CAT:No E-H FCS. Flow Control System. Thermal Series. We welcome customer feedback for all of our products and services.

Transcription

1 CAT:No.75101EH FCS Flow Control System Thermal Series We welcome customer feedback for all of our products and services.

2 TOTAL FCS SOLUTION COMPANY From Supplier To Total Solution Company for Gas Supply Systems Korea Service Center Tsukuba Advanced Technology Center China Service Center Global Support and Services Taiwan Service Center America Service Center 's FCS (Flow Control System) series leading the way in flow control technology. 1

3 FCS Flow Control System S e r i e s s FCS Series is gas flow rate control equipment for all industries. The FCS Series includes FCS Pressure Series (pressure control type) and FCS Thermal Series (thermal flow sensor control type), two product lineups offering two methods of control.this catalog covers the FCS Thermal Series, also known more generally as a Mass Flow Controller (MFC). What is a Mass Flow Controller? A Mass Flow Controller is a device that controls the mass flow rate. In the past, a volume flow meter was used to measure and control the flow of fluids. However, because the volume flow rate is influenced by pressure and temperature, precise measurement and control of flow is difficult to obtain with a mass flowmeter. 's FCS Thermal Series provides Mass Flow Controllers (MFC) that match a range of customer needs. Operating Principles Thermal Mass Flow Sensor When gas flows through a Mass Flow Controller (MFC ), temperature changes are detected by the thermal sensor. This temperature gradient is used to compute the mass flow rate. Because each gas has a specific ability to transfer heat (i.e. heat capacity), dictated by the physical structure of the gas molecules, the MFC can proportionally control the flow rate to a given flow set point. As fluid runs, a temperature difference (impedance value change) occurs in the heating element between the upstream side (A) and downstream side (B) of the Thermal Mass Flow Sensor. The difference is in the rate at which the heating element is cooled, depending on the kind of gas. The mass flow rate is measured according to the principle that the rate of cooling is related to the mass flow rate. A range of digital control devices (,DeviceNetTM, EtherCAT, ), as well as an analog control product (05VDC, 420mA), are part of the lineup in 's FCS Thermal Series. Input Power Output Indication Command Signal Input/Output Connector (DSub 9 Pin) When the gas is not flowing When the gas is flowing The temperature of Thermal Mass Flow Sensor is constant The temperature of Thermal Mass Flow Sensor changes Bridge Circuit Bridge Circuit TA = TB Flow Control Valve Amplifier Circuit Comparative Control Circuit TA TB Interface (except analog model) Bridge Circuit Both and Elastomer s are available Thermal Mass Flow Sensor A A B B Bypass The flow accuracy of 's mass flow controllers in general is ±1% F.S. (± within 1% of maximal flow). If higher accuracy is needed, offers products that gurarantee accuracy to within ± 1% of the set value. L e s s t h a n ±1 S. P. L e s s t h a n ±1 F. S. 1 Precision F.S. 1 Precision F.S Set Value Set Value 2

4 FCS Thermal Series Product LineUP Series Mass Flow Controller PI Function Model MGMR Model Standard Digital Model High Flow Rate Model High Temperature Model Features Equipped with Pressure Sensor Insensitive to sudden pressure fluctuations (Pressure Insensitive) With MGMR Funtion Corrosion Resistant Hastelloy Sensor : ±1% S.P. MGMR(Multi Gas / Multi Range)Function Corrosion Resistant Hastelloy Sensor : ±1% S.P. : ±1% F.S. All Flow Rate Areas: Response Time 1sec 24V Function Model Corresponds to EtherCAT, CCLink Max. Flow Rate 500SLM Flow Rate Accuracy: ±1% F.S. Response Time: 3sec (Please consult for use at temperatures above 80 C) Correspond to the special Specfication Series Name FCST1000MP FCST1000Z FCST1000F FCST1200F FCST1500F FCST1000M(Z)FHT FCST1200MFHT Flow Range (N2 Equivalent) 10SCCM 50SLM 10SCCM 50SLM 10SCCM 50SLM SLM 10SCCM 150SLM Material ±1% S.P. (25100%) ±0.25% F.S. (225%) ±1% S.P. (25100%) ±0.25% F.S. (225%) ±1% F.S. ±1% F.S.(T1200) ±2% F.S.(T1500) ±1% S.P. (25100%) (T1000MZF) ±0.25% F.S. (225%) (T1000MZF) ±1% F.S. (2100%) ( T1000MF T1200MF) Response Time 1sec 1sec 1sec 3sec 1sec(10SCCM 50SLM) 3sec(51 150SLM) PI Function PI MGMR Fanction MGMR MGMR MR MG 1 ±15V Drive 05VDC Input / Output ±15V Drive 05VDC ±15V Drive 05VDC ±15V Drive 05VDC ±15V Drive 05VDC ±15V Drive 05VDC Digital Analog *2 +24V Drive 05VDC Input / Output +24V Drive 420mA Input / Output EtherCAT EtherCAT +24V Drive 05VDC +24V Drive 420mA EtherCAT For metal type only +24V Drive 05VDC +24V Drive 420mA EtherCAT +24V Drive 05VDC +24V Drive 420mA EtherCAT For rubber type only For rubber type only +24V Drive 05VDC +24V Drive 420mA For T1000 only For T1000 only For T1000MF only *3 CCLink CCLink Union Gasket Type (UJR Type) 1/4 UJR 1/4 UJR 1/4 UJR 3/8 UJR(T1200) 1/2 UJR(T1500) 1/4 UJR(T1000M) 3/8 UJR(T1200MF) Fittings Double Compression Ring Type (F900 Type) Iutegrated System Type (IGS Type) 1.5 Wseal Wseal Cseal 1/4 F Wseal Wseal Cseal 1/4 F Wseal Wseal Cseal 3/8 F900(T1200) 1/2 F900(T1500) 1/4 F900(T1000M) 3/8 F900(T1200MF) 1.5 Wseal Wseal Cseal Surface Finish Option For metal type only For metal type only Option Connespon dence to RoHS Page RoHS RoHS RoHS RoHS RoHS For T1000 only P.5~6 P.7~8 P.9~10 P.11 P.12 3 *1: MR Specifications: Changeable to 1/3 flow of the specified full scale flow. MG Specifications: up to four kinds of gases and flow rates can be registered. *2: Analog Interface: Dsub 9 pin. With the proviso, TM39 HRsmade HR10A7R6P. UPC, UPCUS has half pitch 20 P. *3: Digital Interface: for communications, FCST1000 Series has RJ11 connector; FCST2000 Series has RJ45 connector.

5 Mass Flow Controller Mass Flow Flow Ratio Controller Quick Response/ Analog Economy Model Analog Economy Model High Precision Model with Piezo Actuator with integrated indicator Automatic Pressure Controller Automatic Pressure Controller Gas Distribution Ratio Control Model 05V Exclusive Use Economy Model Flow Rate Accuracy: ±1% F.S. Response Time: with 1sec. 05V Exclusive Use Economy Model Limited to certain gases United type that includes a Controlled Source is also available. Flow Rate Accuracy: ±1% S.P. Low temperature thermal sensor Corresponds to the minute flow rate Corresponds to SDS Economy Model Output Indication Optional Needle Valve can be included Flow Rate Accumulation High and Low Alarm Output Pressure control at the upstream side or downstream side by a signal from the external pressure sensor Output Flow Rate Pressure control at the upstream side or downstream side by an internal pressure sensor High Temperature Specification with a Mass Flow meter (Option) Corrosion Resistant Hastelloy Sensor FCST1000L FCSG200 FCST2000 FCSTM39 PCST1000F UPC UPCUS FRCT1000MF 10SCCM 50SLM 10SCCM 5SLM 5SCCM 150SLM 10SCCM 100SLM 10SCCM 50SLM 10SCCM 50SLM ±1% F.S. (10SCCM30SLM) ±2% F.S. (31SLM50SLM) ±2% F.S. ±1% S.P.(25100%) ±0.25% F.S.(225%) ±2% F.S. (10SCCM20SLM) ±3% F.S. (21100SLM) ±1% F.S. 1sec(10SCCM 30SLM) 1sec(Representative value) 2sec(31 6sec(Representative value) 50SLM) 4sec ±15V Drive 05VDC ±15V Drive 05VDC ±15V Drive 05VDC ±15V Drive 010VDC ±15V Drive 05VDC ±15V Drive 05VDC +24V Drive 15VDC +24V Drive 010VDC +24V Drive 420mA 1/4 UJR 1/4 F900 1/4 UJR 1/4 F900 1/4 UJR(T2000) 3/8 UJR(T2150) 1/4 UJR 3/8 UJR 1/4 F900 3/8 F900 1/4 UJR 1/4 F900 1/4 UJR 1/4 UJR 1.5 Wseal Wseal Cseal 1.5 Wseal Wseal 1.5 Wseal Wseal Cseal 1.5 Wseal Wseal For metal type only For metal type only For metal type only RoHS RoHS RoHS RoHS RoHS RoHS RoHS P.13 P.14 P.15~16 P.14 P.17 P.18 P.19 Note 1: External Leak Rate: ing: Pa m 3 /sec He, ing: Pa m 3 /sec He Note 2: Please inquire regarding use under other conditions. Note 3: is a registered trademark of the Open DeviceNet Vendor Association, Inc. Note 4: is a registered trademark of the Organization. Note 5: EtherCAT is a registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. 4

6 PI (Pressure Insensitive) FCST1000MP Series F.S. PI MGMR S.P. Analog Control Digital Control ±15V Drive 05VDC +24V Drive 05VDC +24V Drive 420mA EtherCAT (Option) Note: Not correspond to the specification of the XXX mark. PI (Pressure Insensitive) Builtin pressure sensor eliminates influence of inlet pressure fluctuaions to actual flow by the original control algorithm. Multi Gas / Multi Range (MGMR) Users may change gas and full scale flow rate easily with 8 flow rates ranging from 10 SCCM to 50 SLM. Hastelloy Sensor Improved corrosion resistance against halogen gas. High Flow Rate Accuracy ±1% S.P.(25 100%) Model Number FCST1005MPF(C) FCST1030MPF(C) FCST1050MPF(C) Accesaries Additionally Related Equipments Flow Rate Renge (N 2 Equivalent) Valve Type Controlled Volume Range Repeatability Response Time * Required Pressure Difference Bin1: 10 30SCCM Bin2: SCCM Bin3: SCCM Bin4: 301 1,000SCCM Bin5: 1,001 3,000SCCM kPa (Ar: kPa) Bin6: 3,001 10,000SCCM Bin7: 10,001 30,000SCCM N/O: Normally Open, N/C: Normally Closed 2 100% F.S. ±1% S.P.(25 100%), ±0.25% F.S.(2 25%) (Accuracy guaranteed between: C) ±0.2% F.S. 1sec N/O kPa (Bin6) kPa (Bin7) N/C kPa (Bin6 7) (Ar: kPa) Bin8:30,001 50,000SCCM kPa (Ar: kPa) MAX. Operating Pressure 400kPaG (Ar: 500kPaG) 5 50 C Analog: 0 5VDC (Supply Power Voltage: ±15VDC) Digital:,, EtherCAT 5 *: Response time refers to the time to reach from minimum flow rate to ±2% F.S. of setting flow rate. Note 1: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration.

7 PI (Pressure Insensitive) Function Equipped The FCST1005MPFC MFC is equipped with the PI Function. MFCs that aren't equipped with the PI Function can be connected in parallel and cross talk is reduced. N2 RG P1 P1 / FlowOut / D.P PIMFC 300SCCM MFC 50SLM D.P Vent to Atm. Flow Rate (%) P1 ( % Control Cross talk 150kPaG) PIMFC Flow Out Flow Out PIMFC Actual Actual Flow Flow MFC(0 60%) Inlet Pressure (MPaG) PG:Regulator P1:Pressure Sensor DP:Differential Pressure Flow Time (sec) Downsizing & Cost Reduction By omitting the pressure system equipment from the gas system, footprint size and costs are reduced. With a display Temperature ( C F K) Pressure (kpaa psia) Flow Rate ( ) Setting Pressure(%), Output Flow Rate(%) Manual Valve Regulator Pressure Sensor Filter 2Way Valve 3Way Valve MFC 2Way Valve Product Code Manual Valve Filter 2Way Valve 3Way Valve PI MFC 2Way Valve FCST 1005 MP F C 4J2 F10 N2 R1 U *** Accesaries Additionally Related Equipments 1FCS Thermal FCST: Mass Flow Controller 2Flow Range 1005: 103,000SCCM 1030: 3,00130,000SCCM 1050: 30,00150,000SCCM 3ing Function MP: PI Type 4 F: Analog / Digital D: E: EtherCAT 5Valve Mode Blank: Normally Open C: Normally Closed 6Fittings (Face to face dimension) 4J2: 1/4 UJR(124mm) 4WS2: 1.5 Wseal (92mm) 4CW2: Wseal (92mm) 4CL2: Cseal(92mm) 7Full Scale 8Gas Type 9MGMR 10Dsub 9pin Connector Screw 11User Specifications 12Surface Finish F10: 10SCCM F10L: 10SLM Example: N2 Blank: Single Gas Single Range R1~R8: Multi Gas Multi Range Blank: M3 U: inch Example: atm Flow Rate Unit: CCM, LM Blank: Machined Finish : ElectroPolished 6

8 Accesaries Additionally Related Equipments MGMR Model FCST1000Z Series F.S. PI MGMR S.P. Analog Control Digital Control ±15V Drive 05VDC For metal type only +24V Drive 05VDC +24V Drive 420mA EtherCAT ( ) Note: Not correspond to the specification of the XXX mark. Multi Gas / Multi Range (MGMR) Users may change gas and full scale flow rate easily with 8 flow rates ranging from 10 SCCM to 50 SLM. Hastelloy Sensor Improved corrosion resistance against halogen gas. High Flow Rate Accuracy ±1% S.P.(25 100%) Model Number FCST1005(M)ZF(C) FCST1030(M)ZF(C) FCST1050(M)ZF(C) Flow Rate Renge (N 2 Equivalent) Bin1: 10 30SCCM Bin2: SCCM Bin3: SCCM Bin4: 301 1,000SCCM Bin5: 1,001 3,000SCCM Bin6: 3,001 10,000SCCM Bin7: 10,001 30,000SCCM Bin8: 30,001 50,000SCCM Valve Type Controlled Volume Range Repeatability Response Time * Required Pressure Difference MAX. Operating Pressure kPa (Ar: kPa), N/O: Normally Open, N/C: Normally Closed 2 100% F.S. ±1% S.P.(25 100%), ±0.25% F.S.(2 25%)(Accuracy guaranteed between: C) ±0.2% F.S. 1sec N/O kPa (Bin6) kPa (Bin7) N/C kPa (Bin6 7) (Ar: kPa) 400kPaG (Ar: 500kPaG) 5 50 C kPa (Ar: kPa) Analog: 0 5VDC(Supply Power Voltage:±15VDC), 0 5VDC(Supply Power Voltage:+24VDC), 4 20mA(Supply Power Voltage:+24VDC) Digital:,, EtherCAT (For only) 7 *: Response time refers to the time to reach from minimum flow rate to ±2% F.S. of setting flow rate. Note 1: Specifications are for MFC. Please inquire for the specifications of the. Note 2: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration.

9 Accesaries Additionally Related Equipments MGMR(Multi Gas / Multi Range)Functions Users can optionally change the gas and the full scale flow rate in the flow rate range that corresponds to the specified Bin number. Choose from 8 bin numbers to match gas with flow rate range. All in One N2 400SCCM SiH4 300SCCM H2 800SCCM CH4 500SCCM Cl2 500SCCM SF6 200SCCM Bin Numbers Model Number FCST1005(M)Z FCST1030(M)Z FCST1050(M)Z Bin Numbers R1 R2 R3 R4 R5 R6 R7 R8 Flow Ranges (N 2 Equivalent) 10 30SCCM SCCM SCCM 301 1,000SCCM 1,001 3,000SCCM 3,001 10,000SCCM 10,001 30,000SCCM 30,001 50,000SCCM Able to change gas and the full scale flow rate Configuration Software Ex. Bin Number:R4 Configuration software allows for changing gas and full scale flow rate. PC Supply Power Voltage Emergency response and reduction in spare stock! Lower Costs Converter FCST1000Z Series FCST1000MP Series Bin Number:R4 Connection Screen Product Code FCST 1005 M ZF C 4J2 F10 N2 R1 CR U *** FCS Thermal FCST: Mass Flow Controller FCSTM: 7Full Scale F10: 10SCCM F10L: 10SLM 2Flow Range 1005: 103,000SCCM 1030: 3,00130,000SCCM 1050: 30,00150,000SCCM 8Gas Type Example: N2 3 Material Blank: M: 9MGMR Blank: Single Gas Single Range 4 ZF: Analog / Digital ZD: (Horizontal Connection) ZDT: (Above Connection) ZE: EtherCAT 10ORing Material R1~R8: Multi Gas Multi Range Blank: FKM CR: Chloroprene 5Valve Mode Blank: Normally Open C: Normally Closed 11Dsub 9pin Connector Screw Blank: M3 U: inch 6Fittings (Face to face dimension) 4J2: 1/4 UJR(124mm) 4J1: 1/4 UJR(106mm) 12User Specifications Example: atm Flow Rate Unit: CCM, LM 4F2: 1/4 F900(127mm) 4CW1: Wseal (79.8mm) 13Surface Finish Blank: Machined Finish : ElectroPolished 4CW2: Wseal (92mm) 4WS1: 1.5 Wseal (79.8mm) 4WS2: 1.5 Wseal (92mm) 4CL2: Cseal(92mm) *: corresponds only to metal seal type 8

10 Accesaries Additionally Related Equipments Standard Digital Model FCST1000F Series F.S. PI MGMR S.P. Analog Control Digital Control ±15V 駆動 05VDC +24V 駆動 05VDC +24V 駆動 420mA EtherCAT CCLink For metal type only ( ) Note: Not correspond to the specification of the XXX mark. High Speed Response Response time: 1 sec for any given set point Flow Rate Control, Monitoring Software Connection to PC allows digital control up to 9 channels. Corresponds to Various Modes Corresponds to Special Specifications Example The highpressure specification The low differential pressure specification The high differential pressure specification Model Number FCST1005(M)F(C) FCST1030(M)F(C) FCST1050(M)F(C) Flow Rate Renge (N 2 Equivalent) 10SCCM 5SLM 6 30SLM 31 50SLM, Valve Type N/O: Normally Open, N/C: Normally Closed Controlled Volume Range 2 100% F.S. ±1% F.S. (Accuracy guaranteed between: C) Repeatability ±0.2% F.S. Response Time * 1sec Required Pressure Difference kPa N/O kPa ( 6 10SLM) kPa ( 11 30SLM) N/C kPa ( 6 30SLM) kPa MAX. Operating Pressure 400kPaG 5 50 C Analog: 0 5VDC(Supply Power Voltage:±15VDC) 0 5VDC(Supply Power Voltage:+24VDC) 4 20mA(Supply Power Voltage:+24VDC) Digital:, EtherCAT,, CCLink 9 *: Response time refers to the time to reach from minimum flow rate to ±2% F.S. of setting flow rate. Note 1: Specifications are for MFC. Please inquire for the specifications of the. Note 2: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration.

11 Accesaries Additionally Related Equipments High Speed Response Response Time 1 sec for any given set point Progressive PID Technology N2 1SLM Response (MFC SET: %) Application Flow Rate (%) MFC SET MFC Flow Out Time (sec) 1sec 1ch Monitoring software for 9ch Monitoring software Corrugated Chart Corresponds to Various Modes PLC(Programmable Logic Controller) EtherCAT Single Gas Model, Multi Range Model, Multi Gas Model Control System Specifications Contents Digital / Analog Model Single specification MR(Multi Range) specification MG(Multi Gas) specification Customer specifies gas and flow rate. Flow rate may be changed to even 1/3 of the specified rate. It's possible to register up to 4 kinds of gas table. (Gas, flowrate) Product Code FCST 1005 M F C 4J2 F10 N2 CR U *** FCS Thermal FCST: Mass Flow Controller FCSTM: 7Full Scale F10: 10SCCM F10L: 10SLM 2Flow Range 1005: 10SCCM5SLM 1030: 6SLM30SLM 1050: 31SLM50SLM 8Gas Type Example: N2 3 Material Blank: M: 9ORing Material Blank: FKM CR: Chloroprene 4 F: Analog / Digital FD: (Horizontal Connection) FDT: (Above Connection) E: EtherCAT PB: 10Dsub 9pin Connector Screw 11User Specifications Blank: M3 U: inch Example: atm Flow Rate Unit: CCM, LM 5Valve Mode Blank: Normally Open C: Normally Closed 12Surface Finish Blank: Machined Finish : ElectroPolished 6Fittings (Face to face dimension) 4J2: 1/4 UJR(124mm) 4J1: 1/4 UJR(106mm) 4F2: 1/4 F900(127mm) 4CW1: Wseal (79.8mm) 4CW2: Wseal (92mm) 4WS2: 1.5 Wseal (92mm) 4WS1: 1.5 Wseal (79.8mm) 4CL2: Cseal(92mm) *: corresponds only to metal seal type. 10

12 Accesaries Additionally Related Equipments High Flow Rate Model FCST1200F FCST1500F Series F.S. S.P. PI MGMR Analog Control ±15V Drive 05VDC +24V Drive 05VDC +24V Drive 420mA Note: Not correspond to the specification of the XXX Digital Control EtherCAT mark. For metal type only ( ) Model Number FCST1200MF(C) FCST1200F(C) FCST1500FC Flow Rate Renge (N 2 Equivalent) High Flow Rate Model Even a maximum flow rate of 500 SLM (converted by N 2 gas) is applicable. ±1% F.S. (less thane F.S. 200SLM) Response Time Less than 3 sec SLM SLM SLM Valve Type Controlled Volume Range Repeatability Response Time * Required Pressure Difference MAX. Operating Pressure Analog: 0 5VDC (Supply Power Voltage: ±15VDC) Digital:,, EtherCAT N/O: Normally Open, N/C: Normally Closed 2 100% F.S. ±0.2% F.S. 3sec 700kPaG N/C: Normally Closed ±1% F.S. (Accuracy guaranteed between C) ±2% F.S. (Accuracy guaranteed between: C) kPa (T1200MF SLM: kPa ) 5 45 C kPa Analog: 0 5VDC(Supply Power Voltage: ±15VDC) 0 5VDC(Supply Power Voltage: +24VDC) 4 20mA(Supply Power Voltage: +24VDC) Digital:,, EtherCAT *: Response time refers to the time to reach from minimum flow rate to ±2% F.S. of setting flow rate. Note 1: Specifications are for MFC. Please inquire for the specifications of the. Note 2: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. Product Code FCST 1200M F C 6J3 F100L N2 CR U *** FCS Thermal FCST: Mass Flow Controller FCSTM: 2Flow Range 1200M: 51SLM 150SLM 1200: 51SLM200SLM 1500: 201SLM500SLM 3 F: Analog / Digital FD: (Horizontal Connection) FDT: (Above Connection) E: EtherCAT 4Valve Mode Blank: Normally Open C: Normally Closed 5Fittings (Face to face dimension) 6J3: 3/8 UJR(192.4mm) 6F3: 3/8 F900(192.5mm) 8J3: 1/2 UJR(199mm) 8F3: 1/2 F900(204.6mm) 6Full Scale F100L: 100SLM F500L: 500SLM 7Gas Type Example: N2 8ORing Material Blank: FKM CR: Chloroprene 9Dsub 9pin Connector Screw Blank: M3 U: inch 10User Specifications Example: atm Flow Rate Unit: CCM, LM 11Surface Finish Blank: Machined Finish : ElectroPolish *: corresponds only to metal seal type. 11

13 High Temperature Model FCST1000M(Z)FHT FCST1200MFHT Series F.S. S.P. PI MGMR Analog Control ±15V Drive 05VDC +24V Drive 05VDC +24V Drive 420mA Note: Not correspond to the specification of the XXX Digital Control EtherCAT mark. (Option) Corresponding to High Temperature (Please consult for use at temperatures of 80 C or higher.) Use image under the high temperature environment Control substrate Control substrate Model Number Flow Rate Renge (N 2 Equivalent) FCST1005MZF(C) HT FCST1030MZF(C) HT FCST1050MZF(C) HT 10 3,000SCCM 3,001 30,000SCCM 30,001 50,000SCCM FCST1005MF(C) HT FCST1030MF(C) HT FCST1050MF(C) HT 10 SCCM 5SLM 6 30SLM 31 50SLM Room temperature environment High temperature environment FCST1200MF(C) HT SLM Valve Type Controlled Volume Range Repeatability ±1% S.P. (25 100%) ±0.25% F.S. (2 25%) N/O: Normally Open, N/C: Normally Closed 2 100% F.S. ±0.2% F.S. ±1% F.S. Response Time *1 1sec 3sec Required Pressure Difference *2 MAX. Operating Pressure Digital Multi Gas Model Based on FCS T1000MZF Series Digital Standard Model Based on FCS T1000MF Series (We can calibrate the customerspecified temperature.) Analog: 0 5VDC(Supply Power Voltage: ±15VDC) 0 5VDC(Supply Power Voltage: +24VDC) 4 20mA(Supply Power Voltage: +24VDC) Digital:, (for T1000MF only) Digital High Flow Rate Model Based on FCS T1200MF Series 400kPaG (Ar:500kPaG) 400kPaG 700kPaG Analog: 0 5VDC (Supply Power Voltage:±15VDC) Digital: *1:Response time refers to the time to reach from minimum flow rate to ±2% F.S. of setting flow rate. *2:Please inquire about control of gas or liquid with low vapor pressure. Note 1: Specifications are for MFC. Please inquire for the specifications of the. Note 2: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. Product Code FCST 1005 MF C 4J2 F10 N2 U *** HT Accesaries Additionally Related Equipments 1FCS Thermal 2Flow Range 3 Material 4Valve Mode 5Fittings (Face to face dimension) FCST: Mass Flow Controller FCSTM: It's based upon each model. MF: Analog / Digital MZ: Analog / Digital MFD: (Horizontial Connection) Blank: Normally Open C: Normally Closed It's based upon each model. 6Full Scale F10: 10SCCM F10L: 10SLM 7Gas Type Example: N2 8Dsub 9pin connector screw Blank: M3 U: inch 9User Specifications Example: atm Flow Rate Unit: CCM, LM 10High Temperature Specification HT : Surface Finish Blank: Machined Finish : ElectroPolish 12

14 Fast Response and Analog Economy Model FCST1000L Series F.S. S.P. PI MGMR ±1% F.S.(less than F.S. 30SLM) Input/Output Analog(0 5VDC) Fast Response Analog Control ±15V Drive 05VDC +24V Drive 05VDC +24V Drive 420mA Note: Not correspond to the specification of the XXX Digital Control EtherCAT mark. Less than 1sec (less than F.S. 30SLM) For metal ( type only ) Accesaries Additionally Related Equipments Model Number FCST1005(M)L(C) FCST1030(M)L(C) FCST1050(M)L(C) Flow Rate Renge (N 2 Equivalent) Valve Type Controlled Volume Range Repeatability Response Time * Required Pressure Difference MAX. Operating Pressure 10SCCM 5SLM 6 30SLM 31 50SLM, N/O: Normally Open, N/C: Normally Closed 2 100% F.S. ±1% F.S. (:15 35 C) ±2% F.S. (Accuracy guaranteed between C) kPa ±0.2% F.S. N/O kPa ( 6 10SLM) kPa ( 11 30SLM) N/C kPa ( 6 30SLM) 400kPaG Analog: 0 5VDC(Supply Power Voltage: ±15VDC) 2sec kPa FCST 1005 M L C 4J2 F10 N2 CR U *** FCS Thermal FCST: Mass Flow Controller FCSTM: 2Flow Range 1005: 10SCCM5SLM 1030: 630SLM 1050: 3150SLM 3 Material 4 5Valve Mode Blank: M: L: Analog 1sec *:Response time refers to the time to reach from minimum flow rate to ±2% F.S. of setting flow rate. Note 1: Specifications are for MFC. Please inquire for the specifications of the. Note 2: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. Note3: Please inquire separately when converting to 20 (25) C and 101.3kPa (1 atm) for calibration. Product Code Blank: Normally Open C: Normally Closed 6Fittings (Face to face dimension) 4J2: 1/4 UJR(124mm) 4F2: 1/4 F900(127mm) 4CW1: Wseal (79.8mm) 4CW2: Wseal (92mm) 5 50 C 7Full Scale 8Gas Type 9ORing Material 10Dsub 9pin Connector Screw F10: 10SCCM F10L: 10SLM Example: N2 Blank: FKM CR: Chloroprene Blank: M3 U: inch 11User Specifications Example: atm Flow Rate Unit: CCM,LM 12Surface Finish Blank: Machined Finish : ElectroPolish 4WS1: 1.5 Wseal (79.8mm) 4WS2: 1.5 Wseal (92mm) 4CL2: Cseal(92mm) *: corresponds only to metal seal type. 13

15 Accesaries Additionally Related Equipments Analog Economy Model FCSG200 Series Model Number Practicable Gases Flow Rate Renge (N 2 Equivalent) Valve Type Controlled Volume Range N2 Ar He Air O2 SF6 H2 10SCCM 5SLM N/O: Normally Open 5 100% F.S. (Accuracy guaranteed between C) ±2% F.S. F.S. S.P. Allows flow rate measurement by analog signal and the control function. Supports integrated power supply source FCSG205 Repeatability Response Time Required Pressure Difference MAX. Operating Pressure PI MGMR Analog Control ±15V Drive 05VDC +24V Drive 05VDC +24V Drive 420mA Note: Not correspond to the specification of the Digital Control EtherCAT ±0.2% F.S. 6sec (Central Value) kPa (5SLM) 300kPaG 5 50 C Analog: 0 5VDC (Supply Power Voltage:±15VDC) *:Please inquire to about use of the gas which isn`t mentioned. Note 1: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. XXX mark. with indicater FCSTM39 Series F.S. S.P. PI MGMR Analog Control Digital Control ±15V Drive 05VDC +24V Drive 15VDC +24V Drive 420mA EtherCAT Product Code Note: Not correspond to the specification of the Indicater Flow Rate Output Needle valve model is also available. Flow Rate Estimate and High/ Low Alarm Output XXX mark. Model Number Flow Rate Renge (N 2 Equivalent) Operating Pressure * Others 10SCCM 20SLM TM39(V) SLM ±2% F.S. (Accuracy guaranteed between: C) ±3% F.S. (Accuracy guaranteed between: C) MPa(G) 0~50 C Analog: 1 5VDC(Supply Power Voltage:+24VDC) 4 20mA(Supply Power Voltage:+24VDC) Included needle valve type is available(option), corresponding to fittings Rc1/4 *: The minimum working pressure in case of F.S. 10SCCM is the pressure at the flow of 10SCCM. The minimum value is different depending on the full scale flow rates. Note 1: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. 14

16 High Precision Model with Piezo Actuator FCST2000 Series F.S. S.P. PI MGMR Analog Control ±15V Drive 05VDC Digital Control +24V Drive 05VDC +24V Drive 420mA EtherCAT Note: Not correspond to the specification of the XXX mark. Model Number FCST2005(C) FCST2020(C) FCST2050(C) FCST2150(C) Flow Rate Renge (N 2 Equivalent) 5SCCM 5SLM Piezo Actuator Low Temperature Heat System Flow Rate Sensor Effective with High Reaction and Low Stability Gases Corresponds to the Minute Flow Rate. Special Model: 1, 2, 3 SCCM F.S. 6 20SLM 21 50SLM SLM Accesaries Additionally Related Equipments Valve Type Controlled Volume Range Repeatability Response Time Required Pressure Difference MAX. Operating Pressure kPa N/O: Normally Open, N/C: Normally Closed ±1% S.P.(25 100%), ±0.25% F.S. (2 25%) 2 100% F.S. N/O kPa( 6 10SLM) kPa(11 20SLM) kPa(21 30SLM) N/C kPa( 6 10SLM) kPa(31 50SLM) kPa(11 20SLM) 5 50 C N/O: Normally Open N/C: Normally Closed (Solenoid Actuator) 300kPaG 350kPaG 400kPaG Note 1: Specifications are for MFC. Please inquire for the specifications of the. Note 2: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. Product Code ±0.2% F.S. 1sec(Typical Value) Analog: 0 5VDC(Supply Power Voltage: ±15VDC) Digital: kPa ±2% F.S kPa (51 100SLM) kPa ( SLM) Analog: 0 5VDC (Supply Power Voltage:±15VDC) FCST 2005 D C 4J2 F10 N2 U *** FCS Thermal FCST: Mass Flow Controller FCSTM: 2Flow Range 2005: 5SCCM5SLM 2020: 630SLM 2050: 3150SLM 2150: 51150SLM 3 Blank: Analog / Digital D: (Horizontal Connection) DT: (Above Connection) 4Valve Mode Blank: Normally Open C: Normally Closed 5Fittings (Face to face dimension) 4J2:1/4 UJR(124mm) 4J1:1/4 UJR(106mm) 4CW1:1.125 Wseal (79.8mm) 4CW2:1.125 Wseal (92mm) 6Full Scale 7Gas Type 8Dsub 9pin Connector Screw 9User Specifications F10:10SCCM F10L:10SLM Example: N2 Blank: M3 U: inch 4WS1:1.5 Wseal (79.8mm) 6J2:3/8 UJR(163.4mm)( for 51~150SLM only) 15

17 SDS TM (Safe Delivery Source)Model FCSDST2000 Series F.S. S.P. PI MGMR Analog Control ±15V Drive 05VDC Digital Control +24V Drive 05VDC +24V Drive 420mA EtherCAT Note: Not correspond to the specification of the XXX mark. Applicable Gases: AsH3 BF3 PH3 SiF4 PF3 Multigas model includes a rotary switch for changing gas Model Number The kind of practicable gas Flow Rate Renge (N 2 Equivalent) Economy Model with Piezo Actuator FCSG300 Series Flow Rate Accuracy ±1% F.S. Piezo Actuator Model Number FCSG305(C) FCSG320(C) FCSG350(C) Flow Rate Renge (N 2 Equivalent) Valve Type Controlled Volume Range Repeatability Response Time Required Pressure Difference MAX Operating Pressure Note 1: At Valve Type Controlled Volume Range Note 1: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. Note 2: Flow rate precision guarantee: 1SCCM or over. Note 3: Please specify the installation direction when placing an order. XXX F.S. PI MGMR 2 30SCCM N/O: Normally Open, N/C: Normally Closed 2 100% F.S. (Accuracy guaranteed between: C) Analog Control S.P. ±15V Drive 05VDC Specifications are not supported AsH3 BF3 PH3 SiF4 PF3 ±1% F.S. +24V Drive 05VDC +24V Drive 420mA Digital Control EtherCAT 10SCCM 5SLM 6 20SLM 21 50SLM N/O: Normally Open, N/C: Normally Closed 2 100% F.S. ±1% F.S. (Accuracy guaranteed between: C) ±0.2% F.S. 1sec(Central Value) kPa kPa kPa 300kPaG 5 50 Analog: 0 5VDC(Supply Power Voltage:±15VDC), flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. FCSDST2050 Repeatability Response Time Required Pressure Difference MAX. Operating Pressure Digital: ±0.2% F.S. 2sec (Typical Value) 1.33kPa (10Torr) 133.3kPa(1000Torr) 133.3kPa(1000Torr) 5 50 C Analog: 0 5VDC(Supply Power Voltage:±15VDC) Digital: Accesaries Additionally Related Equipments 16

18 Accesaries Additionally Related Equipments Automatic Pressure Control Controller (Outside Pressure Signal Control) PCST1000F Series Pressure Signal Input Level Pressure control at the upstream side or downstream side by a signal from the external pressure sensor Flow Rate Output 0~5VDC Model Number PCST1005(M)F(C) PCST1030(M)F(C) PCST1050(M)F(C) Flow Rate Renge (N 2 Equivalent) Valve Type Pressure Control Range Pressure Accuracy *1 Flow Rate Output Signal Response Time *2 MAX. Operating Pressure 10SCCM 5SLM 6 30SLM 31 50SLM Application Examples For wafer adhesion in plasma devices and He gas back pressure control., N/C: Normally Closed 0 10VDC F.S % F.S. ±1% F.S. (Accuracy guaranteed between: C) ±1% F.S. (Accuracy guaranteed between: C) *1:The precision of the pressure value depends on the precision of the pressure sensor. *2:Response Time, in the case of controlling upstream pressure, is the time it takes to reach ±2% F.S. of the target pressure from the highest control pressure. 0 5VDC 3sec 400kPaG 5 50 C Analog: 0 10VDC(Supply Power Voltage: ±15VDC) Digital: In the case of controlling downstream pressure, Response Time is the time it takes to reach ±2% F.S. of the target pressure from the lowest control pressure. The reply adjustment is sometimes necessary for the condition for the pipe capacity. Note1: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. F.S. S.P. PI MGMR Note: Not correspond to the specification of the Analog Control Digital Control ±15V Drive 010VDC +24V Drive 010VDC +24V Drive 420mA EtherCAT XXX mark. For metal type only ( ) Flow Rate Output 05VDC 010VDC Pressure Setting 010VDC Outside Control System PCST Control Unit Pressure Control Pressure Sensor Pressure Setting Signal:010VDC Pressure Control Signal:010VDC Flow Rate Output Signal:05VDC Pressure Setting Signal:010VDC Pressure Control Signal:010VDC Flow Rate Output Signal:05VDC Outside Control System PCST Control Unit Pressure Control 010VDC Pressure Sensor Flow Rate Output 05VDC Pressure Setting 010VDC PCS PCST 1005 M F C 4J2 F10 N2 CR U *** 1PCSThermal PCST: 2Flow Range 1005:10SCCM5SLM 1030:6SLM30SLM 1050:31SLM50SLM 3 Material 4 5Valve Mode Downstream Control Product Code Blank: M: F: Analog / Digital C: Normally Closed 6Fittings (Face to face dimension) 4J2:1/4 UJR(124mm) 4J1:1/4 UJR(106mm) 4F2:1/4 F900(127mm) Chamber 4CW1:1.125 Wseal (79.8mm) 7Full Scale 8Gas Type Chamber 9ORing Material 10Dsub 9pin Connector Screw F10:10SCCM F10L:10SLM Example: N2 Upstream Control Blank: FKM CR: Chloroprene Blank: M3 U: inch PCS 11User Specifications Example: atm Flow Rate Unit: CCM,LM 12Surface Finish Blank: Machined Finish : ElectroPolish 4CW2:1.125 Wseal (92mm) 4WS2:1.5 Wseal (92mm) 4WS1:1.5 Wseal (79.8mm) 4CL2:1.125 Cseal(92mm) *: corresponds only to metal seal type. 17

19 Accesaries Additionally Related Equipments Automatic Pressure Control Controller (with pressure sensor) UPC UPCUS Series F.S. S.P. PI Builtin pressure sensor controls pressure at the upstream or downstream sides. High temperature model applicable MGMR Analog Control ±15V Drive 05VDC +24V Drive 05VDC +24V Drive 420mA Note: Not correspond to the specification of the UPC with (UPCM Series) XXX Digital Control EtherCAT mark. Model Number UPC (Downstream pressure controller) UPCUS (Upstream pressure controller) Pressure Range Control Pressure Range Control Valve Cv Value Accuracy (after auto zero operation) Max. Operation Pressure F.S. 13.3kPa abs (100Torr) 1 100% 1 40%:±0.2% F.S %:±0.5% S.P. 200kPaG F.S. 150/300/500 kpa abs 1 100% *1 L type: / M Type:0.011 / H Type:0.03 F.S.150kPa abs. 1 40%:±0.2% F.S %:±0.5% S.P. F.S.300/500kPa abs. 1 20%:±0.1% F.S %:±0.5% S.P. 0~50 (Accuracy guaranteed between: 1535 C) *2 Pressure Setting/ Output Signal Analog: 0.110VDC/010VDC(Supply Power Voltage:±15VDC) Digital: *1: Flow control range of UPCUS changes under different conditions. Please inquire for more information. * 2: Options available for temperature specifications above 50 C. Please inquire for more information. Application Examples 1MPaG Analog: VDC/0 5VDC(Supply Power Voltage:±15VDC) Digital: UPC MFC UPCUS Downstream Control by UPC Control pressure across gas supply branched lines Product Code MFC Upstream Control by UPCUS Maintain constant pressure in a liquid source tank and improve stability of the vaporized gas UPC D HT50 4J2C C150 L UPC Series UPC:Downstream control UPCUS:Upstream control 4Fittings (Face to face dimension) 4J2C:1/4 UJR(124mm) 4J1C:1/4 UJR(106mm) 4WS1:1.5 Wseal (79.8mm) 4CW2:1.125 Wseal (92mm) 2s Blank: Analog D: 3Accuracy guaranteed Temperature Range Blank: 1535 HT50:1550 5Full Scale Pressure Range C150:150kPa abs C300:300kPa abs C500:500kPa abs 6Control Valve Cv L: M:0.011 H:0.03 Note: Please consult Fujikin separately if you use in case of pressure range of F.S. 13.3kPa abs (100 Torr). 18

20 Gas Distribution Ratio Control Model FRCT1000MF Series F.S. S.P. PI MGMR Note: Not correspond to the specification of the Correct Distribution Performance Control the introduction of gas by the correct flow distribution ratio. Hastelloy Sensor Analog Control Digital Control ±15V Drive 05VDC +24V Drive 05VDC +24V Drive 420mA EtherCAT Improved corrosion resistance against halogen gas. Splits the flow from 2 branches to 6 branches. XXX mark. (Option) Gas Panels N2 Ar H2 He MFC1 1SLM MFC2 1SLM MFC3 1SLM MFC4 1SLM Equipment FRC Master 4SLM Slave 4SLM Chamber Accesaries Additionally Related Equipments The is a device that uses a fixed ratio to distribute the absolute flow rate decided by an upstream Mass Flow Controller. Flow is split from 2 to 6 branches. Model Number FRCT1005MF FRCT1030MF FRCT1050MF Flow Rate Renge (N 2 Equivalent) 10 3,000SCCM 3,001 30,000SCCM 30,001 50,000SCCM Valve Type N/O: Normally Open Flow Rate Branching Ratio 5 95% ( * The setting range differs depending on the number of branches and amount of gas.) Repeatability ±0.2% F.S. Response Time * 4sec Max. Inlet Pressure 20kPaG Analog: 0 5VDC(Supply Power Voltage:±15VDC) Digital: *:Response time refers to the time to reach from minimum flow rate to ±2% F.S. of setting flow rate. Note 1: At, flow rates (SCCM, SLM) are converted to values at 0 C and 101.3kPa abs. (1 atm) for calibration. Note 2: Above specifications correspond to one FRC UNIT. Note 3: The inlet side of FRC requires a Mass Flow Controller. Product Code (In case of 2 branches) FRCT 1005 M F 4J2 F4L/F4L N2 M FRCThermal FRCT: 2Flow Range 1005:10SCCM5SLM 1030:630SLM 1050:3150SLM 3ing Function M: 4 F: Analog / Digital FD: 5Fittings (Face to face dimension) 4J2:1/4 UJR(124mm) 6Full scale flow rates Master F10:10SCCM F4L:4SLM 7Full scale flow rates Slave F10:10SCCM F4L:4SLM 8Gas Type Ordering number will be N2 in spite of the kind of gas. 9UNIT M:Master S0*:Slave 10Surface Finish Blank: Machined Finish : ElectroPolish 19

21 I Accesaries Additionally Related Equipments Fittings UJR/F900 Type Fittings IGS Type D C D C H F Fittings UJR/F900 Type FCST1000MP FCST1000Z/F/L FCST1000MZ/MF/ML/ M(Z)FHT FCST1200F FCST1200MF FCST1500F FCSG200 FCSTM39 FCST2000/G300 E *1: Please inquire about using UJR fittings (faceto face dimension 106mm). Note: Please inquire regarding the dimensions of the. A L K M 6M4 J Model Number A UJR F900 C D E H I J K L M (*1) (30.8) (*1) / FCST PCST1000F PCST1000MF 124(*1) UPC / UPCUS 124(*1) Fittings IGS Type Model Number A B C D E G F 1.5Wseal 1.125Wseal 1.5Wseal 1.125Wseal FCST1000MP FCST1000Z/F/L FCST1000MZ/MF/ML/ M(Z)FHT 92(*2) FCST (*2) PCST1000F PCST1000MF 92(*2) UPC / UPCUS 92(*2) * 2: Please inquire to separately when you use IGS type short facetoface dimmension connnection (facetoface dimmension 79.8mm). Note1: Please inquire separately regarding the external dimensions of digital communication models other than. Note2: Flow Rate Control System and Pressure Control System are fixed with 4 Cap Bolts. 1CBM5 30 2CBM4 29 3CBM5 40 4CBM4 10 B A G E Cap Bolt 1.5Wseal 1.125Wseal Mass Flow Controller Signal Connector Pin Numbers Dsub 9 pin Male Connector Signal Valve Opening and shutting Input Flow Rate Setting Voltage 0~5VDC Electric Source:+15VDC Electric Source: 0VDC Electric Source:15VDC Flow Rate Setting Voltage 0.1~5VDC Flow Rate Output Voltage COMMON Flow Rate Setting Voltage COMMON N.C Description +15VDC:Full Open 15VDC:Shut Flow Rate Output Voltage plus Side 05VDC Power Supply Feed Line: 50mAF ± 15VDC Common Line Negative Power Supply Feed Line: 200mA "Flow Rate Setting Input Plus Side 0.15VDC Common Line of Flow Rate Output Voltage Common Line of Flow Rate Setting Voltage Unused Pin (Please don't connect.) *1: Signal Connector of FCST1000 Series *2: Pin7 and Pin8 are connected inside FCS. *3: Pin9 can be designated "Valve Test PT" by special specification. *4: Please inquire separately about connector specifications of digital communication. RJ11 Digital s Connector Pin Numbers Pin Numbers Signal N.C. N.C. Signal[Txd/Rxd] Signal[+Txd/Rxd] N.C. N.C. RJ45 Digital s Connector * Only for FCST2000 Series Signal Signal COM Signal COM N.C. Signal[Txd/Rxd] Signal[+Txd/Rxd] N.C. N.C. N.C. Description Unused Pin (Please don't connect.) Unused Pin (Please don't connect.) RS485 2 Line System Send and Receive Minus RS485 2 Line System Send and Receive Plus Unused Pin (Please don't connect.) Unused Pin (Please don't connect.) 1 8 Description RS485 Signal Common RS485 Signal Common Unused Pin (Please don't connect.) RS485 2 Line System Send and Receive Minus RS485 2 Line System Send and Receive Plus Unused Pin (Please don't connect.) 7 Unused Pin (Please don't connect.) 8 Unused Pin (Please don't connect.)

22 FCS Thermal Series Accesaries Power Supply for 6 Units Part Number: FCST1000PS 3/6/9 Digital Panelmeter Part Number: FCSDPM05L100 Control Potentiometer Part Number: FCSSET02L100 Accesaries Additionally Related Equipments MFC Power Supply Single Analog Control Cable FCPT1200 ー DS9 ー DS15*M ー 0.3SQ PC Converrer Part Number: FCSPM1000ASP Connection Examples Power Supply FCSPM1000ASP AC Electric Cable FCPT1200 ー AC ー 2M Single Digital Control Cable FCPT1200 ー DS9 ー DS15*M ー 0.3SQ Use Equipment Power Supply Cables AC Electric cable Use Equipment Power Supply Cables Converter AC Electric cable Power Supply FCSPM1000ASP Cable FCPT1000 ー DS9 ー DS9*M ー 0.3SQ Connector Change Cable Wide range of connectors supported Power Sapply FCS ー T1000 ー PS3 Note: Specifications are subject to change without prior notice. Multiple Analog Control FCST1000 Cable FCPT1000 ー DS25 ー 3X3 ー 4X3 ー *M Control Source Integratedtype Unit Flow Module Use Equipment Power Supply Digital Panelmeter Control Potertiometer Cables Control Potentiometer FCS ー SET ー 02 ー L100 Digital Panelmeter FCS ー DPM ー 05 ー L100 MFC AC Electric Cable FCPT1200 ー AC ー 2M 21

23 Additionally Related Equipments 2015 Cho Monodzukuri [super manufacturing] Encouragement Awadrd Integrated Gas System IGS Convertional Type Miniature IGS Type IGS One third the size of conventional gas panels. Stop Valves NEW MEGA Series Diaphagm Upper Part of Composition Parts Perfect Attachment and Removal System All upper part assemblies can be attached or removed in upper oneway Encouragement Award Filters Ball Valves Seies Advance Liquid Vaporize System 2010 Machinery Component Award FALVS A d v a n c e d L i q u i d V a p o r i z e S y s t e m 2007 Encouragement Award FCS Body Corresponding to hotness 250 Accesaries Additionally Related Equipments FCSP7000 Series Flow Control Systems FCS Pressure Series FUFL Sires Wetted parts are perfectly oilfree. 0.1, 0.5, 2, 5, 10 μm are applicable as element sizes. 22

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