त जप र व श व द य लय / TEZPUR UNIVERSITY क ल सध क क य लय/ OFFICE OF THE REGISTRAR SHORT QUOTATION NOTICE

Transcription

1 SHORT QUOTATION NOTICE TU/11-24/Pur/Qtn/2013/ 3180 dated:- 15/10/2013. Sealed quotations are invited from reputed manufacturers/authorized dealers/vendors for supply & installation of Laboratory Equipment required for the DIT Project of Prod. P.P.Sahu, Department of Electronics and Communication Engineering, Tezpur University. Sl No Item description with specifications A. Reactive ion etching (RIE) unit with the following specifications System type: Stand Alone Manual/ PC Controlled The System consists of the following main units: Process Chamber 1 No Vacuum System 1 No Power supply 1 No Substrate holder 1 No Gas Management System 1 No Control Console - 1 Set 1. Process Chamber Circular chamber of Dia 300mm x 300 mm height (approximately) made of non magnetic Stainless Steel Grade SS No a) CCP type reactor b) View port for viewing the plasma 1 No c) Openable top lid arrangement for manual loading of substrate 1 No d) Table of approximately 400 mm x 400 mm to house pumps, MS fabricated and powder coated 1 No 2. Vacuum System a) Scroll Pump ( Edwards/ Pfeiffer/Oxford/Ebara make) for roughing and backing the turbo pump 1 Nos b) Turbo molecular pump (Edwards /Pfeiffer/Oxford/Ebara make) with controller 1 No c) Electro pneumatically operated valve for roughing 1 No d) Electro pneumatically operated valve for backing 1 No e) 4 High vacuum valve to isolate the chamber from turbo pump -1 No f) Vacuum lines made of stainless steel, fitted with bellow adopter wherever necessary to arrest the vibration. All the vacuum lines fittings must be argon arc welded using TIG welding technique and all the pipelines must be leak tested using Helium Mass Spectrometer Leak Detector to a leak rate of 1 x 10-9 m. bar lit/sec 1 Set g) Pirani Gauge for vacuum measurement with measuring range from atmosphere to 10-3

2 m.bar 2 Nos h) Penning Gauge for vacuum measurement with measuring range from 10-3 m.bar to 10-7 mbar 1 No 3. Power supply a) The unit of Power Supply should be placed conveniently. b) SEREN / AE/reputed make RF Power Supply, MHz frequency, 600W c) Watts with auto matching network with forward & reflected power monitoring along with the necessary cables- 1 No 4. Substrate Holder a) Round substrate holder to accommodate substrate of 2-6 inch Dia provided with manual height adjustment and water cooling mechanism to cool the substrate. 1 No 5. Gas Management System a) Bronkhorst/MKS/reputed Make Mass Flow Controller (MFC) 4 Nos with measuring ranges as below: Argon, Ar (2-500 SCCM) 1 No Oxygen, O 2 (2-500 SCCM) 1 No Sulphur hexafluoride, SF6 (2-500 SCCM) 1 No Fluoroform, CHF 3 (2-500 SCCM) 1 No Tetrafluoromethane CF 4 (2-500 SCCM) 1 No Nitrogen, N 2 (2-500 SCCM) 1 No 5.1 Gas cabinet, Detectors and gas line (All items mentioned below to be provided/installed by the vendor as per site specification) a) Gas cabinet for placing cylinder with transparent door b) MS Fabricated powder coated Structure c) Gas detectors for hazardous gases d) Tubing including clamps and labeling (10 to 12 feet only) e) 2" exhaust pipe line (metal) for pumping the exhaust gases f) CS clean System/Reputed make dry bed abatement system 5.2 Gas Cylinders a) Praxair/Inox/Equivalent make Semiconductor grade high purity gas cylinders for following gases: 6m 3 Argon, Ar 1 No 6m 3 Oxygen, O2 1 No 2m 3 Sulphur hexafluoride, SF6 2 No 2m 3 Fluoroform, CHF3 2 No 2m 3 Tetrafluoromethane CF4 2 No

3 6m 3 Nitrogen 2 No 5.3 Regulators a) Double stage regulators b) Approx. delivery pressure range of psig ( bar) c) Source Pressure : Vacuum to 3500 psig (241 bar) d) Inlet/Outlet Connections :. inch face seal e) Surface Finish : 15 μin 25 μin Ra f) All port (6 port). male VCR g) Diaphragm Valves for outlet & purging with. male VCR 6. Control Console Control Console should be fabricated out of Mild Steel neatly powder coated with panel cooler which should be placed by the side of chamber frame structure which should be provided to house all the Electrical Control Instrumentation and Control Switches housed by the followings: a) Auto / manual Vacuum Controller b) Programmable Logic Controller c) Vacuum Gauge d) Mass Flow Gas Controllers display e) Mains Control with RYB Indications and Isolator Switch f) Turbo Pump Controllers g) RF Power Supplies h) Industrial Touch screen PC All the electrical switchgears like Control Transformer, Contactors, Relays, Fuses etc should be mounted on a plate and fitted vertically for the convenience of maintenance. The above Control Console must be wired to operate on 415 V AC, 50 Hz, 3 Phase Power Supply. Programmable Logical Controller a) GE FANUC/Equivalent make Programmable Logic Controller (PLC) must be provided in the system for complete automation of vacuum cycle, deposition cycle and to achieve various interlocks of the system. b) This PLC must have necessary number of inputs and outputs, communication interface module etc. SCRUBBER : (All items mentioned below to be provided/installed by the vendor as per site specification) Scrubber unit of reputed make to neutralize all gases used in RIE. a) Civil works b) Electrical Installation c) Reputed company make Air Compressor with delivering capacity 5.2 cfm d) Compressor with delivering capacity 5.2 cfm

4 e) Chiller unit for chilled water supply with temperature C, circulation pump, isolation valves and pressure gauges. 7. PERFORMANCE- (etch-chemistry specification) Si A 0 /min SiO A 0 /min Si 3 N A 0 /min Maximum thickness ~ 20 μm Uniformity : within 3% Aspect Ratio ~ SPARES LIST a) Each O-rings - 5set b) MFC - 1 No of each type c) PCB for programmable controller 1 no d) All fuses B. Plasma enhanced chemical vapour deposition (PECVD) System type : Stand Alone Manual/PC Controlled Unit with the following specifications 1. VACUUM CHAMBER: a) The chamber must be both end open type and must be made out of non magnetic quality stainless steel with nominal internal diameter of 300 mm and cylindrical length of 400 mm. b) The chamber bottom flange must be sealed with `O ring in the base plate. Top of the chamber must be fitted with a flat plate to which RF electrode is assembled. c) The top of the chamber must have flange with "O" Ring for vacuum sealing with top plate. d) The top plate should be fastened to chamber and top flange by suitable clamping arrangement. e) The chamber should be soldered with water cooling coils. f) Two view ports with glasses one on the front and the other on the side monitoring of gadgetries should be provided. g) The cylindrical portion (Rear end) of the chamber should be provided with port for connecting the pumping system. h) Chamber should be welded using TIG welding technique for leak tested using Helium mass spectrometer leak detector to an individual leak rate of 3 x 10-9m.bar.ltrs./sec. i) The chamber internal surface should be electrochemically polished for low out gassing

5 rates. 2. FRAME STRUCTURE: a) MS tubular Frame Structure must be provided and neatly powder coated b) control panel must be brought to the Front side of the Frame Structure for convenience of operation. c) The Frame must be designed to take care for future incorporation of Etching Chamber and Load Lock Chamber with transport mechanism. 3. HYDRAULIC LIFT: a) The Top plate must be made to move up and down with the help of a Hydraulic lift, built in as a part of the unit. b) The system should lift the Top plate up and down and should also be made to stop at any position convenient for use. c) The Top plate should be swivelled to the side by removal of fixing pins in case of servicing and maintenance. 4. BASE PLATE: All Stainless Steel AISI-304,SS 13" dia finely machined and electro chemically polished to achieve the fine surface finish to seal with bottom flange of the chamber. In all, 11 feed through ports should be provided. 5. TOP PLATE: a) All S.S. 304 quality Top Plate must be provided and connected to the Hydraulic lifting arm. b) Centre of the top Plate should be fitted with 100 mm dia RF electrode with necessary feed throughs etc. 6. RF ELECTRODE FOR DEPOSITION CHAMBER: a) RF Electrode for the Deposition Chamber must be water cooled electrode which should carry RF Power and Gas also and this must be provided in the top plate of the chamber. b) The construction of the RF Electrode must consist of an electrode plate fabricated out of copper having a diameter of 100 mm in which water cooling coils should be brazed on the top side and the bottom side should be provided with grooves and perforated sheet for uniform gas distribution. c) This electrode plate should be covered with dark space shield circumferentially. This electrode plate is attached with a co-axial tube in which outer tube must be fabricated out of stainless steel and inner tube should be basically a solid copper rod in which holes must be drilled for taking water inlet and outlet connection and gas connection. d) The outer tube which should be grounded should pass through vacuum shaft seal and it must be insulated from the Base Plate by means of Teflon Insulators. e) The copper rod at the other end must be drilled with holes for taking water inlet and

6 outlet connection and gas inlet connection. f) This copper rod should also be provided with a lug to take RF Power Connection and insulated from the outer tube by Teflon Insulator. This RF Electrode must be provided with 2 Nos of Lock Nuts on the outer tube to adjust the height between the RF Electrode and the Substrate Heater. This can be done manually by loosening the nuts, the shaft freely should move up and down after adjusting the height by using scale. The shaft can be locked at that position by tightening both the nuts. 7. SUBSTRATE HOLDER CUM HEATER: a) Suitable Heater must be provided to heat the substrate to a maximum temperature of 300º C during deposition. b) The Substrate Heater should be placed below the substrate holder of 100 mm diameter with a minimum gap which should be able to carry substrate of dia 2-6 inch. c) Temperature measurement and control must be made by means of Digital PID Controller of reputed make which should work in conjunction with Chromel Alumel K Type Thermocouple. d) Power to the heater must be smoothly controlled by SSR. Power Controller which works in a closed loop based on the signal from PID Controller. e) The substrate holder must be insulated for providing biasing facility using RF/DC Power Supply. 8. R.F. POWER SUPPLY & MATCHING NETWORK: a) RF Power Supply of 600 Watts with auto matching network of MHZ frequency along with the necessary cables provided to feed RF Power to the electrode. b) R.F Power Supply make to be mentioned. 9. GAS FEEDING SYSTEM: a) Gas Feeding System must consist of a gas manifold made of stainless steel which should house 6Nos of Mass Flow Controllers having SCCM. Capacity with built-in Valve, inlet and outlet filter, inlet and outlet valve with Swage lock type of fittings must be provided to feed the gas into the chamber during the process. MFC s provided for Silane, Nitrous oxide, Argon, Oxygen and Ammonia and Nitrogen b) All the gas lines having size of ¼ size will be made of electro polished Stainless Steel SS 316L. c) All the mass flow controllers must be of normally close (NC) type i.e. when not powered there must be no gas flow. 10. GAS CABINET WITH CYLINDERS, REGULATORS, DETECTORS I. GAS CYLINDERS : Praxair/Inox/Equivalent make Semiconductor grade high purity gas cylinders for following gases:

7 6m 3 Argon, Ar 1 No 2m 3 Silane No 6m 3 Ammonia 1 No 6m 3 Nitrous oxide 1 No 6m 3 Oxygen No. 6m 3 Nitrogen---2 No II. REGULATORS : a) Double stage regulators with cross purge assembly for toxic and corrosive gases b) Approx. delivery pressure range of 2ı100 psig ( bar) c) Source Pressure : Vacuum to 3500 psig (241 bar) d) Inlet/Outlet Connections : ¼ inch face seal e) Surface Finish : 15 μin 25 μin Ra f) Material : SS316L g) All port (6 port) ¼ male VCR h) 316L SS Diaphragm Valves for outlet & purging with ¼ male VCR III. GAS CABINET, DETECTORS AND GAS LINE (All items mentioned below to be provided/installed by the vendor as per site specification) a) Reputed company make Gas cabinet for placing cylinder with transparent door b) MS Fabricated powder coated Structure c) Gas detectors for hazardous gases d) Tubing - SS316L; including clamps and labeling (10 to 12 feet only) e) 2" exhaust pipe line (metal) for pumping the exhaust gases f) 5014(budgetary) 11. VACUUM PUMPING SYSTEM: I. ROTARY MECHANICAL PUMP (ROUGHING PUMP): Direct Drive Rotary Mechanical Pump ( Edwards make ) having a displacement capacity of 30m 3 /hr giving a no-load ultimate vacuum of 1 x 10-3 m.bar II. ROOTS PUMP: Roots Pump ( Edwards / Pfeiffer/Oxford/Ebara make ) having a displacement capacity of 150 m3/hr must be provided above the Rotary Mechanical Pump. III. ROTARY PUMP (BACKING PUMP FOR TURBO PUMP): Direct Drive Rotary Roots Pump having a displacement capacity of 15m 3 /hr giving a no load ultimate vacuum of 1 x 10 m.bar. IV. TURBO MOLECULAR PUMP:

8 Turbo molecular pump (Edwards make) having pumping speed of 345 ltrs/sec must be provided along with turbo controller, emergency vent valve, inlet screen and cables for high vacuum operation. V. HIGH VACUUM VALVE: Electro pneumatically operated high Vacuum Gate Valve must be provided to isolate the Chamber from the pumping system. In case of power failure the gate valve switch off automatically there by isolating the deposition chamber. VI. ROUGHING VALVE: Electro pneumatically operated right angle type roughing Valve should be provided for roughing operation. VII. BACKING VALVE: Electro pneumatically operated right angle type, backing Valve must be provided for backing operation. VIII. MOTORISED THROTTLE VALVE: Motorised throttle valve of 2" size must be provided in the roughing line to maintain the required partial pressure of 1 to 40 m.bar in conjunction with capacitance manometer through controller during deposition process. IX. VENT VALVE: Solenoid operated Vent Valve of 1/4" Size must be provided to CVD chamber to vent the chamber to atmosphere whenever required. X. VACUUM PLUMBING LINES: Vacuum Plumbing Lines are fabricated stainless steel for connecting high vacuum, roughing and backing connections with necessary bellow adaptors to arrest vibrations. XI. VACUUM MEASUREMENT: a) Independent Digital Pirani and Digital Penning gauge with 2 Pirani Sensors and 1 Penning Sensor together having a measuring range from 1000m.bar to 10-6 m.bar must be provided in the system. b) Capacitance Manometer provided having a measuring range from 100 mbar to 10-2 mbar along with required cables. XII. ULTIMATE VACUUM: The system described above should be given an ultimate vacuum of 1 x 10-6 m.bar in clean, cold, empty, degassed chamber after back filling with dry nitrogen. XIII. WORKING VACUUM: The deposition pressure in the CVD chamber must be between 1 m bar to 40 m bar. XIV. AUTO/MANUAL VACUUM CONTROLLER:

9 An auto / manual Vacuum Controller must be provided for complete automation of Vacuum Pumping System with fully automatic and manual over riding facility with mimic diagram, manually operated ON/OFF Switches with indication lamps, auto / manual / standby selector switch, utility failure indication and alarms etc. 12. CONTROL CONSOLE: Control Console should be a part of the Frame Structure located on the front side of the frame structure. This must house the followings:- a) Manually operated ON/OFF Switch with indication lamp for Rotary Pump, Roots Pump, Turbo Pump& valves. b) Digital Pirani, Penning Gauge, Digital High Pressure Pirani Gauge, Capacitance Manometer. c) Substrate Heater Controls with ON/OFF Switch for the heater, PID Controller. d) RF Power Supply Control Unit. e) Emergency OFF switch. f) ON/OFF switches for all electro pneumatic valves both in gas lines and pumping system lines. g) Control Console must be wired to operate on 415 V AC, 50 Hz, 3 Phase Supply with power, neutral and ground connection. PROGRAMMABLE LOGIC CONTROLLER: a) A Programmable Logic Controller must be provided in the system for complete automation of Vacuum Cycle and to achieve various interlocks of the system. b) A separate and dedicated Human machine interface (HMI) panel of 6 size must be provided with touch screen operation facility. 13. SAFETY DEVICES: The system must be provided with number of safety devices to protect the system and the operator from malfunction and possible operator's errors. I. OVER LOAD PROTECTION: a) The motors must be fitted with thermal overload protection to protect the Rotary Pump motor from drawing excessive current due to overload. b) The starters should trip in case of excessive current and should be manually reset after identifying the fault conditions. c) RF Power Supply must be protected from the main system. The CVD system should be provided with number of safety devices to protect the system and the operator from malfunction and possible operator's errors. II. MICRO SWITCH: The High vacuum valve must be fitted with micro switches which provide the signal on the valve fully closed position so that even if the electrical signal gives any wrong status the micro switches

10 will not allow other operation to be carried out. III. PIRANI CONTROLLER (PART OF MICROPROCESSOR GAUGE): a) Pirani vacuum controller must be incorporated operating in the range of 0.5 to 1 x 10 3 m.bar through a roughing pirani gauge head and backing pirani gauge head. b) These vacuum controllers must sense the vacuum of respective places and energies the relay when the preset vacuum is reached. c) The pirani controller fitted to roughing gauge head should be normally set at.05m.bar which is the normal vacuum to be created before opening the high vacuum valve. d) In case of leak in the chamber or any degassing the controller must not allow the high vacuum valve to open until the preset vacuum should be reached in the chamber there by protecting the diffusion pump. IV. PENNING GAUGE CONTROLLER (PART OF MICROPROCESSOR GAUGE) Penning Gauge Controller which must operate in the range of 5 x 10 3 m.bar to 1 x 10 6 m.bar should be inter connected with coating unit power controls such that if vacuum falls beyond the set value the controls and respective power supply must be de-energised. 14. COOLING WATER LINES (All items mentioned below to be provided/installed by the vendor as per site specification) a) Water lines for different systems of the system should be taken from a central manifold distributing them into various circuits providing each with a control valve for independent operation. b) Similarly the outlet water from different systems must be connected to a common outlet manifold. m c) Water flow switches should be provided on the outlet of each system so that the water flow rate of each of the system must be sensed and OK signal should be given to operate respective power controls. In case of water supply failure or reduced rate of water flow these switches de-energise the electrical circuit and give alarm showing the status of the system through indicators. 15. PERFORMANCE- (Deposition chemistry specification) Depsition rates : Si A 0 /min SiO A 0 /min Si 3 N A 0 /min Thickness Uniformity : within ±3 % over 4 inch dia substrate for a maximum thickness of ~20 μm SCRUBBER (All items mentioned below to be provided/installed by the vendor as per site specification)

11 Scrubber unit of reputed make to neutralize all gases used in PECVD. a) Civil works b) Electrical Installation c) Reputed company make Air Compressor with delivering capacity 5.2 cfm d) Chiller for chilled water supply with temperature C, circulation pump, isolation valves and pressure gauges. 16. SPARES LIST a) Each O-rings - 5set b) MFC - 1 No of each type c) PCB for programmable controller 1 no d) All fuses TERMS & CONDITIONS: General: 1. No separate tender paper will be issued from the office; one should only download the specifications/list from the website. 2. The rates should be quoted on FOR Tezpur University, Napam basis. 3. Quotations should be accompanied byi) A call deposit (earnest money) amounting `. 5,000/- pledge in favor of Registrar, Tezpur University, payable at Tezpur. 4. The rates should be exclusive of taxes and applicable tax % should be clearly indicated. 5. Quoted rates should be valid at least for a period of 6 months. 6. The rates should be quoted along with supporting documents of specifications and technical features and list of users. 7. Details of availability of after sales support will have to be furnished. After sales support directly from manufacturer and from Assam (Guwahati / Tezpur) will be preferred. 8. The University is exempted from paying Custom and Excise duty. 9. Proprietary items should be quoted with sole Manufacturer/Distributorship certificate. 10. No Advance payment will be made. However if the item is of foreign origin, advance payment will be made either by FDD or vide LOC. In such cases 10% Performance Bank Guarantee should be submitted before issuing FDD/LOC, covering the warranty period. 11. Performance Bank Guarantee also has to be submitted for Major equipments of Indian origin, covering the warranty period. 12. Items of Foreign origin should have Insurance up to installation on site. 13. The University reserves the right to accept or reject any or all the quotations without assigning any reason. 14. The vendor must be a reputed manufacturer or his authorized selling agent of the equipment. 15. If the supplier is not the manufacturer, the sole selling agent certification is to be provided. 16. The vendor should submit authorization letter issued by the Manufacturer for this specific tender addressed to the Registrar, Tezpur University. 17. Any third party item/component in the equipment is to be clearly mentioned with make and model. 18. The vendor should have adequate facilities, trained manpower and staff for installation, commissioning and after sales service of the equipments.

12 19. An undertaking from manufacturer is required stating that they would facilitate the Tenderer on regular basis with the technology/product updates and extend support for the warranty and AMC period as well. 20. The vendor should quote the products strictly as per the tendered specifications. Complete Technical details along with make, model number, complete specifications, pamphlets, and literature of the systems highlighting the special features of their offer should be supplied along with the quotation. No request for deviations in terms and conditions will be entertained. If there is any deviation form terms and conditions of the tender, the tender will be rejected. 21. The Bidder must indicate Registration number of the firm along with the LST/CST No. allotted by the Sales Tax authorities in your quotation. 22. The qualified vendors will be invited to Tezpur University for presentation and clarification to a technical evaluation committee on a specified date technical, financial, maintenance, after sale service, training and user feedback. 23. The vendor is duty bound to observe all the Laws, Rules, Regulations, Policies, Procedures and Guidelines of the Government of India as in force from time to time. 24. The successful vendor shall submit a Performance Security of 30% of the cost of the equipment within 15 days of the placement of purchase order. The Performance Security may be in the form of Bank Guarantee of any Indian Nationalized Bank. The Bank Guarantee should be valid for a minimum period of 3 years. In case supplier fails to deliver the items within delivery period or provide satisfactory after sales service within the warranty period, the Performance Security submitted by the firm is liable to be forfeited. Performance Security shall be released immediately after the warranty is over. No interest will be payable by Tezpur University on the Performance Security. 25. Applications should be forwarded to the Registrar for release of call deposit/emd. 26. Quotation should be submitted within 15 days from issue of this notice. Warranty and maintenance: 1. All hardware items should have three year on-site comprehensive warranty. Warranty shall include free maintenance of the whole equipment supplied including free replacement of parts. The defects, if any, shall be attended to on immediate basis but in no case any defect should prolong for more than 24 hours. The on-site comprehensive warranty should be as follows from the date of acceptance of the equipment by Tezpur University. 2. The vendor shall assure to maintain the inventory of spare parts after warranty is over for maintenance of the equipment supplied for a period of 5 years for hardware items. 3. The vendor should show performance warranty (in %) 5 yrs after the warranty period. 4. The vendor should specify their contact details of all offices in different zones. Installation and commissioning: 1. The equipment should be supplied, installed and commissioned on site by the vendor. 2. Two visits in a year should be included as part of the AMC by the vendor during warranty period. 3. Onsite training to 3-4 staff should be provided at least for 15 days after installation Deputy Registrar Tezpur University