Introducing the remarkable, a break-through in mass flow control technology

Transcription

1 The mass flow controller, is a key piece of semiconductor manufacturing equipment. Its quality and efficiency play a major role in the success or failure of the semiconductor manufacturing process. HORIBA STEC, a company that has consistently introduced high-quality, highly functional products to the demanding semiconductor manufacturing market, and thereby grown its worldwide market share to over 30%* 1, has recently developed a new mass flow controller, one that breaks the mold completely and will change the future of mass flow control technology. That new mass flow controller is the SEC-Z00X. It provides all the mass flow functions customers need, including the flexibility to handle different gas types and flow volumes. The customer him or herself can alter its specifications to suit changing needs*. The unit is also RoHS compliant, which makes it the perfect environmentally friendly tool for improving corporate value. The highly functional, high added value X is brimming with previously unknown charm. The world is witnessing the birth of a mass flow controller that will change the future of the semiconductor industry., revealed for the first time * 1 From VLSI's 007 Research Report. * Multi-gas, multi-range function Quality and dependability The superior dependability you expect from HORIBA STEC. Industry leader HORIBA STEC, is a brand hailed by equipment manufacturers throughout the world, one of many indications that HORIBA STEC consistently supplies high-quality, highly dependable products that meet the toughest standards. Reliable supply HORIBA STEC quickly and reliably supplies equipment to its customers through its three main bases: Kyoto, which acts as HORIBA STEC s headquarters; Aso, the HORIBA Group s mass production factory, which features the latest in production equipment; and two bases in the United States (CA, TX), which act as ultra-quick suppliers. * The new Aso factory was completed in October 00. Global support A reliable support system with an international network Using a network that has branches throughout the world, HORIBA STEC s highly skilled engineers offer complete support for all HORIBA STEC products. Introducing the remarkable, a break-through in mass flow control technology RoHS compliant Complying with all RoHS regulations The Corporate Social Responsibility (CSR) of companies involves, among other things, working to protect the environment. As a company within the HORIBA Group, a leader in environmental analysis equipment, HORIBA STEC is always striving to develop and manufacture environmentally sound products. RoHS regulations: RoHS stands for Restriction of Hazardous Substances and is a set of regulations enforced in the EU to limit the use of six hazardous substances (lead, mercury, cadmium, hexavalent chromium, polybrominated biphenyls (PBBs) and polybrominated diphenyls (PBDEs)), in electric and electronic components. 1

2 We never compromise on performance. High accuracy High-speed response throughout the flow rate range High accuracy ±1.0% S.P. 's linearity is compensated by polynomial approximated curve. This achieves high accuracy for all flow control ranges. For the purpose of advancement of actual gas accuracy, the calibration data of various process gases are measured by HORIBA STEC standard gas measurement system. Gas flow rate characteristic curve Sensor output HBr ±1.0% S.P. : 100% F.S. ±0.% F.S. : % F.S. Gases used in semiconductor processes have a variety of different properties. The flow rate calibration function used in the SEC-Z00X series uses detailed measurement data about the flow rate characteristics of each type of process gas, across different flow rate ranges, as a basis for calibration. This huge store of measurement data paired with highly reliable sensors and the latest in calibration technology ensures extremely precise process gas flow rate control. N Ar Sensor output (V) % 80% 100% y=ax +bx +cx 3 +dx +ex+f (% S.P.) Traceability The National Institute of Standards and Technology (NIST, a U.S. organization) certifies the traceability of the flow rate calibration used by the SEC-Z00X series. These units use a flow rate calibration unit that meets NIST calibration standards. National Institute of Standards and Technology (NIST) Standard flow rate unit: Designed and created by HORIBA STEC SEC-Z00X series % 0% 60% 80% F.S. ±1%F.S. S.P. ±1%S.P. Flow% 100% High-precision standard flow rate system The latest high-precision standard flow rate system is installed at HORIBA STEC s bases in the United States and Japan. This system, which uses a build-up method, can measure the flow rate of process gases, including those containing a high level of toxic substances, and volatile gases. The measured data is centrally managed through a database maintained at headquarters, KYOTO, JAPAN which allows HORIBA STEC to continually improve process RENO, U.S.A gas flow rate control precision. High speed response SEC-Z00X is installed with a newly developed "Variable PID system", which can achieve 1 second response to all setting points. Variable PID is continuously changing depending on setting flow points. This allows the PID factor to be optimized when you change full scale flow and gase. Response speed comparison, with and without the PID algorithm Response speed secs. 3 secs. % Analog (traditional): Single PID coefficient SEC-Z00X: PID algorithm that responds to the flow rate setting 10% 0% setting 100% SEC-Z00X 0 100% F.S. response characteristics Before changed full-scale (%) (%) (%) 0 SET OUT After changed full-scale to % SEC-Z00X 0 10% F.S. response characteristics Before changed full-scale After changed full-scale to % SET OUT SEC-Z00X 0 % F.S. response characteristics Before changed full-scale After changed full-scale to % SET OUT SET OUT SET OUT SET OUT 3

3 The best in quality for you Multi-gas, multi-range solution HORIBA STEC has made it possible for the user to change the type of gas or full-scale flow rate on site. Our special Z00 configuration software makes it possible to change these specifications at will. Best of all, the changes can be made without removing the mass flow controller from the gas panel or piping. This reduces the number of spare mass flow controllers users need to store, and helps save both time and money. SiF SiH SF6 CO NF3 Example: SEC-Z00X MR.MG-0 Example: SEC-Z00X MR.MG-0 Ar CH CF CF6 O Suitable for multiple types of gas ly change types of gas H N 100 SCCM Suitable for multiple ranges ly change the full scale N 1000 SCCM 0 to 1000 SCCM PH3 N Specifications can easily be changed on site Ar 110 SCCM BH6 SCCM N 0 SCCM to 0 SCCM Changing the full-scale flow rate Even when the same full-scale values are used, the MR/MG numbers associated with the full-scale flow rate values for the calibration gas may vary, due to variations in the thermal conductivity of the different process gases. To increase flow rate calibration precision, HORIBA STEC offers the following lineup of MR/MG numbers. List of full-scale flow rates for different gases Gas type MR/MG number SEC-Z1 X series R R SEC-Z X series N Ar H SF6 HBr WF Minimum flow rate maximum flow rate Unit : SCCM Configuration software that allows the user to alter specifications on-site The SEC-Z00X offers multi-gas, multi-range functionality, thanks to its configuration software. This software makes it possible to select MR/MG numbers simply by entering the type of gas being used and the flow rate range, and also features a handy N gas conversion feature for flow rate measurements using N gas during receipt inspections. To ensure that the software is used without error, HORIBA STEC offers software operation seminars. For information on these seminars, please contact your HORIBA STEC representative. RS3C cable PC (Windows) SEC-Z00 Configuration Software Computer Software Name Communications converter (serial) Conversion adapter (CA-DP9RJ) RS3C cable LAN cable USB serial converter Label printer RS3C cable Serial Converter PAC-DX or similar power supply +1, -1 Volts DC CA-DP9RJ Serial Converter SC-EDH signal cable SEC-Z00X Printer RS8 LAN cable Notes OS: Japanese or English, Windows 000 / XP / Vista Configuration software HORIBA STEC offers seminars detailing the use of the software. RS-8 Communications converter to LAN cable PC to communications converter LAN cable for SEC-Z00X communications Required for computers that do not have a serial port Please consult your HORIBA STEC representative for further information The customer can supply all the system components listed above, if desired, except for the software, which must be provided by HORIBA STEC. Please consult your HORIBA STEC representative for more detailed specifications. 6

4 Product specifications Digital/Analog transmission models Mass flow controller model SEC-Z1KX SEC-Z1MGX SEC-Z1X SEC-ZMGXN SEC-ZXN SEC-ZMGX SEC-ZX SEC-Z3MGX SEC-ZMGX SEC-Z3KVX SEC-ZKVX Mass flow controller model Mass flow meter model SEF-Z1KX SEF-Z1MGX SEF-Z1X SEF-ZMGXN SEF-ZXN SEF-ZMGX SEF-ZX SEF-Z3MGX SEF-ZMGX SEF-Z3KX SEF-ZKX Mass flow meter model MR/MG number #R01: 10 SCCM (N conversion flow rate) 1/ SCCM #R1.: 17. SCCM #01: 30 SCCM #1.: SCCM #0: 100 SCCM #.: 17 SCCM #03: 300 SCCM #3.: 0 SCCM #0: 1 SLM #.: 1.7 SLM #0: 3 SLM MR/MG number #6.: SLM #07: 30 SLM #08: 0 SLM 100SLM 00SLM 100SLM 00SLM (N conversion flow rate) #.:. SLM #06: 10 SLM Valve Type O: Normally open C: Normally closed O: Normally open C: Normally closed C: Normally closed Valve Type at fully closed control valve % F.S. % F.S. % F.S. at fully closed control valve -100% of F.S. -100% of F.S. -100% of F.S. measuring range (SEF) measuring range (SEF) * ±1.0% F.S. ±1.0% S.P. ( > % F.S.) ±0.% F.S. ( % F.S.) ±1.0% S.P. (flow rate > 3% F.S.) ±0.3% F.S. (flow rate 3% F.S.) ±1.0% S.P. (flow rate > 3% F.S.) ±0.3% F.S. (flow rate 3% F.S.) * Operating temperature to 0 C (recommended temperature range: 1 to C) to 0 C (recommended temperature range: 1 to C) to 0 C (recommended temperature range: 1 to C) Operating temperature Response 1 second: Over full flow rate range 1 second: Over full flow rate range 1. second: Over full flow rate range (typically 1 second) Response Linearity Linearity Repeatability Repeatability Operating differential pressure 0 to 300 kpa (d) 0 to 300 kpa (d) #., #06: 100 to 300 kpa (d) 00 to 300 kpa (d) 100 to 300 kpa (d) 00 to 300 kpa (d) Operating differential pressure Operating differential pressure (SEF) Operating differential pressure (SEF) MAX. Operating pressure 0 kpa (g) 0 kpa (g) 300 kpa (g) MAX. Operating pressure Pressure resistance 1000 kpa (g) 1000 kpa (g) 1000 kpa (g) Pressure resistance Leak Integrity x 10-1 Pa m3 /s (He) x 10-1 Pa m3 /s (He) x 10-1Pa_m3/s(He) Leak Integrity setting signal 0.1 to V DC (% to F.S.); Input impedance 1 MΩ or higher 0.1 to V DC (% to F.S.); Input impedance 1 MΩ or higher 0. to V DC (% to F.S.); Input impedance 1 MΩ or higher setting signal output signal 0 to V DC (0% to F.S.); Minimum load resistance kω or higher 0 to V DC (0% to F.S.); Minimum load resistance kω or higher 0 to V DC (0% to F.S.); Minimum load resistance kω or higher output signal Digital interface With address function: RS-8 (transmission speed 38,00 bps) F-Net Protocol With address function: RS-8 (transmission speed 38,00 bps) F-Net Protocol With address function: RS-8 (transmission speed 38,00 bps) F-Net Protocol Digital interface Wetted materials 316L Stainless Steel (polished surface) 316L Stainless Steel (polished surface) 316L Stainless Steel (polished surface), PTFE, magnetic stainless steel Wetted materials +1V ±% 10mA -1V ±% 10 ma +1V ±% 10mA -1V ±% 10 ma +1V ±% 10 ma -1V ±% 0 ma +1V ±%, 10 ma -1V ±%, 0 ma Signal response Analog: D-Sub 9-pin (TOP) Digital: LAN jacks (TOP) Analog: D-Sub 9-pin (TOP) Digital: LAN jacks (TOP) Analog: D-Sub 9-pin (TOP) Digital: LAN jacks (TOP) Signal response Standard Fitting *3 1/ inch VCR equivalent Option: 1.1 inch IGS, 1. inch IGS 1/ inch VCR equivalent Option: 1.1 inch IGS 1. inch IGS 1/ inch VCR equivalent Option: 1. inch IGS 3/8 inch VCR equivalent Option: 1. inch IGS 1/ inch VCR equivalent Standard Fitting *3 Mounting orientation Mounting orientation The gas type and full scale settings for the SEC(SEF)-Z1MGX, ZMGX, and ZMGXN can be changed by the operator, using special software. * The flow rate precision guaranteed temperatures conform to SEMI E6-196 standards. The precision is that associated with the full-scale MR and MG number values. *3 IGS: Integrated Gas System * SCCM and SLM are notations indicating the gas flow rate (ml/min, L/min, at 0 C and kpa). DeviceNet transmission models Mass flow controller model SEC-Z1KX SEC-Z1MGX SEC-ZMGXN SEC-ZMGX SEC-Z3MGX SEC-ZMGX SEC-Z3KVX SEC-ZKVX Mass flow controller model Mass flow meter model SEF-Z1KX SEF-Z1MGX SEF-ZMGXN SEF-ZMGX SEF-Z3MGX SEF-ZMGX SEF-Z3KX SEF-ZKX Mass flow meter model MR/MG number #R01:10SCCM (N conversion flow rate) 1/ SCCM #R1.:17.SCCM #1.:SCCM #.:17SCCM #3.:0SCCM #.:1.7SLM #01:30SCCM #0:100SCCM #03:300SCCM #0:1SLM #0:3SLM MR/MG number #6.:SLM #07:30SLM #08:0SLM 100SLM 00SLM 100SLM 00SLM (N conversion flow rate) #.:.SLM #06:10SLM Valve Type O: Normally open C: Normally closed O: Normally open C: Normally closed C: Normally closed Valve Type at fully closed control valve % F.S. % F.S. % F.S. at fully closed control valve -100% of F.S. -100% of F.S. -100% of F.S. measuring range (SEF) measuring range (SEF) * ±1.0%F.S. ±1.0% S.P. ( > % F.S.) ±0.% F.S. ( % F.S.) ±1.0% S.P. ( > 3% F.S.) ±0.3% F.S. ( 3% F.S.) ±1.0% S.P. (flow rate > 3% F.S.) ±0.3% F.S. (flow rate 3% F.S.) * Operating temperature to 0 C (recommended temperature range: 1 to C) to 0 C (recommended temperature range: 1 to C) to 0 C (recommended temperature range: 1 to C) Operating temperature Response 1 second: Over full flow rate range 1 second: Over full flow rate range 1. second: Over full flow rate range (typically 1 second) Response Linearity Linearity Repeatability Repeatability Operating differential pressure 0 to 300 kpa (d) 0 to 300 kpa (d) #., #06: 100 to 300 kpa (d) 00 to 300 kpa (d) 100 to 300 kpa (d) 00 to 300 kpa (d) Operating differential pressure Operating differential pressure (SEF) Operating differential pressure (SEF) MAX. Operating pressure 0kPa(g) 0kPa(g) 300 kpa (g) MAX. Operating pressure Pressure resistance 1000kPa(g) 1000kPa(g) 1000 kpa (g) Pressure resistance Leak Integrity x 10-1 Pa m3 /s (He) x 10-1 Pa m3 /s (He) x 10-1 Pa m3 /s (He) Leak Integrity Digital interface DeviceNet Protocol DeviceNet Protocol DeviceNet Protocol Digital interface Wetted materials 316L Stainless Steel (polished surface) 316L Stainless Steel (polished surface) 316L Stainless Steel (polished surface), PTFE, magnetic stainless steel Wetted materials Conforming to ODVA standards, DC V,.0 VA Conforming to ODVA standards, DC V,.0 VA Conforming to ODVA standards,dc V, 7. VA Conforming to ODVA standards,dc V, 7.0 VA Standard Fitting *3 1/ inch VCR equivalent Option: 1.1 inch IGS, 1. inch IGS 1/ inch VCR equivalent Option: 1.1 inch IGS 1. inch IGS 1/ inch VCR equivalent Option: 1. inch IGS 3/8 inch VCR equivalent Option: 1. inch IGS 1/ inch VCR equivalent Standard Fitting *3 Mounting orientation Mounting orientation The gas type and full scale settings for the SEC(SEF)-Z1MGX, ZMGX, and ZMGXN can be changed by the operator, using special software. * The flow rate precision guaranteed temperatures conform to SEMI E6-196 standards. The precision is that associated with the full-scale MR and MG number values. *3 IGS: Integrated Gas System * SCCM and SLM are notations indicating the gas flow rate (ml/min, L/min, at 0ÅãC and kpa). 7 8

5 Product specifications External dimensions Digital/Analog transmission models DeviceNet transmission models External dimensions A C D F H I SEC-Z3_X series ZERO ADDRESS MSD LSD ZERO ADDRESS 6 6 DATA RATE 1kb 8 0kb 0 PGM 0 00kb MSD LSD PGM NET STATUS MOD H SEC-Z3-MGX / SEC-Z-MGX -M DEPTH ر M DEPTH B E G J A B C D E Connector for digital transmission Analog connector ZERO adjust switch Address switch LED indicator Flow Symbol Name Explanation Symbol Name Explanation RS-8 transmission Daisy chain available Analog transmission and power supply Switch for zero adjust Set from 0 x 01 to 0 x 99 (Not available from 0 x A to F) Analog transmission: Green right on Digital transmission : Green right flashing * Red right on when alarming and zero offset error F G H I J Flow DeviceNet connector Baud rate setting switch ZERO adjust switch MAC ID setting switch LED Indicator DeviceNet transmission and shield type micro connector Set baud rate Switch for zero adjust Set from 00 to 63 NET :Status for network MOD :Status for node D A W I B C T Ø SEC-Z_X series M 8DEPTH Model H T W 1/ B 1/ L I VCR type 3/8 G 1/ G A B C D Digital/Analog transmission models Selecting a model SEC-Z1KX SEC-Z1MGX SEC-Z1MGX O T 1 _, MR.MG-0, 100SCCM, CR B, SUC, (N), SEC-Z1MGX C _ 1 1, MR.MG-0, 10SLM, 1C 3, SUC, (H), SEC-Z3KVX C T 1 _, _, 100SLM, 6CR J, SUC, (N), SEC-ZMGXN SEC-ZXN SEC-ZMGX 13±1 38.±0. Compatible with 1. inch IGS SEC-ZX 13±1 38.±0. Compatible with 1. inch IGS Model Valve type (for SEC) O: Normally open C: Normally closed DeviceNet connector position With DeviceNet only, select S or T. T: Top of case S: Side of case Number of calibration curves 1: Standard DeviceNet output range Blank: Not a DeviceNet model 1: output 100% F.S. (compatible with SEC-Z_MGX) 3: output 133% F.S. (compatible with SEC-Z_MGX) : output % F.S. (compatible with SEC-Z_MGX) MR/MG numbers Blank: Compatible with Z_KVX series Please specify MR/MG numbers. For details, please see the specifications. Types of gas Blank: Type of gas is not specified by MR/MG compatibility Gas name Internal surface polish SUC: Standard for all models * * No. necessary to enter "Polished surface" when your ordering. Distance between joints B : 106 mm J : 10. mm E : 16 mm L : 1 mm G : 177 mm M : 17 mm H : 179 mm IGS joint distance between down ports : 79.8 mm 3 : 9 mm : 96 mm Joint CR: 1/ inch VCR male type fitting 6CR: 3/8 inch VCR male type fitting 8CR: 1/ inch VCR male type fitting IS: 1/ inch Swagelok male type fitting 6IS: 3/8 inch Swagelok male type fitting 1C: 1.1 inch C-seal, i.d. 1/ inch 1W: 1.1 inch W-seal, i.d. 1/ inch W: 1. inch, W-seal, i.d. 1/ inch S: 1. inch, CS-seal, i.d. 1/ inch B: 1. inch, B-seal, i.d. 1/ inch SEC-Z3MGX 139±1 SEC-ZMGX 139±1 SEC-Z3KVX 1±1 SEC-ZKVX 19±1 DeviceNet transmission models SEC-Z1KX SEC-Z1MGX SEC-ZMGXN SEC-ZMGX 13±1 SEC-Z3MGX 10±1 SEC-ZMGX 10±1 SEC-Z3KVX 1±1 SEC-ZKVX 19±1 1.1-inch compatible models Distance between ports 9 mm 38.3± ±0. 38±0. 0.8±0. 38.± ± ±0. 38±0. 0.8± mm Accumulated joint mounting dimensions 8. mm 10.±1 10.±1 1.-inch compatible models Distance between ports 79.8 mm 93 mm Compatible with 1. inch IGS 30 mm 38. mm 1.-inch compatible models ( SEC-Z3-MGX / SEC-Z-MGX ) mm -Ø. mm 1.1 mm mm 10 mm 9 10

6 Connection examples Software Digital transmission PC PLC Converter Daisy chain connection Using an external power source and control signal SC-EAH series signal cable Using PAC-S6 control unit SC-EDH series signal cable SC-EBR cable Analog transmission PAC -S6 DeviceNet transmission Master PLC bus line +V Distribution Power Supply (PAC Series) setting signal: 0 to V DC output signal: 0 to V DC Valve voltage monitor (option) Valve control signal: Fully open/fully closed : ±1 V DC output alarm (minimum/maximum) Program control External control mode. setting. Valve fully open/fully closed signal, etc. Power RS8 digital transmission connector Pin No Connector used: RJ- Analog connectors Pin No Signal name Signal ground [D. COM] Signal ground [D. COM] N.C. Serial output/input (-) Serial output/input (+) N.C. N.C. N.C. Signal name Valve open/closed input output signal: 0 to V DC Power source: +1V DC Power source: Common * Power source: -1V DC setting signal: 0 to V DC Signal: Common * Signal: Common * NC Connector used: D-subminiature 9-contact-pin connector (with M3 fastening screws) SEF series is N.C. * The pin No. Common power source and pin No. 7 Common signal are not connected within the mass flow controller. The pin No. 7 and No. 8 Common signals are connected within the mass flow controller. DeviceNet transmission connectors 3 1 ediagnostic digital mass flow controller monitoring system The importance of preventative maintenance for production equipment in semiconductor device manufacturing plants is widely acknowledged. In fact, preventative maintenance is considered a critical factor for increasing productivity. HORIBA STEC offers a preventative maintenance system for its mass flow controllers, which are considered key devices in the semiconductor manufacturing process. The mass flow controller s preventative maintenance system monitors the flow rate control conditions and the position of the valve, and determines the status of overall flow rate control in the mass flow controller. The system informs the user of what sort of maintenance is required before the mass flow controller becomes unable to control the flow rate. It is considered difficult to predict the maintenance required for a mass flow controller s functioning by monitoring its flow control status alone. HORIBA STEC s mass flow controller monitoring system collects information on the control status of the digital mass flow controllers (analog control) in semiconductor manufacturing equipment using digital communications, and monitors whether or not there is a need for any preventative maintenance. This system is compatible with LAN (TCP/IP) networks, and a single superior Surveillance Server can be used to monitor the mass flow controllers in each semiconductor manufacturing system. It s also Sample system setup Surveillance System HUB LAN LAN Equipment Equipment Equipment Logging unit Logging unit Logging unit Controller Controller Controller relatively easy to create a wide area network for this monitoring system. The logging unit can be used to log the flow rate control status of digital mass flow controller in each semiconductor manufacturing system. The Surveillance Server is connected to the logging unit through a LAN. The logging unit monitors the flow rate control conditions and the position of the flow control valve, and determines whether any preventative maintenance is necessary. This data can be used to investigate the reasons for problems or to review changes in the gas pressure, in addition to determining whether or not preventative maintenance is required. Digital mass flow controller monitoring software; compatible with RS-8 and DeviceNet transmission HORIBA STEC also offers monitoring software that is compatible with HORIBA STEC s digital mass flow controller protocol (F-Net protocol) and is able to monitor all mass flow controller related transmissions. This software makes it easy to check the status of transmissions between control units such as the PLC or PC and the SEC-Z00X series units. In addition to checking if the digital transmission cable and signal converter are installed correctly, it can use the digital mass flow controller s address transmissions to monitor and control installation information and valve operating status. When DeviceNet transmission is used, the software operates using digital transmission information only. In fact, with DeviceNet, it is possible to monitor the control status of the digital mass flow controller using just this software, a PC, and the DeviceNet transmission unit; there is no need for a special, additional control unit mounted on the equipment. Easy-to-use digital mass flow controller monitoring software Digital mass flow controller control software The digital mass flow controller monitoring system uses ediagnostic monitoring software. HORIBA STEC also offers control software that is compatible with The mass flow controller s control status is monitored through digital transmissions, and HORIBA STEC s digital mass flow controller protocol (F-Net protocol). then logged and saved in a PC. The ediagnostic software also features a function that In addition to offering digital mass flow controller flow rate control (step outputs alarms as necessary based on the monitored flow rate control status and valve control, loop control functions, etc.), it is also designed to output the aperture information. Real-time monitoring makes it possible to go back and review the aperture control signal for valves mounted on the same gas line. circumstances surrounding changes in the control status and gas supply conditions. The Thanks to these features, this software offers optimal small-scale gas monitoring information is also extremely useful in investigating the causes of any supply system control. malfunctions that arise. DeviceNet cable SEC-Z0X SEC-Z0X SEC-Z0X DeviceNet communications DeviceNet is an open and global field network that was developed by the ODVA (Open DeviceNet Vendor Association, Inc.) as a unique means for supporting standardization worldwide. The ODVA offers EDS (Electronic Data Sheet) specifications, which are designed to allow shared operability and programming in a multi-vendor environment. The ODVA also carries out conformance testing. Devices that have passed the ODVA s conformance testing can display the logo. Pin No. 1 3 Signal name Drain V+ V- CAN_H CAN_L Advantages. Reduces costs, since AD/DA converters and I/O boards are not required.. The user simply connects the devices through network cables and makes address settings. This reduces both the number of processes required and the time involved.. No special accessories are necessary for the devices. Users can simply choose DeviceNet conforming products, which reduces costs. Structure and operating principles The general structure of the SEC-Z00X series of mass flow controllers is shown in the diagram to the right. These mass flow controllers have a flow rate measurement section that includes a sensor, bypass, flow rate control valve, and special circuitry. A CPU is part of the circuitry, which makes it both multi-functional and highly efficient. The gas is input from an Inlet joint, and is divided so that it flows over both the flow rate sensor and a bypass. The sensor measures the mass flow rate of the gas, and the flow rate control valve modifies the flow rate so that the difference between the measured flow rate and the flow rate received from the external flow rate setting signal is 0 (zero). The units feature a loop circuit, so even if there is a secondary pressure change or ambient temperature change that could affect the supply pressure of the introduced gas, the flow rate is instantaneously corrected, which ensures stable flow rate control. Internal structure sensor Bypass Inlet output signal Driver/ Receiver CPU D/A converter setting signal D/A converter Valve driver circuit Piezo actuator control valve Metal diaphragm Outlet 11 1

7 Global support The HORIBA Group s international network ensures complete support for customers. U.K. NETHERLANDS GERMANY FRANCE KOREA CHINA TAIWAN U.S.A. SINGAPORE Principal branches overseas TAIWAN HORIBA STEC Co., Ltd TAIWAN Branch 3F., No.18, Lane 676, Jhonghua Rd., Jhubei City, Hsinchu County 30, Taiwan (R.O.C.) PHONE: (886) FAX: (886) Tainan Office 1F., No.117, Chenggong Rd., Shanhua Township, Tainan County 71, Taiwan (R.O.C.) PHONE: (886) FAX: (886) U.S.A. HORIBA/STEC lnc. Santa Clara Head Office (Technology Center) 36 Scott Boulevard Santa Clara, CA 90 PHONE: (1) FAX: (1) Austin Office 9701 Dessau Rd., Suite 60, Austin, TX 787 PHONE: (1) FAX: (1) Portland Office 100 SW Nimbus Ave.Suite L-,Portland, OR 973 PHONE: (1) FAX: (1) Reno Office (R&D Center) 60 Spice Island Drive, #, Sparks, NV 8931 PHONE: (1) FAX: (1) Dallas Office 670 International Parkway, Ste. 170 Richardson, TX 7081 PHONE: (1) FAX: (1) New Hampshire Office 31 Derry Road, Suite 13 Hudson, NH 0301, U.S.A. PHONE: (1) FAX: (1) Tempe Office 0 S. Industrial Park Drive. Tempe, AR. 88, U.S.A. PHONE: (1) FAX: (1) KOREA HORIBA STEC KOREA, Ltd. 110, Suntech-City, 13-1, Sangdaewon-Dong, Jungwon-Ku, Sungnam-City, Kyungki-Do, 6-7, Korea PHONE: (8) FAX: (8) U.K. HORIBA INSTRUMENTS Ltd. Kyoto Close, Summerhouse Rd., Moulton Park, Northampton NN3 6FL England PHONE: () FAX: () FRANCE HORIBA INSTRUMENTS Ltd. BURO club Gieres, Avenue de Vignate Gieres, France PHONE: (33) FAX: (33) NETHERLANDS HORIBA INSTRUMENTS Ltd. Bijsterhuizen 11-8, 66 AS Nijmegen, The Netherlands PHONE: (31) FAX: (31) GERMANY HORIBA EUROPE GmbH Zur Wetterwarte 10 Haus Dresden Germany PHONE: (9) FAX: (9) SINGAPORE HORIBA INSTRUMENTS (SINGAPORE) Pte. Ltd. 10 Ubi Crescent, Lobby B #0-11/1 Ubi techpark Singapore 086 PHONE: (6) FAX: (6) CHINA HORIBA TRADING (SHANGHAI) Co., Ltd. Room 1701, United Plaza 168 Nanjing Rd. West Shanghai 0000 CHINA PHONE: (86) FAX: (86) SHANGHAI Service Center Rm.303, No.8, Lane887, Zu-chong-zhi Rd., Zhangjiang Hi-tech Park, Shanghai 0103, CHINA PHONE: (86) FAX: (86) Principal branches in Japan HEAD OFFICE 11-, Hokodate-cho, Kamitoba, Minami-ku, Kyoto, Japan PHONE: (81) FAX: (81) ASO FACTORY Torikokogyodanchi, 38-11, Kohmaibata, Ohaza-torikoaza, Nishihara-mura, Aso-gun, Kumamoto, PHONE: (81) FAX: (81) SENDAI SALES OFFICE 9F Izumi-chuuoh Building, Izumi-chuuoh, Izumi-ku, Sendai-shi, Miyagi, PHONE: (81) FAX: (81) TOKYO SALES OFFICE Arute Bldg HigashiKanda. F, 1-7-8, Higashi-Kanda, Chiyoda-ku, Tokyo, PHONE: (81) FAX: (81) NIRASAKI SALES OFFICE 7-1, Wakao, Ohkusa-machi, Nirasaki-city, Yamanashi, PHONE: (81) FAX: (81) NAGOYA SALES OFFICE Sumitomo Seimei Chikusa nd Building 6F, Aoi, Higashi-ku, Nagoya-shi, Aichi, PHONE: (81) FAX: (81) KYUSHU SALES OFFICE Torikokogyodanchi, 38-11, Kohmaibata, Ohaza-torikoaza, Nishihara-mura, Aso-gun, Kumamoto, PHONE: (81) FAX: (81) Aso Kyushu Kyoto Sendai Nirasaki Tokyo Nagoya 13 1

8 High Performance Mass Flow Controller High Performance Mass Flow Controller Please read the operation manual before using this product to ensure safe and proper handling of the product. The contents of this catalog are subject to change without prior notice, and without any subsequent liability to this company. It is strictly forbidden to copy the content of this catalog in part or in full. All brand names, product names and service names, in this catalog are trademarks or registered trademarks of their respective companies. S-BE33A