TC Series FOR THE MASS FLOW CONTROL OF ALL KIND OF GASES THERMAL MASS FLOW CONTROLLER GENERAL FEATURES OPERATION PRINCIPLE

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1 FOR THE MASS FLOW CONTROL OF ALL KIND OF GASES TC Series THERMAL MASS FLOW CONTROLLER GENERAL TC series are thermal mass flow controllers, a combination of thermal mass flowmeter and control valve. TC automatically controls the mass flow rate of various kinds of gases with high accuracy. General purpose of TC-1000 upto 9.9kg/ cm 2 G(0.99MPa) and high pressure version of TC 2000 upto 100kg/ cm 2 G (10MPa) are available. FEATURES WIND FLOW RANGE Minimum 0~5NCCM, Maximum 0~500NLM(0~50NCCM to 0~100NLM for High pressure version) HIGH ACCURACY ±1% F.S. control accuracy. QUICK RESPONSE 3sec.response for 98% FREE FROM PRESSURE AND TEMPERATURE VARIATION Negligible ZERO and SPAN drift for pressure and temperature. HIGH RELIABILITY Special stainless steel with high anti-corrosive capability is used for solenoid valve actuator. Durable for long time operation. HIGH FUNCTION Theoretically, Mass flow measurement. Then, the bridge circuit outputs electric signal. Theoretically, the heat transfer is proportional to the moving mass of the gas to be measured and its specific heat. The specific heat of the gas is not affected by its pressure and within reasonable range of temperature, it can be observed to be as stable. Thus, by measuring the heat transfer through bridge output, the mass flow rate of the gas can be measured. The output signal from the bridge circuit is amplified to DC 0~5V and sent to indicator and as comparison circuit. At the comparison circuit, the output is compared to the external setting signal. The control valve is actuated to open or to close to make the output and setting signal equal. The control valve has an electromagnetic type actuator for Normal close action. OPERATION PRINCIPLE The gas to be measured is directed to by-pass sensing path by flow restriction. At the by-pass sensing path, two resistance coils are wound which consist a bridge circuit with resistance circuit in electric compartment. In case of no flow passing through the by-pass sensing path, the bridge circuit is in balanced condition. When the gas moves, the heat at the up stream coils is transferred to down stream coil and thus upsetting the original heat balance. TCP POWER SUPPLY UNIT DC±15V AMPLTFIER CIRCUIT TCDU INDICATOR FLOW SIGNAL TCDU SETTING DEVICE COMPARISON CIRCUIT CONTROL VALVE FLOW SETTING SIGNAL BY-PASS SENSOR BRIDGE CIRCUIT SPRING GAS INLET RESTRICTION GAS OUTLET ORIFICE TG-ES211-3E SEP., 1996

2 MODEL CODE STANDARD SPECIFICATION TC GAS TYPE TC-1100 TC-1200 FLOW RANGE NLM 20NLM 80NLM 100NLM 300NLM 300NLM 500NLM 5NCCM 10NCCM 20NCCM 30NCCM FLOW RENGE (FULL SCALE) FLOW CONTROL RANGE RESPONSE TIME (98% RESPONSE) FLOW RATE OUTPUT SIGNAL SETTING SIGNAL ACCURACY CONTROL P kg/cm 2 G(MPa). GAS PRESS kg/cm 2 G(MPa) GAS. TEMP 5NCCM~10NLM 10~20NLM 0.6~3.0(0.66~0.3) 0.6~3.0(0.66~0.3) NCCM 100NCCM TEMP.DRIFT NCCM 300NCCM 500NCCM 1NLM 2NLM 3NLM 5NLM TC-1100 PRESS.DRIFT GAS CONTACT MATERIAL CONNECTON WEIGHT(kg) DC+15V 25mA Max. DC 15V 200mA Max. Rc1/4, OD1/4SW, VCR, VCO FULL SCALE NLM 15NLM 20NLM TC-1200 DIMENSION NLM NLM 70NLM 80NLM TC-1300 TC NLM TC NLM NLM TC NLM NLM TC-1400, TC NLM 500NLM TC-1550 CONNECTION CONNECTION SIZE P N S R O Rc NPT SW VCR VCO 1/4" 3/8" 1/2" 3/4" 1" TC-1100, 1200 TC-1300, 1350 TC-1400 TC-1400, 1500 TC-1200 NCCM=Ncc/min. NLM=NL/min. 2 TOKYO KEISO CO., LTD. TG-ES211-3E

3 TC-1300 TC-1350 TC-1400 TC-1530 TC ~80NLM 80~100NLM 100~150NLM 150~200NLM 200~300NLM 300NLM 400~500NLM 0.7~3.0(0.07~0.3) 2~100% OF FULL SCALE WITHIN 3 SEC. DC0~5V DC0~5V ±1%F.S.(at 23 C) 9.9(0.99) 0~50 C SPAN 0.1%F.S./ C Max. ZERO 0.05%F.S./ C Max. 0.25%F.S. (WITHIN OPERATING PRESSURE RANGE) WITHIN 4 SEC. 1.0~4.5(0.1~0.45) 1.2~3.5(0.12~0.35) 1.5~3.5(0.15~0.35) 1.5~5.0(0.15~0.5) 1.8~5.0(0.18~0.5) DC+15V 25mA Max. DC 15V 320mA Max. DC+15V 25mA Max. DC 15V 200mA Max. SUS316, SHOMAC*2, PTFE, VITON or CR Rc3/8, OD 3/8SW, VCR, VCO Rc1/2, 3/4, 1, OD 1/2, 3/4 SW Rc 3/4, *(1) Flow rate with Nitrogen. Refer to MODEL CODE for details *(2) Ferrite Stainless Steel material TC-1300 TC-1530 TC-1350 TC-1400 TC-1550 TG-ES211-3E TOKYO KEISO CO., LTD. 3

4 MODEL CODE STANDARD SPECIFICATION TC GAS FLOW RANGE FULL SCALE CONNECTION CONNECTION SIZE P N S NLM 20NLM 100NLM 50NCCM 100NCCM 200NCCM 300NCCM 500NCCM 1NLM 2NLM 3NLM 5NLM 10NLM 15NLM 20NLM 30NLM 50NLM 70NLM 80NLM 100NLM Rc NPT SW 1/4" 3/8" TC-2100 TC-2200 TC-2300 TC-2100/TC-2200 TC-2300 FLOW RANGE*(1) (FULL SCALE) FLOW CONTROL RANGE RESPONSE TIME FLOW RATE OUTPUT SIGNAL SETTING INPUT SIGNAL ACCURACY REPEATABILITY. GAS PRESS kg/cm 2 (MPa) CONTROL P kg/cm 2 (MPa) GAS. TEMP TEMP. DRIFT PRESS DRIFT GAS CONTACT CONNECTION MODEL SPAN ZERO SIZE TYPE TC NCCM ~10NLM TC ~20 NLM TC ~100 NLM 2~100% OF FULL SCALE WITHIN 3 SEC. (98% RESPONSE) DC 0~5V DC 0~5V ±1%F.S. ±0.2%F.S. 100kgf/cm 2 G(10MPa) 50~80% of Primary pressure*(3) 0~50 C 0.1%F.S./ Cmax 0.05%F.S./ Cmax 0.1%F.S./(kgf/cm 2 )max DC+15V 25mA DC 15V 320mA SUS316, SHOMAC *(2), PTFE, VITON or CR OD 1/4 OD 3/8 Swagelok Rc (=PT), NPT *(1) Flow rate with Nitrogen. In case of measurement of hydrogen (H2) Minimum flow range will be 250 NCCM. *(2) Ferrite Stainless Steel material *(3) Control range of differential pressure is 10kg/cm 2 (1MPa) in above mentioned CONTROL P. NCCM=Ncc/min. NLM=NL/min. 4 TOKYO KEISO CO., LTD. TG-ES211-3E

5 DIMENSION TC-2100 TC-2200 TC-2300 TG-ES211-3E TOKYO KEISO CO., LTD. 5

6 SUPPORTING INSTRUMENTS EXCLUSIVE CABLES Connection cables are available as follow. Cable ends are properly terminated for immediate connection to devices. TYPE OF CABLE USAGE STANDARD LENGTH SC-T SC-DS TMC-1- TC-1000/TC-2000 TCP TCSU TCDU TCP TC-1000/TC-2000 TM m 2m 2m (Max.100m) TCP UNIT TCP supplies necessary power to TC Controller and TCDU indicator. Also, TCP scales the output from TC controller and feeds to TDCU to indicate flow rate in actual scale. TYPE TCP-1 TCP-3 TCP-5 FOR TC-1000/2000 FOR TDCU FLOW SETTING OUTPUT +15V 100mA 15V 350mA +5V 200mA +5V±0.1% FOR 3 LOOPS FOR 5 LOOPS AC100V±10% 50/60Hz DIMENSION TCP-1 *L=226, =180 for TCP-5 TCP-3 Fixture TDCU INDICATORS TDCU is a "Digital Panel Meter" with 3 1/2 digit indication. Flow rate of the gas is indicated actual industrial unit such as Nl/min. MODEL INDICATION DIGIT HEIGHT TCDU /2digit 8mm +5V 100mA Panel cut TDCU SETTING DEVICE TCSC is a potentio-meter with 2 digit setting counter. Flow rate can be set with 1/100 resolvability. MODEL SPECIFICATION RESISTANCE TCSU Potentio-Merer with 2 digit setting counter 10k / 10 rotation Panel cut 6 TOKYO KEISO CO., LTD. TG-ES211-3E

7 TM-7000 CONVERTOR UNIT TM-7000 is a "ALL-IN-ONE" panel unit for TC1000/2000. In compact DIN96 96 housing, all necessary functions, such as power supply, indication, totalization, setting, are combined. TM-7400 for indication and setting purpose and TM-7500 for indication, totalization and setting purpose are available to match the applications. Proportional mixing of two different gases according to external flow signal is also possible. TM TM SYSTEM CONFIGURATION By using separate units CABLE SC-DS UNIT AC 100V TCDU INDICATOR TCSU SETTING DEVICE TC-1000 CON- TROLLER CABLE SC-T TCP-1 FOR 1 LOOP TCP-3 FOR 3 LOOPS TCP-5 FOR 5 LOOPS With TM-7000 CONVERTOR UNIT PROPORTIONAL MIXING PROCESS A GAS FLOW SIGNAL TMC-1- CABLE ANALOG OUTPUT AC POWER SUPPLY TM-75 INDICATION+TOTALIZATION +SETTING ANALOG OUTPUT SCALED PULSE AC TC-1000/2000 TM-74 INDICATION+SETTING TF-5000/TF-6000 MASS FLOWMETER ANALOG OUTPUT SCALED PULSE AC TM-75 INDICATION+TOTALIZATION +SETTING TC-1000/2000 CONTROLLER TG-ES211-3E TOKYO KEISO CO., LTD. 7

8 ORDERING INFORMATION Specify the following for order/inquiry THERMAL MASS FLOW CONTROLLER TYPE TC- - - GAS TO BE MEASURED PRIMARY PRESS.. kgf/cm 2 G Nor. kgf/cm 2 G Min. kgf/cm 2 G DIFFERENTIAL PRESS. TEMP. ~ C kgf/cm 2 G FULL SCALE Ncc/min NL/min CONNECTION SIZE CONNECTION TYPE 1/4" 3/8" 1/2" 3/4" 1" Swagelok Rc (=PT) NPT VCR VCO SUPPORTING INSTUMENTS UNIT TCP-1 TCP-3 TCP-5 Not required INDICATOR SETTING DEVICE CONVERTOR TCDU-8 TCSU TM (Indication+Setting) TM (Indication+Totalization+Setting) TM (Indication+Setting) TM (Indication+Totalization+Setting) Not required Not required Not required EXCLUSIVE CABLE SC-DS SC-T TMC-1 STD. 2m m (Max.20m) STD. 2m m (Max.100m) STD. 2m m (Max.100m) * Specification is subject to change without notice. Head Office : Shiba Toho Building, Shibakoen, Minato-ku, Tokyo Tel : (KEY) ; Fax : overseas.sales@tokyokeiso.co.jp ; URL : 8 TG-ES211-3E