ULTRA-CLEAN DIAPHRAGM VALVES

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1 ULTR-LN IPRM VLVS

2 334 ULTR-LN VLVS

3 INX OMPT MOL 2L 338 I PRSSUR I-LOW 2LS 345 SUR-MOUNT SRIS MS 360 LOW ONTROL 2LM 339 STNR MTL ST MOL 3L 346 OMPT SUR-MOUNT SRIS MS 361 STNR MOL 2L 340 I TMP. MTL ST 3LT 347 OST IINT ULTR LN MTL IPRM VLV OR NRL PURPOS M 364 3/4" I-LOW 2LS I PRSSUR I LOW MTL ST 3LS 348 IR OPRT, MNUL OVRRI YRI 365 LOW-PRSSUR MOL V 342 P R I PRSSUR VLV V 349 ONOMI IPRM VLV 366 NRL PURPOS VZ 343 IPRM VLVS INTROUTION M & MS 354 I PRSUR IPRM VLV P 368 I-PRSSUR 2L 344 IPRM IR-OPRT VLVS M 355 MULTI PORT MONOLOK VLV M 371 M-LT VN ONTROL TNOLOY 335

4 UV MOL SLTION TL Make the initial choice, taking the application parameters into account. Pressure Temperature as Seat v -10~60 (14~140 ) PT ~0.1 ~0.3 UP rade 2L 2LM 2L 2L M Valve Type P rade V Z ~0.7 ~2.5 2L 2LS12 V Z ~0.1 2L 2LM Low-Pressure 2MPa 300 psi -10~150 (14~300 ) Inert as PI ~0.3 ~0.7 2L 2L M 2L ~0.3 MS V V ~0.1 3L ctive as MTL ~0.3 ~0.7 3L 3LN 3L -10~250 (14~480 ) MTL ~0.7 3LT -10~60 (14~140 ) PT ~0.1 2L ~0.23 P V igh-pressure 2~21MPa (300~3060 psi) -10~40 (14~100 ) -10~150 (14~300 ) Inert as PT + 316L Stainless Steel PI ~0.3 ~0.1 ~0.3 2LS 2L 2LS V (Maximum working pressure 16.2Mpa (2300 psi (Option 21MPa (3060 psi or V, 16.2Mpa (2300 psi) only ctive as MTL ~0.1 ~0.3 3L 3LS **P - igh Purity *UP - Ultra igh Purity 336 ULTR-LN VLVS

5 SI UV STRUTURS, RS N SPIITIONS - UVs are metallic diaphragm-operated valves. The diaphragm is made of a Ni-o lloy. - UVs are available with the following valve structures to meet ultra-high purity (UP) and high-purity (P) grades:. ll-metallic valves, the highest UP grade. These valves are designed to be the ultimate solution, with polymer materials eliminated from their gas contact areas. Ideally suited for use with high-reactivity gases and in applications requiring fast gas replacement. lso best suited for use as supply system valves for high-reactivity.. Soft-seat valves, standard UP grade/standard P grade. M-LT MOTOYM Japan's standard line of valves using PT (polymonochlorotrifluoroethyle) in the standard valve seats. The seat holders minimize the dead volume on the seat bottom, designed for enhanced reliability. aulked-seat valves, general-purpose P grade. P valves using PT (polymonochlorotrifluoroethyle) seats. Minimized seat volumes ease the problems of outgassing and seat creeping in line with the traditional design philosophy of UV's. IST UP** R, 3L SRIS Type Size (inch) v Max. Working Pressure Working Temp. pplication rive eature 3L 1/4-1/ MPa/150psi -10~150 c On-Off Manual and Pneumatic Multiuse 3LS 1/4-1/ MPa/2300 psi OPTION 21MPa/3060 psi -10~150 c On-Off Manual and Pneumatic igh-pressure igh low 3LT 1/ MPa/150 psi -10~250 c On-Off Manual and Pneumatic igh-temperature Use STNR UP** R, 2L SRIS Polyimide(PI) seat is optionally selectable: working tmp.=-10 to 150º Type Size (inch) v Max. Working Pressure Working Temp. pplication rive eature 2L 1/ MPa/150 psi -10~60 c On-Off Manual and Pneumatic ompact 2LM 1/ MPa/150 psi -10~60 c low ontrol raduated Manual ompact 2L 1/4-1/2, 3/ , 2.2 1MPa/150 psi -10~60 c On-Off Manual and Pneumatic Multiuse 2L 1/ MPa/2300 psi OPTION 21MPa/3060 psi -10~60 c On-Off Manual and Pneumatic igh-pressure Use 3LS 1/4-1/ MPa/2300 psi OPTION 21MPa/3060 psi -10~60 c On-Off Manual and Pneumatic igh-pressure igh low M 1/ MPa/150 psi & 2MPa/300 psi -10~60 c On-Off Manual and Pneumatic Multiuse M 1/ MPa/150 psi -10~60 c On-Off Manual and Pneumatic Multiuse MS 1/ MPa/150 psi & 2MPa/300 psi -10~60 c On-Off Manual and Pneumatic Multiuse MS 1/ MPa/150 psi -10~60 c On-Off Pneumatic Multiuse 2LN 1/ MPa/150 psi & 2MPa/300 psi -10~60 c On-Off Manual and Pneumatic Multiuse M 1/ MPa/150 psi & 2MPa/300 psi -10~60 c On-Off Manual and Pneumatic Multiuse STNR P* R, V & VZ SRIS Polyimide(PI) seat is optionally selectable: working tmp.=-10 to 150º Type Size (inch) v Max. Working Pressure Working Temp. pplication rive eature V 1/4-1/ MPa/150 psi -10~60 c On-Off Manual and Pneumatic Multiuse V 1/ MPa/2300 psi -10~60 c On-Off Manual and Pneumatic igh-pressure Use VZ 1/4-1/ MPa/150 psi -10~80 c On-Off Manual aulked Seat NOT: hoose your valve seat material from the Valve Seat Selection Table (p.280) in this catalog. *P - igh Purity **UP - Ultra igh Purity M-LT VN ONTROL TNOLOY 337

2L SRIS OMPT MOL Metal iaphragm Valves ompact models from the Ultra lean Valve series are made to UP specifications. These models come with connection joints in 1/4", as standard.

6 2L SRIS OMPT MOL Metal iaphragm Valves ompact models from the Ultra lean Valve series are made to UP specifications. These models come with connection joints in 1/4", as standard. These valves fit into applications to which a minimum footprint is required. n ompact designs for minimum footprint. n large choice of fluid-specific seat materials is available as an option. or details, please contact one of our field representatives. STNR ONIURTION IMNSIONS Size nd onnection I J K L M 2LS4Q-W 1/4 xtended utt Weld 11 (52) (4) M5 2L4R-V 1/4 Male T 11 (54) (4) M5 2LS4-V 1/4 Swivel emale T 11 (54) M5 Rc1/8 SPIITIONS Size Pressure Temp. v Inboard cross Seat 1/4 1MPa (150 psi) -10 to 60 c (PT) -10 to 150 c (PI) 0.1 3X10 12 elium 3X10 10 elium 2-Way low Pattern STRUTUR 1 ody 316L Stainless Steel 2 Seat PT/PI (Vespel ) 3 Seat older 316L Stainless Steel 4 iaphragm lgiloy 5 andle/ct luminum ORRIN INORMTION or ordering, see page 350 Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-free installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. 338 ULTR-LN VLVS

7 2LM SRIS LOW ONTROL Metal iaphragm Valves low control models from the Ultra-lean Valve Series are made to UP specifications. These models come with connection joints in 1/4", as standard. ach valve is furnished with a handle-lock set screw with a vernier scale. n road flow-control range of six and a half turns of the handle. n handle-lock set screw on the handle side. s these valves are designed to handle flow control tasks, valve seat is not fully closed even at the position of division 0 on the vernier scale. o not operate the handle in the direction in which the valve seat is closed past the position of division 0 on the vernier scale. STNR ONIURTION IMNSIONS Size nd onnection I J K L 2LMS4V-W 1/4 xtended utt Weld 11 (98) (2.5) M5 2LMS4V-W 1/4 Short utt Weld 11 (98) (2.5) M5 2LM4V-V 1/4 Male T 11 (98) (2.5) M5 2LMS4V-V 1/4 Swivel emale T 11 (98) (2.5) M5 2-Way low Pattern SPIITIONS Size Pressure Temp. v Inboard cross Seat 1/4 1MPa (150 psi) -10 to 60 c (PT) -10 to 150 c (PI) 0.1 3X10 ¹² elium STRUTUR 1 ody 316L Stainless Steel 2 Seat PT/PI (Vespel ) 3 Seat older 316L Stainless Steel 4 iaphragm lgiloy 5 andle/ct luminum ORRIN INORMTION or ordering, see page 350 Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-free installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. M-LT VN ONTROL TNOLOY 339

8 2L SRIS STNR MOL Metal iaphragm Valves Standard models from the Ultra-lean Valve Series are made to UP specifications. This model comes with connection joints in three sizes 1/4", 3/8" & 1/2" as standard. This valve comfortably fits into high-flow applications. n Unique seat structure offers superb leak performance. n ompact designs for a minimum foot print. STNR ONIURTION IMNSIONS Size nd onnection I J K M L 2L4R-V 1/4 Male T 11 (63) (4) M5 2LT4-V 1/4 emale T 11 (65) Rc1/8 M5 2LS4-W 1/4 xtended utt Weld 11 (65) Rc1/8 M5 2LS4-W 1/4 Short utt Weld 11 (65) Rc1/8 M5 2LS6R-W 3/8 xtended utt Weld 17.5 (67.5) (4) M5 2LT8R-V 1/2 Male T 17.5 (67.5) (4) M5 2LS8-V 1/2 emale T 17.5 (73.5) Rc1/8 M5 2LS8-W 1/2 xtended utt Weld 17.5 (73.5) Rc1/8 M5 SPIITIONS Size Pressure Temp. v 1/4-10 to c 1MPa 3/8 (PT) 0.7 (150 psi) -10 to 1/2 150 c (PI) 0.7 Inboard cross Seat 3X X10 10 elium elium STRUTUR 1 ody 316L Stainless Steel 2 Seat PT/PI (Vespel ) 3 Seat older 316L Stainless Steel 4 iaphragm lgiloy 5 andle/ct luminum ORRIN INORMTION or ordering, see page Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-free installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. 3-Way low Pattern 340 ULTR-LN VLVS

2LS12 SRIS 3/4'' I-LOW Metal iaphragm Valves Standard models from the Ultra-lean Valve Series are made to UP specifications. This model comes with connection joints in 3/4" as standard.

9 2LS12 SRIS 3/4'' I-LOW Metal iaphragm Valves Standard models from the Ultra-lean Valve Series are made to UP specifications. This model comes with connection joints in 3/4" as standard. This valve comfortably fits into highflow applications. n Unique seat structure offers superb leak performance. n ompact designs for minimum foot print. STNR ONIURTION IMNSIONS Size nd onnection I 2LS12R-V 3/4 Male T LS12R-V 3/4 Swivel emale T LS12R-W 3/4 xtended utt Weld LS12-V 3/4 Male T Rc 1/8 2LS12-V 3/4 Swivel emale T Rc 1/8 2LS12-W 3/4 xtended utt Weld Rc 1/8 SPIITIONS Size Pressure Temp. v 3/4 1MPa (150 psi) -10 to 60ºc 2.2 Inboard cross Seat 3X10 ¹² elium 3X10 9 elium STRUTUR 1 ody 316L Stainless Steel 2 Seat PT/PI (Vespel ) 3 iaphragm lgiloy 4 andle/ct luminum ORRIN INORMTION or ordering, see page Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-free installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. M-LT VN ONTROL TNOLOY 341

V SRIS LOW-PRSSUR MOL Metal iaphragm Valves The V Series is a family of standard models from the Ultra lean Valve Series, which are made to P specifications.

10 V SRIS LOW-PRSSUR MOL Metal iaphragm Valves The V Series is a family of standard models from the Ultra lean Valve Series, which are made to P specifications. These models come with connection joints in three sizes, 1/4", 3/8" and 1/2", as standard. These valves implement the traditional UV 2L Series design concept of high reliability. n Surface roughness of the gas contact area held to Ry <_ 2.5 micro meter as standard. n Operable over a wide range of flow rates up to 1 MPa/150 psi. STNR ONIURTION IMNSIONS Size nd onnection V4-I 1/4 LT-LOK 11 (63) 45 (63.5) 25 M5 V4-V 1/4 Swivel emale T 11 (65) M5 Rc1/8 V4-V 1/4 Male T 11 (63) M5 V6-I 3/8 LT-LOK 17.5 (67.5) 45 (79.4) 28 M5 V8-I 1/2 LT-LOK 17.5 (67.5) 45 (86) 28 M5 V8-V 1/2 Swivel emale T 17.5 (73.5) M5 Rc1/8 V8-V 1/2 Male T 17.5 (67.5) M5 SPIITIONS Size Pressure Temp. v 1/ X 10 ¹² 1MPa 3/8-10 to 60 c 0.7 Pa m3/sec (150 psi) 1/2 0.7 elium Inboard cross Seat 3 X 10 ¹º Pa m3/sec elium STRUTUR 1 ody 316L Stainless Steel 2 Seat PT/PI (Vespel ) 3 Seat older 316L Stainless Steel 4 iaphragm lgiloy 5 andle/ct luminum ORRIN INORMTION or ordering, see page Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. 342 ULTR-LN VLVS

VZ SRIS NRL PURPOS Metal iaphragm Valves conomic implementations of Ultra-lean Valves follow the traditions of MJ UV technologies n vailable in sizes from 1/4" to 1/2" to support a wide range of

11 VZ SRIS NRL PURPOS Metal iaphragm Valves conomic implementations of Ultra-lean Valves follow the traditions of MJ UV technologies n vailable in sizes from 1/4" to 1/2" to support a wide range of connections. n Standard with a 270-degree rotary handle with an open/close indicator. n Over 20,000 open/close cycles. n lectropolished item standard (LT-LOK joint unpolished). n luminum handle for compact, lightweight geometry. The open/close indicator works on a follow-up basis. When opening or closing the valve, operate the handle until the handle hits the stopper. PRT NUMR / IMNSIONS Size nd onnection VZS4R-V 1/4 Male T 11 (53) M5 VZS4R-V 1/4 Swivel emale T 11 (53) M5 VZS4R-I 1/4 LT-LOK 11 (53) 45 (63.5) 25 M5 VZS6R-I 3/8 LT-LOK 17.5 (58) 45 (79.5) 28 M5 VZS4R-V 1/2 Male T 17.5 (58) M5 VZS8R-V 1/2 Swivel emale T 17.5 (58) M5 VZS8R-I 1/2 LT-LOK 17.5 (58) 45 (86) 28 M5 SPIITIONS Size Pressure Temp. v 1/4 3/8 1/2 1MPa (150 psi) -10 to 80ºc Inboard cross Seat X10 ¹² 0.65 elium 3X10 10 elium STRUTUR 1 ody 316L Stainless Steel 2 Seat PT 3 iaphragm lgiloy 4 onnet 303 Stainless Steel 5 andle/ct luminum ORRIN INORMTION or ordering, see page Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. M-LT VN ONTROL TNOLOY 343

2L SRIS I-PRSSUR Metal iaphragm Valves igh-pressure standard models from the Ultra-lean Valve Series are made to UP specifications. These models come with connection joints in 1/4", as standard.

12 2L SRIS I-PRSSUR Metal iaphragm Valves igh-pressure standard models from the Ultra-lean Valve Series are made to UP specifications. These models come with connection joints in 1/4", as standard. eatures include a compact drive geometry and a highly reliable seat structure. n an be used as shutoff valves for high-pressure fluids at up to 16.2 MPa/2300 psi. n ompact designs for minimum footprint. n large choice of fluid-specific seat materials available as options. n Optionally ready for 21 MPa/3060 psi. or more information, please contact one of our field representatives. STNR ONIURTION IMNSIONS Size nd onnection I J L 2LS4R-W 1/4 xtended utt Weld 11 (68) M5 (2.5) 2LS4R-W 1/4 Short utt Weld 11 (68) M5 (2.5) 2L4R-V 1/4 Male T 11 (68) M5 (2.5) 2LS4-V 1/4 Swivel emale T 11 (85) M5 Rc1/8 SPIITIONS Size Pressure Temp. v Inboard cross Seat 1/4 16.2MPa (2300 psi) OPTION: 21MPa/3060 psi -10 to 60 c (PT) -10 to 150 c (PI) 0.1 3X10 ¹² elium 3X10 ¹º elium J STRUTUR 1 ody 316L Stainless Steel 2 Seat PT/PI (Vespel ) 3 Seat older 316L Stainless Steel 4 iaphragm lgiloy 5 andle/ct luminum ORRIN INORMTION or ordering, see page Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. 344 ULTR-LN VLVS

13 2LS SRIS I-PRSSUR - I-LOW Metal iaphragm Valves igh-pressure high-flow models from the Ultra-lean Valve Series are made to UP specifications. These models come with connection joints in two alternative sizes, 1/4" and 1/2", as standard. With their compact designs, these valves comfortably fit into high-pressure high-flow applications. n an be used as shutoff valves for high-pressure fluids at up to 21 MPa/3060 psi. n large choice of fluid-specific seat materials is available as an option. or more information please contact one of our field representatives. STNR ONIURTION IMNSIONS Size nd onnection I J 2LST4R-W 1/4 xtended utt Weld 11 (71) M5 2LSS4-W 1/4 Short utt Weld 11 (89) M5 Rc1/8 2LSS4-V 1/4 Swivel emale T 11 (89) M5 Rc1/8 2LST8R-V 1/2 Male T 17.5 (74) M5 2LSS8-W 1/2 xtended utt Weld 17.5 (92.5) M5 Rc1/8 2LSS8-W 1/2 Short utt Weld 17.5 (92.5) M5 Rc1/8 SPIITIONS Size Pressure Temp. v 1/ MPa / 3060 psi -10 to 40 c 1/ Inboard cross Seat 3X10 ¹² elium 3X10 ¹º elium STRUTUR 1 ody 316L Stainless Steel 2 Seat PT/PI (Vespel ) 3 Seat older 316L Stainless Steel 4 iaphragm lgiloy 5 andle/ct luminum ORRIN INORMTION or ordering, see page Way low Pattern 3-Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. M-LT VN ONTROL TNOLOY 345

14 3L STNR MTL ST MOL Metal iaphragm Valves Standard models from the Ultra-lean Valve Series are made to UP specifications. The ultimate in metallic diaphragm-operated valves with resins completely removed from their gas contact areas. vailable in connection joint sizes of 1/4", 3/8" and 1/2", as standard. n igh-speed replacement of media in a gas or liquid state. n xtensive records of proven performance on corrosive gases (such as l and 2). n esigns can be customized to meet specific needs. STNR ONIURTION IMNSIONS Size nd onnection I J k 3LS4R-V 1/4 Male T 11 (63) (4) M5 3LT4-V 1/4 Swivel emale T 11 (89) M5 Rc1/8 3LS4-W 1/4 xtended utt Weld 11 (89) M5 Rc1/8 3LS4-W 1/4 Short utt Weld 11 (89) M5 Rc1/8 3LS6R-W 3/8 xtended utt Weld 17.5 (67.5) (4) M5 3LT8R-V 1/2 Male T 17.5 (67.5) (4) M5 3LS8-V 1/2 Swivel emale T 17.5 (92.5) M5 Rc1/8 3LS8-W 1/2 xtended utt Weld 17.5 (92.5) M5 Rc1/8 STRUTUR 1 ody 316L Stainless Steel 2 iaphragm lgiloy 3 andle/ct luminum SPIITIONS 3-Way low Pattern Size Pressure Temp. v 1/ X10 ¹² 1MPa 3/8-10 to150ºc 0.7 (150 psi) 1/2 0.7 elium 2-Way low Pattern Inboard cross Seat 2X10 8 elium ORRIN INORMTION or ordering, see page 350 Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. 346 ULTR-LN VLVS

3LT SRIS I-TMPRTUR MTL ST Metal iaphragm Valves The highest-ranking grade of high-temperature models from the Ultra-lean Valve Series are made to UP specifications.

n est suited for use as MOV changeover valves. STNR ONIURTION IMNSIONS Size nd onnection I J k L 3LTS8-V-1 1/2 Male T 17.5 (67.5) 45 32.5 (4) 23 76 28 M5 LT-LOK 1/8 3LTT8-V-1 1/2 Swivel emale T 17.

15 3LT SRIS I-TMPRTUR MTL ST Metal iaphragm Valves The highest-ranking grade of high-temperature models from the Ultra-lean Valve Series are made to UP specifications. The ultimate in metallic diaphragm-operated valves with resins completely removed from their gas-contact areas. These valves can be used at temperatures up to 250. n est suited for use as MOV changeover valves. STNR ONIURTION IMNSIONS Size nd onnection I J k L 3LTS8-V-1 1/2 Male T 17.5 (67.5) (4) M5 LT-LOK 1/8 3LTT8-V-1 1/2 Swivel emale T 17.5 (92.3) M5 LT-LOK 1/8 3LTS8-W-2 1/2 xtended utt Weld 17.5 (92.3) M5 Rc1/8 3LTS8-W-2 1/2 Short utt Weld 17.5 (92.3) M5 Rc1/8 SPIITIONS Size Pressure Temp. v 1/2 1MPa (150 psi) STRUTUR -10 to 250ºc 0.7 Inboard cross Seat 3X10 ¹² elium 1 ody 316L Stainless Steel 2 iaphragm lgiloy 3 andle/ct luminum 2X10 6 elium 4xK 2xK ORRIN INORMTION or ordering, see page Way low Pattern 2-Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. M-LT VN ONTROL TNOLOY 347

16 3LS SRIS I-PRSSUR-I-LOW MTL ST Metal iaphragm Valves The highest-ranking grade of high-pressure-high-flow models from the Ultra-lean Valve Series are made to UP specifications. The ultimate in metallic diaphragm-operated valves with resins completely removed from their gas-contact areas. With their compact designs, these valves comfortably fit into high-pressure high-flow applications. n an be used as shutoff valves for high-pressure fluids at up to 21 MPa/3060 psi. n ompact designs for minimum footprint. n xtensive records of proven performance on corrosive gases (such as l and 2). or more information please contact one of our field representatives. STNR ONIURTION IMNSIONS Size nd onnection 3LSS4R-W 1/4 xtended utt Weld 11 (71) M5 3LSS4R-W 1/4 utt Weld 11 (71) M5 3LST4R-V 1/4 Male T 11 (71) M5 3LSS4-V 1/4 Swivel emale T 11 (89) M5 Rc1/8 3LST8R-V 1/2 Male T 17.5 (74) M5 3LSS8-W 1/2 xtended utt Weld 17.5 (92.5) M5 Rc1/8 3LSS8-W 1/2 Short utt Weld 17.5 (92.5) M5 Rc1/8 SPIITIONS Size Pressure Temp. v 1/ MPa / 3060 psi -10 to 150 c 1/ Inboard cross Seat 3 X Pa m 3 /sec elium 7 X Pa m 3 /sec elium STRUTUR 1 ody 316L Stainless Steel 2 iaphragm lgiloy 3 andle/ct luminum 4x 2x ORRIN INORMTION or ordering, see page Way low Pattern 3-Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. 348 ULTR-LN VLVS

17 V SRIS P-R, I-PRSSUR VLV Metal iaphragm Valves igh-pressure standard models from the Ultra-lean Valve Series are made to P specifications. eatures include a 2L-like compact drive geometry and a highly reliable seat structure. n an be used as shutoff valves for high-pressure fluids at up to 16.2 MPa/2300 psi. n ompact designs for minimum footprint. STNR ONIURTION IMNSIONS Size nd onnection I J V4-I 1/4 LT-LOK 11 (68) (2.5) 17 (63.5) 17 M5 V4-V 1/4 Male T 11 (68) (2.5) M5 V4-V 1/4 Swivel emale T 11 (85) M5 Rc1/8 SPIITIONS Size Pressure Temp. v 1/4 16.2MPa 2300 (psi) -10 to 60 c 0.1 Inboard cross Seat 3 X X Pa m 3 /sec Pa m 3 /sec elium elium STRUTUR 1 ody 316L Stainless Steel 2 Seat PT/PI (Vespel ) 3 Seat older 316L Stainless Steel 4 iaphragm lgiloy 5 andle luminum ORRIN INORMTION or ordering, see page Way low Pattern Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. M-LT VN ONTROL TNOLOY 349

18 ORRIN INORMTION 2L T V - - PI Valve Series nd onnection eature 2L 2LM - ompact - low ontrol V MV - Male ace Seal - Swivel Male ace Seal PI - Vespel 2L - Standard 2LS12-3/4'' igh low V - Low Pressure VZ - conomy eneral Purpose 2L - igh Pressure 2300 psi 2LS - igh Pressure igh flow 3060psi 3L - Standard Metal Seat 3LT - igh Temp. Metal Seat 3LS - igh Pressure igh low Metal Seat V - P rade igh Pressure Valve ctuation evice V - Swivel emale ace Seal W - xtended utt Welld W - Short utt Welld I - LT-LOK - ir Operated N. Q - Oval andle 1/4 turn O - ir Operated N.O T - Toggle andle R - Round andle V - Vernier andle Port esignator (-) for 3-Way Valve lue andle is standard. or other colors contact your local am-let representative. Valve Type S - 2-Port Valve (Straight) - 2-Port Valve (ngle) T - 3-Port Valve (Straight) PORT SINTOR ody Size 4-1/4" 6-3/8" 8-1/2" 12-3/4" n ll 2L & 3L series are made of forged SS316L. n Standad seat: PT. n or valves that are made of bar stock, see Ordering Information page 359 & 362 Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and troublefree installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. 350 ULTR-LN VLVS

19 ST MTRIL SLTION as Molecular ormula State* MMONI N3 L. Seat s** iaphragm Valve PT Pi Metal RON r [ ] [ ] [ ] RSIN S3. [ ] [ ] [ ] ORON TRILORI I3 L. ORON TRILORI 3. LORIN I3 L. X IORN 26. ILORO SILN Si2I2 L. ISILN Si26 I-LORO I-LUORO MTN I22 L. [ ] [ ] [ ] MONO-LORO TRI-LUORO MTN I3 L. [ ] [ ] [ ] TTR LUORO MTN 4 [ ] [ ] [ ] TRI LUORO MTN 3 L. [ ] [ ] [ ] X-LUORO MTN 24 L. [ ] [ ] [ ] LIUM e [ ] [ ] [ ] YRON 2 [ ] [ ] [ ] YRON ROMI r. [X] YRON LORI I L. X YRON SULI 2S L. X NITORON N2 [ ] [ ] [ ] NITORON TRILUORI N3 [ ] [ ] [ ] NITORON OXI N2O L. OXIN O2 [ ] [ ] [ ] POSPIN P3:PUR P3:MIX SILN Si4 SILION TRLORI SiI4 L. SULR XLORI S6 L. TUNSTN XLUORI W6 L. * STT-L.: LIQUI S.: OMPRSS S :S ** ST MTRILS - : VRY OO : OO : UTION X: POOR Warning! or your safety The system designer and user have the sole responsibility for selecting products suitable for their special application requirements, ensuring their safe and trouble-free installation, operation, and maintenance. pplication details, material compatibility and product ratings should all be considered for each selected product. Improper selection, installation or use of products can cause property damage or personal injury. UV, Rev03, January 2010 M-LT VN ONTROL TNOLOY 351

20 352 ULTR-LN VLVS

HIGH-PRESSURE RELIEF VALVES H-900HP SERIES

HIGH-PRESSURE RELIEF VALVES H-900HP SERIES IPRSSUR RLI VLVS 9P SRIS TURS n 9P is available as /P products. n 316St.St. onstruction n Service up to psi n Set Pressure from 5 psig to psig ( 3.5 to 414 bar) n Identifying colored springs for each pressure