MEMS Sensors for Smart Living: ITRI Solutions. Chris Chen, ITRI

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1 MEMS Sensors for Smart Living: ITRI Solutions Chris Chen, ITRI

2 MEMS Sensors for Smart Living Outline Sensors are Everywhere What MEMS Sensors are Most Required Smart Living Megatrend Herald Next Wave of MEMS MEMS Technologies in ITRI Total Solutions on MEMS ITRI s Smart Sensors Roadmap toward Smart Living Summary

3 MEMS Sensors for Smart Living

4 Sensors are Everywhere! Power Management Consumer Electronics Home Security (IR Sensors) Smart Appliances Air Quality Monitoring (Gas Sensors) Wearable Devices Healthcare Anywhere Entertainments Health Care Security Sports & Fitness Others

Sensor Gas Sensors, Accelerometer Gyroscope Magnetometer IMU (Inertial Measurement Unit) Pressure Sensor Bio Sensors (ex.

5 What MEMS Sensors are Most Required? MEMS Sensors for Smart Living Environment Motion Physiologic RF & Others MEMS Microphone Barometer (P) IR Sensor (T) Moisture Sensor Gas Sensors, Accelerometer Gyroscope Magnetometer IMU (Inertial Measurement Unit) Pressure Sensor Bio Sensors (ex. HbO2, ECG, EEG, Glucose, PPG etc.), FBAR Oscillator MEMS Switch MEMS Varicap IPD, Entertainments Health Care Security Sports & Fitness Others Apparently, motion and environmental sensors play as the key roles for smart living applications.

6 Smart Living Megatrend Herald Next Wave of MEMS Sensors for Motion & Envirement (Source: Yole developpement )

7 Huge Market Opportunities on Smart Living: IMU, MEMS Microphone and Pressure Sensor (Source: Yole developpement )

Inertial Combo will Dominate the Future Market!

0 x0.9 mm 3 Specific Algorithms New Process Develop. 15mm 2 20mm 2 3.0 x 3.0 x1.

9 mm 3 (6-DoF IMU Size) Low Power Mode Sensor Fusion Sensor HUB WLP 201 1 201 2 201

8 Inertial Combo will Dominate the Future Market! Smaller Size, Lower Cost, Higher Performance More Software 10mm 2 Size mm x 2.0 x0.9 mm 3 Specific Algorithms New Process Develop. 15mm 2 20mm x 3.0 x1.0 mm 3 3 x 4.5 x 0.95 mm 3 4 x 4 x 0.9 mm 3 (6-DoF IMU Size) Low Power Mode Sensor Fusion Sensor HUB WLP Sensor Fusion is Driving Combo Sensors TSV CMOS MEMS High-res. Acc. Low-drift Gyro. Magnetometer Low-res. Acc. 3-axis Gyro. 6-DoF 9 DoF/ 10 DoF More Sensors

9 MEMS Technologies in ITRI

10 Total Solutions on MEMS MEMS Design Advanced Tech Circuit Design Softwares & Applications Package & Testing Processes & Materials

11 ITRI s Smart Sensors Fluidic Devices Gas Sensor Lab on a Chip MEMS Microphones Analog Microphone Digital Microphone RF Devices Variable Capacitor MEMS Oscillator RF Fluidic Acoustic Optical Optical Devices Electrostatic Mirror Magnetic Mirror Pressure Sensors High Resolution Barometer Barometer Bar Pressure Sensor Pressure Magnetic Inertial Inertial Sensors Low-g Accelerometer Medium-g Accelerometer Magnetic Sensors High Res. Compass Magnetometer Medium-Rate Gyroscope High-Rate Gyroscope Inertial Measurement Unit

12 Low-noise Accelerometer Newton s 2 nd Law of Motion Low-power Gyroscope X-axis Y-axis Z-axis 3-axis Parts Share Same Mechanical Structure Low Off-axis Sensitivity & High Shock Survival Low Noise & Programmable Digital Calibration Compatible with Inertial MEMS Platform Capacitive E-compass Single-axis Dual-axis Tri-axis Low Power Consumption (<1mW) Robust to Process Variation Fully-decoupled Mode Operation Multi-axis Angular Velocity Sensing Capability Only One Resonator is Required to Drive 3 Coriolis Acc. X/Y Axis M-Sensor Z-axis Acc. Z-axis M-Sensor X/Y Axis Acc. Acc. & M-Sensor Share the Same Structure Acc. & M-sensor with Switched Readout Compatible with Inertial MEMS Platform

13 Ultra-compact 6-DOF IMU 3-axis Gyro. Acc. & Gyro Hermetic Sealed in a Same Cap Electrical Isolation of Acc. & Gyro. Mechanical Decoupling of Acc. & Gyro. Analog / Digital Pulse / Digital Data Output Options 3-axis Acc. (Source: Internet)

14 Single Chip Integrated 9-DOF IMU The World s First Single Chip 9-DOF IMU! Accelerometer Gyroscope Magnetometer B Turning Current Direction z y Driving Electrode Sensing Electrode x Small Size, Low Power & Low Cost One Chip Integration of 9-DOF Sensor Lorentz Force Sensing Mechanism for M-Sensor All Capacitive Interfacing for 9-DOF Sensor 3-Axis M-Sensor 3-Axis Gyro. 3-Axis Acc. Acc., Gyro. & M-Sensor Hermetic Sealed in a Same Cap

15 Backplate Diaphragm MEMS Microphone Meas. Item Test Condition Specification Freq. Response 100 ~ 10kHz 100 ~ 10kHz Back Chamber (0dB=1V/Pa) -38+/- 3dB SNR [A weight] (0dB=1V/Pa) > 62dB THD At 94dB SPL <0.5% At 100dB SPL <1% MEMS Capacitive Barometer High Shock Survivability Input Saturation Immunity Active Temperature Stabilization Analog / Digital Pulse / Digital Data Output Options Capable Integration of Accelerometer on Single Chip (TPMS)

16 Smart Sensors for the Future - Gas Sensors - Highly Sensitive IR Array - PPG Sensor (Healthcare) - MEMS Tactile Array

17 Roadmap toward Smart Living Inertial Combo (Motion) MEMS Microphone (Acoustic) Barometer (Positioning) Gas Sensors (Environment) PPG Module (Healthcare) IR Image Sensor (Safety) Tactile Array (Service Robot) (Source: Internet)

18 Summary Driven by the sensing needs of smart living, a new wave of MEMS is coming Motion and environmental sensors look to play as the key roles for smart living applications. The three devices Inertial combo, MEMS microphone and pressure sensor are with very huge market opportunities currently. ITRI is committed to be the total-solution provider for smart living, leading Taiwan s MEMS industry to win in this booming era.

19 Thank you for your attention! Chris Chen Office: chris.chen@itri.org.tw

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