NA Facilities and Gases Committees Meeting Minutes SEMICON West Tuesday, July 13, 2010, 9:30-1:00 PM San Francisco Marriott Marquis

Transcription

1 NA Facilities and Gases Cmmittees SEMICON West Tuesday, July 13, 2010, 9:30-1:00 PM San Francisc Marritt Marquis Attendees: SEMI Staff Kevin Nguyen Nrth America Natalie Shim Krea Ken Okuda Japan C-chairs - Tim Vlin (Parker Hannifin) Table 1 Meeting Attendees Cunt Name #1 Cmpany 1 Bala Mhammed Applied Materials 2 Bill Kiikvee AP Tech 3 Biswanath Ry Pall 4 Dennis Cbb ARC Machines 5 Ins Ch Shinsung Eng 6 Jerry Babuder Swagelk 7 Jhn Savadkuhi MKS Instruments 8 Kang-H Ahn Hanyang University 9 Kwang Sun Kim Krea Sciety f Semicnductr/Display 10 Mhamed Saleem Fujikin 11 Stuart Bestrm Jhnsn Matthey #1 Srted by alphabetical rder (first name) Table 2 Leadership Changes Grup Previus Leader New Leader Pressure Measurement Task Frce Nne (new task frce) Justin Hugh (Applied Materials) Table 3 Ballt Summary # Dcument Title Cmmittee Actin 4737 New Standard: Guide Fr Heater Jacket Requirements Failed and reballt 4722D Revisin f SEMI F , Test Methd fr Determinatin f Particle Failed and reballt Cntributin f Gas Delivery System 4972 Reapprval f SEMI F Test Methd Fr Measuring The Cunting Efficiency Of Cndensatin Nucleus Cunters Passed with editrial changes 4973 Reapprval f SEMI F Test Methd Fr Evaluatin Of Particle Cntributin Frm Gas System Cmpnents Expsed T Crrsive Gas Passed with editrial changes 4789A Revisin f SEMI F Specificatin fr Visual Inspectin and Failed and reballt Acceptance f Gas Tungsten Arc (GTA) Welds in Fluid Distributin Systems in Semicnductr Manufacturing Applicatins 4968 Revisin f SEMI E16-90 (Reapprved 1104) with title change t Guide Fr Determining And Describing Mass Flw Cntrller Leak Rates Delayed review due t time cnstraint 4969 Revisin f SEMI E18-91 (Reapprved 1104) with title change t Guide Fr Temperature Specificatins Of The Mass Flw Cntrller Delayed review due t time cnstraint NA Facilities and Gases Cmmittee 1 July 13, 2010

2 # Dcument Title Cmmittee Actin 4970 Revisin f SEMI E27-92 (Reapprved 1104) with title change t Terminlgy Fr The Linearity Of Mass Flw Cntrllers And Mass Delayed review due t time cnstraint Flw Meters 4971 Revisin f SEMI E29-93 (Reapprved 0710) with title change t Terminlgy Fr The Calibratin Of Mass Flw Cntrllers And Mass Passed as ballted Flw Meters 4974 Revisin f SEMI E28-92 (Reapprved 0710) with title change t Guide Fr Pressure Specificatins Of The Mass Flw Cntrller Table 4 Authrized Ballts Passed with editrial changes Dcument # When SC/TF/WG Details 4737A Cycle 5-10 Heater Jacket TF New Standard: Guide Fr Heater Jacket Requirements 4722E Cycle 5-10 r Filters and Purifiers Revisin f SEMI F , Test Methd fr 6-10 TF Determinatin f Particle Cntributin f Gas 4789B 3440B 4786A 4788A Cycle 5-10 r 6-10 Material f Cnstructin f Gas Delivery Systems TF Cycle 5-10 r Pressure 6-10 Measurement TF Cycle 5-10 r Material f 6-10 Cnstructin f Gas Cycle 5-10 r 6-10 Delivery Systems TF Material f Cnstructin f Gas Delivery Systems TF 5044 Cycle 5-10 Facilities and Gases Cmmittee Table 5 Authrized Activities Delivery System Revisin f SEMI F Specificatin fr Visual Inspectin and Acceptance f Gas Tungsten Arc (GTA) Welds in Fluid Distributin Systems in Semicnductr Manufacturing Applicatins New Standard: Test Methd Fr Pressure Transducers In Gas Delivery Systems Revisin f SEMI F4-1000; Specificatin fr Pneumatically Actuated Cylinder Valves. Revisin f SEMI F Practice Fr Gas Tungsten Arc (GTA) Welding Of Fluid Distributin Systems In Semicnductr Manufacturing Applicatins. Revisin f SEMI F Test Methd fr Determining f Flw Cefficient fr High Purity Shutff Valves Dcument # Type SC/TF/WG Details 5044 SNARF Facilities and Gases cmmittee Nte: SNARFs and TFOFs are available fr review n the SEMI Web site at: Table 6 Previus Meeting Actins Items Revisin f SEMI F Test Methd fr Determining f Flw Cefficient fr High Purity Shutff Valves Date Details Status Ken Okuda t cntact Japan F1 revisin leaders and relay the cncern f NA Onging members n having a subdcument fr F1 as ptinal values in a specificatin. Table 7 New Actins Items Date Details Kevin Nguyen t cntact SEMI Japan staff t set up a telecnference with Bala Mhammed and the leader f Japan F1 Revisin TF t recncile n F1 revisin issue NA Facilities and Gases Cmmittee 2 July 13, 2010

3 1.0 Call t Order Tim Vlin called the meeting t rder and welcmed everyne wh attended. A rund f self intrductin was made. All SEMI standards meetings are subjected t SEMI Anti-Trust Reminder and Guidelines cncerning Patentable Technlgy. SEMI Regulatins nw require all attendees t be members f SEMI standards. If anyne is nt a member f SEMI Standards, please enrll at Cntact SEMI Staff fr a cpy f meeting required elements. Agenda was reviewed and prceed as written. 2.0 Review and Apprval f frm NA Spring, March 30, 2010, San Jse, CA The minutes were reviewed. N changes were made. Please see attachment fr minutes. Mtin: Accept the minutes f the previus meeting as submitted By / 2 nd : Bill Kiikvee (AP Tech)/Bala Mhammed (Applied Materials) Discussin: Nne Vte: 10. Mtin passed Attachment - 1_Fac&Gases Minutes0310.pdf 3.0 Staff Reprt Staff reprt was presented by Kevin Nguyen. The fllwing were highlighted: Event Calendar: Event Name Event Details Slarcn India 2010 SEMICON Taiwan 2010 SEMICON Eurpa 2010 PV Taiwan 2010 SEMICON Japan 2010 July 28-30, 2010 Hyderabad September 8-11, 2010 Taipei Octber 19-21, 2010 Dresden, Germany PV meetings will be held at SlarWatt Octber 26-28, 2010 Taipei December 1-3, 2010 Tky NA Standards Fall 2010 Meetings Nvember 8-11 SEMI Headquarters in San Jse, Califrnia Inviting lcal cmpanies willing and able t hst sme f the meetings t maintain ne-week frmat Final schedule t be annunced by the end f July SEMICON West 2010 Technical Ballt Critical Dates NA Standards Fall 2010 Meetings Cycle 5(Cmmittee Meetings after September 13) Due July 30 Vting perid: August 9 September 8 Cycle 6(Cmmittee Meetings after Octber 18) Due August 30 Vting perid: September 13 Octber 13 NA Facilities and Gases Cmmittee 3 July 13, 2010

4 July 2010 Publicatin Cycle New Standards: 9 Revised Standards: 10 Reapprved Standards: 22 Withdrawals: 4 Ttal SEMI Standards in prtfli: 795 On-line Standards Prduct - SEMIViews Attachment - 2_NA Staff Reprt (West 2010) Mn_Tue.ppt 4.0 Liaisn Reprts 4.1 SEMI Japan Japan Facilities and Gases cmmittee liaisn reprt was presented by Ken Okuda. Again, the issue was carried frm the previus meeting. Bala Mhammed/AMAT viced his cncern n learning that Japan is creating a subdcument fr SEMI F1-96 Specificatin fr Leak Integrity f High-Purity Gas Piping Systems and Cmpnents. Bala recmmended creating a separate new dcument fr Ultra-High Purity Piping system and leave existing F1 fr High-Purity applicatin. Bill Kiikvee added that this issue has been presented fr the past meetings, but it has nt been reslved. Actin Item 1 Kevin Nguyen t cntact SEMI Japan staff t set up a telecnference with Bala Mhammed and cnnect the leader f Japan F1 Revisin TF leader t recncile this issue. Attachment - 3_JP_G+F_SW 2010.ppt 4.2 SEMI Krea Reprt was presented by Natalie Shim. Krea Facilities cmmittee was frmally apprved by ISC. Attachment - 4_KR_Facilities WG_reprt_ ppt 4.3 SEMI Eurpe Kevin Nguyen reprted that Eurpe Facilities cmmittee was disbanded due t inactive. There has been n standards activity r meeting n Facilities cmmittee in the past several meetings. Attachment - 4_EU_GasChem_LiaisnRep_All_ ppt 4.4 ASME B31.3 Prcess Piping Cde Reprt n ASME B31.3 Sub. Cmmittee was presented by Jerry Babuder at gerald.babuder@swagelk.cm. What was the need fr Change? Existing piping systems used fr semicnductr fabricatin facilities, specialty gas and chemical prductin plants, bitech, pharmaceutical were nt adequately addressed in the B31.3 pressure piping cde ASME B31.3 identifies semicnductr and pharmaceutical as within the intended scpe SEMI Standards and ASME BPE reference ASME B31.3 as well Jurisdictins are requiring plants t cnfrm t ASME B31.3 Task Frce Objective: Write a new Chapter X, mdifying the entire B31.3 cde t reflect the requirements and needs fr high purity systems primarily fr the Semicnductr and Bipharmaceutical Industries. Attachment - 5_ASME B31.3 New ChapterX Update ppt NA Facilities and Gases Cmmittee 4 July 13, 2010

5 5.0 Ballt Review 5.1 Dcument New Standard: Guide Fr Heater Jacket Requirements This dcument failed cmmittee review due t persuasive reject. Refer t attachment fr details f ballt adjudicatin. Attachment - 6_4737Failed.dc 5.2 Dcument 4722D - Revisin f SEMI F , Test Methd fr Determinatin f Particle Cntributin f Gas Delivery System This dcument failed cmmittee review due t persuasive reject. Attachment - 7_4722DFailed.dc 5.3 Dcument Reapprval f SEMI F Test Methd Fr Measuring The Cunting Efficiency Of Cndensatin Nucleus Cunters This dcument passed cmmittee review. Attachment - 8_4972.dc 5.4 Dcument Reapprval f SEMI F Test Methd Fr Evaluatin Of Particle Cntributin Frm Gas System Cmpnents Expsed T Crrsive Gas This dcument passed cmmittee review. Attachment - 9_4973.dc 5.5 Dcument 4789A - Revisin f SEMI F Specificatin fr Visual Inspectin and Acceptance f Gas Tungsten Arc (GTA) Welds in Fluid Distributin Systems in Semicnductr Manufacturing Applicatins This dcument failed cmmittee review due t persuasive reject. Attachment - 10_4789AFailed.dc 5.6 Dcument Revisin f SEMI E16-90 (Reapprved 1104) with title change t Guide Fr Determining And Describing Mass Flw Cntrller Leak Rates Ballt review was pstpned until the next meeting per Task Frce s request due t time cnstraint. 5.7 Dcument Revisin f SEMI E18-91 (Reapprved 1104) with title change t Guide Fr Temperature Specificatins Of The Mass Flw Cntrller Ballt review was pstpned until the next meeting per Task Frce s request due t time cnstraint. 5.8 Dcument Revisin f SEMI E27-92 (Reapprved 1104) with title change t Terminlgy Fr The Linearity Of Mass Flw Cntrllers And Mass Flw Meters Ballt review was pstpned until the next meeting per Task Frce s request due t time cnstraint. 5.9 Dcument Revisin f SEMI E29-93 (Reapprved 0710) with title change t Terminlgy Fr The Calibratin Of Mass Flw Cntrllers And Mass Flw Meters This ballt passed cmmittee review. Attachment - 11_4971.dc 5.10 Dcument Revisin f SEMI E28-92 (Reapprved 0710) with title change t Guide Fr Pressure Specificatins Of The Mass Flw Cntrller This dcument passed cmmittee review. Attachment 12_4974.dc NA Facilities and Gases Cmmittee 5 July 13, 2010

6 6 Vice Chair Reprts 6.1. Facilities Activities Design fr Facilities TF/Allan Chasey (ASU) N meeting Gases Activities - Cmpnents Heater Jacket TF/David Clquhun (BriskHeat) Dc. 4737A, New Standard: Guide fr Unifrm Heater Jacket, failed cmmittee review and will be resubmitted fr review at the next meeting Mass Flw Cntrller TF/Mhamed Saleem (Fujikin) The fllwing ballts were delayed in technical adjudicatin due t time cnstraint. These ballts are expected t be reviewed at the next meeting in the Fall. Dc. 4968, Revisin f SEMI E16-90 (Reapprved 1104) with title change t Guide Fr Determining And Describing Mass Flw Cntrller Leak Rates Dc. 4969, Revisin f SEMI E18-91 (Reapprved 1104) with title change t Guide Fr Temperature Specificatins Of The Mass Flw Cntrller Dc. 4970, Revisin f SEMI E27-92 (Reapprved 1104) with title change t Terminlgy Fr The Linearity Of Mass Flw Cntrllers And Mass Flw Meters The fllwing dcuments passed cmmittee review. Dc. 4971, Revisin f SEMI E29-93 (Reapprved 0710) with title change t Terminlgy Fr The Calibratin Of Mass Flw Cntrllers And Mass Flw Meters Dc. 4972, Revisin f SEMI E28-92 (Reapprved 0710) with title change t Guide Fr Pressure Specificatins Of The Mass Flw Cntrller Pressure Measurement TF/Matt Burn (UCT) Tim Vlin reprted that Justin Hugh (Applied Materials) ffered t vlunteer leading the task frce. Mtin: T submit dc. #3440A, New Standard: Test Methd fr Pressure Transducers In Gas Delivery Systems fr Yellw ballt By / 2 nd : Tim Vlin (Parker Hannifin)/Mhamed Saleem (Fujikin) Discussin: Nne Vte: 8-0. Mtin passed Attachment 13_DraftDc3440A Pressure Trans 7-10 Actins.dc Attachment 14_DraftDc3440A Pressure Trans 7-10.dc 6.3. Gases Activities - Cntaminatin Filters and Purifiers TF/Mhamed Saleem (Fujikin), Biswanath Ry (Pall) Biswanath Ry reprted the utcme f the task frce meeting. Essentially, the summary f ballt review is shwn belw. Dc. 4722D, Revisin f SEMI F , Test Methd f Determinatin f Particle Cntributin f Gas Delivery System. Failed and reballt fr the next meeting NA Facilities and Gases Cmmittee 6 July 13, 2010

7 Dc. 4972, Reapprval f SEMI F , Test Methd Fr Measuring The Cunting Efficiency Of Cndensatin Nucleus Cunters Passed Dc. 4973, Reapprval f SEMI F , Test Methd Fr Evaluatin Of Particle Cntributin Frm Gas System Cmpnents Expsed T Crrsive Gas Passed A ntificatin t the vters n the utcme f the cmmittee s reslutin n these ballts will be sent by SEMI staff as required by SEMI Regulatins. Ideally, all vters shuld be infrmed; reject vters are required t be infrmed, as Kevin Nguyen explained. Attachment 15_Reprt n Filter and Purifier TF n July 12, 2010-rev 1.dc 6.4. Gases Activities - Materials and Prcesses Materials f Cnstructin Gas Delivery Systems TF/Tim Vlin (Parker Hannifin) The fllwing ballts were resulted frm this meeting. Dcument 4786A Reapprval f SEMI F4-1000; Specificatin fr Pneumatically Actuated Cylinder Valves. List f rejects addressed; passed by Gases Cmmittee; sme reject actins declined by Audit and Review Cmmittee. Returned t TF. Dcument will be reballted fr review at the next meeting in the Fall Dcument Reapprval f SEMI F Practice Fr Gas Tungsten Arc (GTA) Welding Of Fluid Distributin Systems In Semicnductr Manufacturing Applicatins. List f rejects addressed; passed by Gases Cmmittee; sme reject actins declined by Audit and Review Cmmittee. Returned t TF. Dcument will be reballted fr review at the next meeting in the Fall Dcument Reapprval f SEMI F Specificatin fr Visual Inspectin and Acceptance f Gas Tungsten Arc (GTA) Welds in Fluid Distributin Systems in Semicnductr Manufacturing Applicatins. 1 reject (Eric Sklar); ballt failed and reballt fr next meeting. Dcument will be reballted fr review at the next meeting in the Fall 7 Old Business See table 6 abve. Old business was essentially identical with actin item #1. 8 New Business As presented by Bill Kiikvee, an errr was fund n the cefficient n equatin 7 f F by a standard user in Japan. Further reviewing, additinal errr was als fund n equatin 6. Mtin: T submit revisin f SEMI F , Test Methd Fr Determinatin Of Flw Cefficient Fr High Purity Shutff Valves By / 2 nd : Bill Kiikvee (AP Tech)/Mhamed Saleem (Fujikin) Discussin: Nne Vte: 8-0. Mtin passed Attachment - 16_SNARF SEMI F dc NA Facilities and Gases Cmmittee 7 July 13, 2010

8 9 Actin Item Reviews Actin item was reviewed by Kevin Nguyen. See table 7 abve. 10 Next Meeting The next meeting f the NA Facilities & Gases cmmittee is scheduled fr Nvember 09, 2010 at NA Fall Standards Meetings, SEMI HQ in San Jse, CA. 11 Adjurn Adjurnment f the meeting was held at Nn. These minutes are respectfully submitted by: Kevin Nguyen, SEMI NA Standards Cmmittee Manager Phne: knguyen@semi.rg Minutes apprved by: Tim Vlin (Park Hannifin) C-chair Please t Kevin Nguyen at knguyen@semi.rg r phne at if yu have any questins. All attachments available frm (meeting minutes sectin). Table 8 Index f Attachment Summary Title 1_Fac&Gases Minutes0310.pdf 2_NA Staff Reprt (West 2010) Mn_Tue.ppt 3_JP_G+F_SW 2010.ppt 4_KR_Facilities WG_reprt_ ppt 5_ASME B31.3 New ChapterX Update ppt 6_4737Failed.dc 7_4722DFailed.dc 8_4972.dc 9_4973.dc 10_4789AFailed.dc 11_4971.dc 12_4974.dc 13_DraftDc3440A Pressure Trans 7-10 Actins.dc 14_DraftDc3440A Pressure Trans 7-10.dc 15_Reprt n Filter and Purifier TF n July 12, 2010-rev 1.dc 16_SNARF SEMI F dc #1 Due t file size and delivery issues, attachments must be dwnladed separately. A.zip file cntaining all attachments fr these minutes is available at Fr additinal infrmatin r t btain individual attachments, please cntact Kevin Nguyen at the cntact infrmatin abve. NA Facilities and Gases Cmmittee 8 July 13, 2010