R I T. Title: Amray 1830 SEM Semiconductor & Microsystems Fabrication Laboratory Revision: A Rev Date: 09/29/03 1 SCOPE 2 REFERENCE DOCUMENTS

Transcription

1 Fabrication Laboratory Revision: A Rev Date: 09/29/03 Approved by: Process Engineer / / / / Equipment Engineer 1 SCOPE The purpose of this document is to detail the use of the Amray 1830 SEM. All users are expected to have read and understood this document. It is not a substitute for in-person training on the system and is not sufficient to qualify a user on the system. Failure to follow guidelines in this document may result in loss of privileges. 2 REFERENCE DOCUMENTS o Material Safety Data Sheets for colloidal graphite and silver paint. o Appropriate Tool Manuals 3 DEFINITIONS 3.1 LaB6 Filament used in SEM 4 TOOLS AND MATERIALS 4.1 General Description The AMRAY 1830 SEM will accommodate wafer pieces as well as whole wafers. Image capture is done with PC on tool, through the use of the Snappy program. 5 SAFETY PRECAUTIONS 5.1 Personal Safety Hazards Radiation-This equipment can produce low levels of radiation. Do not operate tool if any covers are not in place High Voltage-The SEM employs voltages that are dangerous and may be fatal to personnel. Do not attempt to defeat the protective interlock systems Mechanical Hazards-Drive assemblies in the chamber have sufficient power to cause injury. Keep hands, fingers, clothing and tools clear of moving parts. 5.2 Hazards to the Tool RIT SMFL Page 1 of 8

2 5.2.1 Use caution when handling samples in the chamber. If a sample drops into the chamber, there is no way to get it out and it will seize-up the positioning motors Do not load a sample too high on the mounting apparatus. If the sample is too high, it may damage the final aperture when focusing When using out-gassing materials such as photo resist, use a lower KV setting. No highly out-gassing materials such as adhesives are allowed in the chamber. They will contaminate the column and damage the tool Do not open V1 until the system has reached the proper vacuum level Always close V1 before turning off the console and never leave V1 open when the tool is unattended. 6 INSTRUCTIONS 6.1 Initial State Check Verify that compressed air is preset at 60 psi (regulator is located behind instrument - no adjustment normally needed) In Service Chase 2725, turn on the nitrogen. The switch is labeled Surface Analysis Verify that vent nitrogen is preset at 2 psi (regulator is located behind the instrument - no adjustment normally needed) Ensure valve V1 is closed, located on the left side of column. This is done by, (a)- pressing down on the metal tab and (b)-pushing in on the valve towards the column. (a) (b) RIT SMFL Page 2 of 8

3 6.1.5 Verify ION pump is on, light is illuminated above [ION PUMP] button. Establish pump is operating correctly by looking at the display on the chamber column gauge and indicator lights. Ensure that the light that is illuminated for the Ion Pump is either the 2mA or 200µA. (Panel 9) If the 2mA light is illuminated the meter should indicate between the two red lines shown below. (Panel 9) If the 200µA light is illuminated the meter should indicate between the two red lines shown below. (Panel 9) If none of the lights are illuminated then press the [METER SELECT] button until lights illuminate If the Ion Pump does not indicate within either of these parameters, get the technician. (Panel 9) RIT SMFL Page 3 of 8

4 V1 Monitor Vacuum Control Joystick Controller Electronics Console 6.2 Operating the system Sample Loading On the column verify that the V1 valve is closed. It should be pushed in Verify that the V1 indicator light is flashing on the display below the column. (Panel 9) Press the Vent button on the panel below the column. (Panel 9) If rough pump does not shut off when [VENT] is depressed, get technician ***********************CAUTION*********************** RIT SMFL Page 4 of 8

5 Do not push [METER SELECT] button Unless GREEN READY light is illuminated ******************************************************** Press REF on the Stage Motor Controller to center the stage before opening the door. (Panel 10) SLOWLY open Chamber Door ***********************CAUTION*********************** Be careful when opening chamber door. Door swings on two sets of hinges. ******************************************************** Insert sample and secure with set-screw and close door Press Evacuate to pump out the chamber. (Panel 9) Watch vacuum meter for needle deflection to the right. Once needle is all the way to the right depress [METER SELECT] button until CCG light illuminates and wait for the pressure to go below 8E-7 on the top scale, then open the V1 valve by pulling it out. (Panel 9) Preliminary Settings Press the [POWER ON] button on electronics console. (Panel 1) Press the [ 10] button on the Magnification panel to 25X (Panel 7) Select CRT on SEM keyboard. (Panel 11) Select AUTO on SEM keyboard. (Panel 11) Select ALT then 1 on SEM keyboard. (Panel 11) Adjust STIGMATOR KNOBS to the 12 o clock position. (Panel 6) Adjust IMAGE SHIFT KNOBS to the 12 o clock position. (Panel 8) Adjust BEAM ALIGNMENT KNOBS to the 12 o clock position (Panel 3) Ensure BIAS is at 2 and HEAT is at 8. (Panel 3) Obtaining and Image Press the [ ] button on the console until the desired Acceleration Potential is achieved. (Panel 3) Press the AUTO HEAT button and watch for the red light between the HEAT and BIAS knobs to go out and the green emission current lights to RIT SMFL Page 5 of 8

6 illuminate. Emission should (Panel 3) Adjust BEAM ALIGNMENT knobs to obtain highest brightness on CRT. CONTRAST may have to be decreased to optimize beam alignment. (Panel 3) Press the COND LENS button to adjust the aperture size. While COND LENS button is illuminated turn silver knob. When desired aperture size is obtained press the DEGAUSS button. Press the COND LENS button again to get back to FINAL LENS Press the FINAL LENS button to adjust focus. While FINAL LENS button is illuminated turn silver knob. Once focus is obtained depress DEGAUSS button. When DEGAUSS is complete, refocus as necessary Press Wobbler and adjust the final aperture. (Panel 8) This is accomplished by turning knobs (1) and (2) on the front and side of the final aperture assy. Until image shifts in and out of focus. Shifting up and down of the image or left and right of the image denotes improper alignment and further adjustments to the final aperture are needed. (1) (2) 6.2 Optimizing the Image The best way to optimize the focus and astigmatism is to zoom in on a very small spherical particle and then make the adjustments so that the small particle looks sharp and then zoom back out to your actual image The partial field [PF] button may be pressed to look at only a small area of the screen. This may be useful in optimizing the image Adjustment of the Stigmator can be accomplished at this time. Be sure to move each knob independently from one another. (Panel 6) Brightness and Contrast can be varied to achieve desired image on the CRT RIT SMFL Page 6 of 8

7 6.3 Removing a Sample Without Going to Standby Close V1. (left side of column) Press the [VENT] button. (Panel 9) If rough pump does not shut off when [VENT] is depressed, get technician Follow instructions Sample Loading 6.4 Placing the SEM in Standby Remove sample from SEM by following instruction Sample Loading Make sure V1 is closed. (Pushed in all the way.) (left side of column) Turn off electronics console by pressing the [OFF] button. (Panel 1) Turn off Surface Analysis N in service chase Picture Taking Image capture is done with the SNAPPY program on PC on SEM Double click on the SNAPPY icon Click on preview on SNAPPY program. 6.4 Errors during Run If the system fails to vent the chamber, make sure that the N2 is on in the service chase If the image is lost, return the SEM to the preliminary settings and start over. RIT SMFL Page 7 of 8

8 6.4.3 If the filament is blown, no current will flow and the red light will come on and stay on. GET TECHNICIAN 7 APPROPRIATE USES OF THE TOOL 7.1 Avoid contaminating the column- only clean samples may be used. 7.2 No out-gassing materials such as adhesives are allowed. 7 ATTACHMENTS 7.2 Manual for Sample Preparation in the Denton Sputterer REVISION RECORD Original Issue Summary of Changes Originator Rev/Date Sean O Brien A-09/29/03 RIT SMFL Page 8 of 8