This educational seminar discusses creating, measuring, and troubleshooting Rough Vacuum.

Save this PDF as:
 WORD  PNG  TXT  JPG

Size: px
Start display at page:

Download "This educational seminar discusses creating, measuring, and troubleshooting Rough Vacuum."

Transcription

1 This educational seminar discusses creating, measuring, and troubleshooting Rough Vacuum. Specifically, today s talk will cover: Brief review of Vacuum Fundamentals Applications Using Rough Vacuum Rough Vacuum Pumps Rough Vacuum Gauges Troubleshooting Rough Vacuum Applications Summary and Preview of High Vacuum Webinar Previous Webinar (Vacuum Fundamentals) is available for download at:

2 Vacuum History Review Von Guericke ( ) Varian Brothers ( ) Credited with first Vacuum Pump Magdeburg Experiment (1657) Vacuum Tubes for Radio & Radar applications (Klystron linear vacuum-tube amp) Invented sputter-ion pump to improve tube life (1956) Inventors of Nuclear Magnetic Resonance (NMR) 2010

3 Pressure: Molecular Collisions Momentum transfer from a particle hitting a fixed surface creates a Force on the wall. P = F/A P P T 1 F 1 F 1 F 2 Flow Regimes: Viscous vs Molecular MOLECULAR FLOW VISCOUS FLOW (P < 1 mtorr) (P > 100 mtorr)

4 Conductance in Viscous Flow (> 100 mtorr) D (cm) L (cm) In Viscous Flow, the Conductance of a TUBE can be calculated using the formula: C = 180 D 4 x P/L (l/sec) S net = (C x S) (C + S) D = Diameter of tube in cm L = Length in cm P = Pressure in Torr Conductance of 1m (100 cm) tubing sizes at 500 mtorr Diameter Conductance (m 3 /hr) ¼ (NW25) (NW40) (NW50) 600

5 Conductance in Viscous Flow (> 100 mtorr) D (cm) L (cm) In Viscous Flow, the Conductance of a TUBE can be calculated using the formula: S net = (C x S) (C + S) C = 180 D 4 x P/L (l/sec) D = Diameter of tube in cm L = Length in cm P = Pressure in Torr Conductance of 1m (100 cm) tubing sizes at 500 mtorr Diameter Conductance (cfm) ¼ (NW25) (NW40) (NW50) 353

6 Pressure Regions: Rough Vacuum UHV Vacuum Pressure Regions Ultra High Vacuum High Vacuum Transition Rough Vacuum Pressure (Torr)

7 Rough Vacuum Applications Instrumentation & Mass Spec - Backing High Vacuum Pumps - Interface Pumping (Differential Vacuum) Vacuum Coating - Surface coatings for decorative or structural properties 1 x 10-3 Torr 1 x 10-5 Torr Detector 1 3 Torr DUAL-INLET Turbo Pumps Single Pump evacuates multiple vacuum regions at different pressures Rough Vacuum Pump Evacuates Interface region to a few Torr AND acts as Backing pump for the Turbo

8 Rough Vacuum Applications Automotive - Leak Detection (AC & Engine) - Brake line filling Water Removal - Insulation for Electrical Transformers - Freeze Drying food and pharmaceuticals

9 Rough Vacuum Applications Heat Treatment (Furnaces) - Heating components under vacuum to change mechanical properties Vacuum Forming & Conveyance

10 Rough Vacuum Applications Semiconductor Manufacturing - Rough vacuum pumps are used for: Initial pump down from atmosphere Backing HV or UHV pumps Wafer transfer and loadlock chambers.

11 VACUUM PUMP SELECTION ROUGH VACUUM pumps are most effective when gas is moving in VISCOUS FLOW RANGE PUMP TYPE EXAMPLES Rough Vacuum Atm - Displacement 10-3 Pumps High Vacuum Displacement Pumps Capture Pumps Diaphragm Pumps Rotary Vane Pumps Oil-Free Scroll Pumps Piston Pumps Screw Pumps Diffusion Pumps Turbo Molecular Pumps Cryo Pumps Ultra High Vacuum < Capture Pumps Cryo Pumps, Ion Pumps Sublimation Pumps

12 Displacement Pumps: Rough Vacuum

13 ROUGH VACUUM PUMPS DIAPHRAGM PUMPS Pressure differential created by deformation of elastic membrane allows gas to enter the space above the piston Inlet valve closes & exhaust valve opens (discharge to atmosphere or to inlet of a second chamber) Single and multi-stage models available Limited base pressure Frequent replacement of diaphragms (annual) Maintenance can be complicated

14 Rough Vacuum: Oil-Sealed RVP OIL-SEALED ROTARY VANE PUMPS 1.5 m 3 /hr 600 m 3 /hr Molecules in VISCOUS FLOW enter the pump inlet Gas is Isolated, Compressed (to above 760 Torr), then Exhausted (or to 2 nd stage) Inlet Isolation Compression/Exhaust

15 Rough Vacuum: Oil-Free Scroll Pump DRY SCROLL PUMPS (3 m 3 /hr 35 m 3 /hr) Compact, Oil-free pumps with high pump speed and low mtorr base pressure Without OIL to achieve sealing, SCROLL PUMPS rely on (field replaceable) TIP SEALS to achieve vacuum Single and Dual Stage Versions available: - Maintenance Simplicity vs Base Pressure! 15m 3 /hr <50 db15m3/hr Hermetically Sealed

16 ROUGH VACUUM PUMPS PISTON PUMPS Piston pumps use coated PISTONS (eg.teflon) and CYLINDERS, and valving to achieve compression: - Inline, V-Twin, and Opposed Piston designs

17 Displacement Pump Comparison Diaphragm Pump Oil-Sealed Rotary Vane Pump (RVP) Oil-Free Scroll Pump Oil Free Piston Pump Oil Free Ultimate Vacuum Maintenance Initial Cost Initial Cost Ultimate Vacuum Oil Oil Free Initial Cost Ultimate Vacuum Maintenance Oil Free Light Gases Audible Noise Maintenance

18 Vacuum Measurement Technologies - Different technologies are required to measure the vacuum pressure in different vacuum regions RANGE GAUGE TYPE EXAMPLES Rough Vacuum Atm Mechanical Deflection & Thermal Transfer Gauges Capacitance Manometer Thermocouple Convection Pirani High Vacuum Ultra High Vacuum Mechanical Deflection & Ionization Gauges < Ionization Gauges & Gas Analyzers Capacitance Manometer Hot Ion Gauge (BAG) Cold Cathode UHV Ionization Gauges Ion Pump Current Residual Gas Analyzer (RGA)

19 Vacuum Measurement Technologies GAUGE TECHNOLOGIES OVERLAP VACUUM REGIONS Ultra High Vacuum High Vacuum Rough Vacuum

20 Mechanical Deflection Gauges Directly measure the physical force of gas molecules striking a surface P T F 1 F 2 CAPACITANCE MANOMETER - DIAPHRAGM (between reference and test pressures) forms part of a capacitor circuit - PRESSURE causes deflection which alters the capacitance) P C - MOST ACCURATE and FASTEST RESPONSE gas independent gauge; Dynamic range 3.5 decades/gauge

21 Thermal Transfer Gauges Exploit the relationship between heat loss (through convection) and pressure CONVECTION GAUGE - Maintain filament at constant T (above ambient): (P I) - Enhanced response time in viscous flow - Atm < 1 x 10-3 Torr THERMOCOUPLE GAUGE - Temperature of wire filament monitored at constant Current (P T) - Slow response time; non linear above 2-5 Torr

22 Thermal Transfer: Pirani Gauge PIRANI GAUGE Filament (exposed to vacuum) forms one leg of a Wheatstone Bridge circuit; Loss of heat changes the resistance of the filament, unbalancing the bridge Voltage is applied to re-establish the balance: P V applied - Response is Gas Type Dependent (Gas Correction factors required) - Extremely non-linear above 1 Torr Typical Pirani Gauge Response

23 Troubleshooting Rough Vacuum Systems Pressure (Torr) Volume Desorption Diffusion Pressure Decay Time

24 Troubleshooting Rough Vacuum Pumpdown Pressure (Torr) P 10-3 T The slope of this line is proportional to the pumping speed Base Pressure Time (min) Monitoring the CHANGE in Pressure over Time can help to determine if there is a leak in the vacuum system A leak-tight system will display steadily decreasing slope until we reach the limits of the ROUGH VACUUM pumps

25 Troubleshooting Rough Vacuum Pumpdown Pressure (Torr) P T Outgassing Base Pressure Time (min) Monitoring the CHANGE in Pressure over Time can help to determine if there is a leak in the vacuum system A vacuum system with OUTGASSING issues will display a fairly constant rate of decrease in pressure over time

26 Troubleshooting Rough Vacuum Pumpdown Pressure (Torr) Real leak Outgassing Base Pressure Time (min) Monitoring the CHANGE in Pressure over Time can help to determine if there is a leak in the vacuum system A vacuum system with a REAL LEAK will show a pressure change that drops, then flattens at the level of the leak

27 Rough Vacuum Troubleshooting: Rate of Rise TEST Outgassing/Virtual Leak: - Rate of Rise ( P/ T) DECREASES over time Pressure T P T P Time Real Leak: - Rate of Rise ( P/ T) remains STEADY over time Pressure P T P T Time

28 Summary: Rough Vacuum Rough Vacuum Pumps (displacement pumps) require gas to be in Viscous Flow to be effective. EFFECTIVE pumping speed approaches ZERO around 1 x 10-3 Torr. Vacuum Pump choice depends on the importance to the user of: Oil vs Oil-free Process Base Pressure Requirements Initial cost vs Lifetime Cost Process Gas Limitations Pump Speed at Operating Pressure Maintenance Simplicity Audible Noise Vacuum gauge selection depends on the accuracy required vs the cost. Gas dependent gauges require correction factor. When approaching the lower limits of Rough Vacuum, OUTGASSING (Desorption and Diffusion) is the dominant factor (vs chamber volume) Techniques for troubleshooting ROUGH VACUUM applications include Pumpdown Curves ( P/ T) and Rate-of-Rise or Leak-Up Tests.

29 Vacuum Education Programs For Information on Agilent s Vacuum Technology Products and Services, please or call , and select option 3. To learn about more Agilent Vacuum Technology Education programs, including UHV Seminars at your institution Scheduled multi-day classes in Vacuum Practice and Leak Detection Custom multi-day classes at your site Other custom training classes to fit your needs Please Robin Arons or call Customer Care at (Option 3) for more details on these programs Confidentiality Label December 12,

30 Next Live Webinar: High Vacuum (Feb-7) High Vacuum Webinar deals with the process of generating, measuring, and maintaining High Vacuum Pressure (10^-3 Torr to approx. 10^-8 Torr). Roots type pumps (covering Transition vacuum region) will also be discussed. Participants will learn about the benefits and drawbacks of different High Vacuum pump and Gauge technologies, and what to consider when constructing a vacuum system or troubleshooting leaks in the High Vacuum regime. To Register, Visit:

Vacuum Science Techniques and Applications Dan Dessau Adv. Lab 2007

Vacuum Science Techniques and Applications Dan Dessau Adv. Lab 2007 Vacuum Science Techniques and Applications Dan Dessau Adv. Lab 2007 Vacuum increases the mean-free-path of gas molecules. Vacuum prevents chemical reaction. Vacuum removes contaminants from surfaces. Vacuum

More information

A Journal of Practical and Useful Vacuum Technology. By Phil Danielson

A Journal of Practical and Useful Vacuum Technology. By Phil Danielson A Journal of Practical and Useful Vacuum Technology From By Phil Danielson Thermal Conductivity Gauges Thermal conductivity pressure gauges are extremely common in vacuum technology, but an understanding

More information

Revision 2013 Vacuum Technology 1-3 day Good Vacuum Practice 1 Day Course Outline

Revision 2013 Vacuum Technology 1-3 day Good Vacuum Practice 1 Day Course Outline Revision 2013 Vacuum Technology 1-3 day Good Vacuum Practice 1 Day Course Outline This training course outline is intended to cover the following: Introduction to vacuum Measurement Lubricated rotary pumps

More information

This educational seminar discusses creating, measuring, and troubleshooting Ultra-High Vacuum ( Torr) systems.

This educational seminar discusses creating, measuring, and troubleshooting Ultra-High Vacuum ( Torr) systems. This educational seminar discusses creating, measuring, and troubleshooting UltraHigh Vacuum ( 10 8 10 12 Torr) systems. Specifically, today s talk will cover: Brief review of High Vacuum (Characteristics,

More information

Leak Checking Large Vacuum Chambers

Leak Checking Large Vacuum Chambers Leak Checking Large Vacuum Chambers Technical Overview Vacuum Technologies Introduction Understanding the pump-down characteristics of a large vacuum vessel is critical for determining whether the vacuum

More information

VS Series Leak Detectors for Vacuum Furnaces LEAK DETECTION FOR VACUUM FURNACES

VS Series Leak Detectors for Vacuum Furnaces LEAK DETECTION FOR VACUUM FURNACES VS Series Leak Detectors for Vacuum Furnaces LEAK DETECTION FOR VACUUM FURNACES VS Series Leak Detectors for Vacuum Furnaces indicate the presence of a leak. If the vacuum level is slow to reach the original

More information

Pressure Measurement

Pressure Measurement Pressure Measurement Manometers Sensors, Transducers Ashish J. Modi Lecturer, Dept. of Mech.Engg., Shri S.V.M. inst. Of Technology, Bharuch Pressure Pressure is a force per unit area exerted by a fluid

More information

Major Design Features

Major Design Features Major Design Features 3Flex Features Design Benefits Discussion 316 SS fittings and pneumatically actuated, hard-seal valves Provides virtually leak-free gas management with the lowest outgassing rate

More information

Chapter 5: Subatmospheric Total Pressure Gauges

Chapter 5: Subatmospheric Total Pressure Gauges Chapter 5: Subatmospheric Total Pressure Gauges The pressure gauges that will be described in this section are used to monitor the environment in a vacuum vessel so that processes conducted under subatmospheric

More information

Leak Detection. Kirsten Zapfe, DESY CAS Vacuum in Accelerators Platja D Aro, May 21, Special thanks to S. Holm, N. Mildner and A.

Leak Detection. Kirsten Zapfe, DESY CAS Vacuum in Accelerators Platja D Aro, May 21, Special thanks to S. Holm, N. Mildner and A. Leak Detection, DESY CAS Vacuum in Accelerators Platja D Aro, May 21, 2006 Special thanks to S. Holm, N. Mildner and A. Wagner Outline Introduction Leak Rate and Leak Types Leak Detection Methods Helium

More information

A Primer on Vacuum Pressure Measurement

A Primer on Vacuum Pressure Measurement A Primer on Vacuum Pressure Measurement Steve Hansen This article appeared in Vacuum Coating & Technology, May 2009 It's often said that we live at the bottom of a sea of air. Looking more closely at the

More information

Pressure Measurement. Introduction. Engr325 Instrumentation. Dr Curtis Nelson 3/1/17

Pressure Measurement. Introduction. Engr325 Instrumentation. Dr Curtis Nelson 3/1/17 3/1/17 Pressure Measurement Engr325 Instrumentation Dr Curtis Nelson Introduction A cluster of 72 helium-filled balloons over Temecula, California in April of 2003. The helium balloons displace approximately

More information

EVOLUTION OF VACUUM PUMP REQUIREMENTS FOR LIQUID CHROMATOGRAPHY MASS SPECTROMETRY

EVOLUTION OF VACUUM PUMP REQUIREMENTS FOR LIQUID CHROMATOGRAPHY MASS SPECTROMETRY EVOLUTION OF VACUUM PUMP REQUIREMENTS FOR LIQUID CHROMATOGRAPHY MASS SPECTROMETRY Andrew Chew and Ian Olsen Edwards Global Technology Centre, UK This talk is based on that made at IVC-20 in Korea, August

More information

Level MEASUREMENT 1/2016

Level MEASUREMENT 1/2016 Level MEASUREMENT 1/2016 AGENDA 2 A. Introduction B. Float method C. Displacer method D. Hydrostatic pressure method E. Capacitance method G. Ultrasonic method H. Radar method I. Laser method J. Level

More information

Determination of the Vacuum System for R2R by using a New Pumping Simulation Program

Determination of the Vacuum System for R2R by using a New Pumping Simulation Program Determination of the Vacuum System for R2R by using a New Pumping Simulation Program AIMCAL WCHC Conference Memphis Oct 10 th, Peter Klingner, Dr. Stefan Lausberg, Dr. Marlis Sydow, Dr. Derek Corcoran

More information

LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/12

LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/12 LOW PRESSURE EFFUSION OF GASES revised by Igor Bolotin 03/05/ This experiment will introduce you to the kinetic properties of low-pressure gases. You will make observations on the rates with which selected

More information

How To Use Getters and Getter Pumps

How To Use Getters and Getter Pumps A Journal of Practical and Useful Vacuum Technology From By Phil Danielson How To Use Getters and Getter Pumps Gettering is a vacuum pumping technology that has been with us, in many forms, for almost

More information

Another convenient term is gauge pressure, which is a pressure measured above barometric pressure.

Another convenient term is gauge pressure, which is a pressure measured above barometric pressure. VACUUM Theory and Applications Vacuum may be defined as the complete emptiness of a given volume. It is impossible to obtain a perfect vacuum, but it is possible to obtain a level of vacuum, defined as

More information

Cryo-Evaporator Operation

Cryo-Evaporator Operation Cryo-Evaporator Operation Cara Ricci November 25, 2003 Thin Film Deposition THE UNIVERSITY OF TEXAS AT DALLAS ERIK JOHNSON SCHOOL OF ENGINEERING DOCUMENT NUMBER: FA2003-TF-008 EDITION: 1.1 PAGE: 1 of 28

More information

Gun Vacuum Performance Measurements February 2003

Gun Vacuum Performance Measurements February 2003 JLAB-TN-03-013 Gun Vacuum Performance Measurements February 2003 Marcy Stutzman Abstract. The vacuum in the polarized photoguns at Jefferson Lab is crucial to long lifetime operation of the polarized source.

More information

Advantages of Carrier Gas Leak Detection using Novel Helium or Hydrogen Leak Detectors with Specific Sensor Types

Advantages of Carrier Gas Leak Detection using Novel Helium or Hydrogen Leak Detectors with Specific Sensor Types 19 th World Conference on Non-Destructive Testing 2016 Advantages of Carrier Gas Leak Detection using Novel Helium or Hydrogen Leak Detectors with Specific Sensor Types Klaus HERRMANN 1, Daniel WETZIG

More information

Chapter 6 Leak detection

Chapter 6 Leak detection Chapter 6 Leak detection 1 2 1. Leak rate q L = V p t mbar l s -1 A leak rate of 1 mbar l s -1 exists in a closed vessel having a volume of 1 liter when the pressure increases by 1 mbar within one second,

More information

Oxford Instruments Austin, Inc.

Oxford Instruments Austin, Inc. User User Manual Manual Issue 01 / November 2013 / Oxford Instruments Austin, Inc. Issue 01 / November 2013 / Original Instructions Original Instructions Issue 01 / November 2013 / Oxford Instruments Austin,

More information

MS-40 Portable Leak Detectors

MS-40 Portable Leak Detectors MS-40 Portable Leak Detectors Fully automatic, easy to use, and highly accurate, these advanced design leak detectors are ideal for a broad range of applications including clean, oil-free testing. MS-40

More information

Quadruple mass spectrometers (transducer type)

Quadruple mass spectrometers (transducer type) Quadruple mass spectrometers that meet the need for sensitive analysis and low outgassing which were specifically designed to be controlled by PCs Quadruple mass spectrometers (transducer type) M-070QA-TDF,

More information

LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary

LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary ADH 1/7/014 LOW PRESSURE EFFUSION OF GASES adapted by Luke Hanley and Mike Trenary This experiment will introduce you to the kinetic properties of low-pressure gases. You will make observations on the

More information

COMPACT HIGH PERFORMANCE HELIUM LEAK DETECTORS ASM 182 SERIES

COMPACT HIGH PERFORMANCE HELIUM LEAK DETECTORS ASM 182 SERIES COMPACT HIGH PERFORMANCE HELIUM LEAK DETECTORS COMPACT HIGH PERFORMANCE HELIUM LEAK DETECTORS The most powerful leak detectors on the market to meet demanding applications needs The ASM 182 Series: a unique

More information

PHOENIX L300i Best-in-class Helium Leak Detectors

PHOENIX L300i Best-in-class Helium Leak Detectors 180.85.02 Best-in-class Helium Leak Detectors The perfect Helium leak detector matching your demands The helium leak detector opens up new dimensions of productivity and reliability for your applications.

More information

PLASMA PHYSICS ADVANCED LAB

PLASMA PHYSICS ADVANCED LAB PLASMA PHYSICS ADVANCED LAB Rev. 2010 Laboratory Cautions 1. The energy from the RF amplifier can can cause burns or even be lethal. Be aware of all electrical connections to the output of this device.

More information

Lab 3 Introduction to Quantitative Analysis: Pumps and Measurements of Flow

Lab 3 Introduction to Quantitative Analysis: Pumps and Measurements of Flow Georgia Institute of Technology School of Earth and Atmospheric Sciences EAS 4641, Spring 2008 Lab 3 Introduction to Quantitative Analysis: Pumps and Measurements of Flow Purpose of Lab 3: 1) To gain a

More information

Dr. José Miguel JIMENEZ CERN, Technology Department Head of the Vacuum, Surfaces and Coatings group

Dr. José Miguel JIMENEZ CERN, Technology Department Head of the Vacuum, Surfaces and Coatings group Vacuum Systems Outline Vacuum in Particle Accelerators Vacuum Basics Instrumentation & Pumping The LHC Case Vacuum in Particle Accelerators Why is Vacuum needed in particle accelerators? Vacuum aims to

More information

RDK-408D2 Cold Head. Technical Manual. SHI-APD Cryogenics Inc Vultee Street Allentown, PA U.S.A. Revision A: September 2005

RDK-408D2 Cold Head. Technical Manual. SHI-APD Cryogenics Inc Vultee Street Allentown, PA U.S.A. Revision A: September 2005 RDK-408D2 Cold Head Technical Manual SHI-APD Cryogenics Inc. 1833 Vultee Street Allentown, PA 18103-4783 U.S.A. Revision A: September 2005 (Reference SHI Manual: December 18, 2003 266404A CD32ZZ-160A)

More information

Lab 3 Introduction to Quantitative Analysis: Pumps and Measurements of Flow

Lab 3 Introduction to Quantitative Analysis: Pumps and Measurements of Flow Georgia Institute of Technology School of Earth and Atmospheric Sciences EAS 4641, Spring 2007 Lab 3 Introduction to Quantitative Analysis: Pumps and Measurements of Flow Purpose of Lab 3: 1) To gain a

More information

at NIST: ultra-low outgassing rates

at NIST: ultra-low outgassing rates Traceable outgassing measurements at NIST: ultra-low outgassing rates and new materials James Fedchak Thermodynamic Metrology Group Sensor Science Division Physical Measurement Laboratory Vacuum Project:

More information

Practical approach and problems in in-situ RGA calibration

Practical approach and problems in in-situ RGA calibration Practical approach and problems in in-situ RGA calibration Oleg Malyshev and Keith Middleman Vacuum Science Group, ASTeC Accelerator Science and Technology Centre STFC Daresbury Laboratory UK Workshop

More information

Gas Measurement Fundamentals Certification. Curriculum

Gas Measurement Fundamentals Certification. Curriculum Gas Certification Institute, LLC P.O. Box 131525 Houston, Texas 77219-1525 281-598-7200 Phone 281-598-7199 Fax contact@gascertification.com www.gascertification.com Curriculum Copyright 2007-2012 Gas Certification

More information

Exercise 4-2. Centrifugal Pumps EXERCISE OBJECTIVE DISCUSSION OUTLINE DISCUSSION. Pumps

Exercise 4-2. Centrifugal Pumps EXERCISE OBJECTIVE DISCUSSION OUTLINE DISCUSSION. Pumps Exercise 4-2 Centrifugal Pumps EXERCISE OBJECTIVE Familiarize yourself with the basics of liquid pumps, specifically with the basics of centrifugal pumps. DISCUSSION OUTLINE The Discussion of this exercise

More information

MS.RAJA ELGADY/PRESSURE PAPER 3

MS.RAJA ELGADY/PRESSURE PAPER 3 1- (a) A water tank has a rectangular base of dimensions 1.5m by 1.2m and contains 1440 kg of water. Calculate (i) the weight of the water, weight =...... [1] (ii) the pressure exerted by the water on

More information

HIGH PERFORMANCE LEAK DETECTORS ASM 182 SERIES / ASM 192 SERIES

HIGH PERFORMANCE LEAK DETECTORS ASM 182 SERIES / ASM 192 SERIES HIGH PERFORMANCE LEAK DETECTORS ASM 182 SERIES / ASM 192 SERIES HIGH PERFORMANCE LEAK DETECTORS ASM 182 SERIES / ASM 192 SERIES The most powerful leak detectors on the market to meet demanding applications

More information

FEATURES AND BENEFITS

FEATURES AND BENEFITS AGILENT TRAINING 2-3 Features and Benefits 4-7 Vacuum and Leak Detection 8 Equipment Maintenance 9 Primary Pump Rebuilding 9 Custom On-Site Training 10-18 Formulas and Tables 19-27 Glossary FEATURES AND

More information

THERMODYNAMICS, HEAT AND MASS TRANSFER TUTORIAL NO: 1 (SPECIFIC VOLUME, PRESSURE AND TEMPERATURE)

THERMODYNAMICS, HEAT AND MASS TRANSFER TUTORIAL NO: 1 (SPECIFIC VOLUME, PRESSURE AND TEMPERATURE) THERMODYNAMICS, HEAT AND MASS TRANSFER TUTORIAL NO: 1 (SPECIFIC VOLUME, PRESSURE AND TEMPERATURE) 1. A vacuum gauge mounted on a condenser reads 66 cm Hg. What is the absolute pressure in the condenser

More information

Memorandum Background: Results and Discussion:

Memorandum Background: Results and Discussion: Memorandum To: Dr. Abercromby From: Jason Rapp and Matthew Stumbo Date: January 17, 2012 Subject: Vacuum Chamber Basics Technical Memo Background: We explored several aspects of vacuum chambers, in preparation

More information

Oxygen Contamination

Oxygen Contamination MPMS Application Note 1014-210 Oxygen Contamination This application note describes potential sources for oxygen contamination in the sample chamber and discusses its possible effects. Molecular oxygen,

More information

INSTRUCTIONS. VP-100 Ion Pump. Model / R001

INSTRUCTIONS. VP-100 Ion Pump. Model / R001 INSTRUCTIONS 87-900-130-01 (A) March 3, 2011 VP-100 Ion Pump Model 819-1490 / 819-1490R001 GENERAL INFORMATION This equipment is destined for use by professionals. The user should read this instruction

More information

RC102 & RC110 Sample in Vacuum Continuous Flow Cryogenic Workstation Cryostats

RC102 & RC110 Sample in Vacuum Continuous Flow Cryogenic Workstation Cryostats RC102 & RC110 Sample in Vacuum Continuous Flow Cryogenic Workstation Cryostats www.cryoindustries.com INDUSTRIES RC102 & RC110 Sample in Vacuum Continuous Flow Cryogenic Workstation Cryostats Designed

More information

JANIS OPERATING INSTRUCTIONS FOR SUPERCONDUCTING MAGNET CRYOSTATS

JANIS OPERATING INSTRUCTIONS FOR SUPERCONDUCTING MAGNET CRYOSTATS OPERATING INSTRUCTIONS FOR SUPERCONDUCTING MAGNET CRYOSTATS INTRODUCTION The Janis Research Company's Superconducting Magnet/Cryostat System is one of the most versatile tools available to the scientist

More information

Detector Carrier Gas Comments Detector anode purge or reference gas. Electron Capture Nitrogen Maximum sensitivity Nitrogen Argon/Methane

Detector Carrier Gas Comments Detector anode purge or reference gas. Electron Capture Nitrogen Maximum sensitivity Nitrogen Argon/Methane Gas requirements Gases for packed columns The carrier gas you use depends upon the type of detector and the performance requirements. Table 520-1 lists gas recommendations for packed column use. In general,

More information

Self Heating Sensing Applications

Self Heating Sensing Applications Self Heating Sensing Applications The main sections of this white paper are laid out as follows: Section 1 Overview Section 2 Section 3 Liquid Level Sensing Fluid Flow Sensing. Section 4 Gas Analysis using

More information

8. Now plot on the following grid the values of T (K) and V from the table above, and connect the points.

8. Now plot on the following grid the values of T (K) and V from the table above, and connect the points. Charles s Law According to Charles s law, the volume of a fixed mass of gas varies directly with its Kelvin temperature if its pressure is constant. The following table contains Celsius temperature and

More information

Specification Sheet. Equipment Model: J-VAC-12 High Vacuum Furnace. Type. Chamber. Maximum Temperature 1250 C. Hot Zone

Specification Sheet. Equipment Model: J-VAC-12 High Vacuum Furnace. Type. Chamber. Maximum Temperature 1250 C. Hot Zone Specification Sheet Equipment Model: J-VAC-12 High Vacuum Furnace Type Vertical Bell, Turbo Pumped Chamber Stainless Steel Coldwall Maximum Temperature 1250 C. Hot Zone 18 (45 cm) Dia. x 24 (60 cm) H.

More information

VACUUM TECHNIQUES. Why? How else might you make the measurement?

VACUUM TECHNIQUES. Why? How else might you make the measurement? VACUUM TECHNIQUES A good vacuum is essential to many experimental physics applications especially those at the physical extremes of low temperature and high energy. It is quite likely that, in the course

More information

LESER Deutschland Standard Functional Tightness Test (Cryo) Content

LESER Deutschland Standard Functional Tightness Test (Cryo) Content Page 1/10 Content 1 Purpose... 1 2 Scope... 1 3 Range of Application... 1 4 Normative Background... 2 5 Terms and Definitions... 2 6 Test Equipment... 3 7 Test Procedure... 5 8 Acceptance Criteria... 8

More information

5.1.3 Mechanical Hazards Drive assemblies have sufficient power to cause injury. Keep hands, fingers, clothing and tools clear of moving parts.

5.1.3 Mechanical Hazards Drive assemblies have sufficient power to cause injury. Keep hands, fingers, clothing and tools clear of moving parts. Approved by: Process Engineer / / / / Equipment Engineer 1 SCOPE The purpose of this document is to detail the use of the PE4400. All users are expected to have read and understood this document. It is

More information

Resist round robin ELETTRA

Resist round robin ELETTRA Resist round robin outgassing @ ELETTRA Trieste - Italy M. Bertolo, P. Lacovig, L.Rumiz, D. Giuressi, R. Sergo, A. Stolfa Experimental setup (1) 100 mm linear translator Sample manipulator Mask manipulator

More information

JETFIRST 150 RTA SYSTEM OPERATING MANUAL Version: 2 Feb 2012

JETFIRST 150 RTA SYSTEM OPERATING MANUAL Version: 2 Feb 2012 JETFIRST 150 RTA SYSTEM OPERATING MANUAL Version: 2 Feb 2012 UNIVERSITY OF TEXAS AT ARLINGTON Nanofabrication Research and Teaching Facility TABLE OF CONTENTS 1. Introduction....2 1.1 Scope of Work.....2

More information

Earlier Lecture. In the earlier lecture, we have seen Kapitza & Heylandt systems which are the modifications of the Claude System.

Earlier Lecture. In the earlier lecture, we have seen Kapitza & Heylandt systems which are the modifications of the Claude System. 17 1 Earlier Lecture In the earlier lecture, we have seen Kapitza & Heylandt systems which are the modifications of the Claude System. Collins system is an extension of the Claude system to reach lower

More information

ASSIGNMENT 2 CHE 3473

ASSIGNMENT 2 CHE 3473 DUE: May 23 ASSIGNMENT 2 CHE 3473 #Problem 1: 3.3 #Problem 2: 3.4 #Problem 3: 3.5 #Problem 4: 3.6 #Problem 5: 3.7 #Problem 6: 3.8 #Problem 7: 3.11 #Problem 8: 3.15 #Problem 9: 3.22 #Problem 10: 3.32 #Problem

More information

A Reliable and Tracer Gas Independent Leak Detector for Food Packages

A Reliable and Tracer Gas Independent Leak Detector for Food Packages 19 th World Conference on Non-Destructive Testing 2016 A Reliable and Tracer Gas Independent Leak Detector for Food Packages Silvio DECKER 1 1 INFICON GmbH, Köln, Germany Contact e-mail: Silvio.Decker@inficon.com-

More information

ASSIGNMENT 2 CHE 3473

ASSIGNMENT 2 CHE 3473 DUE: May 21 ASSIGNMENT 2 CHE 3473 #Problem 1 Read Chapter 3. ALL OF IT. Time yourself and report the time. #Problem 2: 3.2 #Problem 3: 3.3 #Problem 4: 3.5 #Problem 5: 3.6 #Problem 6: 3.7 #Problem 7: 3.8

More information

Oxford Instruments Austin, Inc.

Oxford Instruments Austin, Inc. User's User s Manual Issue 01 / March 2013 / OIAI Cryo-Plex 10 Oxford Instruments Austin, Inc. Issue 01 / March 2013 / Original Instructions Oxford Instruments Austin, Inc. is a wholly-owned subsidiary

More information

- Introduction: a) Metallized Paper & Film :The market Outlook The following diagram shows the estimated usage of the main metallized materials

- Introduction: a) Metallized Paper & Film :The market Outlook The following diagram shows the estimated usage of the main metallized materials Vacuum Metallization of Paper and Outgassing Materials By Fabiano Rimediotti Galileo Vacuum Systems Prato Italy Phone : +390574564380 - f.rimediotti@galileovacuum.com Abstract Materials like paper, some

More information

High Performance Mass Spectrometers

High Performance Mass Spectrometers High Performance Mass Spectrometers For Vacuum and Semiconductor Process Monitoring Detailed product information / introduction MOCVD semiconductor processing Applications: XXCVD/MOCVD XXPECVD XXALD XXSputtering

More information

Mass Spec will not pump down

Mass Spec will not pump down Mass Spec will not pump down Applies to 5973A/N MSD There are several situations that could cause the 5973A/N to have problems pumping down. The following scenarios should help in isolating problems related

More information

Chapter 5: Gases 5.1 Pressure Why study gases? An understanding of real world phenomena. An understanding of how science works.

Chapter 5: Gases 5.1 Pressure Why study gases? An understanding of real world phenomena. An understanding of how science works. Chapter 5: Gases 5.1 Pressure Why study gases? An understanding of real world phenomena. An understanding of how science works. A Gas Uniformly fills any container. Easily compressed. Mixes completely

More information

AGILENT TURBOMOLECULAR PUMPS MEASUREMENT METHODOLOGY

AGILENT TURBOMOLECULAR PUMPS MEASUREMENT METHODOLOGY AGILENT TURBOMOLECULAR PUMPS MEASUREMENT METHODOLOGY Agilent Vacuum Products: Our Committment to Quality Agilent s commitment to quality and Measurement s philosophy Reference Standards (PNEUROP, ISO)

More information

USA (Bartlett, IL) Division

USA (Bartlett, IL) Division USA (Bartlett, IL) Division USA (Bartlett, IL) Division 100+ years Manufacturing Experience Six Sigma Black Belt (2) 350,000 Sq. Ft. Manufacturing & Office Total Program Development & Management Product

More information

Quick Reference Technical Data

Quick Reference Technical Data Bulletin 127C 2 Quick Reference Technical Data For over 100 years, The Spencer Turbine Company has specialized in innovative solutions to air and gas handling problems. Spencer's product line includes

More information

Chapter 13: The Behavior of Gases

Chapter 13: The Behavior of Gases Chapter 13: The Behavior of Gases I. First Concepts a. The 3 states of matter most important to us: solids, liquids, and gases. b. Real Gases and Ideal Gases i. Real gases exist, ideal gases do not ii.

More information

End of Chapter Exercises

End of Chapter Exercises End of Chapter Exercises Exercises 1 12 are conceptual questions that are designed to see if you have understood the main concepts of the chapter. 1. While on an airplane, you take a drink from your water

More information

Unit 2 Pressure Measurement Techniques 1. State importance of pressure measurement in process industries.

Unit 2 Pressure Measurement Techniques 1. State importance of pressure measurement in process industries. Unit 2 Pressure Measurement Techniques 1. State importance of pressure measurement in process industries. The measurement of pressure is one of the most important measurements, as it is used in almost

More information

States of Matter Review

States of Matter Review States of Matter Review May 13 8:16 PM Physical States of Matter (Phases) Solid Liquid Melting Gas Condensation Freezing Evaporation Deposition Sublimation Sep 13 6:04 PM 1 May 13 8:11 PM Gases Chapter

More information

EuroFID Total Hydrocarbon Analyzer. Precise Determination of Total Hydrocarbons in Air for Corrosive as well as Condensing Gases

EuroFID Total Hydrocarbon Analyzer. Precise Determination of Total Hydrocarbons in Air for Corrosive as well as Condensing Gases P r o d u c t i n f o r m at i o n EuroFID Total Hydrocarbon Analyzer Precise Determination of Total Hydrocarbons in Air for Corrosive as well as Condensing Gases Proven Analyzer Technology Measuring total

More information

ARTICLE IN PRESS. Nuclear Instruments and Methods in Physics Research A

ARTICLE IN PRESS. Nuclear Instruments and Methods in Physics Research A Nuclear Instruments and Methods in Physics Research A 602 (2009) 845 849 Contents lists available at ScienceDirect Nuclear Instruments and Methods in Physics Research A journal homepage: www.elsevier.com/locate/nima

More information

How to specify a product. Process Sensors and Mechanical Instruments

How to specify a product. Process Sensors and Mechanical Instruments How to specify a product Process Sensors and Mechanical Instruments Keep the overview. Here is some guideline information on how to specify our products. Intended as supplementary help to specification

More information

Procedure of Xenon Transfer

Procedure of Xenon Transfer Procedure of Xenon Transfer Feng Zhou,MIT CC: Martina Green February 28, 2005 In this write up, we discuss the procedure on how to transfer xenon to a designed gas storage vessel that supplies xenon to

More information

Development of a high vacuum sample preparation system for helium mass spectrometer

Development of a high vacuum sample preparation system for helium mass spectrometer Journal of Physics: Conference Series Development of a high vacuum sample preparation system for helium mass spectrometer To cite this article: P Kumar et al 2012 J. Phys.: Conf. Ser. 390 012056 View the

More information

Final Gas Law Review

Final Gas Law Review Name: ate: 1 t which temperature is the vapor pressure of ethanol equal to 80 kpa?. 48. 73. 80. 101 4 Gas Molecular Mass (g/mol) 2 4 17 20 The table shown lists four gases and their molecular mass. Which

More information

1. The principle of fluid pressure that is used in hydraulic brakes or lifts is that:

1. The principle of fluid pressure that is used in hydraulic brakes or lifts is that: University Physics (Prof. David Flory) Chapt_15 Thursday, November 15, 2007 Page 1 Name: Date: 1. The principle of fluid pressure that is used in hydraulic brakes or lifts is that: A) pressure is the same

More information

COMMISSIONING OF RHIC VACUUM SYSTEMS*

COMMISSIONING OF RHIC VACUUM SYSTEMS* COMMISSIONING OF RHIC VACUUM SYSTEMS* H.C. Hseuh #, R. Davis, R.C. Lee, D. Pate, L. Smart, R. Todd, D. Weiss, D. Zigrosser RHIC Project, BNL, Upton, NY 11973 Abstract The Relativistic Heavy Ion Collider

More information

Gas Release from Solids, Materials for Vacuum and Leak Detector

Gas Release from Solids, Materials for Vacuum and Leak Detector VACUUM AND PLASMA SCIENCE AND TECHNOLOGY W9 Gas Release from Solids, Materials for Vacuum and Leak Detector Ming-Show Wong Nov. 2015 Gas Release from Solids Vaporization Thermal Desorption First Order

More information

Pressure & Vacuum Measurement. Series 370. Solutions. Stabil-Ion Vacuum gauge and Controller

Pressure & Vacuum Measurement. Series 370. Solutions. Stabil-Ion Vacuum gauge and Controller w w w. m k s i n s t. c o m Pressure & Vacuum Measurement Solutions Series 370 Stabil-Ion Vacuum gauge and Controller Features & Benefits All-metal, rack-mount controller for Stabil-Ion and Convectron

More information

Matter is made up of particles which are in continual random motion Misconception: Only when a substance is in its liquid or gas state do its

Matter is made up of particles which are in continual random motion Misconception: Only when a substance is in its liquid or gas state do its Kinetic Theory of Matter Matter is made up of particles which are in continual random motion Misconception: Only when a substance is in its liquid or gas state do its particles move because in these two

More information

SPH 4C Unit 4 Hydraulics and Pneumatic Systems

SPH 4C Unit 4 Hydraulics and Pneumatic Systems SPH 4C Unit 4 Hydraulics and Pneumatic Systems Properties of Fluids and Pressure Learning Goal: I can explain the properties of fluids and identify associated units. Definitions: Fluid: A substance that

More information

Bonding Reliability Testing for Wafer Level Packaged MEMS Devices

Bonding Reliability Testing for Wafer Level Packaged MEMS Devices Bonding Reliability Testing for Wafer Level Packaged MEMS Devices Michael Shillinger Vice President of Operations Innovative Micro Technology Santa Barbara, CA, USA mjs@imtmems.com October 20, 2011 Innovative

More information

Guide for Reading. Vocabulary compressibility

Guide for Reading. Vocabulary compressibility 14.1 Properties of Gases Connecting to Your World In organized soccer, there are rules about equipment. For international competitions, the ball s mass must be not more than 450 grams and not less than

More information

Very Large Scale Vacuum Systems

Very Large Scale Vacuum Systems Very Large Scale Vacuum Systems Introduction I am Derek Thomas This presentation is about Urenco at Capenhurst Good timing, it s 40 years since we set up Urenco Contents The company: Urenco Enrichment-

More information

Technical Data Sheet TI-F50 Locking Units series KFH

Technical Data Sheet TI-F50 Locking Units series KFH English translation of German original Locking Units series KF Further important practical advice is given in Operating Manual BA-F50., Rod diameter 18 mm 50 mm øz 8 L 2 6 x 6 0 min. 4x30 KF 18 to KF 32,

More information

OMNISTAR / THERMOSTAR. The efficient solution for gas analysis. Intelligent software. Wide range of applications.

OMNISTAR / THERMOSTAR. The efficient solution for gas analysis. Intelligent software. Wide range of applications. OMNISTAR / THERMOSTAR The efficient solution for gas analysis. Intelligent software. Wide range of applications. OMNISTAR /THERMOSTAR The efficient solution for gas analysis. Intelligent software. Wide

More information

Trillium US Inc. Cryo-Plex 10 Cryogenic High Vacuum Pump User s Manual Rev A / November 2015

Trillium US Inc. Cryo-Plex 10 Cryogenic High Vacuum Pump User s Manual Rev A / November 2015 97-00032-000 Trillium US Inc. Cryo-Plex 10 Cryogenic High Vacuum Pump User s Manual Rev A / November 2015 For information about Trillium US Inc., visit the Trillium US Inc. Web site at: http://www.trilliumus.com

More information

Vacuum. Technology Know How

Vacuum. Technology Know How Know How Pfeiffer Page 2 Page 1 Introduction to 8 1.1 General 8 1.1.1 What is vacuum? 8 1.1.2 Overview of vacuum 8 1.2 Fundamentals 9 1.2.1 Pressure 9 1.2.2 General gas equation 12 1.2.3 Molecular number

More information

Operating Procedures for Metal Evaporator I

Operating Procedures for Metal Evaporator I Operating Procedures for Metal Evaporator I Metal Evaporator I is intended as a tool and a training device. Understanding the operation of this equipment should give you a basic knowledge of vacuum and

More information

250C-IG COMPRESSOR KIT 12V PART NO C-IG COMPRESSOR KIT 24V PART NO

250C-IG COMPRESSOR KIT 12V PART NO C-IG COMPRESSOR KIT 24V PART NO 250C-IG COMPRESSOR KIT 12V PART NO. 25050 250C-IG COMPRESSOR KIT 24V PART NO. 25058 IMPORTANT: It is essential that you and any other operator of this product read and understand the contents of this manual

More information

Application Note AN-107

Application Note AN-107 SPEC Sensor TM Characterization & Calibration Considerations Scope This document is provided to describe the considerations needed to characterize, calibrate, verify and validate the measurement performance

More information

BASICS of MAINTENANCE and TROUBLESHOOTING of VACUUM DIFFUSION PUMPS

BASICS of MAINTENANCE and TROUBLESHOOTING of VACUUM DIFFUSION PUMPS BASICS of MAINTENANCE and TROUBLESHOOTING of VACUUM DIFFUSION PUMPS Topics for Discussion Diffusion Pump Basics Maintenance Troubleshooting Topics for Discussion Diffusion Pump Fundamentals Maintenance

More information

EMISSION CHAMBERS. Bulk and Surface Emission Detection for the RAD7 User Manual

EMISSION CHAMBERS. Bulk and Surface Emission Detection for the RAD7 User Manual EMISSION CHAMBERS Bulk and Surface Emission Detection for the RAD7 User Manual TABLE OF CONTENTS INTRODUCTION 3 1 SYSTEM CONFIGURATION 4 1.1 Closed Loop Configuration 4 Fig. 1 Emission Chamber Closed Loop

More information

275 series Convection Vacuum Gauge

275 series Convection Vacuum Gauge 275 series Convection Vacuum Gauge User Manual Kurt J. Lesker Company 1925 Rt. 51 Jefferson Hills, PA 15025 USA Phone: +1-412-387-9200 Fax: +1-412-384-2745 E-mail: gauging@lesker.com www.lesker.com p/n

More information

5.08 KINETICS OF ATOMIC OXYGEN REACTIONS BY A FLOW METHOD

5.08 KINETICS OF ATOMIC OXYGEN REACTIONS BY A FLOW METHOD 2nd/3rd Year Physical Chemistry Practical Course, Oxford University 5.08 KINETICS OF ATOMIC OXYGEN REACTIONS BY A FLOW METHOD (5 points) Background information Relevant lecture courses: Introduction to

More information

Universal Gas Analyzers for Process Monitor (UGAPM) UGAPM100, UGAPM200, UGAPM300

Universal Gas Analyzers for Process Monitor (UGAPM) UGAPM100, UGAPM200, UGAPM300 Operation Manual and Programming Reference Universal Gas Analyzers for Process Monitor (UGAPM) UGAPM100, UGAPM200, UGAPM300 Stanford Research Systems Revision 1.1 May, 2014 Certification Stanford Research

More information

User s Manual Differential Pump

User s Manual Differential Pump User s Manual Differential Pump Model DP-03 XIA LLC 31057 Genstar Road Hayward, CA 94544 USA Tel: (510)-401-5760; Fax: (510)-401-5761 http://www.xia.com/ Information furnished by XIA LLC (XIA) is believed

More information

GM Series Dual-Block Multi-Function Gas Control Valves

GM Series Dual-Block Multi-Function Gas Control Valves Installation Sheets Manual 121 Gas Combustion Combination Controls and Systems Section G Technical Bulletin GM Issue Date 0297 GM Series Dual-Block Multi-Function Gas Control Valves Figure 1: GM Series

More information