Manifold type. Series

Transcription

1 Manifold type Series

2 Manifold type Series The SV Series of compact air operated valves have been designed for use with liquid chemicals, aiming at improvement of fundamental functions and downsizing. DVNE has successfully achieved these aims in response to our customers requirements. Fluid separating manifold Used when dividing one type of fluid between several outlets. Fig. 1efore supply IR Fig. 2During supply Fluid mixing manifold Used when supplying more than one type of fluid to one or two places. Fig. 1efore supply IR Fig. 2During supply

3 Standardize ustomization Semiconductor manufacturing processes are undergoing rapid changes; they are becoming more advanced and require cleaner production environments. Valves must also provide more advanced functions to keep up with these trends. In heading into the age of 300 mm wafers, the trend toward standardization is gaining momentum, while at the same time, customers are asking for customized products. dvance is conducting research under the theme of standardize customization in order to Manifold

4 Manifold that reduces fluid clogging High temperature circu The body has been integrated, producing a construction that eliminates liquid residues and clogging. Two types are available: a fluid separating type and a fluid mixing type. Fluid separating type IR Fig. 1efore supply Reduced and Fig. 2During supply Fluid mixing type Fig. 1efore supply IR Manifold type Series Fig. 2During supply Double fluid mixing manifold Optimal when supplying two different fluids alternately or when flushing with DIW For example, after a liquid chemical has been supplied from port (Fig. 1), the n operation monitor is provided, making it easy to check whether liquid is flowi IR LOSE Fig. 1Supply c

5 lation manifold Developed for circulating high temperature liquid chemicals and is highly reliable. irculation function (Fig. 1) and drainage function (Fig. 2) are switchable. IR Fig. 1irculation Fig.2Drainage port manifold hanging to a manifold configuration tends to hamper the supply of fluid, thus the size of the pipes at the and ports can be changed to assist this supply. hange of pipe size Embedded manual valve manifold Manual valves and toggle valves are embedded. Manual valve Toggle valve ir operated valve after liquid chemicals have been used. nside of the valve can be flushed out by supplying DIW from port (Fig. 2). g from port or IR Operation indication LOSE hemical from port Fig. 2Supply DIW from port and perform flushing inside valves

6 Type Selection Table Fluid separating manifold Series No. ctuation onnection (tube) ase SV 0 3 1/4"1/2" 2 N 4 OD1/4"64 0 Standard T 4 3/4" 6 NO 5 OD3/"10 6 OD1/2"1210 illar i Inch Non m millimeter Z Optional 4 Quadruple iping on side oth sides 7 OD3/4" Quintuple Fluid mixing manifold Series No. ctuation onnection (tube) SV 3 1/4"1/2" 2 N 4 OD1/4"64 4 3/4" 5 OD3/"10 6 OD1/2"1210 ase 0 0 Standard T illar i Inch m millimeter Optional Non Z ctuation f Double f action format 4 Quadruple iping on side oth sides 7 OD3/4" Quintuple Manifold that reduces fluid clogging (fluid separating type) Series No. ctuation onnection (tube) SV 3 1/4"1/2" 2 N 4 OD1/4"64 4 3/4" 6 NO 5 OD3/"10 6 OD1/2" OD3/4"1916 ase Flow route structure Liquid clogging elimination type T illar Optional i Inch Non m millimeter Z 4 5 Quadruple Quintuple Manifold that reduces fluid clogging (fluid mixing type) Series No. ctuation onnection (tube) ase SV 3 1/4"1/2" 2 N 4 OD1/4"64 4 3/4" 5 OD3/"10 6 OD1/2" OD3/4" N 0 Standard N 0 N Standard 0 N Flow route structure Liquid clogging elimination type T illar i Inch m millimeter Optional Non Z ctuation f f Double action format 4 5 Quadruple Quintuple Double fluid mixing manifold Series No. ctuation onnection (tube) SV 3 1/4"1/2" 2 N 4 OD1/4"64 4 3/4" 5 OD3/"10 6 OD1/2"1210 ase Flow route structure 0 M Standard M elimination type T Liquid clogging 0 illar Optional i Inch Non m millimeter Z 4 Quadruple 7 OD3/4" Quintuple High temperature circulation manifold Series No. ctuation SV 3 1/4"1/2" 2 N 4 3/4" onnection (tube) 4 OD1/4"64 5 OD3/"10 6 OD1/2" OD3/4"1916 ase 0 Standard 0 illar i Inch m millimeter High temp. spec. S S High temp. circulating type heck DVNE s drawings for detailed specifications and type selection.the contents of this catalog are subject to change according to various circumstances.

7 series Dimension Drawing Fluid Separating/Mixing Manifold 30MX 15 -Rc1/ D 30MX 10-Rc1/ M6 Depth 10 4-M6 Depth M6 Depth 10 5-M6 Depth 6 [SV3240] [SV3250] 45 D 30MX Rc1/ MX Rc1/ M6 Depth 10 5-M6 Depth M6 Depth 12 [SV3260] [SV4270] Double Fluid Mixing Manifold 92 30MX Rc1/ With operation display MX Rc1/ With operation display R1.5 4-M6 Depth 6 (for attachment) R1.5 4-M6 Depth 6 (for attachment) -2-1 [SV3240MTZ] [SV3260MTZ]

8 Fluid logging Reduction Manifold 30MX Rc1/ 30MX Rc1/ M6 Depth 6 (2-M6 Depth 6 for Quadruple or lower) M6 Depth 9 [SV3240NTmZ] [SV3250NTmZ] 45 30MX Rc1/ MX Rc1/ M6 Depth M6 Depth 12 [SV3260NTmZ] [SV4270NTmZ] High Temperature irculation Manifold Rc1/ Rc1/ M6 Depth M6 Depth [SV3260S] [SV4270S] variety of valves are prepared. lease contact our sales staff for further information.