Signal box DGM-SK, relay box DGM IT and operation termal DGM-AX for gas management system, mass flow controller, cylder scales, rupture disks, floater, flow switch and cable monitorg. Installation The housg of the solenoid valve control is designed for wall mountg. Four mountg holes are provided the back of the housg for this purpose. These can be accessed by unscrewg the cover. Operates 5/1 solenoid valves On-Off by means of a key operated switch Emergency shutdown function and collective actuation Collective alarm for the control room Increased plant security Improved user-friendless Fast system overview Simple stallation and operation The solenoid valve control is equipped with five/ten put channels which make it possible to control and monitor solenoid valves. Furthermore there is an put channel for emergency shutdown and two zero potential signals for a higher signal such as DDC, PLC. As soon as voltage is applied to the solenoid valve control the green operatg LED lights up and signals that it is operational. The MV (solenoid valves) are activated usg the key switch On or deactivated usg the key switch Off. If the emergency shutdown is activated, all solenoid valves are switched off and the red emergency shutdown LED flashes. In addition an acoustic signal is emitted which can be reset usg the Reset button. The solenoid valve control MV-5/MV-1 is a control unit which controls and regulates solenoid valves on dividual pressure cylders and multiple cylder bundles. The MV-5/MV-1 has been constructed to be fail-safe usg state-of-the-art technology and takes to account the relevant regulations and EC guideles. The solenoid valve control MV-5/MV-1 is used to actuate solenoid valves for gas cylder stations and to monitor their functional capability. In the case of a malfunction of any solenoid valve the operator is notified both optically and acoustically on the control unit. Power supply: 23 V AC. 5 Hz, 5 VA Fuse: 3,15 A slow-blow solenoid valve put; 5 * relay put with with 1 fe fuse protection each Signal put: 2 * relay put (1 change-over contact) Max. contact load AC: 23 V ~, 5 Hz, 1 VA Max. contact load DC: 48 V, 1A Signal lamp: LED red, green 5 mm Acoustic alarm: Piezo buzzer, f = 3.3 khz Ambient temperature: 4 C max. Humidity: 95 % relative humidity, not condensg Housg: Polystyrene, colour similar to RAL 735 (light grey) Protection category: IP 54 Dimensions: mm (w h l) Installation position: upright, side the Ex-area Connection cross section: 2.5 mm² max. Cable glands: 13 each PG11 DGM MV 5 DGM MV 5 DGM MV 1 67

68 Gas monitorg Software GasCom Software for control and automated supervision of gas supply and gas stock GasCom, ma screen GasCom, stock control and pressure levels, status displays of switchg stations, itiatg of purge cycles, emergency shut-offs Visualisg of system status Automated control processes Gas stock management Fault and cost reduction Statistic and archive functions Flexible adaptation of the software to the customer s processes Realisation of customer specified functions The GasCom serves monitorg the many functions of a high purity gas supply system and comes with an tegrated gas management module cludg cylder storage management allowg for tighter cost control. It is creasgly important to deliver coherent and customer oriented gas supply concepts to satisfy the risg cost controls and effective work schedulg. An automation concept compatible with high-purity gas supply is a fundamental component of this. The GCEDruVa GasCom software leaves nothg to be desired. Functions Visualisg of system data Display of pressure data System monitorg GAS MONITORING: Sensor monitorg of cylder, les and extraction pressures and consumption, pressures at dividual connection pots, current certificate data, status display, fault and warng log files (viewable onle via an ternet browser) dividual low supply pressure alarm for each gas le with optional pressure range Pressure testg with analysis for dividual areas Integration of supply panels and/or gas supply racks Remote Control Password protected dialog for flexible access right assignment three stages: user, manager, admistrator Automation of control processes Storage of gas cylder data for each station Generatg automated order suggestions order process coupled to low gas supply warngs Event triggered s Triggerg of gas equipment specific functions Fault and cost reduction Mimisg of downtime due to "over seen" empty gas cylders Prevention of double entry mistakes (e.g. gas certificate data) through telligent terfaces Archive function and statistical analysis Where was each gas cylder connected and at what time? Loggg of events and measured data Variable loggg tervals Automatic recordg of pressure the log data Automatic recordg of all triggered actions the log data Automatic savg of fault and system-warngs the log data Automated documentation for quality control Savg and documentation of cylder certificates data via lk-up with professional SQL-data banks Gas consumption measurg GasCom, graphic display of cylder pressure with alarm functions and low supply pressure displays 68

69 System requirements Standard PC, 2 GHz, 512 MB memory, Wdows XP Expandability accordg to system requirements Langauge choices German / English Order formation Please contact GCEDruVa for further formation GasCom, monitorg the consumption and system leak tightness Location-dependent monitorg through the Internet or Intranet, remote diagnostics of the central gas supply, archivg of system data, order triggerg 69

70 GSPS Gas safety protection systems Control Unit Surface mounted housg:abs plastic (UL 94 HB) white Dimensions: mm (W/H/L) Voltage: 23 V / 5 Hz Operation: Foil-keypad with key switch Display: Text display 2 4 characters, illumated background Outlet: zero-potential contact for collective fault reportg Cable feed: From bottom via PG fittg Pressure transducer Materials: housg: staless steel 1.435, Trenn diaphragm: Ceramic Al2O3, Griffrg: Dural, Seal: EPDM Inlet: 16 bar Outlet: 4 2 ma / 2 conductor Voltage: V DC, V DC (EX version) Protection class: IP 67, Ex protection II 1 G EEX ia lic T 4/4 Electrical connection Plug M 12 1 (4 pole) Mech. connection: G1/4 EN 837-1/-3 Valves Nomal width: DN.5 / DN 1 Ambiant temperature.: -3 C to +6 C Materials: Brass (valve body), nickel-plated Brass (valve body) Staless steel, (valve body) Diaphragm: EPDM (CrNi), NBR (Brass), Viton (SS) Connection: G3/8 side thread Inside cleang: Free of oil and grease (US- cleang GCE-spec ) Power supply/ Protection class: 23V / 5 6Hz / IP 65 EEX m II T4 Electrical connection: power socket DN 4365 with rectifier IP65 sealed connection cable L = 3.m (EX-version) Gas safety protection system, for the monitorg and safeguardg of supply systems for non corrosive, high purity gases and acetylene Closed-position monitorg of all downstream pot-of-use armatures durg start-up Monitorg of all downstream supply networks for pipe breakage or damage durg operation Monitorg of all downstream supply networks and unwanted pressure crease durg operation System checks for pressure drop after workg hours Integrated data storage for fault analysis and operational statistics Emergency shut-off Self testg of the GSPS In effect the device provides the followg functions: durg the start up and times of operation the downstream pipe network is monitored for gas leakage, tube breakage and damage. At the same time the system is contuously tested for pressure crease (e.g. pressure regulator, valve defect). Air holes, or rather, downstream pressure deviations are therefore identified immediately. The signal box, with tegrated data storage, saves a history of operations. Makg statistics available for safety purposes. Personnel endangerment is prevented through monitorg any cident of system failure and automatic emergency shut-down (tegration the central security system of the buildgs management). After workg hours the pressure consistency is contually tested and if necessary an automatic shut-off of leaky systems is assured. The GSPS valve unit can be room or floor based or centrally arranged. To conform to the safety concept of the operator as well as the size of the stallation. Pursuant to the current pressure equipment guideles, the operator of the equipment is responsible for the correct operation and tightness, as well as the operator s safety. The GSPS fulfils not only monitorg and safety functions accordance with the prevailg norms and safety regulations but also raises, through the extensive functions, the safety of the operation. Thus the GSPS is of particular importance, notably for the use with toxic and flammable gases (e.g.: C 2 H 2 ; H 2 ; O 2 ) central gas supply equipment. Leakage are practically ruled by contuous monitorg durg and side the times of operation. The time and effort for matenance and testg is through early warng, realised this way, system faults are reduced to a mimum. GSPS Connetion 1 1 = DN 1, 3/8"f 15 = DN 15, 1/2"f 2 = DN 2, 3/4"f 25 = DN 25, 1"f Material MV MV = brass Ni/Cr M = brass E = staless steel Operational pressure = max 12 bar / 175 psi 15 = max. 1.5 bar /22 psi (Acetylene) 2 = max..2 bar / 3 psi (Noble gas) Ex. Protection EEX EEX = for use EX protected areas KA = proctection class IP 65 GSPS-SK Control unit Circuits CU 1 1 = Control unit sgle channel 2 = Control unit dual channel EEX = EX channel, for use of the valve combonation EX area 7

71 Safety cylder cabets Security cabets, accordance with norm DIN EN , for 1 to 4 5-liter-cylders Installation workrooms Highest possible fire-protection accordance with type class G9 Flexible cylder brackets for 1L and 5L cylder Integrated air extraction Flexible positiong of gas panels Additional lead-thoughs for sensors, cables etc. Self-sealg case of fire Safety cabets, type tested, are manufactured multiple wall constructions of steel plates with embedded fire protection plates of certified, quality-controlled sulatg material. Mountg rails for the armatures, cylder brackets, etc. are cluded delivery. The flexible terior fittgs allow for the deployment of all standard gas cylders. In case of fire, the cabet contents poses no further danger and makes no contribution to the spread of fire, durg a defed period. The cabet forms a contament of the protection area around the pressure gas cylders accordance with TRG 28. Integrated let and extraction opengs close automatically the case of fire. The identification/labellg comply with ISO Durg stallation of the cabets there are construction requirements to be observed: 1-times air exchange is necessary for flammable and oxidizg gases and 12-times air exchange for toxic gases. The pressure drop should not be more then maximum 15 Pa. Local potential equalization should be observed. For secure storage of gas cylders when: gas cylders need to stay the workroom even after shut-down time, it is not possible to realise the necessary protection area (acc. TRG) for lack of space, but contuous gas supply is essential, and/or short pipework is necessary. SC 6 SC 9 SC 12 Outside dimentions (W D H) mm mm mm 71

72 Protective cylder cabets Sheet steel cabet for door gas cylder storage, for liter cylders. In accordance with TRG 28 Corrosion proof steel sheet housg for use doors Height adjustable cylder brackets for 1L and 5L cylder Flexible armature mountgs Doors with air vents top and bottom Grooved sheet metal floor Inspection wdow available as accessory Sheet steel cabet are constructed as a sgle-walled structure with complete galvanized and plastic-coated, structured surface, offer protection from the effects of weather and unauthorised use. Ventilation accordance with TRG is found at the bottom of the doors and the back wall. Connection to the on-site ventilation (NW 75) is prepared. Included delivery is mountg rails for the armatures, cylder bracket. Available on request are: fixed or hged spection wdows, additional shelvg, documentation pouch, etc. the flexible terior fittgs allow for the storage of all standard gas cylders. For the safe housg of gas cylders side areas. Outside dimentions (W D H) Cylder max. OD mm 1-2 (5l) OD mm 1-4 (5l) 72

73 Cylder pressure regulators FMD 5-14 IP Sgle-stage, to crease gas purity to mimum 6., let pressure 23 bar / 33 psi, downstream pressure range.2-6 bar / 3-85 psi With tegrated filterelement Diaphragm regulator The FMD 5-14 IP consists of a cylder connection, pressure regulator, let and let gauges, relief valve, let connection and tegrated, replaceable filter element, which the creases the gas purity. The TÜV-certified, diffusion resistant filter offers high cleang capacity, universal application and long life-span. The need for a replacement is dicated good time and clearly visible by way of discolouration of the dicator. The FMD 5-14 IP with filter element is always deployed where gas purity must be higher then 6. and cost-effective, optimum analysis results are wished for. Pressure regulator Body: staless steel 316L (1.444) specially cleaned and electro-polished or brass CW614 (CuZn39Pb3) specially cleaned, nickel-plated and chrome-plated Seat seals: PCTFE Seals: PCTFE, PVDF (Brass) Relief valve seat seals: FKM, (EPDM, FFKM)*, EPDM, (FKM)* Pressure gauge range: -1-1 bar ( psi), bar ( - 45 psi) Basic design aspects: see page 13 Weight: approx. 2.8 kg Dimensions (w h d): approx mm *upon request Performance values of Filters M a x.fl o w H 2 O Cap. O 2 Hydrocarb. Filtration (l/m) (gr) (ml) (gr) approx. life span GC-Moisture Moisture > 3 years GC-Oxygen Oxygen 25 2 > 3 years GC-Hydroc. Hydrocarbons (as n-butane) > 3 years GC-Combo. Moisture + Oxygen (as n-butane) > 2 years GC-Triple Moisture + Oxygen (as n-butane) > 2 years + Hydrocarb. s H 2 O O 2 Hydrocarb. Filtration (gr) (gr) Flow rate approx. Life span GC-Moisture Moisture Resonator Laser Gas > 1 year GC-Oxygen Oxygen Resonator Laser Gas > 1 year GC-Hydroc. Hydrocarbons Resonator Laser Gas > 1 year GC-Triple Moisture +Oxygen Resonator Laser Gas (as n-butane) >.5 years + Hydrocarb. regulator FMD 5-14 IP FMD 5-14 IP Material Upstream pressure BC F BC = brass F = 23 bar chrome-plated /33 psi SS = staless steel steelsteel Downstream pressure 6 6 =.5-6 bar / 7-85 psi Inlet DIN DIN, ANSI, NEN, AFNOR, NBN BS 341, CGA, UNI Outlet CL6 CL6, CL8** CL 1/8", CL 1/4", NO6 Gas type Gas Please specify ** Outlet: CL6 = tube fittg for tube 6 mm, NO6 = hose connector for hose 6 mm side diameter. Please note the "burst rate chart" when choosg the tube fittgs chapter 5 73

74 Inle Filter CO Inle filter, for applicationens the chromatography, for laser resonator gases and other high purity gases, let pressure 11 bar / 16 psi Inle gas purifier with dicator Large number of adsorbent agents/combations are possible Matenance of the gas purity even durg the filter replacement Super Clean Filter atta mimum purity of the gases The filter are metal and glass (with dicator) Brass or staless steel connections (1/4 or 1/8 ) available TÜV-tested under laboratory conditions The Super-Clean gas filter is diffusion tested, glass/metal version and purifies gases with a flow rate of max. 12 l/m dependent of the let quality, from hydrocarbons, oxygen and moisture (all with dicators) to a gas purity higher than 6.. Available with or with visual display. Performance values of filters Filtration Used H 2 O Cap. O 2 Hydrocarb. approx. life span for (gr) (ml) (gr) GC-Moisture Moisture ITG*: He, H 2, air > 3 years GC-Oxygen Oxygen ITG > 3 years GC-Hydrocarb.. Hydrocarb. ITG*: He, H 2, air (as n-butane) > 3 years GC-Combo. Moisture + Hydrocarb. ITG*: He, H 2, air 1-18 (as n-butane) > 2 years GC-Triple Moisture + Oxygen ITG* (as n-butane) > 2 years + Hydrocarb. *ITG = Inert carrier gas Super-Clean gas filter glass/metal model for laser gases such as helium, oxygen and carbon dioxide, to protect the resonator as well as the high performance, top-quality laser equipment. Super-Clean gas filter glass/metal model purifies die sensitive carrier gases and burner gases from gas chromatography, carrier gas for GC/MS and LC/MS system from hydrocarbons, oxygen and moisture (all with dicators). Available with or with visual display. Gas purity at let: > 6. Max. let pressure: 11 bar (16 psi) Inlet/let: Tube fittg 1/8, on request 1/4 Workg temperature: -4 C to 65 C Max. Flow rate: 12 l/m Dimensions (l d): approx mm Art.-Nr. CO11 CO12 CO13 CO14 CO15 CO16 CO151 CO161 CO141 CO22 CO211 CO21 CO21 CO32 CO31 CO33 74 Inle Filter - Staless steel with Indicator Filter for Moisture Filter for Oxygen Filter for Hydrocarbons Combation filter : Oxygen - Moisture Triple filter : Oxygen - Moisture - Hydrocarbons gas spec. (He) Triple filter : Oxygen / Moisture / Hydrocarbons Inle Filter - Glass with Indicator Triple-dicator : Oxygen / Moisture / Hydrocarbons gas spec. (He) dicator Oxygen/Moisture/Hydrocarbons dicator Oxygen/Moisture for ICP Inle Filter Parts Click-On Inle Super Clean connection 1/8"Brass (2x) Click-On Inle Super Clean connection 1/8 SS (2x) Click-On Inle Super Clean connection 1/4"Brass (2x) Click-On Inle Super Clean connection 1/4 SS (2x) Wall mountg accessories (4/pack) Replacement special O-rgs for Click-On connection ; 1/packet Special connection for 1/4 Click-On connection

75 Filter cartridges for laser-resonator gases RES Filter unit for laser resonator gases such as N2, He, CO2 let pressure 11 bar / 16 psi, to improve gas purity, at least to 6. Preserves the high performance of lasers Mimises matenance and disruption costs Simultaneous cleang of hydrocarbons, oxygen and moisture. Quick and easy replacement durg operation Early visual saturation warng protects for malfunction Inert and diffusion tight versions Filter units metal or glass versions, diffusion tight mounted on a plate. The filter can be replaced durg operation seconds with fluencg the technical or analytical performance data any way. Filter cartridges for laser-resonator gases Raises the productivity from lasers through the mimisg of down time and malfunctions, as well as repair and matenance costs. Inlet/let: Tube fittg 1/8, on request 1/4 Workg temperature: -4 to 65 C Max. flow rate: 7 l / m Residual impurities: <.1 ppm Dimensions filter: approx mm Dimensions base plate: approx. 8 1 mm s H2O O2 Hydrocarb. Filtration (gr) (gr) Flow rate approx. life span GC-Moisture Moisture Resonator Laser Gas > 1 Year GC-Oxygen Oxygen Resonator Laser Gas > 1 Year GC-Hydrocarb. Hydrocarb. Resonator Laser Gas > 1 Year GC-Triple Moisture + Oxygen Resonator Laser Gas (as n-butane) >.5 Years + Hydrocarb. Art.-Nr. RES1 RES3 on request Base plate for Super Clean gas filter with 1/4"brass-connections Base plate for 1 filter (for premix gas) Base plate for 3 filters (for oxygen - helium - carbon dioxide) Special : additional charge for staless steel base plate connection : 2% of base plate Super Clean gas filter cartridges with combation of adsorber and dicator RES31 Oxygen - Moisture - Hydrocarbons RES33 Oxygen - Moisture - Hydrocarbon bundels with 3 Parts for base plate B5 Wall mountg kit (1 and 3) B11 Replacement O-rg set for base plate (1+1) B12 Replacement tube fittg for base plate (3 2 for let and let) ; brass - 1/4 B122 Replacement tube fittg for base plate (3 2 for let and let) ; staless steel - 1/4 B13 Replacement cover for base plate; complete set of 2, c. O-rg 75

76 Filter-sets FS Filter-set, for pure gases, for high flow rates, let pressure 11 bar / 16 psi, to improve gas purity, at least to 6. Only 2 filters needed for hydrocarbon-filterg LC/MS Quick and easy replacement durg operation Inert and diffusion tight versions Early visual saturation warng Filter units metal or glass versions, diffusion tight mounted on a plate. The filter can be replaced durg operation seconds with fluencg the technical or analytical performance data any way. Cleans sensitive nitrogen generator gases the LC/MS-Systems from hydrocarbons to a purity of > 6. ( %). Super Clean combonation filter-set for high flow rate Raises the productivity from high performance analysis equipment through the mimisg of down time and malfunctions, as well as repair and matenance costs. Inlet /Outlet : Brass tube fittg 1/4 Workg temperature: -4 C to 65 C Dimensions filter: 29 mm 4 mm Dimensions 1 base plate: 8 1 mm Filtration Max. Flow H 2 O O 2 Hydrocarb. approx. life span (l/m) (gr) (ml) (gr) GC-H 2 O Moisture Reson. Laser Gas > 2 Years GC-Oxygen Oxygen Reson. Laser Gas > 2 Years GC-CHn CHn Reson. Laser Gas > 2 Years LC-CHn CHn Reson. Laser Gas >.4 Years GC-Combo. Moisture + Oxygen Reson. Laser Gas n-butane > 1.5 Years GC-Triple Moisture + Oxygen n-butane > 1 Year +CHn. Art.-Nr. App. Base plate B1 GC Base plate for 1 filter B2 GC Base plate for 2 filter B21 LC Base plate- higher flow rate - for 2 filters (N2-filtration) B3 GC Base plate for 3 filter B4 GC Base plate for 4 filter Filter F11 GC Filter, H2O, standard, higher flow rate, with dicator F12 GC Filter, O2, standard, higher flow rate, with dicator F13 GC Hydrocarbons filter, standard, higher flow rate, with dicator F14 GC Hydrocarbons filter, standard, higher flow rate, with dicator F73 GC 3-filter set (Triple + 2x Hydrocarbons/moisture combo) F74 GC 4-filter set (Standard: oxygen, moisture + 2x charcoal) F72 LC 2-filter set (Hydrocarbons 2x for LC-MS: N2 filtration) - higher flow rate: with dicator F722 LC 2-filter set (Hydrocarbons 2x for LC-MS : N2 filtration) - higher flow rate: with dicator F721 LC Special moisture filter; 2er Set, higher flow rate Filter cartridges with combation of adsorbents F31 GC Filter, triple (O2/moisture/hydrocarbons); carrier gas filtration for FID - ECD - NPD F32 GC Filter, triple: gas spec. He (O2/moisture/hydrocarbons) GC-MS F21 GC Filter, combo, higher flow rate, (hydrocarbons/moisture); burner gas application Base plate + cartridge combed with filter adsorbers B14 GC FID KIT for 4 standard filter, high capacity O2, moisture, 2x hydrocarbons B13 GC FID KIT for 3 filter/base plate: Triple + 2x combo filter (hydrocarbons/moisture) B111 GC MS KIT for He (gas spec.) ;1 filter/base plate, triple set (O2/moisture/hydrocarbons) B11 GC MS, ECD-, FID-, NPD-carrier gas KIT for 1 filter/base plate, triple set (O2/moisture/hydrocarbons) B12 GC Carrier gas KIT for FID, 2 pos. for air & H2 (combo set: 2x hydrocarbons/moisture) B121 LC MS KIT for 2 filter/base plate (2x hydrocarbons: N2 filtration) - higher flow rate!!: with dicator B122 High flow rate special moisture filter KIT for 2 filter/base plate GC= gas-chromatography, LC = liquid-chromatography 76

77 Gas preheaters LRX 5, for preheatg of ert and non-corrosive gases, not for flammable gases or oxygen, let pressure max. 23 bar/ 33 psi High performance for gases and liquids Electric protector IP66 (EN 6947) The LRX is a high performance preheatg appliance for the central gas supply. It is delivered fully mounted with 1m cable (3 1.5 mm 2 ) and safety power supply plug. The resistor unit is replaceable ( the factory only) with a protective casg of staless steel. The preheatg appliance LRX is used to raise the temperature from gases before their entrance the pressure regulator and to avoid freezg of valves or followg equipment. It can also be used to vaporise liquid gases and particular for use with carbon dioxide, argon and nitrous oxide, as well as with gas mixtures of non-flammable gases which conta CO 2 or argon. Power supply: 23 V AC / 5 Hz, 5 W Protection category: IP 66 (acc. DIN 6947) Connection: 1 m cable (3x1.5 mm²) Outlet temperature: 6 C / 14 F Max. flow rate: at higher then 1 C / 5 F: CO 2 : 1 m³/h / 5.9 SCFM Argon: 15 m³/h / 8.8 SCFM Temperature limit: 98 C Housg: Brass + copper-plated tube Ø 5 8 (5 W) Dimensions (w h l): approx mm Weight: approx. 2. kg Inlet/let: M GVW 2, for oxygen and ert gases, let pressure max.315 bar / 45 psi High efficiency With the safety protection "Equipment as technical work appliance" accordance with the Equipment and product safety regulation (GPSG) The GVW 25 is delivered with cable cludg safety power supply plug. To preheat oxygen and ert gases at high pressures. Power supply: 23 V - 5 Hz, 2 W Inlet/let: accor. with DIN 477 and CEN Connection: 2 m cable Protection category: IP 44 Size: approx. 15 Ø9 mm Weight: approx. 2 kg Inlet/let: NPT 1/4"f Temperature limit: 8 C +/- 5 C Temperature: 4 C +/- 3 C Inlet Gas LRX 5 GVW 25 DIN ANSI AFNOR BS341 CGA NEN Please specify 77

78 Cylder scale Electronic scales, for the level meterg of gas cylders, with alarm put for low supply pressure alarm Cylder scales Display unit Very flat construction Meterg range to 135 kg.1 % accuracy and high temperature resistance Fulfils the highest EMV requirements High protection class IP 65 for door use and high humidity 3 alarm puts on display unit These electronic scales are delivered together with display unit and connection cable. The dicatg device offers 3 alarm puts to the display unit for the low supply pressure alarm. For door or door use gas cabets. The flat design of these scales allows for the stallation even under spatially restricted conditions. The high protection class allows for deployment even where heavy condensation occurs. The scales fulfil the highest EMV requirements to guarantee a safe, fault-free and exact operation. Scales Measurg range : 27 / 45 / 136 kg - 6 / 1 / 3 lbs Overrange limit: 115/ 13 / 34 kg Sensor material, housg: Chrome nickel steel Workg temperature: -15 to 5 C (compensated temperature range) Accuracy: <.1 % of range Nonlearity: <.5 % of range EX-protection: ATEX, category 3G, EEx na/nl II C T4 /T5/T6 X Protection class: IP 65(NEMA 4) accord. to IEC Dielectric strength: 5 DC V Auxiliary power: 15-3 DC V Max. put: < 3 ma Signal put: ma, 2-wire Display Housg: Polycarbonate, black Dimensions: approx mm Display size: mm Protection class: IP 66 Weight: approx. 3 g Alarm lets : switchg put Switchg behavior: break cutter and shutter, adjustable with keyboard Power ratg: 23 V AC, 3 A Power consumption: 1 VA Workg temperature: - 5 C Auxiliary power: AC 23 V 5/6 Hz 78

79 Contact gauges KI 5 - NPT 1/4" Contact gauge with ductive contact (KI), for visual and acoustic warng of low gas supply pressure and to monitor the cylder pressures; for ert, combustible, oxidizg and corrosive gases and gas mixtures, nomal pressure maximum 23 bar Construction conforms to safety regulations EN837-1 Switchg pot is freely adjustable marked area (45 ) Pressure display at location and signal transmission for recordg measured data Ex-protection is possible conjunction with correspondg signal box These pressure measurg struments have a robust chrome nickel steel/cooper-zc-alloy housg accordance with DIN When the gas cylder is empty and by skg cylder pressure an ductive contact switch is activated. The switch pot, i.e. the pressure level at which the signal should be triggered is freely adjustable with a sector of 45 (at 315 bar type e.g. 38 bar). To set the switch pot the pressure level markg is simply adjusted to the desired switch pot. Panel and manifolds can be fitted with contact gauges as an optional. Contact gauges combe the advantages of a local display with the demand for an electric signal transmission. This allows for - conjunction with special signal boxes - the optical and acoustic warng signal by low gas supply pressure or the monitorg of the le pressure with freely adjustable threshold. Notice ab electrical connections The polarity must be taken to consideration when connectg as the ductive contact is an active electronic component, The KI 5 can only be operated with a special amplifier. Suitable for operation are: Signal boxes DGM-SK 6 2/4/6/1 Ex *, switch amplifier WE 77/Ex *. * The deployment of contact gauges ex-zone 1 is possible with these struments. When connectg the contact gauges to an existg fault alarm system it is important to check, the technical manual, if the operation of NAMUR-Initiators is possible. In case of doubt please contact the manufacturer of your equipment Measurg element: Bourbon tube Diameter: 5 mm Design: Chemical-safety version DIN 1663 Housg: CrNi-steel/copper-zc-alloy Measurg element: CrNi-steel , circular form/copper-zk-alloy Inspection glass: Polycarbonate Accuracy: Class 2.5 (DIN 165) Wrench size: 14 mm Nomal pressure: 23 bar Display range: see gauge scale Threshold: Freely adjustable marked range (45 of the display range from p = origatg) Gas suitability: All gases Contact: ductive slit sensor ( accordance with NAMUR) Workg temperature: ambiant: -25 C to +7 C measurg medium maximum +1 C Protection class: II 2 G EEx ia IIC T6, PTB 99 ATEX 2219 X Switchg hysteresis: +/- 5 % (SEW) Control behavior: Contact type 1 (I1), contact of low impedance with creasg pressure Dimensions (Ø d h): mm Connection: NPT 1/4"m side thread Art.-Nr. /Contact- Material Display range (bar) Display range (psi) H H H H KI / i1 KI / i1 KI 5-4 / i1 KI 5-4 / i1 BC SS BC SS

80 Contact gauges KI 63, KR 63 - NPT 1/4" Contact gauge, with ductive contact (KI) or mechanical reed contact (KR), for visual and acoustic warng of low gas supply pressure, to monitor the le pressure, nomal pressure maximal 2 bar Construction conforms to safety regulations the BG- chemical dustry Switchg pot freely adjustable One or two switchg pot models Pressure display and signal transmission for recordg measured data Ex-protection is possible conjunction with correspondg signal box SK 6 These pressure measurg struments have a robust chrome nickel steel housg safety version accordance with DIN 166. When the gas cylder nears empty and by skg cylder pressure an ductive contact switch is activated (KI 63) or respectively a mechanical reed contact (KR 63). The switch pot, i.e. the pressure level at which the signal should be triggered, is freely adjustable. Both the gauge KI 63 as well as KR 63 are available with one or two switch pots and with different contact types. To set the switch pot the pressure level markg is adjusted by turng the beyonetrg to the left and removg the viewg glass. The desired value for the switchg pot is obtaed by adjustg the red markg on the side scale edge. Afterwards the viewg glass is replaced usg the bayonet rg. Measurg element: Bourbon tube Diameter: 63 mm Design: Chemical-safety version Material: Housg: SS 1.431, parts contact with the measurg medium: SS Accuracy: Class 1.6 Workg temperature: -25 C to +7 C /-13 F to 158 F Display range: see gauge scale Threshold: Freely adjustable over the whole scale range Gas suitability: All gases Connection: NPT 1/4"m or VCR 1/4"f KI 63 Contact: ductive contact accord. to NAMUR Connection: also G 1/4"m for Acetylene: KI 63-4 I1 Protection class: II 2 G EEx ia IIC T6, PTB 99 ATEX 2219 X Switchg hysteresis : max 2.5% Control behavior : Contact type 1 (I1), contact of low impedance with creasg pressure Contact type 2 (I2), contact of high impedance with creasg pressure Dimensions (Ø d h): mm KR 63 Contact: Reed contact, magnet. actuated ert gas contact Applied load: 1 W / 1 V /.5 A Switchg hysteresis: max 2.5% Control behavior KR 63: Contact type 1 (R1), contact is terupted by decreasg pressure Contact type 2 (R2), Contact is terupted by creasg pressure Mium switchg marg K1/K2 (KR 63-2): 35% of the display range Dimensions (Ø d h): mm Display range Art.-Nr. / contact type Material bar psi H KI / i2 SS ,5 22 H KI 63-1 / i1 SS H KI / i1 SS H28981 KR / r2 SS ,5 22 H KR 63-1 / r1 SS H KR / r1 SS

81 Safety gauges G ¼ With G1/4 m connection, accuracy class 2.5 Art.-Nr. Material Display range bar psi H RM G Brass / NI-CR H RM G SS H RM G Brass / NI-CR H RM G SS H RM 5-6 G Brass / NI-CR H RM 5-6 G SS H RM 5-16 G Brass / NI-CR H RM 5-16 G SS H RM G Brass / NI-CR H RM G SS H RM G Brass / NI-CR H RM G SS H RM 5-6 G Brass / NI-CR H RM 5-6 G SS H RM 5-1 G Brass / NI-CR H RM 5-1 G SS H RM 5-16 G Brass / NI-CR H RM 5-16 G SS Gauge with let at 6 o'clock, other configurations on request! Safety gauges RM 5, NPT ¼ With let below, accuracy class 2.5 Art.-Nr. Material Display range bar psi H RM NPT Brass / NI-CR H RM NPT SS H RM 5-5 NPT Brass / NI-CR H RM 5-5 NPT SS H RM 5-1 NPT Brass / NI-CR H RM 5-1 NPT SS H RM 5-18 NPT Brass / NI-CR H RM 5-18 NPT SS H RM 5-25 NPT Brass / NI-CR H RM 5-25 NPT SS H RM 5-8 NPT Brass / NI-CR H RM 5-8 NPT SS H RM NPT Brass / NI-CR H RM NPT SS H RM 5-4 NPT Brass / NI-CR 4 58 H RM 5-4 NPT SS safety gauge Accuracy classes: 2.5 / 1.6, safety level: accordg with EN 837, diameter: 5 mm (2") / 63 mm (2.48"), Material: Brass nickel-plated and chrome-plated CW614N (CuZn39Pb3), CW58L (CuZn37); CW453K (CuSn8) (Bourdon tube) dependg on pressure range, staless steel 316L (1.444) Flash back arrestors Gas / max. pressure (bar) Art.-nr. Inlet Outlet Material A* H M O P L337 FS4 G¼ m G ¼"f Brass L454 FS4 G¼ m G ¼ f Brass-Cr L11 FS5 NPT ¼"f NPT ¼ m SS B96 FS5 NPT ¼ m NPT ¼"f Brass B492 FS5 NPT ¼"f NPT ¼"f SS B614 FS5 NPT ¼ m NPT ¼"f Brass B643 FS5 NPT ¼"f NPT ¼"f SS B892 FS5 NPT ¼"f NPT ¼"f Brass-Cr *) Acetylene C 2 H 2 (A), Hydrogen H 2 (H), Methane CH 4 (M), Oxygen O 2 (O), Propane C 3 H 8 (P) 81

82 Cylder Connections DIN 477 Complete, for FMD series , let NPT ¼ m Art.-Nr. Material Connection thread H FA 1 Brass / NI-CR W /14 LH H FA 1 SS W /14 LH H FA 5 SS W 1 1/8 LH H32955 FA 6 Brass / NI-CR W /14 H FA 6 SS W /14 H FA 7 SS R 5/8 H FA 8 SS W 1 1/8 H FA 9 Brass / NI-CR R ¾ H FA 9 SS R ¾ H FA 1 Brass / NI-CR W /14 H FA 1 SS W /14 H FA 11 SS R 3/8 H FA 13 SS R 5/8 H FA 13 SS R 5/8 H FA 14 SS M Cylder Connections UNI Complete, for FMD series , let NPT ¼ m Art.-Nr. Material Connection thread H FA UNI 445 Brass / NI-CR W 2 1/14 S. H FA UNI 445 SS W 2 1/14 S. H FA UNI 446 Brass / NI-CR W /14 H FA UNI 446 SS W /14 H36855 FA UNI 449 Brass / NI-CR W /14 H36864 FA UNI 449 SS W /14 H36145 FA UNI 4412 Brass / NI-CR W /14 H36141 FA UNI 4412 SS W /14 Cylder Connections BS 341 Cylder Connections NEN 3268 Complete, for FMD series , let NPT ¼ m Art.-Nr. Material Connection thread H FA BS 341 Nr. 2 SS G 5/8 LH H FA BS 341 Nr. 3 Brass / NI-CR G 5/8 H36311 FA BS 341 Nr. 3 SS G 5/8 H FA BS 341 Nr. 4 Brass / NI-CR G 5/8 LH H FA BS 341 Nr. 4 SS G 5/8 LH H FA BS 341 Nr. 8 Brass / NI-CR TPI H FA BS 341 Nr. 8 SS TPI Complete, for FMD Series , let see below, let NPT ¼ m Art.-Nr. Material Connection thread H FA LU 1 Brass / NI- CR W /14 LH H FA LU 1 SS W /14 LH H FA LU 4 Brass / NI- CR W 1 1/8 LH H FA LU 4 SS W 1 1/8 LH H FA RI 2 Brass / NI- CR G 5/8 H FA RI 2 SS G 5/8 H FA RU 1 Brass / NI- CR W /14 H FA RU 1 SS W /14 H36155 FA RU 3 Brass / NI- CR W /14 H FA RU 3 SS W /14 82

83 Cylder Connections AFNOR Cylder Connections CGA Cylder valves Pigtails Pigtails Complete, for FMD series 5+32, let NPT ¼ m Art.-Nr. Material Connection thread H FA C Brass / NI-CR Ø H FA C SS Ø H FA E Brass / NI-CR Ø LH H FA E SS Ø LH H FA F Brass / NI-CR Ø H FA F SS Ø Complete, for FMD series , let NPT ¼ m Art.-Nr. Material Inlet H FA CGA 32 Brass / NI- CR NGO RH EXT H FA CGA 32 SS NGO RH EXT H FA CGA 35 Brass / NI- CR NGO LH EXT H36761 FA CGA 35 SS NGO LH EXT H FA CGA 54 Brass / NI- CR NGO RH EXT H FA CGA 54 SS NGO RH EXT H37573 FA CGA 58 Brass / NI- CR NGO RH INT H3751 FA CGA 58 SS NGO RH INT H FA CGA 59 Brass / NI- CR NGO LH INT H36741 FA CGA 59 SS NGO LH INT Inlet pressure max. 5 bar, let gas type specific, accordance with DIN 477, let NPT ¼"f Art.-Nr. Design Material FAV536BC5 with gauge Brass / NI- CR FAV536SS5 with gauge SS FAV537BC5 with gauge Brass / NI- CR FAV537SS5 with gauge SS In accordance with DIN 477/ 23 bar, with hexagon nut, coil tube Ø 6 mm. Material SS/ PCTFE. Outlet, swivel nut M or NPT 1/4"m. Pigtail tubg allows for connection of the gas panel with gas supply a limited spatial area. Built- handles guarantee a zero potential and gas-tight connections. Cylder connections also accordance with other norms such as AFNOR, NEN,... or 3 bar cylder on request. Art.-Nr. Art.-Nr. M14 1.5f NPT1/4"m DIN connection H H FA 1 H FA 5 H H FA 6 H H FA 7 H H FA 8 H H FA 9 H H FA 1 H H FA 11 H H FA 13 H H FA 14 In accordance with DIN 477/ 23 bar, tube Ø 1/8, with hex nut, let NPT ¼ m. material SS/PCTFE. Cylder connections also accordance with other norms such as AFNOR, NEN,... upon request. Art.-Nr. DIN Connection H FA 1 H FA 5 H FA 6 H FA 7 H FA 8 H FA 9 H FA 1 H FA 11 H FA 13 H FA 14 83

84 Flexible hoses Acetylene high pressure connection hoses In accordance with DIN 477/ 23 bar, with hex nut. Material SS/PCTFE. Inlet see below, let M14 1.5f mm or NPT 1/4"m with swivel nut. For safety reasons the flexible corrugated pipe comes equipped with a safety les, which prevent uncontrolled whippg the case of a hose breakage. The advantage of the corrugated pipe is a maximum mobility relation to the gas supply. Cylder connections accordance with other norms such as AFNOR, NEN,... and 315 bar cylder models are upon request. M14,5 1.5f NPT 1/4"m Art.-Nr. Art.-Nr. DIN Length H H FA 1 1 m H H FA 5 1 m H H FA 6 1 m H H FA 7 1 m H H FA 8 1 m H H FA 9 1 m H H FA 1 1 m H H FA 13 1 m H H FA 14 1 m H H FA m H H FA m H H FA m H H FA m H H FA m H H FA m H H FA m H H FA m H H FA14 1.5m H H FA 1 3 m H H FA 6 3 m H H FA 1 3 m H H FA 13 3 m H FA 14 3 m Version Length Cylder with back pressure safety 8 mm Bundle RHÖNA 15 mm Bundle LINDE 15 mm Bundle MG 15 mm Bundle Basi 15 mm Attention: there is a 5-yearly obligatory testg for acetylene high pressure hoses accordance with TRAC 24, These hoses fulfil the requirements accordg to EN ISO Further connections upon request. Bundle connection Rhöna standard for AGA for Lde bundle Bundle connection module Cylder hoses with back pressure protection Cylder hoses with back pressure protection for MG bundle for BASI bundle Bundle hose with gas supplier-specific connections 84

85 Acetylene high pressure hoses Tube fittgs, straight With check valve and cylder connection. Other connections on request. Art.-Nr. Connection DIN DIN CGA AFNOR H UNI 4411 Tube fittgs, elbow 9 Art. Nr. Material H3513U NPT ¼ m 1/8 Brass H3613U NPT ¼ m ¼ Brass H3113U NPT ¼ m 6 mm Brass H3213U NPT ¼ m 8 mm Brass H333U NPT ¼ m 1 mm Brass H343U NPT ¼ m 12 mm Brass H3511U NPT ¼ m 1/8 SS H3611U NPT ¼ m ¼ SS H3111U NPT ¼ m 6 mm SS H3211U NPT ¼ m 8 mm SS H331U NPT ¼ m 1 mm SS H341U NPT ¼ m 12 mm SS A121U G¼ m 1/8 Brass / NI-CR L268U G ¼ m ¼ Brass / NI-CR A123U G ¼ m 6 mm Brass / NI-CR A162U G ¼ m 8 mm Brass / NI-CR A125U G ¼ m 1 mm Brass / NI-CR A127U G ¼ m 12 mm Brass / NI-CR A12U G ¼ m 1/8 SS L264U G¼ m ¼ SS A122U G¼ m 6 mm SS A161U G¼ m 8 mm SS A124U G¼ m 1 mm SS A126U G¼ m 12 mm SS H32613U G 3/8 m ¼ Brass H31933U G 3/8 m 6 mm Brass H382383U G 3/8 m 8 mm Brass H381863U G 3/8 m 1 mm Brass H383113U G 3/8 m 12 mm Brass H386631U G 3/8 m 1/8 SS H388971U G 3/8 m ¼ SS H31931U G 3/8 m 6 mm SS H382381U G 3/8 m 8 mm SS H381861U G 3/8 m 1 mm SS H383111U G 3/8 m 12 mm SS Art.-Nr. Material H3123U NPT ¼ m 6 mm Brass H3233U NPT ¼ m 8 mm Brass H38523U NPT ¼ m 1 mm Brass H39643U NPT ¼ m 12 mm Brass H3121U NPT ¼ m 6 mm SS H3231U NPT ¼ m 8 mm SS H38521U NPT ¼ m 1 mm SS H39641U NPT ¼ m 12 mm SS G¼ m 6, 8, 1, or 12 mm brass and staless steel on request! 85

86 Tube fittgs, T-shape Art.-Nr. Material H381473U 3 1/8 Tube Brass H3973U 3 ¼ Tube Brass H3133U 3 6 mm Tube Brass H3283U 3 8 mm Tube Brass H3333U 3 1 mm Tube Brass H3413U 3 12 mm Tube Brass H381471U 3 1/8 Tube SS H3971U 3 ¼ Tube SS H3131U 3 6 mm Tube SS H3281U 3 8 mm Tube SS H3331U 3 1 mm Tube SS H3411U 3 12 mm Tube SS Tube fittgs, tube end 6 m Art.-Nr. Material H384963U 6 mm 1/8 Brass H382613U 6 mm 3 mm Brass H382623U 6 mm 4 mm Brass H384961U 6 mm 1/8 SS H382611U 6 mm 3 mm SS H382621U 6 mm 4 mm SS Other Tube stub connections available on request! Hose nozzles, G-thread Art.-Nr. Material H U G¼ m 4 mm Brass / NI-CR H U G¼ m 6 mm Brass / NI-CR H U G¼ m 8 mm Brass / NI-CR H382551U G¼ m 4 mm SS H382561U G¼ m 6 mm SS Hose nozzles, hose end 6 mm Art.-Nr. Material H382523U 6 mm 4 mm Brass H382533U 6 mm 6 mm Brass H382543U 6 mm 8 mm Brass H382521U 6 mm 4 mm SS H382531U 6 mm 6 mm SS Adaptors Art.-Nr. Material H31783U NPT ¼ m G¼ m Brass H314853U NPT ¼ m G ¼ f Brass / NI-CR H31781U NPT ¼ m G¼ m SS H31481U NPT ¼ m G ¼ f SS H31281U NPT ¼ m VCR ¼ m SS H31381U NPT ¼ m VCR ¼"f SS 86

87 Hexagon bld plugs Art.-Nr. Material H NPT 1/4"m SS H G 1/4"m SS H G 3/8"m SS Gasckets for G-threadg Mimum order 25 pcs. PVDF, 1 pcs. PCTFE Art.-Nr. Size Material H mm G ¼ PVDF H mm G ¼ PVDF H mm G ¼ PVDF H mm G ¼ PVDF H mm G ¼ PCTFE H mm G ¼ PCTFE H mm G ¼ PCTFE H mm G ¼ PCTFE H mm G ¼ PTFE H mm G 3/8 PVDF H mm G 3/8 PCTFE H mm G 3/8 PTFE Gaskets for cylder connections For cylder connections accordance with DIN 477 ( mimum order 25 pcs. PVDF, 1 pcs. PCTFE) Art.-Nr. FA-Nr. Material H , 6, 7, 9, 1, 12, 13 PVDF H9119 1, 6, 7, 9, 1, 12, 13 PCTFE H , 8 PVDF H9129 5, 8 PCTFE H , 14 PVDF H , 14 PCTFE Gloves, transparent Sgle-use, mimum order 25 pcs. Art.-Nr. Material Size W619 Latex S, or 6 7 W6191 Latex M, or 7 8 W6192 Latex L, or 8 9 W6561 Latex strengthened 9 9 ½ W6494 Plastic, white XL Gaskets for M mm Mimum order 25 pcs. Art.-Nr. Material Dimensions H17112 O- Rg EPDM 6 2 mm H17111 O- Rg FKM 6 2 mm H91116 Seal PVDF mm H9119 Seal PCTFE mm 87

88 Check valves Art.-Nr. Material Inlet Outlet H4526 SS/ FKM M mm NPT ¼ m H Brass/ Buna NPT ¼"f NPT ¼ m H SS/ Viton NPT ¼"f NPT ¼ m B638 SS/ FKM 6 mm NPT ¼ m B727 SS/ EPDM 6 mm NPT ¼ m Relief valves Direct actg, sprg loaded valve, to safely release excess pressure. let NPT ¼ m, let NPT ¼ f, Art.-Nr. Material Activatg Pressure B645 SB/ 8 N Brass/ NI+CR/ EPDM 8 bar B646 SS/ 8 N SS/ FKM 8 bar B631 SB/ 15 N Brass/ NI+CR/ EPDM 15 bar B632 SS/ 15 N SS/ FKM 15 bar B636 SB/ 6 N Brass/ NI+CR/ EPDM 6 bar B635 SS/ 6 N SS/ FKM 6 bar Plastic hoses Valve mountgs Moisture filters Available lengths of 1m Art.-Nr. side Ø side Ø Material H mm 4 mm Polyethylene H mm 4 mm Teflon H mm 6 mm Teflon H mm 8 mm Teflon For valves MVA 5, MVK 41, MVR 5, MVA 51 Art.-Nr. Material H51824 For wall mountg Alumium H52395 Retag bracket Steel Recommended for chloric gases such as HCL, BF 3, etc. Art.-Nr. H51164 TF 75 Filter housg filled with molecular sieve H TF 75 Filter sert 88

89 Flow meters, with regulatg valve With meterg valve, delivery cludes conversion table, let/let NPT ¼"f Luft Art.-Nr. Material Flow rate [l/h] at 1 bar (2 C) H2837 DK 8 Brass/ FKM 6 6 H DK 8 Brass/ FKM H DK 8 Brass/ FKM 5-5 H DK 8 Brass/ FKM H2836 DK 8 Brass/ VITON 6 6 H DK 8 Brass/ VITON H DK 8 Brass/ VITON 5-5 H DK 8 Brass/ VITON Heatg sleeve N 2 and H 2 Art.-Nr. Material Flow rate [l/h] H DK 8 for N2 Brass/ VITON 6 6 at 1 bar (2 C) H DK 8 for H2 SS/ VITON at 2 bar flow meters for other gases available on request. For FMD series 23 and 5. illustration with FMD Cylder holder Art.-Nr. H ZB 5- Sleeve 23 V H ZB 5- Sleeve 115 V Art.-Nr. H31131 FH profiled staless steel sheet with belt H3522 Belt replacement belt for cylder holder Adjustment knobs for pressure regulators and valves Service Art.-Nr. H Replacement adjustment knob pressure regulator, black, Series 5 H Replacement adjustment knob shut-off valve, 9 black, Series 5 H11821 Replacement adjustment knob regulatg valve, black, Series 5 H45224 Guide sleeve for replacement adjustment knob, Series 5 H11624 Guide sleeve for valve, Series 5 H Screw for Series Replacement adjustment knob pressure regulator, black, Series Screw for Series 23 H11921 Replacement adjustment knob pressure regulator, Series LAB 3 H Replacement adjustment knob shut-off valve, Series LAB 3 H Replacement adjustment knob regulatg valve, Series LAB 3 Electrochemical polishg of metal parts Ultrasonic Cleang Orbital Weldg of staless steel Flow rate measurg Repair Trag for pressure regulator and valves Service contracts for high purity gas systems 89

90 Labels, Series 5, Adjustment knob + Valve Labels, Series 3, 4 and 5 Labels, Series 3 Labels for SMD/ BMD/ EMD For valve and pressure regulator adjustment knob, GCEDruVa models Art.-Nr. Material Diameter H21364 for adjustment knob PVC Ø 3 mm H for valve PVC Ø 17 mm For valve and pressure regulator adjustment knobs, colour codg accordance with DIN 1292 Material Diameter Note Label for valve PVC Ø 17 mm Indicate gas type Label for adjustment knob PVC Ø 3 mm Indicate gas type Pressure regulator adjustment knob gas specific, please dicate gas type! Art.-Nr. Material Diameter LabelLAB3 for adjustment knob PVC Ø 21 mm H21474 for shut-off valve Anodized Alu Ø 12 mm H for regulatg valve Anodized Alu Ø 14 mm Gas specific, connection thread: 8 mm 25 mm, please dicate gas type! Art.-Nr. Material H Self-adhesive lamate PVC Leak-detaction spray Art.-Nr. W6196 Leak detection spray 4 ml Canister DVGW Teflon tapes Open-ended wrenches Series 4 Art.-Nr. Material W6356 Teflon tape, width 1.5 PTFE 12 m 12 mm.1 mm W6355 Teflon tape, width 1.6 PTFE 13.7 m 12.3 mm.1 mm Gloves, transparent Sgle-headed wrench, extra flat 6 mm Art.-Nr. Material H mm SS H mm SS Sgle-use, mimum order 25 pcs. Art.-Nr. Material Size W619 Latex S, or 6 7 W6191 Latex M, or 7 8 W6192 Latex L, or 8 9 W6561 Latex strengthened 9 9 ½ W6494 Plastic, white XL 9

91 Performance charts FMD + LMD Flow rate curves Pressure p 2 [bar, psi] Dynamic decompression curve ISO bar / 14 bar - Pressure p 2 [bar, psi] ISO bar / 14 bar bar / 2 psi p 1 = 29 bar / 42 psi p 1 = 34 bar / 495 psi 6 p 1 = 13 bar / 19 psi C pd 1 = 8 bar / 12 psi Flow rate Q N [Nm 3 /h, SCFM] N bar / 85 psi Pressure p 1 [bar, psi] FMD + LMD Pressure p 2 [bar, psi] ISO bar / 1.5 bar p 1 = 22 bar / 32 psi A B C 8 p 1 =7 bar/1 psi p 6 1 = 27 bar / 39 psi 4 E p 1 = 21 bar / 35 psi 2 CG H D Flow rate Q N [Nm 3 /h, SCFM] N 2 12 FMD 53 Pressure p 2 [bar, psi] ISO p 1 = 11 bar / 147 psi p 1 = 6 bar / 85 psi p 1 = 57 bar / 83 psi p 1 = 8 bar / 12 psi Flow rate Q N [Nm 3 /h, SCFM] N 2 47 FMD 532 Dynamic decompression curve Pressure p 2 [bar, psi] ISO bar / 1.5 bar Pressure p1 [bar, psi] Dynamic decompression curve 28 bar / 5 bar - Pressure p 2 [bar/psi] ISO bar Pressure p 1 [bar, psi] Dynamic decompression curve Pressure p 2 [bar/psi] ISO bar / 1.5 bar - Pressure p 2 [bar, psi] ISO bar / 1.5 bar p 1 = 22 bar / 32 psi 1.5 bar / 15 psi p 1 = 27 bar / 39 psi bar / 15 psi 3 bar / 45 psi p 1 =7 bar/1 psi 3 bar / 45 psi p 1 = 21 bar / 35 psi Pressure p 1 [bar, psi] Flow rate Q N [Nm 3 /h, SCFM] N 2 91

92 Performance charts FMD + LMD 51 FMD + LMD Flow rate curves ISO 253 Flow rate curves ISO 253 Pressure p 2 [bar abs., psi abs.] 2 bar abs. / 3 bar abs. - Pressure p 2 [bar abs., psi abs.] 2 bar / 3 bar - 3, p 1 = 12 bar / 175 psi 44 3, FMD + LMD 51 2, p 1 = 12 bar / 175 psi 2, Flow rate Q N [Nm 3 /h, SCFM] N Flow rate Q N [Nm 3 /h, SCFM] N FMD , Pressure p 2 [bar, psi] SMD 5-16 ISO bar / 2 bar - Pressure p 2 [bar, psi] ISO bar / 28 bar - p 1 = 12 bar / 175 psi p 1 = 57 bar / 83 psi 1, SMD p 1 = 12 bar / 175 psi Pressure p 2 [bar, psi] p 1 = 7 bar / 1 psi G H I Flow rate Q N [Nm 3 /h, SCFM] N BMD 5-3 p 1 = 37 bar / 54 psi D E F G p 1 = 29 bar / 42 psi Flow rate Q N [Nm 3 /h, SCFM] N 2 ISO bar / 1.5 bar - Pressure p 2 [bar, psi] ISO bar - p 1 = 22 bar A/ 32 psi p 1 = 27 bar / 39 psi D E F p 1 = 21 bar / 35 psi Flow rate Q N [Nm 3 /h, SCFM] N B p 1 = 39 bar / 565 psi Flow rate Q N [Nm 3 /h, SCFM] N 2 19 C 35 p 1 = 29 bar / 42 psi p 1 = 34bar / 495 psi EMD Pressure p 2 [bar, psi] 1,4 1,2 1,,8,6 A,4,2 ISO bar - p 1 = 14 bar / 2 psi C p 1 = 3 bar / 45 psi B Flow rate Q N [Nm 3 /h, SCFM] N 2 5 EMD 5 Pressure p 2 [bar, ISO / 1.5 bar - 12 psi] p 1 = 22 bar / 32 psi p 1 = 38 bar / 55 psi 4 2 p 1 = 13 bar / 19 psi p 1 = 23 bar / 335 psi Flow rate Q N [Nm 3 /h, SCFM] N 2 2

93 Performance charts FMD 1-14 FAV Pressure p 2 [bar, psi] ISO bar - Flow rate Q N [Nm 3 /h, SCFM] N 2 ISO p 1 = 3 bar/ 45 psi 5 p 1 = 25 bar/ 36 psi G H E Flow rate Q N [Nm 3 /h, SCFM] N 2 6 turns of adjustment knob MVR-A 5 G/W Flow rate Q N [Nm 3 /h, SCFM] N LAB psi Pressure p 2 [bar, psi] ISO , 1,5 ISO psi 58 psi 1 psi 1.5 bar - LAB 31 Pressure p 2 [bar, psi] 12 ISO / 1 bar p 1 = 21 bar / 35 psi 4 p 1 = 9 bar / 13 psi Flow rate Q N [Nm 3 /h, SCFM] N LAB Pressure p 2 [bar, psi] ISO bar - Inlet pressure p 1 = 12 bar / 175 psi closg 1, p 1 = 4 bar / 6 psi, Flow rate Q N [l/m, SCFM] N FMD 3 FMD 32 openg Flow rate Q N [l/m, SCFM] N Pressure p 2 [bar, psi] ISO 253 Pressure p 2 [bar, psi] ISO Flow rate Q N [Nm 3 /h, SCFM] N 2 13 Flow rate Q N [Nm 3 /h, SCFM] N

94 Performance charts LMD Pressure p 2 [bar/psi] ISO Pressure p 2 [bar/psi] ISO 253 Flow rate Q N [l/m, SCFM] N Flow rate Q N [l/m, SCFM] N 2.6 FMD 23 BMD Pressure p 2 [bar/psi] ISO Outlet Pressure p 2 [bar/psi] ISO 253 Flow rate Q N [Nm 3 Flow rate Q /h, SCFM] N 2 35 N [Nm 3 /h, SCFM] N 2 15 BMD Pressure p 2 [bar/psi] ISO 253 Flow rate Q N [Nm 3 /h, SCFM] N 2 6 FMD 32 FMD Pressure p 2 [bar/psi] ISO bar / 1.5 bar - Pressure p 2 [bar, psi] ISO bar / 5 bar p 1 = 22 bar / 32 psi p 1 = 11 bar / 147 psi 8 p 1 = 27 bar / 39 psi p 1 = 6 bar / 85 psi p 4 1 =7 bar/1 psi A p 1 = 21 bar / 35 psi p 1 = 57 bar / 83 psi p 1 = 8 bar / 12 psi Flow rate Q N [Nm 3 /h, SCFM] N 2 12 Flow rate Q N [Nm 3 /h, SCFM] N 2 47

95 Recommendations for staless steel tubg Maximum allowable workg pressure [psi] for ch sizes staless steel tube Tube wall thickness [ch] Tube- Outside-Ø [ch],28,35,49,65,83,95,19,12,134,156,188 1/8 85 3/ / / / / / / / / / Maximum allowable workg pressure [bar] for metric staless steel tube Tube wall thickness [mm] Tube- Outside-Ø [mm] Note: For gas applications select a tube wall thickness to the left of the correspondg allowed limit value. All tables serve as recommendations only. In any case, the relevant applicable guideles, practises and norms, the condition of the materials and the surface must be taken to account. Tube material: Top-quality, completely annealed hydraulic tubg of staless steel (type 34, 34/34L, 316, 316/316L, 317, 317/317L) (seamless or welded and drawn) accordance with ASTM A269 or A213 or comparable. The grade must not be more than 9 HRB or 2 HV. The tube must be scratch free and be suitable for bendg and crimpg. Tolerances of the side diameter, by tubes with an side diameter of 1/16 ch, may be maximum ±,3 ch. 95

96 Recommendations for Copper Tubg Maximum allowable workg pressure [psi] for ch tube copper Tube wall thickness [ch] Tubeside-Ø [ch] / / / / / / / / / / Maximum allowable workg pressure [bar] for metric tube copper Tube wall thickness [mm] Tubeside-Ø [mm] Note: For gas applications select a tube wall thickness to the left of the correspondg allowed limit value ( the green shaded area). All tables serve as recommendations only. In any case, the relevant applicable guideles, practises and norms, the condition of the materials and the surface must be taken to account. The permitted operational pressure are calculated with an S-value from 6 psi (41.3 MPa) for ASTM B75 and ASTM B88 tube at 28 to 37 C ( 2 to 1 F), as also specified ASME B31.3 and ASME B31.1. Material recommendation: Top-quality, soft-annealed, seamless copper tubg, ASTM B75 and EN 157 or comparable. 96

97 Unit conversion Volumes cm³ Liter m³ (ch) ³ (foot)³ gal cm³ x x1-4 Liter m³ x1 2 ³ (ch) x x x x1-2 ft³ (foot) 2.83x x gal 3.785x x Volume flow m 3 /h l/h ml/h (foot) 3 /m SFPM gal/m (foot) 3 /s SFPS l/s cm 3 /s m³/h l/h ml/h ft 3 /m gal/m ft 3 /s l/s cm³/s Pressure units bar mbar µbar Pa kpa MPa kp/mm² kp/cm² atm 1) mm Hg 2) m Ws mm Ws psi bar mbar µbar Pa kpa MPa kp/ mm² kp/ cm² atm 1) mm Hg 2) m Ws mm Ws psi

98 Gases and their properties Cylder Cylder pressure pressure Cylder Flow rate (2 C) (68 F) connection Gas Formula rel. to N2 bar psi accord. DIN 477 Gas type Acetylene C2H b Ammonia NH g/k Argon Ar i Boron trifluoride BF g/k Butadiene C4H b/g Butane C4H b Butylene C4H b Chlore Cl g/k Hydrogen chloride HCl g/k Deuterium D b Nitrous Oxide N2O o Air DL o Ethylene C2H b/o Ethane C2H b/o Helium He i Carbon Dioxide CO o Carbon monoxide CO b/g Krypton Kr i Methane CH b Neon Ne i Propane C3H b Propylene C3H b Test gas 14 o Oxygen O o Sulphur dioxide SO g/k Sulphur hexafluoride SF o Hydrogen sulphide H2S b/g/k Nitrogen N o Nitric oxide NO g/k Synthetische air SL o Tetrafluoromethane CF g/o Hydrogen H b/o Xenon Xe i Key: b = flammable gas, i = Inert gas, g = toxic, k = corrosive, o = other Cylder connections accordg to DIN 477 Nr. Connection thread Gases DIN W21.8 1/14" LH 1.3-Butadiene, Butane, 1-Butylene, Deuterium, Ethane, Ethene, Ethylene, Isobutane, Isobutylene,Methane, Propane, Propylene, Hydrogen 3 Yoke connection Acetylene 5 W1" 1/8" LH Carbon monoxide, Hydrogen sulphide 6 W21.8 1/14" Ammonia, Argon, Helium, Carbon dioxide, Krypton, Neon, Sulphur hexafluoride, Tetrafluormethane (R14), fluoroform (R23), Xenon 7 G 5/8" Sulphur dioxide 8 1" Boron trifluoride, Chlore, Hydrogen chloride, Nitric oxide, Nitrogen monoxide, 9 G ¾" oxygen, test gas (with oxygen > 21 %) 1 W /14" Nitrogen 11 G 3/8" Nitrous oxide (Normal connection) 13 R 5/8" Pressurised air 14 M LH Test gas (with oxygen < 21 %) DIN 477-Part 5, 315 bar / 2.1 W3 2 non flammable, non toxic and non oxidisg gases and gas mixtures / 2.8 W3 2 non flammable, toxic and corrosive gases and gas mixtures / 19.4 W3 2 pressurised air / 2.8 W3 2 LH flammable, non toxic gases and gas mixtures / 2.1 W3 2 LH flammable, toxic and corrosive or non corrosive gases and gas mixtures / 18.7 W3 2 oxygen and oxidisg, non toxic, non corrosive gases and gas mixtures 6 18 / 18 W3 2 oxidisg, toxic and/or corrosive gases and gas mixtures 98

99 The GCE GmbH DruVa for more than 4 years the name DruVa stands for high purity gas equipment of highest quality. This tradition, as supplier of top-of-the-range armatures and systems for high purity gases, is for us, under the new product label GCEDruVa, obligation and foundation to raise the quality of our products even further. Our busess strategy is therefore based on three columns: Focusg all activities on high purity gas handlg equipment. Matag an tensive dialogue with our customers to allow for contuous novation and early recognition of the changg demands on the high purity gas armatures and corporate this our future product ranges. Further development of the quality standards accordance with DIN EN 91. All the employees of our company carry this responsibility. Sce the begng of 1998 is the DruVa GmbH, under the new name GCE GmbH, part of the group GCE - Gas Control Equipment - with head quarters Malmo, Sweden. GCE is a European group who s core busess is the production and sales of equipment and stallation for gas supply of many various kds. The GCE-group is characterised through: its presence all major European markets equipment adapted to the national standards comprehensive application knowledge drawn from long standg experience Production and delivery state of the art technology: organised for quick response, short lead-times all companies are ISO 9 certified selected companies with ISO 14 certification all medical units certified accordance with EN 46 Busess sectors of the GCE: Weldg and Cuttg Cuttg and weldg systems Mache for torch cuttg Equipment for Medical Gas Supply Oxygen therapy systems Gas supply systems for hospitals Emergency gas systems Currently seventeen manufacturg, sales and service operations Europe and USA, representg the trademarks Autogen, BIG, Charledave, Medile, Mujelli, MUREX, Rhoena and now GCEDruVa, all established market leaders their particular fields. Empowered by this expansion of the base of operation our organization will strive, equally the future, to offer armatures which are characterised by their safety, reliability, purity and ground breakg technology. GCEDruVa offers competence all questions concerng high purity gas technology, efficient service, cost effective vestment and above all a reliable partnership to secure mutual busess success together with our customers. Industrial Process s High pressure valves for all gases Residual pressure and low torque valves Industrial gas supply High Purity and special Gas Control Equipment Pressure regulators and valves Complete gas supply Armatures for die semiconductor technology Art.nr. V35. Edition 1/211. Alternations are subject to change with notice hz GCE 211