GAS Solenoid Actuator Type Mass Flow Controllers

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Ruth Garrison
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5 GAS Solenoid Actuator Type Mass Flow Controllers Smaller, less expensive equipment offering more functions is now considered a primary factor in increasing productivity.

1 5 GAS Solenoid Actuator Type Mass Flow Controllers Smaller, less expensive equipment offering more functions is now considered a primary factor in increasing productivity. The demand for smaller, more cost-efficient and functional equipment applies with equal force to gas supply systemsand therefore to the key production devices known as mass flow controllers. HORIBA STEC, which has always offered products that provide the performance required for the latest processes, has created the world s smallest class of mass flow controllers, the -G series, and solenoid actuator type mass flow controllers that offer terrific cost performance.

Solenoid Actuator Type Mass Flow Controllers 6 -GA series World s smallest class: Models that can fit into a 3 mm x 3 mm design sworld s smallest class: The same 3 mm x 3 mm size as other devices in

shigh speed replacement: Polishing of the gas contact area is standard, and since the gas flow passage volume has been reduced by % (compared with previous models), the series offers greatly improved

2 Solenoid Actuator Type Mass Flow Controllers 6 -GA series World s smallest class: Models that can fit into a 3 mm x 3 mm design sworld s smallest class: The same 3 mm x 3 mm size as other devices in integrated gas panels. shigh speed replacement: Polishing of the gas contact area is standard, and since the gas flow passage volume has been reduced by % (compared with previous models), the series offers greatly improved gas replacement. sfast response: Quick start function included. sauto-close function is standard. scontributs to the creation of more compact, lighter weight, and more highly functional integrated gas panels. Ultra-compact mass flow controllers -E4J series Metal seals at a low cost Mass flow controllers sfeature a metal O-ring: Can be used with corrosive gases. serror alarm function: A red light that illuminates in the main unit s LED when an error occurs and an alarm output function (at point of contact) are standard. slow cost: The components have been redesigned for improved cost efficiency. -E4 series Low cost models that can be used to control from extremely small to large flow rates scompatible with a wide variety of flow rate control needs: Flow rate control between.2 SCCM and SLM (N2) available in a single series. ssuitable for a wide range of uses: Already in use in general production at many factories. slow cost: A line up of models that offer terrific cost performance: -E4MK3/EMK3 Mass flow controllers

3 7 GAS -G series Model mass flow ( controller ) mass flow ( meter ) Materials at gas contact area Valve type Standard flow rate range (N2 equivalent F.S.) Flow rate control range (for series) Flow rate control range (for SEF series) Response speed Accuracy Linearity Repeatability Operating differential pressure (for series) Operating differential pressure (for series) Maximum operating pressure Pressure Resistance Leak Integrity Seal method Operating temperature Flow rate setting signal Flow rate output signal Drive power source Standard Fitting Standard functions Unit weight //3// //3/ SCCM SLM to 3kPa (d) * For series. * SCCM and SLM are symbols indicating gas flow rate (ml/min, L/min at C,.3 kpa). GAMC GAM M: type, SUS36L, PTFE, magnetic stainless steel Close at power-off: C 2 SLM 2 to % F.S. (fully closed at settings of 2% or lower) to % Less than sec (T8) ± % F.S. ±.5% F.S. ±.2% F.S. to 3kPa (d) 3kPa (d) 3 kpa (G) MPa (G) 5 x -2 Pa m 3 /s (He) Metal seal 5 to C (accuracy guaranteed between 5 and 45 C). to 5VDC (Input impedance : more then MΩ) to 5VDC (Minimun load resistance 2kΩ) +5 VDC ± 5%, 6 ma; -5 VDC ± 5%, ma, 3. VA CS seal/w seal/b seal/c seal Quick start function*, auto-close function*, auto-zero function*, interior surfaces polished -G: 3 g; SEF-G: 2g *4 3/5 SLM to 3kPa (d) -E4J series Model Materials at gas contact area Valve type Standard flow rate range (N2 equivalent F.S.) Flow rate control range Response speed Accuracy Linearity Repeatability Operating differential pressure Maximum operating pressure Pressure Resistance Leak Integrity Seal method Operating temperature Flow rate setting signal Flow rate output signal Drive power source E-J //3// //3/ SCCM /2/3/5/ SLM to 3kPa (d) +5 VDC ± 5%, 6 ma -5 VDC ± 5%, ma 3.2 VA Standard Fitting * SCCM and SLM are symbols indicating gas flow rate (ml/min, L/min at C,.3 kpa). M: type, SUS36L, PTFE Close at power-off: C 2 to % F.S. Less than sec (T8) ± % F.S. ±.5% F.S. ±.2% F.S. 3kPa (G) MPa (G) x - Pa m 3 /s (He) Metal seal 5 to C (accuracy guaranteed between 5 and 35 C). to 5VDC (Input impedance : more then MΩ) to 5VDC (Minimun load resistance 2kΩ) /4VCR type E-4J /3 SLM to 3kPa (d) +5 VDC ± 5%, 6 ma -5 VDC ± 5%, ma 3. VA -E4 series Model Types of gas * - - SEF- - SEF- mass flow ( controller ) mass flow ( meter ) Materials at gas contact area Valve type Standard flow rate range (N2 equivalent F.S.)* Flow rate control range (for series) Flow rate control range (for SEF series) Response speed Accuracy Linearity Repeatability Operating differential pressure (for series) Usage pressure (for SEF series) Pressure Resistance Leak Integrity Operating temperature Flow rate setting signal Flow rate output signal Drive power source E4/E4MK3 E4 Non-corrosive gases (the MK3 model can handle N2, O2, air, H2, Ar, and He) SUS36L, Viton, PTFE, magnetic stainless steel //3/// /3/ SCCM /2/3/5/ SLM 2 to % F.S. ±.2% F.S. SCCM to 5 SLM: to 3 kpa (d); to 3 SLM: to 3 kpa (d) 3 kpa (G) E/EMK3 E /3 SLM x -8 Pa m 3 /s (He) 5 to C (accuracy guaranteed between 5 and 35 C) +5 VDC ± 5%, ma -5 VDC ± 5%, ma, 3 VA Less than sec (T8) ± % F.S. ±.5% F.S. Close at power-off: C / SLM to % F.S. to 3kPa (d) Standard Fitting *2 /4 Swagelok type 3/8 Swagelok type * Please contact HORIBA STEC for information on types of gas other than those listed. *2 Non-standard joints can also be used. Please contact HORIBA STEC for more information. * The -E4, -E, -E4MK3 and -EMK3 feature an auto-zero function as well. * Inlet pressure for the -E4//6/E4MK3/EMK3: maximum 3 kpa (G) or under. For the -7/: maximum 3 kpa (G) or under. * SCCM and SLM are symbols indicating gas flow rate (ml/min, L/min at C,.3 kpa). * Viton is registered trademark of E. I. DuPont de Nemours. E6 E6 MPa (G) N2, O2, Air, H2, Ar, C3H8, CH4, C4H ±.5% F.S. x -7 Pa m 3 /s (He) -E4(MK3).E(MK3) :. to 5VDC (Input impedance : more then MΩ) -E6.E7.E :. to 5VDC (Input impedance : more then MΩ) Analog: to 5VDC (Minimun load resistance 2kΩ) +5 VDC ± 5%, ma -5 VDC ± 5%, ma, 3. VA E7 E7 SUS36L, Viton, magnetic stainless steel SLM 5 to % F.S. 3 kpa (G) to 3kPa (d) 5 to 45 C (accuracy guaranteed between 5 and 35 C) E E N2, O2, Air, H2 3/ SLM Less than 2 seconds (T8) ± 2% F.S. ± % F.S. ± % F.S. 4 kpa (G) added pressure with loss of pressure less than % over minutes /2 Swagelok type

4 Solenoid Actuator Type Mass Flow Controllers 8 Reduced footprints Currently, 3 mm x 3 mm (.5 inch pitch) is the standard for components in the accumulation systems of integrated gas panels. In the new - G series of mass flow controllers, each part of the mass flow controller has been made more compact, so that a unit can fit into the same 3 mm x 3 mm as the other components making up the gas -G series panel. In addition to reducing the footprint of the accumulated gas panel, this new series of mass flow controllers makes it possible to use the same base block size for all the components, which reduces design and production costs, as well as overall accumulated gas panel costs. sthe -G in a sample integrated gas panel Hand valve Filter Regulator Pneumatic Pressure valve sensor -G Pneumatic valve Internal flow passage volume -G /5 - /2 Other company (A) Unit volume / Weight 2/5 4/5 Electrical signal/drive power source connections -G, -E4J, -E4 series Transmission cable Flow rate setting signal Analog ( to 5 VDC) Flow rate output signal Analog ( to 5 VDC) Valve open/close signal Alarm output connection point Power source voltage: ±5 VDC Valve voltage monitor signal ssignal connector Pin no Signal name Valve open/close signal Flow rate output signal ( to 5 VDC) Power source (+5 VDC) Power source (COMMON) Power source (-5 VDC) Flow rate setting signal ( to 5 VDC) Signal (COMMON) Valve voltage output signal (please check this) NC Connector used: D-subminiature contact pin connector (with M3 fitting screws) speripherals In order to avoid changes in the COMMON power source, caused by the valve drive current, it is necessary to connect both the power source COMMON pin and the single COMMON pin to the same shared power source. Since they are not connected in the interior of the mass flow controller, please be sure to wire them separately, but so that they share the same power source. Dimensions -G, -E4 series s-g AMC s-e ssef-e ø84 4 ø inch IGS flange M6 depth M6 depth

5 2 GAS Mass flow controllers for integrated gas panels Integrated gas panels are made up of separate modules, including mass flow controllers, valves, regulators, filters, and so on, that perform the functions that were traditionally performed by parts in gas supply systems. Integrated gas panels can be manufactured without welding joints and piping since individual modules are used, and they are smaller and easier to maintain than traditional gas supply systems. sadvantages Compatible with a wide variety of fittings Compatible with every type of fitting, including C seals, CS seals, and W seals. Easier to maintain Unidirectional desorption makes it easier to desorb the mass flow controller. Less dead volume The amount of useless volume at the joint area is greatly reduced. ssample integrated gas panel design Hand valve Regulator Air valve Filter Flow Air valve Pitch size. inch.5 inch Compatible model series -Z52 series -ZD series (DeviceNet compatible mass flow controllers) -73 series -Z52/522 series -ZDW series (DeviceNet compatible mass flow controllers) -F7 series -F4 series -VD series -73 series SUC processing After machining, the surface of the stainless steel (SUS36L) that makes up the unit is polished until its roughness is at the sub-micron level. sadvantages Improves gas emission characteristics. Controls particle generation. Valve Sensor OUT CRP processing After machining, the surface of the stainless steel (SUS36L) that makes up the unit is subjected to composite electrolytic polishing, and then a % Cr2O3 oxidation film is formed on the surface. sadvantages Reduces outgassing of moisture and hydrocarbon gases. Increases resistance to corrosion by chlorine gases (highly corrosive gases). Has a non-catalytic effect on the spontaneous decomposition of SiH4/B2He and other similar chemicals. Suppresses contamination by particles from certain corrosive gases. soutgas data /4 x 2 Ar,.2 L/min, RT hours EP CRPS IN Surface roughness measurement sresults of surface roughness measurement.2 µm. µm H2O concentration (ppb) Time (minutes) snon-catalytic data /4 x m Ra.35 µm RMS.35 µm Rt. µm Ro.6 µm Rv.6 µm Rz. µm Sm.3 µm SC 3 TL Slope.3 Rmax.3 µm Measurement conditions Measurement scaling factor Drive speed Cutoff Measurement length Results.3 mm/s.8 mm 2.5 mm SiH4 concentration (ppm) 6 4 Pure Ni Hastelloy-EP SUS36L -EP SUS36L -CRPS Temperature ( C)

6 Mass Flow Controllers 22 Connecting analog mass flow controllers (examples) sconnecting to a digital power source, display unit, and settings unit Basic connections SC-Eseries Display unit DU-2 Settings unit SU-2 PAC series sconnecting to a dedicated controller Control using PAC-S6 SC-Dseries Control using PAC-D2 SC-Dseries PAC -S6 Flow rate output Flow rate alarm (high/low) PAC -D2 Flow rate output Flow rate alarm (high/low) Program control External control mode Flow rate setting Valve fully open/fully closed signal Etc. External control mode Flow rate setting Valve fully open/fully closed signal Etc. Control using an FI- integrator/control unit SC-Dseries FI- Flow rate output Flow rate alarm (high/low) Integrated flow rate control External control mode Flow rate setting Valve fully open/fully closed signal Etc. sconnecting to an external controller Basic connections SC-Aseries Flow rate setting signal: to 5 VDC Flow rate output signal: to 5 VDC Alarm output (for some models) Valve control signal: Fully open/fully closed Drive power source: ±5 VDC Connector connections Pin no Signal name Valve forced open/close signal Analog flow rate output signal ( to 5 VDC) Power source input (+5 VDC) COMMON power source Power source input (-5 VDC) Analog flow rate setting signal ( to 5 VDC) COMMON signal Alarm (option) Valve voltage monitor (option) Connector used: D-subminiature contact pin connector (with M3 fitting screws)

7 Mass Flow Controllers 26 Choosing the appropriate mass flow controller model and specifications s series -733 Model M * Seal material O *2 Valve structure SUC *3 Gas contact area surface processing Ar *4 Gas types SCCM *5 Full-scale flow rate and unit /4VCR *6 Fitting Individual specifications *7 * Select the seal material. M: Metal seal R: Rubber seal If you are using poisonous or corrosive gases, we recommend using M (metal) as the seal material. (Examples: AsH3, B2H6, PH3, GeH4, H2Se, BCl3, BF3, Cl2, F2, HBr, HF, SiCl4, TiCl4, CiF3, HCI, WF6, etc.) *2 Select the desired valve state for when there is no electricity. (Select the desired normal valve state.) O: Open C: Closed (This option is not available for flow meters.) *3 Gas contact area surface processing The gas contact area can be processed to ultra clean levels (option). SUC: Surfaces are polished until the roughness is at the sub-micron level. CRP: A CRP film (passivation film) is formed on the gas contact surfaces (stainless steel). *4 Select the types of gas you wish to use. *5 Select the full scale flow rate and flow rate unit. The flow rate unit is usually noted at C or C (.3 kpa). See Chart for more information. *6 Fitting A variety of contact joints other than /4 VCR type fitting can be used. Units can also be made compatible with integrated gas panels. Please contact HORIBA STEC for more information. Chart Flow rate unit L/min ml/min C display SLM SCCM C display LM CCM *7 Units can be adjusted to meet non-standard specifications. Please contact HORIBA STEC for more information. sdigital interface RS-5.F-Net protocol : -Z52MG/Z522MG RS-422A.F-Net protocol : -F7series -VDseries DeviceNet : -Z54MG/Z524MG -ZD/ZDWseries Series -Z -ZD/DW -F7 -VD GA -E4J -E Standard Flow Range (N2 Equivalent F.S.) 5SCCM to SLM 5SCCM to SLM 5SCCM to 3SLM SCCM to SLM SCCM to SLM 5SCCM to SLM 5SCCM to SLM SCCM to 5SLM SCCM to 3SLM SCCM to SLM 5SCCM to SLM SCCM to SLM 5SCCM to SLM Operating temparture Seal material Interface Fitting Internal Normal High surface Digital (F-Net) Digital Metal Rubber Analog VCR Type Swagelok IGS temp model temp model polishing RS-422A RS-5 DeviceNet type.inch.5inch Standard Standard Standard Mass flow meters: For the SEF series, please start by deciding without valve structure and then consider the other options.

8 27 GAS Dimensions <> -Z M4 P.C.D.42±. <2> -V series -ZD series 45 2-M4 P.C.D.42±. H E W I T A B D C <3> -46 -Z3DW M8 4-M4 <4> M4, depth 5 R.4 3 *Please contact HORIBA STEC for information on details not shown here Model H T W I (/4 VCR) -Z52 -Z522 -ZD -Z2D -Z3D -ZDW -Z2DW -Z3DW -F73 -F74 -F7 -F -F4 /SEF-VDM /SEF-VDM -73 /SEF (LD) /SEF-73 /SEF-7355 SEF-74 /SEF-(MF) /SEF-4(MF) /SEF-45 /SEF-46 -SP/SR -(MF) -4(MF) -EJ -E4J -E4(MK3) -E(MK3) -E6 -E7 /SEF-647 * /SEF-64 * -834 /SEF-8 /SEF-84 /SEF-8455 /SEF-846 /SEF-24 /SEF- /SEF-5 /SEF-3 /SEF-3 /SEF-4 /SEF- /SEF-5 /SEF-6 * -4MK2 3 -MK *2 *2 *2 *2 *2 *2 *2 *2 * I (/4 Swagelok) * Please contact HORIBA STEC for details on the dimensions of the /SEF-647/64. *2 Surface dimensions: mm models can also be produced. * Please contact HORIBA STEC to request a copy of the dimension drawing. * Equivalent products are sometimes used in place of the joints listed here. I (3/8 VCR) I (3/8 Swagelok) A B C D E See <> 2. See <3> See <3> See <4>

9 Mass Flow Controllers Accessory dimensions spac-s6 Max or higher spac-d/d Max *3 or higher * or higher spac-i spac-4i/6i ±.3 4-M ± ±.2 sdu-2e 2-ø 2-M3 tap sdu-2k ± ± ±.3.7± Panel thickness:.8 mm to 3. mm 7 ± 83± ssu-2ed Digital dial 68 dia Panel installation opening 3.3 dia..5 dia. ssu-2ea * 24 dia. 22/2 dia..5 dia. Panel installation opening.5 dia..5 ssettings unit..6±.7 ø6 ø.3 3/8- UNEF thread dia sfi n * or higher.6 *Where n is the number of PAC-S6 units installed. +.5 n-2 *Where n is the number of PAC-D/D2 units installed. 8±2 ±2 67.5±2 (2±2) 6 4-M4 3 * Dimensions in parentheses ( ) are for the PAC-6. Analog dial

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