TC Series FOR THE MASS FLOW CONTROL OF ALL KIND OF GASES THERMAL MASS FLOW CONTROLLER OUTLINE FEATURES OPERATION PRINCIPLE

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FOR THE MASS FLOW CONTROL OF ALL KIND OF GASES TC Series THERMAL MASS FLOW CONTROLLER OUTLINE TC series are thermal mass flow controllers, a combination of thermal mass flowmeter and control valve.

1 FOR THE MASS FLOW CONTROL OF ALL KIND OF GASES TC Series THERMAL MASS FLOW CONTROLLER OUTLINE TC series are thermal mass flow controllers, a combination of thermal mass flowmeter and control valve. TC automatically controls the mass flow rate of various kinds of gases with high accuracy. General purpose of TC-1 upto.99mpa and high pressure version of TC 2 upto 1MPa are available. FEATURES WIND FLOW RANGE Minimum to 5mL/min(nor), Maximum to 5L/min(nor) ( to 5mL/min(nor) to to 1L/min(nor) for High pressure version) HIGH ACCURACY ±1% F.S. control accuracy. QUICK RESPONSE 3sec. response for 98% FREE FROM PRESSURE AND TEMPERATURE VARIATION Negligible ZERO and SPAN drift for pressure and temperature. HIGH RELIABILITY Special stainless steel with high anti-corrosive capability is used for solenoid valve actuator. Durable for long time operation. HIGH FUNCTION Theoretically, Mass flow measurement. Then, the bridge circuit outputs electric signal. Theoretically, the heat transfer is proportional to the moving mass of the gas to be measured and its specific heat. The specific heat of the gas is not affected by its pressure and within reasonable range of temperature, it can be observed to be as stable. Thus, by measuring the heat transfer through bridge output, the mass flow rate of the gas can be measured. The output signal from the bridge circuit is amplified to DC to 5V and sent to indicator and as comparison circuit. At the comparison circuit, the output is compared to the external setting signal. The control valve is actuated to open or to close to make the output and setting signal equal. The control valve has an electromagnetic type actuator for Normal close action. OPERATION PRINCIPLE The gas to be measured is directed to by-pass sensing path by flow restriction. At the by-pass sensing path, two resistance coils are wound which consist a bridge circuit with resistance circuit in electric compartment. In case of no flow passing through the by-pass sensing path, the bridge circuit is in balanced condition. When the gas moves, the heat at the up stream coils is transferred to down stream coil and thus upsetting the original heat balance. TCP POWER SUPPLY UNIT DC±15V AMPLTFIER CIRCUIT TCDU INDICATOR FLOW SIGNAL TCDU SETTING DEVICE COMPARISON CIRCUIT CONTROL VALVE FLOW SETTING SIGNAL BY-PASS SENSOR BRIDGE CIRCUIT SPRING GAS INLET RESTRICTION GAS OUTLET ORIFICE OCT. 27K

2 TC-1 GENERAL PURPOSE THERMAL MASS FLOW CONTROLLER MODEL CODE STANDARD SPECIFICATIONS TC GAS TYPE TC-11 TC-12 FLOW RANGE L/min(nor) 2L/min(nor) 8L/min(nor) 1L/min(nor) 3L/min(nor) 3L/min(nor) 5L/min(nor) 5mL/min(nor) 1mL/min(nor) 2mL/min(nor) 3mL/min(nor) FLOW RENGE (FULL SCALE) FLOW CONTROL RANGE RESPONSE TIME (98% RESPONSE) FLOW RATE OUTPUT SIGNAL SETTING SIGNAL ACCURACY CONTROL P(MPa). GAS PRESS(MPa) GAS. TEMP 5mL/min(nor) to 1L/min(nor) 1 to 2L/min(nor).66 to.3.66 to mL/min(nor) 1mL/min(nor) TEMP.DRIFT mL/min(nor) 3mL/min(nor) 5mL/min(nor) 1L/min(nor) 2L/min(nor) 3L/min(nor) 5L/min(nor) TC-11 PRESS.DRIFT GAS CONTACT MATERIAL CONNECTON WEIGHT(kg) DC+15V 25mA Max. DC 15V 2mA Max. Rc1/4, OD1/4SW, VCR, VCO FULL SCALE L/min(nor) 15L/min(nor) 2L/min(nor) TC-12 DIMENSION 33 3L/min(nor) L/min(nor) 7L/min(nor) TC-13 TC L/min(nor) 14 1L/min(nor) TC L/min(nor) L/min(nor) 25L/min(nor) TC L/min(nor) L/min(nor) 5L/min(nor) TC-155 P Rc N NPT CONNECTION S SW R VCR O 4 VCO 1/4" TC-11, 12 TC /8" TC-13, 135 CONNECTION SIZE 8 1/2" TC /4" 1" TC-14, 15 2 TOKYO KEISO CO., LTD.

3 TC-13 TC-135 TC-14 TC to 8L/min(nor) 8 to 1L/min(nor) 1 to 15L/min(nor) 15 to 2L/min(nor) 2 to 3L/min(nor) 4 to 5L/min(nor) 2 to 1% OF FULL SCALE WITHIN 3 sec. WITHIN 4 sec. DC to 5V DC to 5V ±1%F.S.(at 25 C).7 to.3.1 to to to to.5 9.9(.99) 5 to 5 C SPAN.1%F.S./ C Max. ZERO.5%F.S./ C Max..25%F.S. (WITHIN OPERATING PRESSURE RANGE) DC+15V 25mA Max. DC 15V 32mA Max. DC+15V 25mA Max. DC 15V 2mA Max. SUS316, SHOMAC*2, PTFE, FKM or CR OD 3/8SW, VCR, VCO Rc3/4, 1, OD 1/2, 3/4 SW Rc 3/4, *(1) Flow rate with Nitrogen. Refer to MODEL CODE for details *(2) Ferrite Stainless Steel material TC-13 TC-135 TC-14 TC-155 TOKYO KEISO CO., LTD. 3

4 TC-2 HIGH PRESSURE THERMAL MASS FLOW CONTROLLER MODEL CODE STANDARD SPECIFICATIONS TC GAS FLOW RANGE FULL SCALE CONNECTION CONNECTION SIZE P N S 4 6 1L/min(nor) 2L/min(nor) 1L/min(nor) 5mL/min(nor) 1mL/min(nor) 2mL/min(nor) 3mL/min(nor) 5mL/min(nor) 1L/min(nor) 2L/min(nor) 3L/min(nor) 5L/min(nor) 1L/min(nor) 15L/min(nor) 2L/min(nor) 3L/min(nor) 5L/min(nor) 7L/min(nor) 8L/min(nor) 1L/min(nor) Rc NPT SW 1/4" 3/8" TC-21 TC-22 TC-23 TC-21/TC-22 TC-23 FLOW RANGE*(1) (FULL SCALE) FLOW CONTROL RANGE RESPONSE TIME FLOW RATE OUTPUT SIGNAL SETTING INPUT SIGNAL ACCURACY. GAS PRESS (MPa) CONTROL P kg/cm 2 (MPa) GAS. TEMP TEMP. DRIFT PRESS DRIFT GAS CONTACT CONNECTION MODEL SPAN ZERO SIZE TYPE TC-21 5mL/min(nor) to 1L/min(nor) TC-22 1 to 2 L/min(nor) TC-23 2 to 1 L/min(nor) 2 to 1% OF FULL SCALE WITHIN 3 sec. (98% RESPONSE) DC to 5V DC to 5V ±1%F.S.(at 25 ) 1MPa 5 to 8% of Primary pressure*(3) 5 to 5 C.1%F.S./ Cmax.5%F.S./ Cmax.1%F.S./(.1MPa)max DC+15V 25mA DC 15V 32mA SUS316, SHOMAC *(2), PTFE, FKM or CR OD 1/4 OD 3/8 Swagelok Rc (=PT), NPT *(1) Flow rate with Nitrogen. In case of measurement of hydrogen (H2) Minimum flow range will be 25mL/min(nor). *(2) Ferrite Stainless Steel material 4 TOKYO KEISO CO., LTD.

5 DIMENSION TC-21 TC-22 TC-23 TOKYO KEISO CO., LTD. 5

6 SUPPORTING INSTRUMENTS EXCLUSIVE CABLES Connection cables are available as follow. Cable ends are properly terminated for immediate connection to devices. TYPE OF CABLE USAGE STANDARD LENGTH SC-T TC-1/TC-2 TCP 2m SC-DS SC-CM- TCP TCSU TCDU TC-1/TC-2 TM-14 2m 2m (Max.1m) TCP UNIT TCP supplies necessary power to TC Controller and TCDU indicator. Also, TCP scales the output from TC controller and feeds to TDCU to indicate flow rate in actual scale. TYPE TCP-1 TCP-3 TCP-5 FOR TC-1/2 FOR TDCU FLOW SETTING OUTPUT +15V 1mA 15V 35mA +5V 2mA +5V±.1% FOR 3 LOOPS FOR 5 LOOPS AC1V±1% 5/6Hz DIMENSION TCP-1 *L=226, =18 for TCP-5 TCP-3 Fixture TCDU INDICATOR TCDU is a "Digital Panel Meter" with 3 1/2 digit indication. Flow rate of the gas is indicated actual industrial unit such as L/min(nor). MODEL INDICATION DIGIT HEIGHT TCDU /2digit 8mm +5V 1mA Panel cut TCSU SETTING DEVICE TCSC is a potentio-meter with 2 digit setting counter. Flow rate can be set with 1/1 resolvability. MODEL SPECIFICATION RESISTANCE TCSU Potentio-Merer with 2 digit setting counter 1k / 1 rotation Panel cut 6 TOKYO KEISO CO., LTD.

1 5 9 SCALE ZERO REF EXT1 EXT2 DIRECT FULL ZERO SET 2 3 4 1 1 5 9 9 6 8 7 SCALE ZERO EXT1 REF EXT2 DIRECT FLOW SET FULL SET ZERO 2 3 4 1 1 5 9 9 6 8 7 TC THERMAL MASS FLOW CONTROLLER

All necessary functions of power supply to the mass flow controllers and scaling indication of flow signal, and flow rate setting function with the change of external/manual setting

72 25 5.5 147 12 Panel cut and installation interval More than 9 TM-1 CONVERTER 67 +.

7 - SYSTEM CONFIGURATION By using separate units CABLE SC-DS UNIT AC 1V TCDU INDICATOR TCSU SETTING DEVICE TC-1 CON- TROLLER CABLE SC-T TCP-1 FOR 1 LOOP TCP-3 FOR 3 LOOPS TCP-5 FOR 5

7 1 5 9 SCALE ZERO REF EXT1 EXT2 DIRECT FULL ZERO SET SCALE ZERO EXT1 REF EXT2 DIRECT FLOW SET FULL SET ZERO TC THERMAL MASS FLOW CONTROLLER TM-14 CONVERTER UNIT TM-14 MINI CONVERTER UNIT is power supply and indication unit which is used in combination with Tokyo Keiso s TC-1, 2 series mass flow controllers. All necessary functions of power supply to the mass flow controllers and scaling indication of flow signal, and flow rate setting function with the change of external/manual setting are provided in DIN 72mm compact housing. Additionally, totalizing pulse output is provided as option for easy composition of the flow-rate regulating system of various gases Panel cut and installation interval More than 9 TM-1 CONVERTER SCALE ZERO REF EXT1 EXT2 DIRECT FLOW SET FULL SET ZERO TOKYO KEISO More than SYSTEM CONFIGURATION By using separate units CABLE SC-DS UNIT AC 1V TCDU INDICATOR TCSU SETTING DEVICE TC-1 CON- TROLLER CABLE SC-T TCP-1 FOR 1 LOOP TCP-3 FOR 3 LOOPS TCP-5 FOR 5 LOOPS With TM-14 CONVERTOR UNIT PROPORTIONAL MIXING PROCESS A GAS FLOW SIGNAL Exclusive cable (SC-CM- ) POWER SUPPLY TM-1 CONVERTER TOKYO KEISO TM-14 Analog output (Totalizing pulse output) AC power supply TM-1 CONVERTER FLOW SET Analog output (Totalizing pulse output) AC power supply TF-5/TF-6 MASS FLOWMETER TOKYO KEISO TC-1, TC-2 TM-14 TC-1/2 CONTROLLER TOKYO KEISO CO., LTD. 7

8 ORDERING INFORMATION Specify the following for order/inquiry THERMAL MASS FLOW CONTROLLER TYPE TC- - - GAS TO BE MEASURED PRIMARY PRESS.. MPa Nor. MPa Min. MPa DIFFERENTIAL PRESS. TEMP. to C MPa FULL SCALE ml/min(nor) L/min(nor) CONNECTION SIZE CONNECTION TYPE 1/4" 3/8" 1/2" 3/4" 1" Swagelok Rc (=PT) NPT VCR VCO SUPPORTING INSTUMENTS UNIT TCP-1 TCP-3 TCP-5 Not required INDICATOR SETTING DEVICE CONVERTER TCDU-8 TCSU TM-14 - (Indication+Setting) Not required Not required Not required EXCLUSIVE CABLE SC-DS SC-T SC-CM- STD. 2m m (Max.2m) STD. 2m m (Max.1m) STD. 2m m (Max.1m) * Specification is subject to change without notice. Head Office : Shiba Toho Building, Shibakoen, Minato-ku, Tokyo Tel : (KEY) ; Fax : overseas.sales@tokyokeiso.co.jp ; URL : 8 TOKYO KEISO CO., LTD.

TC Series FOR THE MASS FLOW CONTROL OF ALL KIND OF GASES THERMAL MASS FLOW CONTROLLER GENERAL FEATURES OPERATION PRINCIPLE

TC Series FOR THE MASS FLOW CONTROL OF ALL KIND OF GASES THERMAL MASS FLOW CONTROLLER GENERAL FEATURES OPERATION PRINCIPLE FOR THE MASS FLOW CONTROL OF ALL KIND OF GASES TC Series THERMAL MASS FLOW CONTROLLER GENERAL TC series are thermal mass flow controllers, a combination of thermal mass flowmeter and control valve. TC