Process Pump. The excellent corrosion resistance is achieved due to the new. Series PAF3000/Series PAF5000

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1 Process Pump Series F3/Series F RoHS The excellent corrosion resistance is achieved due to the new PFA wetted material construction! PPS/PFA dual construction, withstand pressure and heat cycle performance have been improved. o metallic parts are used (Metal-free), Pump made of all fluororesin (Series F) P X F Max. flow rate: 4 L/min (Automatically operated) (Series F) Fitting type: Female thread/tube extension/with nut (Insert bushing type, Flare type) 91

2 The excellent corrosion resistance is achieved due Body material ew PFA Excellent corrosion resistance One pump is compatible with various fluids. Diaphragm/Seal / material Diaphragm Modified Check ball Valve seat ew PFA Port ew PFA FLUID I Variation Automatically F341 operated F41 F3413 F413 Body material ew PFA Diaphragm material Modified Discharge flow rate (L/min) 1 to 2 to 4 1 to 1 to 38 Fitting type Female thread Tube extension With nut ote 1) Foot Silencer ote 2) ote 1) Equipped with the F series as standard equipment. ote 2) Automatically operated only. Female thread Tube extension With nut 92

3 to the new PFA wetted material construction! Light weight and Compact Weight: 1.3 kg (F3 / air operated, without foot) 116 mm 169 mm PPS/PFA dual construction Withstand pressure and heat cycle performance have been improved. 119 mm Clean Assembled in a clean room and double-packaged. By using a molded side cover and port, it effectively reduces the amount of dust generation. Side cover PPS Side cover ew PFA Variation on fittings with nut Insert bushing type (LQ1 fittings) ew Flare type (LQ3 fittings) Retightener 1 2 Main seal 1 Quadruple seal construction Body Triple seal construction Body Insert bushing ut ut Tube Tube T. Double stepped retaining design Grip seal P X F

4 Process Pump: Automatically Operated Type (Internal Switching Type) Air Operated Type (External Switching Type) Series F3 RoHS Female thread Tube extension With nut 3 3 Actuation ote 1) Actuation Automatically operated Thread type F Actuation ote 1) ote 2) Type Rc PT G Actuation Automatically operated 13 Tubing size Main fluid connection size 1/2" How to Order F341 3 F341 P13 Port size 3 F B Port size 3/8" B one With foot With silencer Thread type one With foot With silencer Applicable actuation Automatically operated Applicable actuation Automatically operated When option is more than one, suffix in alphabetical order. Type Rc PT G F341 S 1 S 13 When option is more than one, suffix in alphabetical order. ote 2) AIR SUP 3 Actuation ote 1) Actuation Automatically operated Fitting type 1 3 Fitting type LQ1 LQ3 Fitting size Fitting type I side OUT side LQ1 LQ Refer to page 96 for the compatible fittings. B Thread type F one With foot With silencer Type Rc PT G ote 2) Applicable actuation Automatically operated When option is more than one, suffix in alphabetical order. AIR EXH FLUID I Automatically operated type P1 P2 ote 1) The port size of the pilot port is as follows. Automatically operated type is 1/4"; type is 1/8". ote 2) The thread type is applied to the pilot port thread and the female thread piping connection. Refer to page 931 for maintenance parts. Refer to pages 932 and 933 for related products. 94 FLUID I type

5 Process Pump: Automatically Operated Type (Internal Switching Type) Air Operated Type (External Switching Type) Series F RoHS Female thread F Actuation ote 1) Actuation Automatically operated Thread type F ote 2) Type Rc PT G How to Order Port size 6 Port size 3/4" one With silencer Applicable actuation Automatically operated Tube extension F41 AIR SUP With nut F41 S 1 S 19 3 Actuation 19 ote 1) Actuation Automatically operated ote 1) Actuation Actuation Automatically operated I side 6 P19 Tubing size Main fluid connection size 3/4" Fitting size Fitting type OUT side LQ1 LQ3 6 6 F Fitting type 1 3 Refer to page 96 for the compatible fittings. Thread type Fitting type LQ1 LQ3 Type Rc PT G ote 2) one With silencer Thread type F Applicable actuation Automatically operated one With silencer Type Rc PT G ote 2) Applicable actuation Automatically operated P X F AIR EXH FLUID I Automatically operated type P1 P2 ote 1) The port size of the pilot port is 1/4". ote 2) The thread type is applied to the pilot port thread and the female thread piping connection. Refer to page 931 for maintenance parts. Refer to pages 932 and 933 for related products. FLUID I type 9

6 SMC SMC SMC SMC SMC SMC Series F Fittings compatible for the process pump with nut / F341S, F41S. Product without nut (insert bushing), 1 piece nut removed, which is not necessary in cases when using the products with nut. E Union elbow P Panel mount union How to Order Fittings for Products with ut (Series F341S, F41S) LQ1 fittings LQ1 E 41 S Fitting type T Union tee Union U ut (including insert bushing), 1 location removed Applicable tubing size Metric size Inch size Class o. Applicable Applicable process pump tubing size (mm) Reducing Applicable Applicable process pump Class F341S F41S tubing size (inch ) Reducing F341S F41S x 1 1 x 8 19 x x 1 2 x x A B A B A B 1/2" x 3/8" 3/8" x 1/4" 3/4" x /8" 1/2" x 3/8" 1" x 7/8" 3/4" x /8" : Basic size : With reducer : Basic size : With reducer ote) Select the fitting after confirming the I / OUT side fitting size and fitting type. LQ3 fittings LQ3 E 4A S E Union elbow P Panel mount union Fitting type T Union tee U Union Applicable tubing size Class 4 A A ut, 1 location removed Applicable tubing size (inch) 1/2" x 3/8" 3/4" x /8" Applicable process pump F341S F41S ote) Select the fitting after confirming the I / OUT side fitting size and fitting type. Ordering Example F341S-1S13-B Process pump Tubing size 12 x 1 OUT side LQ1E41-S Union elbow LQ1U4B-S Union I side Tubing size 3/8" x 1/4" F341S-1S13-B 1 LQ1E41-S (Union elbow) 1 LQ1U4B-S (Union) 1 ote) Fittings which are ordered with the process pump at the same time will be shipped in a separate package. A 96

7 P X F 97

8 Series F Performance Curve: Automatically Operated Type F341 Flow Characteristics. F41 Flow Characteristics. Discharge pressure (MPa) SUP =. MPa SUP =.4 MPa SUP =.3 MPa Discharge pressure (MPa) SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa.1 SUP =.2 MPa Discharge rate (L/min) Discharge rate (L/min) F341 Air Consumption 2 F41 Air Consumption Air consumption (L/min [AR]) 1 1 SUP =.2 MPa SUP =. MPa SUP =.4 MPa SUP =.3 MPa Air consumption (L/min [AR]) SUP =.2 MPa SUP =. MPa SUP =.4 MPa SUP =.3 MPa Discharge rate (L/min) Discharge rate (L/min) 98

9 Process Pump Automatically Operated Type Series F Selection from Flow Characteristic Graph (F341) Required specifications example: Find the pilot air pressure and pilot air consumption for a discharge rate of 6 L/min and discharge pressure of.2 MPa. <The transfer fluid is fresh water (viscosity 1 mpa s, specific gravity 1.).> If the total lifting height is required instead of the discharge pressure, discharge pressure of.1 MPa corresponds to a total lift of 1 m. Selection procedures: 1. First mark the intersection point for a discharge rate of 6 L/min and discharge pressure of.2 MPa. 2. Find the pilot air pressure for the marked point. In this case, the point is between the discharge curves for SUP =.3 MPa and SUP =.4 MPa, and based on the proportional relationship to these lines, the pilot air pressure for this point is approximately.3 MPa. 3. ext find the air consumption rate. Trace the discharge rate, 6 L/min, up to the point between the discharge curves for SUP =.3 MPa and.4 MPa, then trace to the Y-axis, finding the air consumption to be around L/min (AR). Caution 1. These flow characteristics are for fresh water (viscosity 1 mpa s, specific gravity 1.). 2. The discharge rate differs greatly depending on properties (viscosity, specific gravity) of the fluid being transferred and operating conditions (lifting range, transfer distance), etc. 3. Use.7 kw per 1 L/min of air consumption as a guide for the relationship of the air consumption to the compressor. Viscosity Characteristics (Flow rate correction for viscous fluids) Ratio of discharge rate against fresh water (%) Viscosity (mpa s) Selection from Viscosity Characteristic Graph Required specifications example: Find the pilot air pressure and pilot air consumption for a discharge rate of 2.7 L/min, discharge pressure of.2 MPa, and a viscosity of 1 mpa s. Selection procedures: 1. First find the ratio of the discharge rate for fresh water when viscosity is 1 mpa s from the graph below. It is determined to be 4%. 2. ext, in the required specification example, the viscosity is 1 mpa s and the discharge rate is 2.7 L/min. Since this is equivalent to 4% of the discharge rate for fresh water, 2.7 L/min.4 = 6 L/min, indicating that a discharge rate of 6 L/min is required for fresh water. 3. Finally, find the pilot air pressure and pilot air consumption based on selection from the flow characteristic graphs. Caution Viscosities up to 1 mpa s can be used. Dynamic viscosity ν= Viscosity µ/density ρ. µ ν= ρ ν(1-3 m 2 /s) = µ(mpa s)/ρ(kg/m 3 ) P X F 99

10 Series F Performance Curve: Air Operated Type F3413 Flow Characteristics Discharge pressure (MPa) SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Cycle Cycle Cycle 4 Hz 3 Hz 2 Hz F413 Flow Characteristics Discharge pressure (MPa) SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Cycle Cycle Cycle 3 Hz 2 Hz 1 Hz.1.1 F3413 Air Consumption (4 Hz) 2 Air consumption (L/min [AR]) 1 1 SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Discharge rate (L/min) F3413 Air Consumption (3 Hz) 2 Air consumption (L/min [AR]) 1 1 SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Discharge rate (L/min) F3413 Air Consumption (2 Hz) 2 Air consumption (L/min [AR]) Discharge rate (L/min) SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Discharge rate (L/min) F413 Air Consumption (3 Hz) Air consumption (L/min [AR]) F413 Air Consumption (2 Hz) Air consumption (L/min [AR]) F413 Air Consumption (1 Hz) Air consumption (L/min [AR]) Discharge rate (L/min) SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Discharge rate (L/min) SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Discharge rate (L/min) SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Discharge rate (L/min) 91

11 Process Pump Air Operated Type Series F Selection from Flow Characteristic Graph (F3413) Required specification example: Find the pilot air pressure and pilot air consumption for a discharge rate of 4 L/min and discharge pressure of.1 MPa. <The transfer fluid is fresh water (viscosity 1 mpa s, specific gravity 1.).> ote 1) If the total lifting height is required instead of the discharge pressure, discharge pressure of.1 MPa corresponds to a total lift of 1 m. ote 2) Discharge per cycle: Approx. ml Selection procedures: 1. First mark the intersection point for a discharge rate of 4 L/min and discharge pressure of.1 MPa. 2. Find the pilot air pressure for the marked point. In this case, the point is between the discharge curves (solid lines) for SUP =.2 MPa, and the pilot air pressure for this point is approx..2 MPa. Calculating Air Consumption (F3413) Find the air consumption for operation with a discharge rate of 4 L/min, a 4 Hz switching cycle and pilot air pressure of.2 MPa from the air consumption graph. Selection procedures: 1. Look up from the discharge rate of 4 L/min to find the intersection with SUP =.2 MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 4 L/min (AR). Caution 1. These flow characteristics are for fresh water (viscosity 1 mpa s, specific gravity 1.). 2. The discharge rate differs greatly depending on properties (viscosity, specific gravity) of the fluid being transferred and operating conditions (density, lifting range, transfer distance). Viscosity Characteristics (Flow rate correction for viscous fluids) Ratio of discharge rate against fresh water (%) Viscosity (mpa s) Selection from Viscosity Characteristic Graph Required specification example: Find the pilot air pressure and pilot air consumption for a discharge rate of 2.7 L/min, discharge pressure of.2 MPa, and a viscosity of 1 mpa s. Selection procedures: 1. First find the ratio of the discharge rate for fresh water when viscosity is 1 mpa s from the graph below. It is determined to be 4%. 2. ext, in the required specification example, the viscosity is 1 mpa s and the discharge rate is 2.7 L/min. Since this is equivalent to 4% of the discharge rate for fresh water, 2.7 L/min.4 = 6 L/min, indicating that a discharge rate of 6 L/min is required for fresh water. 3. Finally, find the pilot air pressure based on selection from the flow characteristic graphs. Caution Viscosities up to 1 mpa s can be used. Dynamic viscosity ν = Viscosity µ/density ρ. µ ν= ρ ν(1-3 m 2 /s) = µ(mpa s)/ρ(kg/m 3 ) P X F 911

12 Series F Specifications Series F3 Operation method Port size Discharge flow rate Average discharge pressure Pilot air pressure Air consumption Suction lift oise Main fluid: Suction/Discharge port Pilot air: Supply/Exhaust port Dry Wet Withstand pressure Service life Operating fluid temperature Ambient temperature Recommended operation cycle Weight (without foot bracket) Mounting Packaging F341 Automatically operated Female thread 1 to 2 L/min 8 db (A) or less (: with silencer, A2) ote) Values in the table are measured at room temperature using fresh water. F3413 Rc, PT, G 3/8" Female thread, 1/2" Tube extension, With nut (size 4, ) to.4 MPa.2 to. MPa (for to 6 C) 23 L/min (AR) or less Up to 1 m (inside the pump is dry) Up to 4 m (with fluid inside the pump).7 MPa million cycles (for water) to 9 C (o freezing) to 7 C (o freezing) Rc, PT, G 1/8" Female thread 1 to 1 L/min 8 db (A) or less (excluding the noise from the quick exhaust and solenoid valve) 2 to 4 Hz 1.6 kg 1.3 kg Horizontal (mounting on the bottom surface) Clean double packaging Series F F41 F413 Operation method Automatically operated Port Main fluid: Suction/Discharge port Rc, PT, G 3/4" Female thread, 3/4" Tube extension, With nut (size, 6) size Pilot air: Supply/Exhaust port Female thread Discharge flow rate to 4 L/min to 38 L/min Average discharge pressure to.4 MPa Pilot air pressure.2 to. MPa (for to 6 C) Air consumption 3 L/min (AR) or less Suction lift Dry Up to 1 m (inside the pump is dry) Wet Up to 4 m (with fluid inside the pump) oise 8 db (A) or less 8 db (A) or less (excluding the noise from the quick exhaust (: with silencer, A2) and solenoid valve) Withstand pressure.7 MPa Service life million cycles (for water) Operating fluid temperature to 9 C (o freezing) Ambient temperature to 7 C (o freezing) Recommended operation cycle 1 to 3 Hz Weight (without foot bracket) 6 kg Mounting Horizontal (mounting on the bottom surface) Packaging Clean double packaging ote) Values in the table are measured at room temperature using fresh water. Tube Size Applicable for ut Size (Tube size can be altered, using a reducer even within the same nut size.) Size Applicable tubing size 1 x 8, 12 x 1, 3/8" x 1/4", 1/2" x 3/8" 12 x 1, 19 x 16, 1/2" x 3/8", 3/4" x /8" 19 x 16, 2 x 22, 3/4" x /8", 1" x 7/8"

13 Process Pump Automatically Operated Type/Air Operated Type Series F Working Principle: Automatically Operated Type (F341, 41) Switching valve Air exhaust port (AIR EXH) With spring for F341 only Air supply port (AIR SUP) Drive unit Control unit Pilot valve A Pump chamber A Check valve Shaft Pilot valve B Discharge port () Pump chamber B Diaphragm A Drive chamber A Drive chamber B Suction port (FLUID I) Diaphragm B Control unit 1. When air is supplied, it passes through the switching valve and enters drive chamber B. 2. Diaphragm B moves to the right, and at the same time diaphragm A also moves to the right pushing pilot valve A. 3. When pilot valve A is pushed, air acts upon the switching valve, drive chamber A switches to a supply state, and the air which was in drive chamber B is exhausted to the outside. 4. When air enters drive chamber A, diaphragm B moves to the left pushing pilot valve B.. When pilot valve B is pushed, the air which was acting upon the switching valve is exhausted, and drive chamber B once again switches to a supply state. A continuous reciprocal motion is generated by this repetition. Drive unit 1. When air enters drive chamber B, the fluid in pump chamber B is forced out, and at the same time fluid is sucked into pump chamber A. 2. When the diaphragm moves in the opposite direction, the fluid in pump chamber A is forced out, and fluid is sucked into pump chamber B. 3. Continuous suction and discharge is performed by the reciprocal motion of the diaphragm. Working Principle: Air Operated Type (F3413, 413) External solenoid valve port solenoid valve Air supply port (AIR SUP) P1 P2 Discharge port () P X F Drive unit Pump chamber A Pump chamber B Check valve Shaft Diaphragm A Drive chamber A Drive chamber B Diaphragm B Suction port (FLUID I) 1. When air is supplied to P1 port, it enters drive chamber A. 2. Diaphragm A moves to the left, and at the same time diaphragm B also moves to the left. 3. The fluid in pump chamber A is forced out to the discharge port, and the fluid is sucked into pump chamber B from the suction port. 4. If air is supplied to the P2 port, the opposite will occur. Continuous suction and discharge of fluid is performed by repeating this process with the control of an external solenoid valve ( port valve). 913

14 Series F Piping and Operation: Automatically Operated Type (F341, 41) Piping diagram Reset button reset port Pilot air supply port AIR SUP Discharge port Silencer Suction port FLUID I Pilot air exhaust port AIR EXH Caution Mounting posture of the pump is set with the mounting bracket facing downward. Air to be supplied to the air supply port <AIR SUP> should be cleaned and filtered through a filter, or a mist separator etc. Air with foreign matter or drainage etc. will have negative effects on the built-in solenoid valve and will lead to malfunction. Maintain the proper tightening torque for fittings and mounting bolts, etc. Looseness can cause problems such as fluid and air leaks, while over tightening can cause damage to threads and parts, etc. Operation <Starting and Stopping> Refer to circuit example (1) 1. Connect air piping to the air supply port <AIR SUP> and connect piping for the fluid to be transfered to the suction port <FLUID I> and the discharge port <>. 2. Using a regulator, set the pilot air pressure within the range of.2 to. MPa. Then, the pump operates when power is applied to the 3 port solenoid valve of the air supply port <AIR SUP>, the sound of exhaust begins from the air exhaust port <AIR EXH> and fluid flows from the suction port <FLUID I> to the discharge port <>. At this time, the throttle on the discharge side is in an open state. The pump performs suction with its own power even without priming. (Dry state suction lifting range: max. 1 m) To restrict exhaust noise, attach a silencer (A2-2: option) to the air exhaust port <AIR EXH>. 3. To stop the pump, exhaust the air pressure being supplied to the pump by the 3 port solenoid valve of the air supply port <AIR SUP>. The pump stops even when the throttle on the discharge side is closed. But the pressure supply to the pump should be exhausted quickly. <Discharge Flow Rate Adjustment> 1. Adjustment of the flow rate from the discharge port <> is performed with the throttle connected on the discharge side or the throttle connected on the air exhaust side. For adjustment from the air side, use of the silencer with throttle AS2 (port size 1/4) or the needle valve connected to the air exhaust port <AIR EXH> is effective. Refer to circuit example (1). (Adjust the throttle on the air side so that the exhaust air is fully exhausted.) 2. When operating with a discharge flow rate below the specification range, provide a by-pass circuit from the discharge side to the suction side to ensure the minimum flow rate inside the process pump. With a discharge flow rate below the minimum flow rate, the process pump may stop due to unstable operation. Refer to circuit example (2). (Minimum flow rates: F3 1 L/min, F L/min) <Reset Button> When the pump stops during operation, press the reset button. This makes it possible to restore operation in case the switching valve be-comes clogged due to foreign matter in the supply air. <Air Operated Reset Port> It is possible to restore operation by supplying air to the air operated reset port without directly pressing the reset button, such as by remote control. Pressure equivalent to or greater than pilot air pressure (but less than. MPa) is required to reset air. Refer to air operated reset circuit example (1) and (2). <Counting The Operating Cycle: F3 Only> The pump's operating cycle can be counted by applying a pressure switch to the air operated reset port. Keep the distance between the pressure switch and the air operated reset port within mm. Refer to air operated reset circuit example (1). Air supply Mist Micro mist separator separator Circuit example (1) Circuit example (2) 3 port solenoid valve Regulator Silencer AIR SUP Process Pump AIR EXH Throttle FLUID OUT FLUID I For the related products, refer to pages 932 and Throttle Strainer Transfer fluid Process Pump Bypass reset Circuit example (1) [F3] Pressure switch for counting the operating cycle Air supply F3 2 port solenoid reset port valve for remote reset Circuit example (2) [F] F 3 port solenoid reset port valve for remote reset Air supply

15 Process Pump Automatically Operated Type/Air Operated Type Series F Piping and Operation: Air Operated Type (F3413, 413) Piping diagram Pilot air supply port: P1 AIR SUP Discharge port Pilot air supply port: P2 AIR SUP Recommended Valve Suction port FLUID I Solenoid valve F3413 VQZ14 (Exhaust center) F413 VQ44 (Exhaust center) Refer to page 932 for further details. Caution Maintain the proper tightening torque for fittings and mounting bolts, etc. Looseness can cause problems such as fluid and air leaks, while over tightening can cause damage to threads and parts, etc. Operation <Starting and Stopping> Refer to circuit example 1. Connect air piping ote 1) to the pilot air supply port <P1>, <P2> and connect piping for the fluid to be transfered to the suction port <FLUID I> and the discharge port <>. 2. Using a regulator, set the pilot air pressure within the range of.2 to. MPa. Then, the pump operates when power is applied to the solenoid valve ote 2) of the pilot air supply port and fluid flows from the suction port <FLUID I> to the discharge port <FLUID OUT>. At this time, the throttle on the discharge side is in an open state. The pump performs suction with its own power even without priming. ote 3) (Dry state suction lifting range: Max. 1 m) To restrict exhaust noise, attach a silencer to the solenoid valve air exhaust port. 3. To stop the pump, exhaust the air pressure being supplied to the pump with the solenoid valve of the air supply port. ote 1) When used for highly permeable fluids, the solenoid valve may malfunction due to the gas contained in the exhaust. Implement measures to keep the exhaust from going to the solenoid valve side. ote 2) For the solenoid valve, use an exhaust center port valve, or a combination of residual exhaust 3 port valve and a pump drive 4 port valve. If air in the drive chamber is not released when the pump is stopped, the diaphragm will be subjected to pressure and its life will be shortened. ote 3) When the pump is dry, operate the solenoid valve at a switching cycle of 2 to 4 Hz for F3, 1 to 3 Hz for F.If operated outside of this range, the suction lifting height may not reach the prescribed value. <Discharge Flow Rate Adjustment> 1. The flow rate from the discharge port <> can be adjusted easily by changing the switching cycle of the solenoid valve on the air supply port. P X F Circuit example (1) Circuit example (2) Air supply Mist Micro mist separator separator Regulator port solenoid valve (Exhaust center) Process Pump FLUID P1 OUT P2 FLUID I Throttle Strainer Air supply Mist Micro mist separator separator Regulator 3 port 4 port solenoid solenoid valve valve Process Pump P1 FLUID OUT P2 FLUID I Throttle Strainer Transfer fluid Transfer fluid For the related products, refer to pages 932 and

16 Series F Dimensions: Automatically Operated Type (Series F3) Female thread: F F3 Reset button x M x.8 Thread depth x ø7 mounting hole ( is selected) (12) Rc, PT, G 3/8" Foot () Reset button reset port Rc, PT, G 1/8" AIR SUP Rc, PT, G1/4" 16 (12) 1/2" tube extension (ø9.) (ø12.7) FLUID I Rc, PT, G 3/8" 2 x M x.8 Thread depth reset port Rc, PT, G 1/8" AIR SUP Bottom view of body AIR EXH Silencer: A2-2 () Tube extension: F341- P13 P13 P13F 4 x ø7 mounting hole ( is selected) Bottom view of body AIR EXH Silencer: A2-2 () Foot () FLUID I 1/2" tube extension 916

17 Process Pump Automatically Operated Type Series F Dimensions: Automatically Operated Type (Series F3) With nut (with LQ1 fittings): F341S- 1S13 1S19 Reset button x M x.8 Thread depth reset port Rc, PT, G 1/8" 4 x ø7 mounting hole ( B is selected) Bottom view of body AIR SUP 16 (12) With nut AIR EXH Silencer: A2-2 () 63 Foot () A FLUID I With nut (mm) A F341S-1S13 11 F341S-1S With nut (with LQ3 fittings): F341S-3S13 Tube Size Applicable for ut Size (Tube size can be altered, using a reducer even within the same nut size.) Size Applicable tubing size 4 1 x 8, 12 x 1, 3/8" x 1/4", 1/2" x 3/8" 12 x 1, 19 x 16, 1/2" x 3/8", 3/4" x /8" (4) 11 P X F Foot () 917

18 Series F Dimensions: Air Operated Type (Series F3) Female thread: F F x M x.8 Thread depth x ø7 Bottom view of body AIR SUP (P1) Rc, PT, G 1/8" Rc, PT, G 3/8" AIR SUP (P2) Rc, PT, G 1/8" 9 74 FLUID I Rc, PT, G 3/8" Tube extension: F3413- P13 P13 P13F Foot () 2 x M x.8 Thread depth 9 19 (ø9.) (ø12.7) x ø7 Bottom view of body AIR SUP (P1) Rc, PT, G 1/8" 1/2" tube extension 918 AIR SUP (P2) Rc, PT, G 1/8" 9 11 Foot () FLUID I 1/2" tube extension

19 Process Pump Air Operated Type Series F Dimensions: Air Operated Type (Series F3) With nut (with LQ1 fittings): F3413S- 1S13 1S x M x.8 Thread depth x ø7 Bottom view of body AIR SUP (P1) Rc, PT, G 1/8" With nut AIR SUP (P2) Rc, PT, G 1/8" 9 A Foot () FLUID I With nut Tube Size Applicable for ut Size (mm) (Tube size can be altered, using a reducer even within the same nut size.) F3413S-1S13 F3413S-1S19 A Size 4 Applicable tubing size 1 x 8, 12 x 1, 3/8" x 1/4", 1/2" x 3/8" 12 x 1, 19 x 16, 1/2" x 3/8", 3/4" x /8" With nut (with LQ3 fittings): F3413S-3S13 (4) 11 P X F Foot () 919

20 Series F Dimensions: Automatically Operated Type (Series F) Female thread: F F x ø9 AIR SUP 1 Reset button reset port Rc, PT, G 1/8" (27) 249 Rc, PT, G 3/4" AIR EXH 18 Silencer: A2-2 () FLUID I Rc, PT, G 3/4" Tube extension: F41- P19 P19 P19F x ø9 AIR SUP 1 Reset button reset port Rc, PT, G 1/8" (27) Straight part 4 3/4" tube extension (ø19.) (ø1.8) AIR EXH 18 Silencer: A2-2 () FLUID I 3/4" tube extension 92

21 Process Pump Automatically Operated Type Series F Dimensions: Automatically Operated Type (Series F) With nut (with LQ1 fittings): F41S- 1S19 1S x ø9 AIR SUP 1 Reset button reset port Rc, PT, G 1/8" (27) 249 A With nut AIR EXH 18 Silencer: A2-2 () FLUID I With nut F41S-1S19 F41S-1S2 (mm) A 48 Tube Size Applicable for ut Size (Tube size can be altered, using a reducer even within the same nut size.) Size Applicable tubing size 12 x 1, 19 x 16, 1/2" x 3/8", 3/4" x /8" 6 19 x 16, 2 x 22, 3/4" x /8", 1" x 7/8" P With nut (with LQ3 fittings): F41S-3S19 7 (43) X F

22 Series F Dimensions: Air Operated Type (Series F) Female thread: F F AIR SUP (P1) x ø9 249 Rc, PT, G 3/4" 1 17 AIR SUP (P2) 18 FLUID I Rc, PT, G 3/4" Tube extension: F413- P19 P19 P19F 1 24 AIR SUP (P1) x ø Straight part 4 3/4" tube extension (ø19.) (ø1.8) 1 17 AIR SUP (P2) 18 FLUID I 3/4" tube extension 922

23 Process Pump Air Operated Type Series F Dimensions: Air Operated Type (Series F) With nut (with LQ1 fittings): F413S- 1S19 1S x ø9 AIR SUP (P1) A With nut AIR SUP (P2) 18 FLUID I With nut F413S-1S19 F413S-1S2 (mm) A 48 Tube Size Applicable for ut Size (Tube size can be altered, using a reducer even within the same nut size.) Size Applicable tubing size 12 x 1, 19 x 16, 1/2" x 3/8", 3/4" x /8" 6 19 x 16, 2 x 22, 3/4" x /8", 1" x 7/8" With nut (with LQ3 fittings) : F413S-3S19 7 (43) P X F

24 Process Pump F3-X68 Made to Order Body material ew PFA Diaphragm seal material Compatible with various liquids (DI water (Deionized water), solvent) Tightening bolt, Air switching valve: Stainless steel Use the F series standard products when metal-free pump is necessary for hydrofluoric acid, etc. Lightweight/Compact (F3-X68 without foot) Weight: 1.8 kg 133 mm 173 mm 119 mm PPS/PFA dual construction Withstand pressure and heat cycle performance have been improved. Connection type: Female thread/tube extension/with nut (Insert bushing type, Flare type) Specifications Operation method Main fluid: Suction/Discharge port Port size Pilot air: Supply/Exhaust port Discharge flow rate Average discharge pressure Pilot air pressure Air consumption Dry Suction lift Wet oise Withstand pressure Service life Fluid temperature Ambient temperature Weight (without foot) Mounting orientation Packaging Values in the table are measured at room temperature using fresh water. F341-X68 Automatically operated Rc, PT, G 3/8" Female thread, 1/2" Tube extension, With nut (Size 4, ) Female thread 1 to 2 L/min to.4 MPa.2 to. MPa (for to 6 C) 23 L/min (AR) or less Up to 1 m (Dry interior of the pump) Up to 4 m (Liquid inside the pump) 8 db (A) or less (: with silencer, A2).7 MPa million cycles (for water) to 9 C (o freezing) to 7 C (o freezing) 1.8 kg Horizontal (mounting on the bottom surface) General environment 924

25 Process Pump/Wetted Part: Fluoropolymer Automatically Operated Type (Internal Switching Type) Series F3-X68 Tube extension F341 AIR SUP FLUID OUT AIR EXH FLUID I Automatically operated type How to Order Female thread F341 3 X68 13 ote 2) Thread type Type Rc PT F G P13 Tubing size Main fluid connection size 1/2" With nut F341S 1 S 13 Performance Curve Flow Characteristics. Discharge pressure (MPa) SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa Fitting type Fitting type 1 3 LQ1 LQ3 Port size Port size 3 3/8" Fitting size Fitting type I side OUT side LQ1 LQ Refer to page 96 for applicable fittings Discharge flow rate (L/min) Products using stainless steel parts (Body tightening bolts, switching valves, etc.) one B With foot With silencer When multiple options are required, indicate them in alphabetical order. X68 ote 2) Thread type Type Rc PT F G Thread type Type Rc PT F G Products using stainless steel parts (Body tightening bolts, switching valves, etc.) B one With foot With silencer When multiple options are required, indicate them in alphabetical order. X68 Products using stainless steel parts (Body tightening bolts, switching valves, etc.) one ote 2) B With foot With silencer When multiple options are required, indicate them in alphabetical order. ote 1) The port size of the pilot port is 1/4". ote 2) The thread type is applied to the pilot port thread and the female thread piping connection. Refer to pages 932 and 933 for related products. Air Consumption 2 Air consumption (L/min [AR]) 1 1 SUP =. MPa SUP =.4 MPa SUP =.3 MPa SUP =.2 MPa SUP: Pilot air pressure Discharge flow rate (L/min) 92 P X F

26 F3-X68 Dimensions: Automatically Operated Type (Series F3) Female thread: F F3 --X68 Reset button x M x.8 Thread depth x ø7 AIR SUP 16 reset port Rc, PT, G 1/8" (12) Rc, PT, G 3/8" Silencer: A2-2 () 13 AIR EXH Foot () FLUID I Rc, PT, G 3/8" 14 Tube extension: F341- P13 P13 P13F --X68 Reset button x M x.8 Thread depth x ø7 AIR SUP 16 reset port Rc, PT, G 1/8" (12) 1/2" Tube extension (ø12.7) (ø9.) Bottom view of body Bottom view of body Silencer: A2-2 () 13 AIR EXH 63 Foot () 11 FLUID I 1/2" Tube extension

27 Process Pump F3-X68 Dimensions: Automatically Operated Type (Series F3) 1S13 With nut (with LQ1 fittings): F341S- 1S19-X x M x.8 Thread depth 9 (4) Foot () With nut (with LQ3 fittings) F341-S-3S13--X68 4 x ø7 Reset button Bottom view of body AIR SUP 16 reset port Rc, PT, G 1/8" (12) With nut AIR EXH Silencer: A2-2 () Foot () 63 A FLUID I With nut (mm) A Size Applicable tubing size x 8, 12 x 1, 3/8" x 1/4", 1/2" x 3/8" x 1, 19 x 16, 1/2" x 3/8", 3/4" x /8" F341S-1S13 F341S-1S19 Applicable Fluids Tube Size Applicable for ut Size (Tube size can be altered, using a reducer even within the same nut size.) Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers. SMC assumes no responsibility for the accuracy of the data or for any damages arising from the data. The material and fluid compatibility check list provides reference values as a guide only; therefore SMC does not guarantee the application to our product. Chemical Table symbols : Can be used. : Cannot be used. F341-X68 ew PFA ote 1, 2) ote 2) ote 1, 2) Body material Diaphragm material Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone water Hydrogen peroxide Concentration % or less, C or less Ethyl acetate Butyl acetate itric acid (except fuming nitric acid) Concentration 1% or less Pure water Sodium hydroxide Concentration % or less Super pure water Toluene Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) Phosphoric acid Concentration 8% or less ote 1, 2) ote 1, 2) Caution 1. Select the wetted parts material in accordance with the transfer liquid for determing the model. Do not use fluid which corrode the wetted parts material. 2. Do not use the products for medical or food applications. 3. The applicability may vary depending on additives. Take note also of additives. 4. The applicability may vary depending on impurities. Take note also of impurities.. Examples of transfer liquids are shown in the table on the left. Since the applicability may vary depending on your operating conditions, be sure to check it by means of experimentation. 6. The compatibility shown in the table is when the fluid temperature is within the product specification (9 C or less). ote 1) Static electricity may be generated. Take measures to prevent static electricity. ote 2) Fluid may permeate through and affect parts made of other materials. 927 P X F

28 Series 3/ Products complying with the ATEX Directive Products complying with the 6 ATEX Directive, Category 3 3 Body size Body size 3/8 1/2 Series / Made to Order Specifications: Please consult with SMC for detailed size, specifications and delivery. 6 Wetted body material Body material 1 ADC12 (Aluminum) 2 SCS14 (Stainless steel) 1. Products Complying with ATEX Diaphragm material Diaphragm Operating method material Automatically operated 1 2 BR Dimensions are the same as those of the standard products. Actuation Actuation Automatic operation Thread type F T Type Rc PT G PTF Port size one With silencer Port size 3/8" 1/2" 3/4" Operating method applied Automatic operation Applicable model 3 Body size 3 Body size 3/8 1/2 Wetted body material 1 2 Body material ADC12 (Aluminum) SCS14 (Stainless steel) Diaphragm material With Air Operated Reset Port X2 Diaphragm material BR Thread type F T Type Rc PT G PTF Port size Port size 3/8" 1/2" 3/4" one With silencer Applicable model 3 Made to order specifications X2 With air operated reset port Reset port 3 Reset circuit example Reset port 3/8" 173 Reset port M RESET AIR SUP Simple construction & compact unit SMC AIR EXH

29 Process Pump Series / 3 Body size Body size 3/8 1/2 Pressure switch Wetted body material 1 2 Body material ADC12 (Aluminum) SCS14 (Stainless steel) Diaphragm material With Operating Cycle Counting Port X8 Diaphragm material BR Pressure signal acquisition port Thread type F T Type Rc PT G PTF Port size Port size 3/8" 1/2" 3/4" one With silencer Applicable model 3 Made to order specifications With operating X8 cycle counting port 3 Counting circuit example Pressure signal acquisition port M 173 Pressure signal acquisition port M RESET AIR SUP Simple construction & compact unit SMC AIR EXH 133. Series 1 3 Actuation Actuation 1. Wetted Part Seal SF7 Specification X16 Thread type F T Type Rc PT G PTF one With foot Made to order specifications X16 Wetted part seal SF7 specification P X F OUT port q e w w I port q e: O-ring (SF7) 929

30 Series / Female thread Tube extension 3 Diaphragm material Diaphragm material 1 2. Wetted Part Fluororesin Specification Actuation Actuation Diaphragm material 1 Tube size Connection size at main fluid side Actuation 7 1/4" Actuation 1 X17 Thread type ote 1) F Type Rc PT G Port size P 7 X17 Diaphragm material Specifications AIR SUP Rc, PT, G 1/8" Made to order specifications X17 Wetted part fluororesin specification Port size 1/8" Thread type ote 1) F Type Rc PT G Operating method Main fluid suction/discharge port Port size Pilot air supply/exhaust port Amount of discharge Pilot air pressure Suction head Withstand pressure Fluid temperature Ambient temperature Mounting orientation Packaging Made to order specifications X17 Wetted part fluororesin specification 113--X17 Rc, PT, G 1/8" Female thread, 1/4" Tube extension Rc, PT, G 1/8" Female thread to 1 L/min.2 to. MPa Suction head (for both dry and wet).7 MPa to C (o freezing or temperature change) to C (o freezing or temperature change) Mount with the side facing up Clean double packaging ø ø4. 41 Rc, PT, G 1/8" FLUID OUT /4" tube extension 4. FLUID I Rc, PT, G 1/8" 2 x R2.2 FLUID I 93 SESOR PORT M1 x 1 Leakage sensor from Yamatake (can be retrofit) HPF-S3-B

31 Maintenance Parts List Series 3, Description Diaphragm kit 31 KT-3-31 Series 3 32 KT KT KT--31 Series 2 KT KT--31 Check valve kit Switching valve assembly kit KT-3-36 KT-3-37 KT--36 Switching valve parts kit KT--37 Pilot valve kit KT--38 KT--38 Manual cap assembly kit KT-3-4 KT--4 Series P3 Description Diaphragm kit Check valve kit Pilot valve kit Manual cap kit Foot kit Series P P331 P3313 KT-3-31 KT-P3-31 KT-3-36#1 KT-P3-36#1 KT-3-38 KT-3-4 KT-3-4 KT-3-38 KT-3-4 KT-P3-4 Series X1 Description Diaphragm kit Check valve kit Switching valve parts kit Pilot valve kit Pulsation attenuator control valve kit Series 1 Description Diaphragm kit Check valve kit Switching valve parts kit Foot kit Packing kit Series X1 X112 KT-X1-31 KT-X1-36 KT-X1-37#1 KT--38 KT-X1-39 Series KT-1-2 KT-1-1 VJ314MY-H KT-1-3 KT-1-4 P X F Series F3, Series F3 Description F341 F3413 Diaphragm kit KT-F3-31 Check valve kit KT-F3-36 Switching valve kit KT-F3-37 Pilot valve kit KT-F3-38 Foot kit KT-F3-4 Leakage sensor KT-F3-47 Stroke sensor KT-F3-48 Series F F41 F413 KT-F-31 KT-F-36 KT-F-37 KT-F-38 KT-F-47 KT-F

32 Related Products <For driving series 33, P3313, F3413 > port solenoid valve VQZ14 /24 (Exhaust center) (A) (B) 4 2 Specifications Piping Valve construction Type of actuation Max. operating pressure Min. operating pressure Flow characteristics 1 4/2 (P A/B) 4/2 /3 (A/B EA/EB) Max. operating frequency C[dm 3 /(s.bar)] b Cv C[dm 3 /(s.bar)] b Cv VQZ142 VQZ242 VQZ14 VQZ24 Body ported Base mounted Metal seal 3 position exhaust center.7 MPa (High-pressure type 1. MPa).1 MPa Hz (R1) (P) (R2) Refer to Best Pneumatics o.1 for further details. <For driving series F413> port solenoid valve VQ44 (Exhaust center) (A) (B) 4 2 <For driving series 33, P3313, F3413, 113> 3 port solenoid valve SYJ14/714.C. (A) (R1) (P) (R2).O. (A) 2 Specifications Piping Valve construction Type of actuation Max. operating pressure Min. operating pressure Flow characteristics Refer to Best Pneumatics o.1 for further details. Specifications Piping Valve construction Type of actuation Max. operating pressure Min. operating pressure Flow characteristics 1 4/2 (P A/B) 4/2 /3 (A/B EA/EB) ote) ( 1 2(P A) 2 3(A R) C[dm 3 /(s.bar)] b Cv C[dm 3 /(s.bar)] b Cv ): Low wattage (. W) specifications C[dm 3 /(s.bar)] b Cv C[dm 3 /(s.bar)] b Cv VQ44 Base mounted Rubber seal 3 position exhaust center 1. MPa(.7 MPa).1 MPa ote) To drive a double-action pump with a 3 port valve requires 2 units. SYJ314 SYJ14 SYJ714 Base mounted Rubber seal.c..7 MPa.1 MPa (P)(R) 1 3 (P)(R) Refer to Best Pneumatics o.1 for further details. <For extending the maintenace cycle> Micro mist separator Series AMD Series AMD can separate and remove aerosol state oil mist and remove carbon or dust of more than.1 µm. 932 Specifications Rated flow ote) (L/min (AR)) Port size (ominal size B) Weight (kg) AMD2C AMD3C 1 1/4, 3/8 3/8, 1/2..9 ote) Maximum flow rate at pressure.7 MPa Maximum flow rate varies depending on the operating pressure. Refer to Best Pneumatics o. for further details. Specifications Fluid Compressed air Max. operating pressure 1. MPa Min. operating pressure ote 1). MPa Proof pressure 1. MPa Ambient and fluid temperature to 6 C ominal filtration rating.1 µm (Filtration efficiency 99.9%) Outlet oil Max..1 mg/m 3 (AR) ote 2) mist concentration (At saturation of element oil, less than.1 mg/m 3 (AR) Approx..8 ppm) When 2 years passed, or Element service life pressure drop reaches.1 MPa. ote 1) With auto drain is.1 MPa (.O. type),.1 MPa (.C. type). ote 2) When compressor discharge oil mist concentration is 3 mg/m 3 (AR).

33 Related Products <To extend the maintenace cycle> Mist separator Series AM Series AM separates and removes the oil mist and removes fine particles of rust and carbon, etc., of.3 µm or larger. Refer to Best Pneumatics o. for further details. <For supplying air for regulating pressure> Filter regulator + Mist seperator Air combination Series AC2D/3D/4D <When it is desired to remove droplets of water from system> Water separator Series AMG The AMG series remove droplets of water from compressed air. Use it when it is necessary to remove water, but when air as dry as that from an air dryer is not necessary. <When it is desired to easily remove water from system> Membrane dryer Series IDG Macromolecular membrane dryers that act like filters -2 C low dew point just by installing on air pressure line. o power supply required. ote 1) o freezing ote 2) AR represents the flow rate converted to the value under 2 C at atmospheric pressure. ote 3) Including the dew point indicator purge air flow rate of 1 L/min (AR) (inlet air pressure at.7 MPa) (Except for IDG1, IDG) Refer to Best Pneumatics o. for further details. AM1C AM2C Rated flow L/min (AR) Port size (ominal size B) Weight (kg) Component devices Port size Rc Filter regulator Mist seperator Pressure gauge port size Rc ote 1) Conditions: Upstream pressure.7 MPa, set pressure. MPa. The rated flow rate varies depending on the set pressure. ote 2) When compressor discharge concentration is 3 mg/ m 3. Refer to Best Pneumatics o. for further details. Rated flow ote) (L/min (AR)) Port size (ominal size B) Weight (kg) Refer to Best Pneumatics o. for further details /8, 1/4 1/4, 3/8.38 1/8 1/4. AC2D AC3D AW2 AW3 AFM2 AFM3 1/4 3/8 1/8 1/8 AMG1C AMG2C 3 7 1/8, 1/4 1/4, 3/8.38. ote) Maximum flow rate at pressure.7 MPa Specifications Fluid Compressed air Max.operating pressure 1. MPa Min. operating pressure ote 1). MPa Proof pressure 1. MPa Ambient and fluid temperature to 6 C Filtration degree.3 µm (Filtration efficiency 99.9%) Downstream oil mist concentration Max. 1. mg/m 3 (AR) (Approx..8 ppm) ote 2) Element life 2 years, or when pressure drop reaches.1 MPa ote 1) With auto-drain is.1 MPa ote 2) When compressor discharge oil mist concentration is 3 mg/m 3 (AR) Specifications Proof pressure Max. operating pressure Min. operating pressure Set pressure range Rated flow rate (L/min (AR)) ote 1) Ambient and fluid temperature ominal filtration rating Downstream oil mist concentration Bowl material Construction/Filter regulator Weight (kg) ote) With auto drain is.1 MPa. AC2D AC3D AC4D AC4D-6 1. MPa 1. MPa. MPa. to.8 MPa to 6 C (o freezing) AW: µm, AFM:.3 µm (Filtration efficiency 99.9%) Max. 1. mgf/ m 3 (Approx..8 ppm) ote 2) Polycarbonate Relieving type Specifications Fluid Compressed air Max. operating pressure 1. MPa Min. operating pressure ote). MPa Proof pressure 1. MPa Ambient and fluid temperature to 6 C Dehumidification rate 99% When 2 years passed, or Element service life pressure drop reaches.1 MPa. Standard Specifications/Single Unit (Standard Dew Point 2 C) Range of operating conditions Standard performance Standard performance conditions Standard dew point: 2 C IDG IDG1 IDG2 IDG3A IDGA Fluid Compressed air Inlet air pressure (MPa).3 to.8.3 to 1. Inlet air temperature ( C) ote 1) to to Ambient temperature ( C) to to Outlet air atmospheric pressure dew point ( C) Inlet air flow rate (L/min (AR)) ote 2) Outlet air flow rate (L/min (AR)) Purge air flow rate (L/min (AR)) ote 3) Inlet air pressure (MPa) Inlet air temperature ( C) Inlet air saturation temperature ( C) Ambient temperature ( C) Dew point indicator purge air flow rate Port size (ominal size B) Weight (kg) (with bracket) L/min (AR) 1/8, 1/4 1/4, 3/8.2 (.31).43 (.1).66 (.76).74 (.87).77 (.9) P X F <For strainer> Industrial filter Vessel type Series FGD Specifications FGDCA FGDTA Size Rc 3/8 3/8 Max. operating Design Element pressure temperature number of pcs.7 MPa 1 MPa 8 C 8 C ote) Please contact SMC for compatibility of the wetted parts material. 1 1 Element size ø6 x L2 Aluminum ø6 x L2 SCS 14 Principle materials Cover Case SPCD Gasket O-ring BR Gaskets, etc. ylon SUS 316L Fluororesin Fluororesin Refer to page 113 for further details. 933

34 Applicable Fluids Material and Fluid Compatibility Check List for Process Pumps The data below is prepared based on data provided by the material manufacturers. SMC assumes no responsibility for the accuracy of the data or for any damages arising from the data. The material and fluid compatibility check list provides reference values as a guide only; therefore SMC does not guarantee the application to our product. Caution 1. Select the wetted parts materials according to the transfer liquid you use to determine the model. For the liquid contact areas, aluminum is suitable for oils, and stainless steel is suitable for solvents and industrial water. For the diaphragm material, BR is suitable for inert liquids, and is suitable for non-permeating liquids. Use fluids that will not corrode the wetted parts materials. 2. These products are not suitable for medical or food use. 3. The applicability may vary depending on additives. Take note also of additives. 4. The applicability may vary depending on impurities. Take note also of impurities.. Examples of transfer liquids are shown below. Since the applicability may vary depending on your operating conditions, be sure to check it by means of experimentation. 6. Compatibility is indicated for fluid temperatures specified for the respective products (6 C or less for Series 3/, C or less for Series 1, and 9 C or less for Series F3/). Series 3,, P3 and X Examples of applicable liquids Series 1 Body material Diaphragm material Tap water eutral detergent Kerosene Oils Ethyl alcohol Thinners Flammable liquids Acids Alkalis Examples of applicable liquids Series F3 and F Chemical Body material Diaphragm material Tap water Water Pure water Turbine oil Oil Cutting oil Brake oil Flux Toluene Solvent Methyl ethyl ketone Acetone Inert solvent Ethyl alcohol Isopropyl alcohol Sodium hypochlorite Cleaning fluids Acids Alkalis Metal corrosive liquid Highly permeating liquid Highly penetrating liquid ADC12 ote 2) ote 2) ote 2) ote 1) 111 BR Body material Diaphragm material Acetone Ammonium hydroxide Isobutyl alcohol Isopropyl alcohol Hydrochloric acid Ozone water Hydrogen peroxide Concentration % or less, C or less Ethyl acetate Butyl acetate itric acid (except fuming nitric acid) Concentration 1% or less Pure water Sodium hydroxide Concentration % or less Super pure water Toluene Hydrofluoric acid Sulfuric acid (except fuming sulfuric acid) Phosphoric acid Concentration 8% or less 934 Table symbols : Can be used. x: Cannot be used. : Can be used under certain conditions. Please consult us P331 P3313 X1112 X1212 SCS14 ew PFA ADC12 SCS14 BR ote 2) ote 2) ote 2) ote 2) ote 2) ote 1) PP, Stainless steel 316 F341 F ote 2) ew PFA ote 2, 3) ote 3) ote 2, 3) ote 2, 3) ote 2, 3) ote 2, 3) ote 3) ote 2, 3) ote 3) ote 3) F3413 F413 ote 2, 3) ote 2, 3) ote 2, 3) ote 2, 3) ote 2, 3) ote 2, 3) ote 1) ote 2) ote 2) ote 2) ote 2) ote 2) ote 1) The air operated types can also be used for highly penetrating liquids. However, they cannot be used if the penetrating components damage parts such as seals in the air circuit. In addition, since the exhaust air contains the gas components penetrating through the diaphragm, take measures to prevent the exhaust air from going to the solenoid valve. ote 2) Static electricity may be generated. Take measures to prevent static electricity. ote 3) These may be penetrated by fluids, and the penetrating fluids may affect parts of other materials.