E-Beam Evaporator with thermal evaporation sources - BOC Edwards Auto 500

Transcription

1 Stadad Opeaig Poedue E-Beam Evaporator with thermal evaporation sources - BOC Edwards Auto 500 The BOC Edads Auto eleto-ea eapoaio sste a deposit ulta pue thi ils of ateials ith high elig poits ad ahiee fast deposiio ates. It also featues to theal eapoaio soues alog ith the e-ea soue iside the hae. 1.0 Operation Procedures Toi Fues Whe loadig ad uloadig saples t ot to eathe the fues o etal dust podes fo iside the hae, sie a of the etals a e toi to ihale. The alls of the hae ill e oated ith etals ad the a lake of. Whe leaig the hae use the auu leae to eoe a loose pailes. Please take a moment to review general lab safety information in section 4 of this document. 1.1 Find the e-beam-thermal LOG Book. Sign-in with date, name, advisor s last name, starting/ending thickness monitor #, Start time and End time. Also list which metals are placed in which pocket (if using e-beam), which metals you will deposit and what thickness will be deposited. List any comments as you work, such as problems, etc. If you are using the thermal evaporator, list what type of boat you used and what material and thickness you will deposit. 1.2 On the touch screen, press VENT and wait ~3-4 minutes. DO NOT FORCE THE DOOR OPEN. Gently pull on the handle to check if it is vented. It should open easily. Ope the e-ea shute pessig o the SS uto, o the let side shute otolle. To ope the theal eapoato shutes use the SS o SS utos o the ight side shute otolle. Use the TURRET CONTROLLER KNOB to hoose ou e-ea uile poket desied ad ake sue ou a see the appopiate etal i that uile ad hek that the etal leel is suiiet to use ~>/ full as a iiu. If oe etal is eeded otat leaoo staf. Do ot eoe the uile fo the pokets o hage pokets. To load the theal eapoato, see leaoo staf fo help. Chek the CRY TAL LIFETIME pessig the DATA uto o the Edads FTM thikess oito uil the USAGE light is illuiated. If the alue is aoud o oe, otat leaoo staf to eplae the stal. Mout ou saples ito the CHAMBER:

2 . Take the glass slide otaiig ou saples ad lip the glass slide faig do to the uppe oud plate ith the etal lips o the edge of the holde. DO NOT USE TAPE o the oud etal holde.. You a atah ou saple to the glass slide usig tape, gaphite paste, o sile paste hih ill d ad hold the saple i plae, o the slide. Close the e-ea shute pessig of the SS uto o the let shute otolle. Close the hae doo. Make sue to lit the hadle efoe lathig it do. O the see, pess SEAL. O the see, pess PROCESS ad ait uil the pessue is BELOW - To P fo est deposiio. This ill take ~- hous ie. While ou ait, ou a hek the etal thikess alues usig the DATA uto o the Edads FTM otolle. The hat posted o the fot of the ahie lists difeet etals ad thei oespodig desit, z-alues, ad toolig fatos that should e assiged to eah lae # i the thikess oito. Pess DATA uil the lae light is illuiated. Use the up ad do aos to hoose the desied lae #. Eah ie ou pess the DATA uto ou ill soll though the eteed ues. If a of the ae ioet, otat leaoo staf. Do ot hage a ues to e difeet tha assiged. Ude teiate ou should use the up ad do aos to ete ou desied il thikess i. Pess DATA uil the ate light is illuiated. Reod the pessue i the e-ea Log Book should o elo - To P efoe staig. Make sue the SS uto o the let otolle is OFF let uto. Make sue the REMOTE uto iddle uto o the OURCE HUTTER CONTROL is pessed. The REMOTE uto ill ol ok o the e-ea soue. Make sue the LEFT-ost utos o the UB TRATE HEATER otolle ad the ROTARY WORKHOLDER ae pessed o. The pess the TART uto o the ROTARY WORKHOLDER the ight uto to stat otaio. Tu o the e-beam POWER UPPLY loated o loo, to the let of the ai hae Flip up the tiple eleti iuit eake. Pess the ON/OFF uto o the EB oue Cotol. Tu the CURRENT ko all the a do to MINoute lokise. Pess the GUN uto o the e-ea otol uit. You should see the high oltage eadig ad uet. To egi deposiig etal, VERY SLOWLY tu up CURRENT ko o the poe suppl otol. O aeage, ap up at aout A/i, to edue the stess o the ilaet.

3 Iease the uet uil the desied deposiio RATE is see o the EDWARD FTM let LED displa usuall /s ake sue that this ate is TEADY does t lutuate uh oe tha /s. The ight LED displa ill sho a uig total of deposiio. Oe the desied RATE is ahieed, pess the RUN uto o the THICKNE MONITOR. This ill ope the shute ad stat the deposiio as ell as zeoig the uig thikess eadout o the ight side of the oito. If ou ae deposiig theal eapoaio, ou ust hek the thikess auall ad stop at ou desied thikess. Whe the desied thikess is eahed the shute ill lose autoaiall o auall ou ill stop it. Ate opleio, ap do the CURRENT to A SLOWLY ut the ap do a e doe at a LIGHTLY faste ate tha the ap up. Pess the GUN uto of ad the ON/OFF uto to of o the EB oue Cotol. If ADDITIONAL etals ae eeded, tu the TURRET CONTROLLER KNOB to the desied poket #. Retu to step of the DEPOSITION PROCESS. Repeat this secio for as ay diferet etal layers as desired. Pess of the START uto o the ROTARY WORKHOLDER otolle to stop the otaio. Reod a ial data i the e-ea log ook. Please also ote a poles o aoaliies i the log ook. Wait ~ iutes he the tepeatue is elo o C, the pess EAL. O the touh see, pess VENT. Wait ~ iutes uil the doo opes easil. DO NOT FORCE OPEN THE DOOR OPEN. Reoe ou saple. If ou at to do aothe saple, follo steps staig fo step. Close the hae doo. O the touh see, pess the CYCLE uto to pup the hae do. Leae the sste pupig.

4 Speiiaios / Featues Fou poket eleto-ea soue To idepedet theal eapoaio soues kv high oltage suppl X-Y ea seep, sustate heaig, sustate otaio FTM- uatz thikess oito oue ateials: io, Al, Ge, Ag ad Au, et. Lage o hae: diaete high Fot loadig eales eas aess ito the hae Autoai PLC opeated auu otol sste ith touh see displa eales eas opeaio ad i-situ thikess oitoig Uliate auu: - a - To Pupdo: < i to - a - To ad < i to - a - To Use Reuieets The E-Beam Evaporator with thermal evaporation sources - BOC Edwards Auto 500 must be used by authorized personnel only. All authorized users are expected to read and understand this SOP and follow the operation instructions carefully. No unauthorized personnel may use this equipment. All users must wear appropriate personal protective equipment. To become an authorized user, one must: 1. Complete Environment, Health & Safety (EH&S) training 2. Complete initial orientation and training for the Davis Hall EE Cleanroom 3. Receive training on this piece of equipment from lab personnel 4. Schedule equipment time using the calendar 5. Read and fully understand this SOP

5 4.0 General Safety 4.1 Required Personal Protective Equipment Users must wear coveralls, bouffant caps, shoe covers, safety glasses, and gloves. Shorts, open-toed shoes, high heels, and skirts, are forbidden. 4.2 Emergency Procedures and Contacts For non-life threatening emergencies: use the main cleanroom phone and call the emergency contact #'s listed on the wall or for police / ambulance, call In case of fire or other life threatening emergency: Exit the cleanroom through an emergency exit door. Pull one of the fire alarms located in the main hallway outside of the cleanroom. Dial campus police / ambulance at University after hours laboratory use policy No working alone, use the buddy system! # Revised by Date Modification 1 D. Easo // 2 Daid Easo // Updated ith afet 3 4 5