G. H. Raisoni College of Engineering,Nagpur (An Autonomous Institute affiliated to Rashtrasant Tukadoji Maharaj Nagpur University)

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G. H. Raisoni College of Engineering,Nagpur (An Autonomous Institute affiliated to Rashtrasant Tukadoji Maharaj Nagpur University) Report on GIAN Workshop on MEMS for BioMechanics and BioRobotics at

1 G. H. Raisoni College of Engineering,Nagpur (An Autonomous Institute affiliated to Rashtrasant Tukadoji Maharaj Nagpur University) Report on GIAN Workshop on MEMS for BioMechanics and BioRobotics at VNIT, Nagpur Dr. Shubhangi Giripunje, Prof. Sonali Joshi, Prof.Rahul Agrawal has attended GIAN workshop on MEMS for Biomechanics and BioRobotics from 4 th Dec-8 th Dec 2017, organized by VNIT, Nagpur. The workshop was started with inauguration on 4/12/17 with the gracious presence of Dr. Shuji Tanaka, Department of Robotics, Microsystem Integration Center, Tohoku University, Dr.N.S.Chaudhari,Director,VNIT, Dr.K.M.Bhurchandi, Dr. R.B.Deshmukh, & Dr.R.M.Patrikar. Inauguration of workshop The five days scheduled divided in theory classes, demonstration of Lab facilities for fabrication and hands on practice which was conducted by Dr. Shuji Tanaka, Dr. R.M. Patrikar and Dr. R.B.Deshmukh. Day1 : Session 1: Lecture taken by Dr. Shuji Tanaka on topic Overview of MEMS and Applications. The following topics are covered by him: Home Game Consoles Revolution of TV Game by MEMS Electronics in Smartphone Structure of Accelerometer Mechanism of Accelerometer MEMS Vibratory Gyroscope Vehicle Stability Control (Toyota Motor) Mechanism of Gyroscope Energy Loss and Quality Factor

2 Anchor Loss Integrated Inertia Sensors (Analog Devices) Wafer-level Batch Production of MEMS Photolithography Fabrication Technology Unique to MEMS MEMS Microphone Thermal Inkjet Printer (Canon) Digital Micromirror Device (TI) Fabrication Process of New DMD Day1: Session 2: MEMS Trends in Industry by Dr. Tanaka MEMS Downsizing by Advanced Packaging Wafer-Level Packaging: Bonding Methods Sensor Module: ST Sensor Tile Importance of Module in Business MEMS Company Ranking Layer Poly Silicon MEMS (Robert Bosch) MEMS-LSI Integration Platform (Inven Sense) Our MEMS-LSI Integration Platform Multi Sensors Based on EpiSeal Applications Needing High Performance Gyro MEMS Vibratory Gyroscope Performance of Gyroscopes Feedback System of Mode-Matched Gyro Sensor Platform LSI HIROSE TSV in Multi Project Wafer for Integrated MEMS Day1:Session 3: Hands on COMSOL Software for cantilever Based Gas Sensors by Prof.Akansha Singh Comsol Multiphysics Software tool For Distance Measurement in Sensors FEM Concept

3 Day2 : Lecture taken by Dr. Shuji Tanaka on topic MEMS Fabrication Process. The Following topics covered are : Silicon Accelerometer Bulk and Surface Micromachining Micro Flow Meter Various Structures by Anisotropic Wet Etching Earliest Surface-Micromachined MEMS: Resonant Vapor Sensor Thin-Film-Packaged Resonator SCREAM SCREAM Electrostatic Lens Examples of MEMS Packaging Why Wafer-Level Packaging for MEMS Bonding Methods Anodic Bonding First MEMS Accelerometer Capacitive Accelerometer Integrated Capacitive Pressure Sensor Feedthrough s in Glass Capping Wafer Glass Drilling Methods Electrical Connection using Porous Au Bumps Wafer-Level Packaging of FBAR (Avago) Pretreatment for Cu-Cu Themocomp. Bonding Au-Si Eutectic Bonding SiC Diaphragm Pressure Sensor Bonding Methods Wafer-Level Packaging of Accelerometers. Epi-poly Si Technology

4 Poly-SiGe Above-CMOS MEMS: Process (IMEC) Day2:Session2 Lecture taken by Dr. Shuji Tanaka on topic LSI Integration with MEMS.The Following points are covered: Why Is MEMS-CMOS Integration Needed Integrated Capacitive Pressure Sensor. Integrated Piezoresistive Pressure Sensor Two-Wire Pressure Sensor for Catheters Poly-Si Surface Micromachining Digital Micromirror Device Driving Method of Digital Micromirror Device Resonant Gate Transistor (Westinghouse) Day2:Session3: Dr. Shuji Tanaka discussed on MEMS Application Idea for Mini Contest. Day3 : Lecture taken by Dr. Shuji Tanaka on topic Transducers for MEMS. The Following points are discussed: Piezoresistive Effect Piezoresistive Effect of Silicon Piezoresistive Silicon Pressure Sensor Temperature Coefficient of Sensitivity Gap-Closing-Type Electrostatic Actuator Pull-in of Electrostatic Actuator Comb-Type Electrostatic Actuator Scaling of Electrostatic Actuators Time Dependent Dielectric Breakdown (TDDB) Breakdown Voltage Dependence on Electrode Charge-up Problem and Its Preventive Measures Charge Up Avoidance for Electrostatic Actuator PZT: Lead Zirconate Titanate Applied Electric Filed vs. Induced Strain Single Crystal vs. Polycrystal Transducers for Electromechanical Resonators FD Product Day3: Session 3: Hands on Lab on Chip Fabrication by Prof.T.Pravinraj who demonstrated how to design the layout on PCB, fabrication.

Day4 :Mini contest was conduct on MEMS Application.

For Blind) Womb health detection System For over speeding detection and safety for people Superpointer Wearable Gas sensor(health band) In this competition GHRCE group

Tanaka Day4 : Session 2 Lecture taken by Dr. Shuji Tanaka on topic Overview of Piezoelectric MEMS.

5 Day4 :Mini contest was conduct on MEMS Application. Total 8 teams have participated and they have presented the following projects: MEMS for Beauty & Beast ICT based Disease Detection using pulse MEMS For Child Safety I See( For Blind) Womb health detection System For over speeding detection and safety for people Superpointer Wearable Gas sensor(health band) In this competition GHRCE group presented on ICT based Disease Detection using pulse and won third prize in MINI Contest. Mini contest certificate received by the hands of Dr. Tanaka Day4 : Session 2 Lecture taken by Dr. Shuji Tanaka on topic Overview of Piezoelectric MEMS. The Following are the Topics Covered by him Piezoelectric MEMS in and near Market PZT MEMS Gyroscope (Panasonic) HDD Head Actuator (TDK-SAE Magnetics) Actuation Types of Micromirror Device Electromagnetic Micromirror (Microvision) PZT Micromirror (Stanley) Laser Projector Using Micromirror Device MEMS Scanning Micromirror for LIDER PZT Scanning Micromirror for Endscopic OCT Varifocal Liquid Lens with PZT Actuator

6 Thermally-Actuated RF MEMS Switch Challenges of RF MEMS Switch Contact Resistance of Ohmic Switch PZT Cantilever Actuator Wireless RF Front-End of Cellphone (2G + 3G) Day5: Session 1:Lecture taken by Dr. R.M.Patrikar on topic System on Chip design Flow. Following points are covered System Overview of MEMS Applications Advantages Importance of MEMS and CMOS integration Day5: Session 2: Lecture taken by Dr. R.B.Deshmukh on topic Fundamentals of BioMehanics and BioRobotics applications. The following points are covered Stochastic process Bio-inspired System Real time Problems Day5: Session 3: Hands on taken by Prof.Ravi Solanke on CADENCE SOC Design for MEMS Application using CAD tools following points are covered CMOS and MEMS Integration CMOS layout Designing SKILL language using Cadence Virtuoso Terminologies Automated Layout designing. Some Programming Hands on Dr. Shubhangi Giripunje Prof. Sonali Joshi Prof. Rahul Agrawal

7 Mini Contest on MEMS Application

9 Certificate of participant

MEMS Sensors for Smart Living: ITRI Solutions. Chris Chen, ITRI

MEMS Sensors for Smart Living: ITRI Solutions Chris Chen, ITRI MEMS Sensors for Smart Living Outline Sensors are Everywhere What MEMS Sensors are Most Required Smart Living Megatrend Herald Next Wave of